| Project/Area Number |
21760577
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| Research Category |
Grant-in-Aid for Young Scientists (B)
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| Allocation Type | Single-year Grants |
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| Research Field |
Material processing/treatments
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| Research Institution | Tohoku University |
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Principal Investigator |
TSUJI Toshihiro 東北大学, 大学院・工学研究科, 助教 (70374965)
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| Project Period (FY) |
2009 – 2010
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| Project Status |
Completed (Fiscal Year 2010)
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| Budget Amount *help |
¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000)
Fiscal Year 2010: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Fiscal Year 2009: ¥3,120,000 (Direct Cost: ¥2,400,000、Indirect Cost: ¥720,000)
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| Keywords | 超音波原子間力顕微鏡 / レーザー顕微鏡 / 剥離 / スパッタリング成膜 / スピンコート / ボールSAWセンサ / 感度 / 検出限界 / 燃料電池 / 水素ガス / 水蒸気 / 弾性表面波センサ / ZnO / Pt / マグネトロンスパッタリング / 原子間力顕微鏡 |
|---|
| Research Abstract |
Nondestructive evaluation of thin films with a thickness of sub-μm is required for development of high-performance devices. Since some sensitive films for surface acoustic wave gas sensor have a problem of delamination, I aimed to develop delamination-free sensitive films during sensor operation and verify the usefulness of the evaluation using ultrasonic atomic force microscopy and laser microscopy. As a result of the evaluation of the sensitivity of the sensors and the observation of the films, it was found that developed sensitive films were useful for highly sensitive sensor. Therefore, the purpose of this study was achieved.
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