Development of ultrasonic atomic force microscopy for nondestructive evaluation of thin films

• Project/Area Number: 21760577
• Research Category: Grant-in-Aid for Young Scientists (B)
• Allocation Type: Single-year Grants
• Research Field: Material processing/treatments
• Research Institution: Tohoku University
• Principal Investigator: TSUJI Toshihiro 東北大学, 大学院・工学研究科, 助教 (70374965)
• Project Period (FY): 2009 – 2010
• Project Status: Completed (Fiscal Year 2010)
• Budget Amount: ¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000); Fiscal Year 2010: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000); Fiscal Year 2009: ¥3,120,000 (Direct Cost: ¥2,400,000、Indirect Cost: ¥720,000)
• Keywords: 超音波原子間力顕微鏡 / レーザー顕微鏡 / 剥離 / スパッタリング成膜 / スピンコート / ボールSAWセンサ / 感度 / 検出限界 / 燃料電池 / 水素ガス / 水蒸気 / 弾性表面波センサ / ZnO / Pt / マグネトロンスパッタリング / 原子間力顕微鏡

Research Abstract

Nondestructive evaluation of thin films with a thickness of sub-μm is required for development of high-performance devices. Since some sensitive films for surface acoustic wave gas sensor have a problem of delamination, I aimed to develop delamination-free sensitive films during sensor operation and verify the usefulness of the evaluation using ultrasonic atomic force microscopy and laser microscopy. As a result of the evaluation of the sensitivity of the sensors and the observation of the films, it was found that developed sensitive films were useful for highly sensitive sensor. Therefore, the purpose of this study was achieved.

Research Products

• [Journal Article] Meandering collimated beam of surface acoustic waves on a trigonal crystal ball (2011)
  • Author(s): Takayuki Yanagisawa, Tsuneo Ohgi, Shingo Akao, Noritaka Nakaso, Yusuke Tsukahara, Yoshikazu Ohara, Toshihiro Tsuji, Kazushi Yamanaka
  • Journal Title: Applied Physics Letters Volume: 98 Pages: 123508-123508
  • Peer Reviewed
• [Journal Article] ボールSAWセンサによる極性ガスの高感度測定 (2011)
  • Author(s): 永井弘樹, 小峯和也, 吉野絢, 岩谷隆光, 坂本俊裕, 辻俊宏, 赤尾慎吾, 柳沢恭行, 大木恒郎, 中曽教尊, 山中一司
  • Journal Title: 圧電材料・デバイスシンポジウム2011講演論文集 Pages: 121-126
• [Journal Article] 環境計測のためのボールSAWガスクロマトグラフシステム (2011)
  • Author(s): 坂本俊裕, 吉野絢, 岩谷隆光, 永井弘樹, 小峯和也, 辻俊宏, 赤尾慎吾, 柳沢恭行, 大木恒郎, 中曽教尊, 山中一司
  • Journal Title: 圧電材料・デバイスシンポジウム2011講演論文集 Pages: 127-128
• [Journal Article] 軸外スピンコート法で成膜した感応膜を用いる球状弾性表面波センサによる極性化合物の測定 (2010)
  • Author(s): 辻俊宏, 小峯和也, 永井弘樹, 坂本俊裕, 岩谷隆光, 赤尾慎吾, 柳沢恭行, 大木恒郎, 中曽教尊, 山中一司
  • Journal Title: 電子情報通信学会技術研究報告 Volume: US2010-55 Pages: 39-44
  • NAID: 110008106814
• [Journal Article] Ball SAW gas chromatograph for detection of mixed VOC and FC gases (2010)
  • Author(s): Toshihiro Tsuji, Shohei Kawai, Hiroki Nagai, Toshihiro Sakamoto, Takamitsu Iwaya, Shingo Akao, Takayuki Yanagisawa, Tsuneo Ohgi, Noritaka Nakaso, Kazushi Yamanaka
  • Volume: 20
