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Development of Reactive Plasma Spray Process for Fabrication of High Quality Aluminum Nitride Coating

Research Project

Project/Area Number 21760583
Research Category

Grant-in-Aid for Young Scientists (B)

Allocation TypeSingle-year Grants
Research Field Material processing/treatments
Research InstitutionToyohashi University of Technology

Principal Investigator

YAMADA Motohiro  Toyohashi University of Technology, 大学院・工学研究科, 助教 (00432295)

Project Period (FY) 2009 – 2010
Project Status Completed (Fiscal Year 2010)
Budget Amount *help
¥4,550,000 (Direct Cost: ¥3,500,000、Indirect Cost: ¥1,050,000)
Fiscal Year 2010: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
Fiscal Year 2009: ¥2,990,000 (Direct Cost: ¥2,300,000、Indirect Cost: ¥690,000)
Keywordsプラズマ溶射 / 窒化アルミニウム / 窒化反応 / コーティング
Research Abstract

Aluminum nitride (AlN) possesses high thermal conductivity with dielectric property. AlN is very useful in several applications though it hasn't been developed a thick coating process. In this research, AlN coating was successfully fabricated by reactive plasma spray using nitrogen/hydrogen plasma for the reaction of feedstock aluminum or alumina powders. The crystal of the AlN coating was cubic structure which is similar to aluminum oxynitride. It became clear that the nitrding process of feedstock powder is through oxynitride phase during flight in the plasma.

Report

(3 results)
  • 2010 Annual Research Report   Final Research Report ( PDF )
  • 2009 Annual Research Report
  • Research Products

    (53 results)

All 2011 2010 2009 Other

All Journal Article (24 results) (of which Peer Reviewed: 12 results) Presentation (28 results) Remarks (1 results)

  • [Journal Article] Reactive atmospheric plasma spraying of AlN coating:Influence of aluminum feedstock particle size2011

    • Author(s)
      M.Shahien, M.Yamada, T.Yasui, M.Fukumoto
    • Journal Title

      Journal of Thermal Spray Technology Vol.20, No.3

      Pages: 580-589

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Influence of NH4Cl powder addition for fabrication of aluminum nitride coating in reactive atmospheric plasma spray process2011

    • Author(s)
      M.Shahien, M.Yamada, T.Yasui, M.Fukumoto
    • Journal Title

      Journal of Thermal Spray Technology Vol.20, No.1-2

      Pages: 205-212

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Reaction and nitridation of Al2O3 powder in reactive atmospheric plasma spraying2011

    • Author(s)
      M.Yamada, M.Shahien, T.Yasui, M.Fukumoto
    • Journal Title

      Proceedings of Processing and Fabrication of Advanced Materials XIX

      Pages: 1452-1463

    • Related Report
      2010 Final Research Report
  • [Journal Article] Reactive atmospheric plasma spraying of AlN coating : Influence of aluminum feedstock particle size2011

    • Author(s)
      M.Shahien
    • Journal Title

      Journal of Thermal Spray Technology

      Volume: 20-3 Pages: 580-589

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Microstructure of interfacial region between cold-sprayed copper coating and AlN substrate coated with sputtered titanium and copper2011

    • Author(s)
      H.Nakano
    • Journal Title

      Journal of Thermal Spray Technology

      Volume: 20-3 Pages: 407-411

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Influence of NH_4Cl powder addition for fabrication of aluminum nitride coating in reactive atmospheric plasma spray process2011

    • Author(s)
      M.Shahien
    • Journal Title

      Journal of Thermal Spray Technology

      Volume: 20-1-2 Pages: 205-212

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Synthesis of titanium dioxide (TiO2) powders for cold spray2011

    • Author(s)
      N.Tjitra Salim
    • Journal Title

      Proceedings of Processing and Fabrication of Advanced Materials XIX

      Pages: 1174-1184

    • Related Report
      2010 Annual Research Report
  • [Journal Article] Reaction and nitridation of Al2O3 powder in reactive atmospheric plasma spraying2011

    • Author(s)
      M.Yamada
    • Journal Title

      Proceedings of Processing and Fabrication of Advanced Materials XIX

      Pages: 1452-1463

    • Related Report
      2010 Annual Research Report
  • [Journal Article] A New Method for measuring shear adhesion strength of ceramic cold spray splats2010

    • Author(s)
      M.E.Dickinson
    • Journal Title

      Nanoscience and Nanotechnology Letters

      Volume: 2 Pages: 348-351

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Cold Spraying of TiO2 photocatalyst coating with nitrogen process gas2010

    • Author(s)
      M.Yamada
    • Journal Title

      Journal of Thermal Spray Technology

      Volume: 19-6 Pages: 1218-1223

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Influence of feedstock powder for fabrication of aluminum nitride in reactive atmospheric plasma spray process2010

    • Author(s)
      M.Shahien
    • Journal Title

      Proceedings of International Thermal Spray Conference 2010

      Volume: (CD)

    • Related Report
      2010 Annual Research Report
  • [Journal Article] Deposition of TiO2 ceramic particles on cold spray process2010

    • Author(s)
      M.Yamada
    • Journal Title

      Proceedings of International Thermal Spray Conference 2010

      Volume: (CD)

    • Related Report
      2010 Annual Research Report
  • [Journal Article] Fabrication of A1N coatings by reactive atmospheric plasma spray nitriding of Al powders2010

