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Plastic deformation mechanism of covalent single crystal semiconductor, and development on x-ray point focusing monochromator and analyzing crystal

Research Project

Project/Area Number 21760576
Research Category

Grant-in-Aid for Young Scientists (B)

Allocation TypeSingle-year Grants
Research Field Material processing/treatments
Research InstitutionKyoto University (2010)
Tohoku University (2009)

Principal Investigator

MORISHITA Kohei  Kyoto University, 大学院・エネルギー科学研究科, 特定助教 (00511875)

Project Period (FY) 2009 – 2010
Project Status Completed (Fiscal Year 2010)
Budget Amount *help
¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000)
Fiscal Year 2010: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
Fiscal Year 2009: ¥2,730,000 (Direct Cost: ¥2,100,000、Indirect Cost: ¥630,000)
Keywords半導体結晶 / 高温塑性変形 / X線点集光素子 / X線分光素子 / シリコン / ゲルマニウム
Research Abstract

Single crystal semiconducting wafers such as silicon and germanium are widely used for monochromators or analyzers of X-rays thanks to their excellent crystallographic quality. However, owing to their brittleness due to their intrinsic nature, they are easily broken when strong deformation is applied. In the present work, by using plastic deformation of them at the temperatures just below the melting points of them, the author realized a Johansson type point-focusing monochromator with R=300mm concave surface, much higher efficiency and shorter focal length than that of conventional ones, and realized also integrated conical analyzer which make it possible to simultaneous focusing of several characteristic lines onto the detector plane of a small-area (20×20mm) X-ray CCD. The present results are breakthrough in X-ray spectrometry.

Report

(3 results)
  • 2010 Annual Research Report   Final Research Report ( PDF )
  • 2009 Annual Research Report
  • Research Products

    (26 results)

All 2011 2010 2009 Other

All Journal Article (10 results) (of which Peer Reviewed: 5 results) Presentation (14 results) Patent(Industrial Property Rights) (2 results)

  • [Journal Article] Plastically deformed Si-crystal wafers for neutron-monochromator elements2011

    • Author(s)
      H.Hiraka, K.Fujiwara, K.Yamada, K.Morishita, K.Nakajima
    • Journal Title

      Nucl.Instr. and Meth.A 635

      Pages: 137-140

    • Related Report
      2010 Final Research Report
  • [Journal Article] Optical Image Analysis of the Novel Ultra-Lightweight and High-Resolution MEMS X-Ray Optics2010

    • Author(s)
      I.Mitsuishi, Y.Ezoe, U.Takagi, K.Ishizu, T.Moriyama, T.Hayashi, T.Sato, K.Morishita, K.Nakajima, N.Y.Yamasaki, K.Mitsuda
    • Journal Title

      IEEE J.Quantum Electron. 46

      Pages: 1309-1312

    • Related Report
      2010 Final Research Report
  • [Journal Article] Ultra light-weight and high-resolution X-ray mirrors using DRIE and X-ray LIGA techniques for space X-ray telescopes2010

    • Author(s)
      E.Yuichiro, I.Mitsuishi, U.Takagi, M.Koshiishi, K.Mitsuda, N.Y.Yamasaki, T.Ohashi, F.Kato, S.Sugiyama, R.E.Riveros, H.Yamaguchi, S.Fujihira, Y.Kanamori, K.Morishita, K.Nakajima, R.Maeda
    • Journal Title

      Microsyst. Technol. 16

      Pages: 1633-1641

    • Related Report
      2010 Final Research Report
  • [Journal Article] Realization of a High-Performance Point-Focusing Monochromator for X-ray Studies2010

    • Author(s)
      H.Okuda, K.Morishita, K.Nakajima, K.Fujiwara, I.Yonenaga, S.Ochiai
    • Journal Title

      APEX 3

    • NAID

      10027014467

    • Related Report
      2010 Final Research Report
  • [Journal Article] Ultra light-weight and high-resolution X-ray mirrors using DRIE and X-ray LIGA techniques for space X-ray telescopes2010