• [Journal Article] Possibility for sub-ppm hydrogen detection with the ball SAW sensor (2010)
  • Author(s): Hiroki Nagai, Shohei Kawai, Osamu Ito, Toru Oizumi, Toshihiro Tsuji, Nobuo Takeda, Kazushi Yamanaka
  • Journal Title: Proceedings of 20th International Congress on Acoustics Volume: 20
• [Journal Article] Development of Multiple-Gas Analysis Method Using the Ball Surface Acoustic Wave Sensor (2010)
  • Author(s): Yutaro Yamamoto, Shingo Akao, Hiroki Nagai, Toshihiro Sakamoto, Noritaka Nakaso, Toshihiro Tsuji , Kazushi Yamanaka
  • Journal Title: Japanese Journal of Applied Physics Volume: 49(7)
  • NAID: 210000068876
  • Peer Reviewed
• [Journal Article] Development of Multiple-Gas Analysis Method Using the Ball Surface Acoustic Wave Sensor (2010)
  • Author(s): Yutaro Yamamoto, Shingo Akao, Hiroki Nagai, Toshihiro Sakamoto, Noritaka Nakaso, Toshihiro Tsuji, Kazushi Yamanaka
  • Journal Title: Japanese Journal of Applied Physics Volume: 49(7)
  • NAID: 210000068876
  • Peer Reviewed
• [Journal Article] Ball SAW gas chromatograph for detection of mixed VOC and FC gases (2010)
  • Author(s): Toshihiro Tsuji, Shohei Kawai, Hiroki Nagai, Toshihiro Sakamoto, Takamitsu Iwaya, Shingo Akao, Takayuki Yanagisawa, Tsuneo Ohgi, Noritaka Nakaso, Kazushi Yamanaka
  • Journal Title: Proceedings of 20th International Congress on Acoustics Volume: 20
• [Journal Article] ボールSAWセンサによるVOCおよび燃料電池関連ガスの計測 (2010)
  • Author(s): 辻俊宏, 河合祥平, 永井弘樹, 坂本俊裕, 岩谷隆光, 赤尾慎吾, 柳沢恭行, 大木恒郎, 中曽教尊, 山中一司
  • Journal Title: 日本音響学会2010年秋季研究発表会講演論文集 Pages: 1437-1438
• [Journal Article] ボールSAWガスクロマトグラフのための金属カラムの開発 (2010)
  • Author(s): 岩谷隆光, 赤尾慎吾, 辻俊宏, 坂本俊裕, 中曽教尊, 山中一司
  • Journal Title: 日本音響学会2010年秋季研究発表会講演論文集 Pages: 1439-1440
• [Journal Article] Development of ball SAW gas chromatograph with quantitative analysis of multiple hazard gases (2010)
  • Author(s): Toshihiro Sakamoto, Shingo Akao, Hiroki Nagai, Takamitsu Iwaya, Aya Yoshiho, Noritaka Naka Toshihiro Tsuji, Kazushi Yamanaka
  • Journal Title: Proceedings of Symposium on Ultrasonic Electronics Volume: 31 Pages: 185-186
  • Peer Reviewed
• [Journal Article] Pressure Characteristics of Leaky Loss and Velocity on Ball SAW Device (2010)
  • Author(s): Takayuki Yanagisawa, Shingo Akao, Noritaka Nakaso, Toshiihro Tsuji, Omar Elmazria, Kazushi Yamanaka
  • Journal Title: Proceedings of Symposium on Ultrasonic Electronics Volume: 31 Pages: 213-214
  • Peer Reviewed
• [Journal Article] Development and Evaluation of Metal MEMS Column for the Ball SAW Gas Chromatograph (2010)
  • Author(s): Shingo Akao, Takamitsu Iwaya, Toshihiro Sakamoto, Hiroki Nagai, Noritaka Nakaso, Toshihiro Tsuji, Kazushi Yamanaka
  • Journal Title: Proceedings of Symposium on Ultrasonic Electronics Volume: 31 Pages: 453-454
  • Peer Reviewed
