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Development of mirco DLC coating method using high-density plasma flow generated by pulsed arc discharge

Research Project

Project/Area Number 21760581
Research Category

Grant-in-Aid for Young Scientists (B)

Allocation TypeSingle-year Grants
Research Field Material processing/treatments
Research InstitutionNagoya University

Principal Investigator

KOUSAKA Hiroyuki  Nagoya University, 工学研究科, 准教授 (90362318)

Project Period (FY) 2009 – 2010
Project Status Completed (Fiscal Year 2010)
Budget Amount *help
¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000)
Fiscal Year 2010: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000)
Fiscal Year 2009: ¥2,600,000 (Direct Cost: ¥2,000,000、Indirect Cost: ¥600,000)
Keywordsパルスアークプラズマ / アブレーション / ダイヤモンドライクカーボン / スリット内面 / PTFE / 硬度 / 水蒸気 / 高密度プラズマ / 細穴内面 / 硬さ / 摩擦係数
Research Abstract

The possibility of diamond-like carbon coating to the inside of narrow slit (less than a few hundred microns in width) by using ultra-high-density plasma flow generated by pulsed arc discharge was investigated. It was revealed that inclusion of small amount of water molecule in coating chamber is effective to increase the hardness of the DLC film deposited by pulsed plasma ablation of PTFE. Then, DLC coating to slits 1.0, 0.5, 0.2 mm in width, which was made by 2 stainless-steel plate, was attempted ; the results showed that the length of 10 mm from the entrance of the silt was coated in the case of 1.0 mm slit, while almost no film was coated in the cases of 0.5 and 0.2 mm slits.

Report

(3 results)
  • 2010 Annual Research Report   Final Research Report ( PDF )
  • 2009 Annual Research Report
  • Research Products

    (26 results)

All 2011 2010 2009

All Journal Article (6 results) (of which Peer Reviewed: 4 results) Presentation (19 results) Patent(Industrial Property Rights) (1 results)

  • [Journal Article] Surface Chemical Modification of Ciir Rubber by High Density Plasma Treatment2010

    • Author(s)
      J.H.Kim, N.Umehara, H.Kousaka, M.Shimada, M.Hasegawa
    • Journal Title

      International Journal of Modern Physics B 24

      Pages: 2682-2687

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Plasma Treatment of Ciir Rubber with Improvement of Adhesion and Real Contact Area2010

    • Author(s)
      J.H.Kim, I.Nitta, N.Umehara, H.Kousaka, M.Shimada, M.Hasegawa
    • Journal Title

      International Journal of Modern Physics B 24

      Pages: 2688-2693

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] プラズマによる立体形状表面加工の最新動向とトライボロジー2010

    • Author(s)
      上坂裕之
    • Journal Title

      トライボロジスト 55

      Pages: 790-796

    • NAID

      10027461236

    • Related Report
      2010 Final Research Report
  • [Journal Article] Surface Chemical Modification of Ciir Rubber by High Density Plasma Treatment2010

    • Author(s)
      J.H.Kim, N.Umehara, H.Kousaka M.Shimada, M.Hasegawa
    • Journal Title

      International Journal of Modern Physics B

      Volume: 24 Pages: 2682-2687

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Plasma Treatment of Ciir Rubber with Improvement of Adhesion and Real Contact Area2010

    • Author(s)
      J.H.Kim, I.Nitta, N.Umehara, H.Kousaka, M.Shimada, M.Hasegawa
    • Journal Title

      International Journal of Modern Physics B

      Volume: 24 Pages: 2688-2693

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] プラズマによる立体形状表面加工の最新動向とトライボロジー2010

    • Author(s)
      上坂裕之
    • Journal Title

      トライボロジスト

      Volume: 55 Pages: 790-796

    • NAID

      10027461236

    • Related Report
      2010 Annual Research Report
  • [Presentation] High-speed DLC coating employing high-density near plasma sustained by microwave propagation along plasma-sheath interface2011

    • Author(s)
      T.Okamoto, H.Kousaka, N.Umehara
    • Organizer
      The 4th international conference on PLAsma-NanoTechnology & Science
    • Place of Presentation
      高山市民文化会館
    • Year and Date
      2011-03-11
    • Related Report
      2010 Final Research Report
  • [Presentation] Improvement of axial uniformity of DLC film coated to inner surface of narrow metal tube with MVP method2011