    • Author(s)
      Ezoe Yuichiro
    • Journal Title

      Microsystem Technologies-Micro-and Nanosystems-Information Storage and Processing Systems

      Volume: 16 Pages: 1633-1641

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Optical Image Analysis of the Novel Ultra-Lightweight and High-Resolution MEMS X-Ray Optics2010

    • Author(s)
      Ikuyuki Mitsuishi
    • Journal Title

      Ieee Journal of Quantum Electronics

      Volume: 46 Pages: 1309-1312

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Realization of a High-Performance Point-Focusing Monochromator for X-ray Studies2010

    • Author(s)
      Hiroshi Okuda
    • Journal Title

      Applied Physics Express 3

      Pages: 46601-46601

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Systematic studies of Si and Ge hemispherical concave wafers prepared by plastic deformation2009

    • Author(s)
      K.Nakajima, K.Fujiwara, K.Morishita
    • Journal Title

      J.Cryst.Growth 311

      Pages: 4587-4592

    • Related Report
      2010 Final Research Report
  • [Journal Article] Systematic studies of Si and Ge hemispherical concave wafers prepared by plastic deformation2009

    • Author(s)
      Kazuo Nakajima
    • Journal Title

      Journal of Crystal Growth 311

      Pages: 4587-4592

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Plastically deformed Si-crystal wafers for neutron-monochromator elements

    • Author(s)
      Haruhiro Hiraka
    • Journal Title

      Nuclear Physics A

      Volume: (掲載確定)

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Presentation] 高温加圧加工法による結晶成型2010

    • Author(s)
      森下浩平
    • Organizer
      日本学術振興会 結晶成長の科学と技術 第161委員会第63回研究会
    • Place of Presentation
      京都
    • Year and Date
      2010-05-21
    • Related Report
      2010 Annual Research Report
  • [Presentation] 円筒及び曲率傾斜Ge分光結晶を用いた高効率波長分散型X線分析システムの試作2010

    • Author(s)
      林好一
    • Organizer
      日本学術振興会 結晶成長の科学と技術 第161委員会第63回研究会
    • Place of Presentation
      京都
    • Year and Date
      2010-05-21
    • Related Report
      2010 Annual Research Report
  • [Presentation] 高温加圧加工法によるSi、Ge結晶の3次元的形状への塑性加工2010

    • Author(s)
      中嶋一雄
    • Organizer
      応用物理学会
    • Place of Presentation
      東海大学(神奈川県)
    • Year and Date
      2010-03-19
    • Related Report
      2009 Annual Research Report
  • [Presentation] 高温加圧加工法により作成したGe点集光結晶のX線集光性能評価2010

    • Author(s)
      奥田浩司
    • Organizer
      応用物理学会
    • Place of Presentation
      東海大学(神奈川県)
    • Year and Date
      2010-03-19
    • Related Report
      2009 Annual Research Report
  • [Presentation] 高温加圧加工法を用いた波長分散型・多元素同時分光結晶の開発2010

    • Author(s)
      森下浩平
    • Organizer
      応用物理学会
    • Place of Presentation
      東海大学(神奈川県)
    • Year and Date
      2010-03-19
    • Related Report
      2009 Annual Research Report
  • [Presentation] MEMS-based X-ray optics for future astronomical missions2010

    • Author(s)
      Y.Ezoe, I.Mitsuishi, K.Ishizu, T.Moriyama, K.Mitsuda, N.Y.Yamasaki, T.Ohashi, M.Horade, S.Sugiyama, R.E.Riveros, T.Boggs, H.Yamaguchi, Y.Kanamori, N.T.Gabriel, J.J.Talghader, K.Morishita, K.Nakajima, R.Maeda
    • Organizer
      in Optical MEMS 2010
    • Place of Presentation
      Hokkaidou, Japan
    • Related Report
      2010 Final Research Report
  • [Presentation] 高温加圧加工法による結晶成型2010