• [Journal Article] Fabrication of Thin Sensitive Film of Ball Surface Acoustic Wave Sensor by Off-Axis Spin-Coating Method (2009)
  • Author(s): Kentaro Kobari, Yutaro Yamamoto, Masanori Sakuma, Shingo Akao, Toshihiro Tsuji, Kazushi Yamanaka
  • Journal Title: Japanese Journal of Applied Physics Volume: 48(7)
  • NAID: 210000067132
  • Peer Reviewed
• [Journal Article] Development of Packed Column for Surface Acoustic Wave Gas Chromatograph Using Anodically Bonded Silicon-Glass Structure with a Cmpression Jacket (2009)
  • Author(s): Y.Yamamoto, S.Akao, M.Samuka, K.Kobari, K.Noguchi, N.Nakaso, T.Tsuji, K.Yamanaka
  • Journal Title: Japanese Journal of Applied Physics 48(7)
  • Peer Reviewed
• [Journal Article] Fabrication of Thin Sensitive Film of Ball Surface Acoustic Wave Sensor by Off-Axis Spin-Coating Method (2009)
  • Author(s): K.Kobari, Y.Yamamoto, M, Sakuma, S.Akao, T.Tsuji, K.Yamanaka
  • Journal Title: Japanese Journal of Applied Physics 48(7)
  • NAID: 210000067132
  • Peer Reviewed
• [Journal Article] Development of Ball SAW Gas Chromatograph for Natural Gas Analysis (2009)
  • Author(s): S.Akao, Y.Yamamoto, H.Nagai, T.Ohgi, T.Yanagisawa, K.Okubata, H.Jige, T.Fukiura, N.Nakaso, T.Tsuji, K.Yamanaka
  • Journal Title: Proceedings of Symposium on Ultrasonic Electronics 30 Pages: 79-80
  • Peer Reviewed
• [Presentation] ボールSAWガスクロマトグラフを用いた環境計測 (2011)
  • Author(s): 坂本俊裕, 吉野絢, 岩谷隆光, 永井弘樹, 小峯和也, 辻俊宏, 赤尾慎吾, 柳沢恭行, 大木恒郎, 中曽教尊, 山中一司
  • Organizer: 第58回応用物理学関係連合講演会
  • Place of Presentation: 厚木
  • Year and Date: 2011-03-09
• [Presentation] 可搬型ガスクロマトグラフのための金属MEMSカラムの開発 (2011)
  • Author(s): 岩谷隆光, 吉野絢, 赤尾慎吾, 坂本俊裕, 中曽教尊, 辻俊宏, 山中一司
  • Organizer: 第58回応用物理学関係連合講演会
  • Place of Presentation: 厚木
  • Year and Date: 2011-03-09
• [Presentation] ボールSAWセンサによる極性ガスの高感度測定 (2011)
  • Author(s): 永井弘樹、小峯和也、吉野絢、岩谷隆光、坂本俊宏、辻俊宏、赤尾慎吾、柳沢恭行、大木恒郎、中曽教尊、山中一司
  • Organizer: 圧電材料・デバイスシンポジウム2011
  • Place of Presentation: 仙台
• [Presentation] 環境計測のためのボールSAWガスクロマトグラフシステム (2011)
  • Author(s): 坂本俊裕、吉野絢、岩谷隆光、永井弘樹、小峯和也、辻俊宏、赤尾慎吾、柳沢恭行、大木恒郎、中曽教尊、山中一司
  • Organizer: 圧電材料・デバイスシンポジウム2011
  • Place of Presentation: 仙台
• [Presentation] 多種類の危険・有害ガス分析のためのボールSAWガスクロマトグラフ (2010)
  • Author(s): 坂本俊裕、赤尾慎吾、山本祐太郎、永井弘樹、岩谷隆光、中曽教尊、辻俊宏、山中一司
  • Organizer: 2010年春季 第57回応用物理学関係連合講演会
  • Place of Presentation: 神奈川・東海大学
  • Year and Date: 2010-03-17
• [Presentation] ボールSAWセンサを用いた多種類の危険・有害ガス分析法の開発 (2010)
  • Author(s): 山本祐太朗、赤尾慎吾、永井弘樹、坂本俊裕、岩谷隆光、中曽教尊、辻俊宏、山中一司
  • Organizer: 圧電材料・デバイスシンポジウム2010
  • Place of Presentation: 仙台・東北大学
  • Year and Date: 2010-02-02
• [Presentation] 軸外スピンコート法で成膜下感応膜を用いる球状弾性表面波センサによる極性化合物の測定 (2010)
  • Author(s): 辻俊宏、小峰和也、永井弘樹、坂本俊裕、岩谷隆光、赤尾慎吾、柳沢恭行、大木恒郎、中曽教尊、山中一司
  • Organizer: 電子情報通信学会超音波研究会
  • Place of Presentation: 仙台
• [Presentation] ボールSAWセンサによるVOCおよび燃料電池関連ガスの計測 (2010)
  • Author(s): 辻俊宏、河合祥平、永井弘樹、坂本俊裕、岩谷隆光、赤尾慎吾、柳沢恭行、大木恒郎、中曽教尊、山中一司