    • Author(s)
      KAZUNORI MORI, HIROYUKI KOUSAKA, NORITSUGU UMEHARA
    • Organizer
      3nd Int.Symp.Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPLASMA2011)
    • Place of Presentation
      名古屋工業大学
    • Year and Date
      2011-03-08
    • Related Report
      2010 Final Research Report
  • [Presentation] Improvement of axial uniformity of DLC film coated to inner surface of narrow metal tube with MVP method2011

    • Author(s)
      KAZUNORI MORI, HIROYUKI KOUSAKA, NORITSUGU UMEHARA
    • Organizer
      3nd Int.Symp.Advanced Plasma Science and its Applications for Nitrides and Nanomaterials(ISPLASMA2011)
    • Place of Presentation
      名古屋工業大学,名古屋,日本
    • Year and Date
      2011-03-08
    • Related Report
      2010 Annual Research Report
  • [Presentation] Internal DLC Coating of Narrow Metal Tubes with High-Density Near Plasma Sustained by Microwave Propagation along Plasma-Sheath Interfaces2010

    • Author(s)
      Hiroyuki Kousaka, Kazunori Mori, Noritsugu Umehara
    • Organizer
      63rd Gaseous Electronics conference/ 28th Symposium on plasma Processing/ 7th International Conference on Reactive Plasmas
    • Place of Presentation
      Maison De LA Chimie (Paris,France)
    • Year and Date
      2010-10-05
    • Related Report
      2010 Final Research Report
  • [Presentation] Internal DLC Coating of Narrow Metal Tubes with High-Density Near Plasma Sustained by Microwave Propagation along Plasma-Sheath Interfaces2010

    • Author(s)
      Hiroyuki Kousaka, Kazunori Mori, Noritsugu Umehara
    • Organizer
      63rd Gaseous Electronics conference/28th Symposium on plasma Processing/7th International Conference on Reactive Plasmas
    • Place of Presentation
      Maison De LA Chimie, Paris, France
    • Year and Date
      2010-10-05
    • Related Report
      2010 Annual Research Report
  • [Presentation] MVP 法により細穴内面に成膜されたDLC 膜の軸方向の均一化2010

    • Author(s)
      森一憲, 上坂裕之, 梅原徳次
    • Organizer
      第71回応用物理学会学術講演会
    • Place of Presentation
      長崎大学
    • Year and Date
      2010-09-16
    • Related Report
      2010 Final Research Report
  • [Presentation] MVP法により細穴内面に成膜されたDLC膜の軸方向の均一化2010

    • Author(s)
      森一憲, 上坂裕之, 梅原徳次
    • Organizer
      第71回応用物理学会学術講演会
    • Place of Presentation
      Xinming Lake Holiday Resort Beijing China
    • Year and Date
      2010-09-16
    • Related Report
      2010 Annual Research Report
  • [Presentation] High-density plasma generation using microwave propagation along plasma-sheath interface and its application to DLC coating2010

    • Author(s)
      H.Kousaka
    • Organizer
      1st International Workshop on Plasma Scientech for All Something (Plasas- 1)
    • Place of Presentation
      Xinming Lake Holiday Resort (Beijing, China)(invieted)
    • Year and Date
      2010-05-15
    • Related Report
      2010 Final Research Report
  • [Presentation] High-density plasma generation using microwave propagation along plasma-sheath interface and its application to DLC coating2010

    • Author(s)
      H.Kousaka
    • Organizer
      1st International Workshop on Plasma Scientech for All Something(Plasas-1)
    • Place of Presentation
      Xinming Lake Holiday Resort, Beijing, China
    • Year and Date
      2010-05-15
    • Related Report
      2010 Annual Research Report
  • [Presentation] Internal Plasma Processing of Narrow Halls and Tubes with Microwave Propagation Along Plasma-Sheath Interfaces2010

    • Author(s)
      H.Kousaka, K.Mori, N.Umehara, N.Tamura, T.Shindo
    • Organizer
      37th International Conference on Metallurgical Coatings and Thin Films (ICMCTF)
    • Place of Presentation
      Town & Country Hotel (SanDiego, USA)
    • Year and Date
      2010-04-26
    • Related Report
      2010 Final Research Report
  • [Presentation] Internal Plasma Processing of Narrow Halls and Tubes with Microwave Propagation Along Plasma-Sheath Interfaces2010

    • Author(s)
      H.Kousaka, K.Mori, N.Umehara, N.Tamura, T.Shindo
    • Organizer
      37th International Conference on Metallurgical Coatings and Thin Films(ICMCTF)
    • Place of Presentation
      Town & Country Hotel, SanDiego, USA
    • Year and Date
      2010-04-26
    • Related Report
      2010 Annual Research Report
  • [Presentation] Internal Plasma Processing of Narrow Halls and Tubes with Microwave Propagation Along Plasma-Sheath Interfaces2010