    • Author(s)
      森下浩平、中嶋一雄、藤原航三、米永一郎、奥田浩司
    • Organizer
      結晶成長の科学と技術第161委員会第63回研究会
    • Place of Presentation
      JSTイノベーションプラザ京都
    • Related Report
      2010 Final Research Report
  • [Presentation] 円筒及び曲率傾斜Ge分光結晶を用いた高効率波長分散型X線分析システムの試作2010

    • Author(s)
      林好一、森下浩平、藤原航三、中嶋一雄
    • Organizer
      結晶成長の科学と技術第161委員会第63回研究会
    • Place of Presentation
      JSTイノベーションプラザ京都
    • Related Report
      2010 Final Research Report
  • [Presentation] Ge単結晶ウエハの高温塑性変形による波長分散型多元素同時分光結晶の開発2010

    • Author(s)
      森下浩平、林好一、中嶋一雄
    • Organizer
      第146回日本金属学会
    • Place of Presentation
      筑波大学
    • Related Report
      2010 Final Research Report
  • [Presentation] 高温加圧加工法を用いた波長分散型・多元素同時分光結晶の開発2010

    • Author(s)
      森下浩平、林好一、中嶋一雄
    • Organizer
      第57回応用物理学関係連合講演会、19a-W-09
    • Place of Presentation
      東海大学
    • Related Report
      2010 Final Research Report
  • [Presentation] 高温加圧加工法により作成したGe点集光結晶のX線集光性能評価2010

    • Author(s)
      奥田浩司、中嶋一雄、森下浩平、藤原航三、米永一郎、落合庄治郎
    • Organizer
      第57回応用物理学関係連合講演会、19a-W-08
    • Place of Presentation
      東海大学
    • Related Report
      2010 Final Research Report
  • [Presentation] 高温加圧加工法によるSi、Ge結晶の3次元的形状への塑性加工2010

    • Author(s)
      中嶋一雄、森下浩平、藤原航三、米永一郎
    • Organizer
      第57回応用物理学関係連合講演会、19a-W-07
    • Place of Presentation
      東海大学
    • Related Report
      2010 Final Research Report
  • [Presentation] 超軽量・高角度分解能 新MEMS X線光学系の開発2009

    • Author(s)
      三石郁之、江副祐一郎、高木うた子、石津健佑、森山鉄平、三田信、Raul Riveros、 Taylor Boggs、山口ひとみ、加藤史樹、洞出光洋、杉山進、森下浩平、中嶋一雄、藤平慎也、金森義明、前田龍太郎、山崎典子、満田和久
    • Organizer
      第10回X線結像光学シンポジウム
    • Place of Presentation
      つくば国際会議場
    • Related Report
      2010 Final Research Report
  • [Presentation] シリコン熱塑性変形を利用した軽量高性能X線望遠鏡の開発2009

    • Author(s)
      林多佳由, 佐藤拓郎, 塩野目雄, 石田学, 江副祐一郎, 大橋隆哉, 満田和久, 森下浩平, 中嶋一雄
    • Organizer
      第10回X線結像光学シンポジウム
    • Place of Presentation
      つくば国際会議場
    • Related Report
      2010 Final Research Report
  • [Patent(Industrial Property Rights)] 分光結晶、波長分散型X線分析装置および元素分布測定方法2009

    • Inventor(s)
      林好一、中嶋一雄、森下浩平
    • Industrial Property Rights Holder
      東北大学
    • Industrial Property Number
      2009-252190
    • Filing Date
      2009-11-02
    • Related Report
      2010 Final Research Report
  • [Patent(Industrial Property Rights)] 分光結晶、波長分散型X線分析装置および元素分布測定方法2009

    • Inventor(s)
      林好一, 中嶋一雄, 森下浩平
    • Industrial Property Rights Holder
      東北大学
    • Industrial Property Number
      2009-252190
    • Filing Date
      2009-11-02
    • Related Report
      2009 Annual Research Report

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Published: 2009-04-01   Modified: 2016-04-21  

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