  • Organizer: 日本音響学会2010年秋季研究発表会
  • Place of Presentation: 大阪
• [Presentation] Ball SAW Gas Chromatograph for Detection of Mixed VOC and FC Gases (2010)
  • Author(s): Toshihiro Tsuji, Shohei Kawai, Hiroki Nagai, Toshihiro Sakamoto, Takamitsu Iwaya, Shingo Akao, Takayuki Yanagisawa, Tsuneo Ohgi, Noritaka Nakaso, Kazushi Yamanaka
  • Organizer: The 20th International Congress on Acoustics (ICA)
  • Place of Presentation: オーストラリア シドニー
• [Presentation] Possibility for Sub-ppm Hydrogen Detection with the Ball SAW Sensor (2010)
  • Author(s): Hiroki Nagai, Shohei Kawai, Osamu Ito, Toru Oizumi, Toshihiro Tsuji, Nobuo Takeda, Kazushi Yamanaka
  • Organizer: The 20th International Congress on Acoustics (ICA)
  • Place of Presentation: オーストラリア シドニー
• [Presentation] Multiple Organic Gas Detection by the Ball Surface Acoustic Wave Sensor (2010)
  • Author(s): Kazushi Yamanaka, Toshihiro Sakamoto, Yutato Yamamoto, Kentaro Kobari, Toshihiro Tsuji, Shingo Akao, Noritaka Nakaso
  • Organizer: International Academy, Research, and Industry Association(IARIA) The First International Conference on Sensor Device Technologies and Applications
  • Place of Presentation: イタリア ヴェネツィア
• [Presentation] Multiple Organic Gas Detection by the Ball Surface Acoustic Wave Sensor (2010)
  • Author(s): Kazushi Yamanaka, Toshihiro Sakamoto, Yutato Yamamoto, Kentaro Kobari, Toshihiro Tsuji, Shingo Akao, Noritaka Nakaso
  • Organizer: International Academy, Research, and Industry Association (IARIA) The First International Conference on Sensor Device Technologies and Applications
  • Place of Presentation: イタリアヴェネツィア
• [Presentation] Possibility for Sub-ppm Hydrogen Detection with the Ball SAW Sensor (2010)
  • Author(s): Hiroki Nagai, Shohei Kawai, Osamu Ito, Toru Oizumi, Toshihiro Tsuji, Nobuo Takeda, Kazushi Yamanaka
  • Organizer: The 20th International Congress on Acoustics (ICA)
  • Place of Presentation: オーストラリアシドニー
• [Presentation] Ball SAW Gas Chromato graph for Detection of Mixed VOC and FC Gases (2010)
  • Author(s): Toshihiro Tsuji, Shohei Kawai Hiroki Nagai, Toshihiro Sakamoto, Takamitsu Iwaya, Shingo Akao, Takayuki Yanagisawa, Tsuneo Ohgi, Noritaka Nakaso, Kazushi Yamanaka
  • Organizer: The 20th International Congress on Acoustics (ICA)
  • Place of Presentation: オーストラリアシドニー
• [Presentation] ボールSAWガスクロマトグラフのための金属カラムの開発 (2010)
  • Author(s): 岩谷隆光、坂本俊裕、辻俊宏、赤尾慎吾、中曽教尊、山中一司
  • Organizer: 日本音響学会2010年秋季研究発表会
  • Place of Presentation: 大阪
• [Presentation] Ball SAW Gas Chromatograph for Automatic Analysis of Wide Variety of Gases (2010)
  • Author(s): Toshihiro Sakamoto, Shingo Akao, Hiroki Nagai, Takamitsu Iwaya, Noritaka Nakaso, Toshihiro Tsuji, Kazushi Yamanaka
  • Organizer: 2010 IEEE International Ultrasonic Symposium (IUS)
  • Place of Presentation: アメリカサンディエゴ