    • Author(s)
      H.Kousaka, K.Mori, N.Umehara, N.Tamura, T.Shindo
    • Organizer
      53rd Technical conference of SVC (Society of Vacuum Coaters)
    • Place of Presentation
      Orland World Center (Orland, USA)
    • Year and Date
      2010-04-19
    • Related Report
      2010 Final Research Report
  • [Presentation] Internal Plasma Processing of Narrow Halls and Tubes with Microwave Propagation Along Plasma-Sheath Interfaces2010

    • Author(s)
      H.Kousaka, K.Mori, N.Umehara, N.Tamura, T.Shindo
    • Organizer
      53rd Technical conference of SVC
    • Place of Presentation
      Orland World Center, Orland, USA
    • Year and Date
      2010-04-19
    • Related Report
      2010 Annual Research Report
  • [Presentation] Hardness increase of amorphous carbon film coated by pulsed-plasma ablation of PTFE2010

    • Author(s)
      Shingo KAWARA, Hiroyuki KOIZUMI, Hiroyuki KOUSAKA, et.al.
    • Organizer
      The 3rd Int.Conf.Plasma-NanoTechnology & Science (IC-PLANTS)
    • Place of Presentation
      名城大学
    • Year and Date
      2010-03-11
    • Related Report
      2010 Final Research Report
  • [Presentation] Hardness increase of amorphous carbon film coated by pulsed-plasma ablation of PTFE2010

    • Author(s)
      Shingo KAWARA, Hiroyuki KOIZUMI, Hiroyuki KOUSAKA, et.al.
    • Organizer
      The 3rd Int. Conf. Plasma-NanoTechnology & Science(IC-PLANTS)
    • Place of Presentation
      名城大学,名古屋,日本
    • Year and Date
      2010-03-11
    • Related Report
      2009 Annual Research Report
  • [Presentation] Control of fluorine content for hardness increase of amorphous carbon film coated by pulsed-plasma ablation2010

    • Author(s)
      Shingo KAWARA, Hiroyuki KOIZUMI, Hiroyuki KOUSAKA, et.al.
    • Organizer
      2nd Int.Symp.Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPLASMA2010)
    • Place of Presentation
      名城大学
    • Year and Date
      2010-03-08
    • Related Report
      2010 Final Research Report
  • [Presentation] Control of fluorine content for hardness increase of amorphous carbon film coated by pulsed-plasma ablation2010

    • Author(s)
      ^1Shingo KAWARA, Hiroyuki KOIZUMI, Hiroyuki KOUSAKA, et.al.
    • Organizer
      2nd Int. Symp. Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPLASMA)
    • Place of Presentation
      名城大学,名古屋,日本
    • Year and Date
      2010-03-08
    • Related Report
      2009 Annual Research Report
  • [Presentation] Influence of fluorine content on hardness of amorphous carbon film coated by pulsed-plasma ablation2009

    • Author(s)
      Shingo KAWARA, Hiroyuki KOUSAKA, et.al.
    • Organizer
      The 3rd Int.Conf.Manufacturing, Machine Design, and Tribology (ICMDT)
    • Place of Presentation
      Ramada Plaza Jeju Hotel (済州島,韓国)
    • Year and Date
      2009-06-25
    • Related Report
      2010 Final Research Report
  • [Presentation] Influence of fluorine content on hardness of amorphous carbon film coated by pulsed-plasma ablation2009

    • Author(s)
      Shingo KAWARA, Hiroyuki KOUSAKA, et. al.
    • Organizer
      The 3rd Int. Conf. Manufacturing, Machine Design, and Tribology (ICMDT)
    • Place of Presentation
      Ramada Plaza Jeju Hotel,済州島,韓国
    • Year and Date
      2009-06-25
    • Related Report
      2009 Annual Research Report
  • [Patent(Industrial Property Rights)] フッ素含有炭素材料の製造方法2010

    • Inventor(s)
      上坂裕之, 河原真吾, 小泉宏之, 山田和彦
    • Industrial Property Rights Holder
      名古屋大学, 独立行政法人宇宙航空研究開発機構
    • Industrial Property Number
      2010-024509
    • Filing Date
      2010-02-05
    • Related Report
      2010 Final Research Report 2009 Annual Research Report

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Published: 2009-04-01   Modified: 2016-04-21  

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