• [Presentation] Development and Evaluate of Metal MEMS Column for the Ball SAW Gas Chromatograph (2010)
  • Author(s): Shingo Akao, Takamitsu Iwaya, Toshihiro Sakamoto, Hiroki Nagai, Toshihiro Tsuji, Noritaka Nakaso, Kazushi Yamanaka
  • Organizer: 2010 IEEE International Ultrasonic Symposium (IUS)
  • Place of Presentation: アメリカサンディエゴ
• [Presentation] Developenient of Ball SAW Gas Chromatograph with Quantitative Analysis of Multiple Hazard Gases (2010)
  • Author(s): Toshihiro Sakamoto, Shingo Akao, Hiroki Nagai, Takamitsu Iwaya, Aya Yoshino, Noritaka Nakaso, Toshihiro Tsuji, Kazushi Yamanaka
  • Organizer: 第31回超音波エレクトロニクスの基礎と応用に関するシンポジウムUSE2010
  • Place of Presentation: 東京
• [Presentation] Pressure Characteristics of Leaky Loss and Velocity on Ball SAW Device (2010)
  • Author(s): Takayuki Yanagisawa, Shingo Akao, Noritaka Nakaso, Toshihiro Tsuji, Omar Elmazria, Kazushi Yamanaka
  • Organizer: 第31回超音波エレクトロニクスの基礎と応用に関するシンポジウムUSE2010
  • Place of Presentation: 東京
• [Presentation] Development and Evaluation of Metal MEMS Column for the Ball SAW Gas Chromatograph (2010)
  • Author(s): Shingo Akao, Takamitsu Iwaya, Toshihiro Sakamoto, Hiroki Nagai, Noritaka Nakaso, Toshihiro Tsuji, Kazushi Yamanaka
  • Organizer: 第31回超音波エレクトロニクスの基礎と応用に関するシンポジウムUSE2010
  • Place of Presentation: 東京
• [Presentation] Development of Ball SAW Gas Chromatograph for Natural Gas Analysis (2009)
  • Author(s): S.Akao, Y.Yamamoto, H.Nagai, T.Ohgi, T.Yanagisawa, K.Okubata, H.Jige, T.Fukiura, N.Nakaso, T.Tsuji, K.Yamanaka
  • Organizer: 第30回超音波エレクトロニクスの基礎と応用に関するシンポジウム
  • Place of Presentation: 京都・同志社大学
  • Year and Date: 2009-11-19
• [Presentation] Development of Ball SAW Gas Chromatograph for Natural Gas Components (2009)
  • Author(s): 山本祐太朗, 赤尾慎吾, 永井弘樹, 中曽教尊, 辻俊宏, 山中一司
  • Organizer: IEEE International Ultrasonic Symposium
  • Place of Presentation: イタリア・ローマ
  • Year and Date: 2009-09-23
• [Presentation] Separation and Measurement of Mixed Hazardous Gases by Ball SAW Gas Chromatograph with Sensitive Film Fabricated Using Off-Axis Spin-Coating (2009)
  • Author(s): T.Tsuji, Y.Kawai, K.Kobari, Y.Yamamoto, S.Akao, N.Nakaso, K.Yamanaka
  • Organizer: IEEE International Ultrasonic Symposium
  • Place of Presentation: イタリア・ローマ
  • Year and Date: 2009-09-23
• [Presentation] Separation and Measurement of Mixed Hazardous Gases by Ball SAW Gas Chromatograph with Sensitive Film Fabricated Using Off-Axis Spin-Coating (2009)
  • Author(s): Toshihiro Tsuji, Yuki Kawai, Kentaro Kobari, Yutaro Yamamoto, Shingo Akao, Noritaka Nakaso, Kazushi Yamanaka
  • Organizer: IEEE International Ultrasonic Symposium
  • Place of Presentation: イタリアローマ
• [Remarks]
  • URL: http://www.material.tohoku.ac.jp/~hyoka/database_year_j.html
• [Remarks]
  • URL: http://www.material.tohoku.ac.jp/~hyoka/database_year_j.html