    • Author(s)
      M.Shahien
    • Journal Title

      Materials Transactions 51-55(In press)

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Deposition behavior of copper fine particles onto flat substrate surface in cold spraying2010

    • Author(s)
      M.Fukumoto
    • Journal Title

      Journal of Thermal Spray Technology 19(1-2)

      Pages: 89-94

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Reactive atmospheric plasma spraying of aluminum nitride based coating2009

    • Author(s)
      M.Yamada
    • Journal Title

      Proceedings of Processing and Fabrication of Advanced Materials XVIII

      Pages: 1999-2006

    • Related Report
      2009 Annual Research Report
  • [Journal Article] Effect of ambient pressure on flattening behavior of thermal sprayed particles2009

    • Author(s)
      K.Yang
    • Journal Title

      Journal of Thermal Spray Technology 18(4)

      Pages: 510-518

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Study of wetting on flattening behavior of thermal sprayed particles2009

    • Author(s)
      K.Yang
    • Journal Title

      Proceedings of the 4^<th> Asian Thermal Spray Conference

      Pages: 226-231

    • Related Report
      2009 Annual Research Report
  • [Journal Article] Fabrication of aluminum nitride based coating by reactive atmospheric plasma spray2009

    • Author(s)
      M.Shahien
    • Journal Title

      Proceedings of the 4^<th> Asian Thermal Spray Conference

      Pages: 124-129

    • Related Report
      2009 Annual Research Report
  • [Journal Article] Cold spraying of Ti02 photocatalyst coating2009

    • Author(s)
      M.Yamada
    • Journal Title

      Proceedings of the 4^<th> Asian Thermal Spray Conference

      Pages: 12-16

    • Related Report
      2009 Annual Research Report
  • [Journal Article] Fabrication of aluminum nitride coating by atmospheric plasma spray2009

    • Author(s)
      M.Yamada
    • Journal Title

      Proceedings of 19th International Symposium on Plasma Chemistry

    • Related Report
      2009 Annual Research Report
  • [Journal Article] Nitriding of Al powder and fabrication of A1N films by atmospheric plasma spray2009

    • Author(s)
      M.Shahien
    • Journal Title

      Proceedings of the tenth International Symposiumon Sputtering & Plasma Processes

      Pages: 468-471

    • Related Report
      2009 Annual Research Report
  • [Journal Article] Influence of process gas conditions upon fabrication of titanium dioxide coating by cold spray2009

    • Author(s)
      M.Yamada
    • Journal Title

      Proceedings of ASMP 2009

    • Related Report
      2009 Annual Research Report
  • [Journal Article] Fabrication of Cu-MoS2 composite coating by cold spraying and evaluative of its property2009

    • Author(s)
      M.Yamada
    • Journal Title

      Proceedings of the International Thermal Spray Conference 2009

      Pages: 326-330

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Deposition behavior of copper particles onto flat substrate surface in cold spraying2009

    • Author(s)
      M.Fukumoto
    • Journal Title

      Proceedings of the International Thermal Spray Conference 2009

      Pages: 273-278

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Presentation] コールドスプレーおよびサスペンション溶射により作製した光触媒酸化チタン皮膜の特性2011

    • Author(s)
      山田基宏
    • Organizer
      日本セラミックス協会2011年年会
    • Place of Presentation
      静岡大学
    • Year and Date
      2011-03-17
    • Related Report
      2010 Annual Research Report
  • [Presentation] The effect of substrate on adhesion strength of cold-sprayed TiO2 coating2011

    • Author(s)
      N.Tjitra Salim
    • Organizer
      日本セラミックス協会2011年年会
    • Place of Presentation
      静岡大学
    • Year and Date
      2011-03-17
    • Related Report
      2010 Annual Research Report
  • [Presentation] The synthesis of TiO2 powder via hydrolysis method for cold spray process2011

    • Author(s)
      N.Tjitra Salim
    • Organizer
      日本セラミックス協会2011年年会
    • Place of Presentation
      静岡大学
    • Year and Date
      2011-03-17
    • Related Report
      2010 Annual Research Report
  • [Presentation] Reaction and nitridation of Al2O3 powder in reactive atmospheric plasma spraying2011

    • Author(s)
      M.Yamada, M.Shahien, T.Yasui, M.Fukumoto
    • Organizer
      Processing and Fabrication of Advanced Materials XIX
    • Place of Presentation
      The University of Auckland, New Zealand
    • Year and Date
      2011-01-17
    • Related Report
      2010 Annual Research Report 2010 Final Research Report
  • [Presentation] Synthesis of titanium dioxide (TiO2) powders for cold spray2011

    • Author(s)
      N.Tjitra Salim
    • Organizer
      Processing and Fabrication of Advanced Materials XIX
    • Place of Presentation
      The University of Auckland, New Zealand
    • Year and Date
      2011-01-16
    • Related Report
      2010 Annual Research Report
  • [Presentation] Synthesis of titanium dioxide powders via hydrolysis of titanyl sulphate for cold spray coating2010

    • Author(s)
      N.Tjitra Salim
    • Organizer
      日本溶射協会第92回全国講演大会
    • Place of Presentation
      川崎市産業振興会館
    • Year and Date
      2010-11-30
    • Related Report
      2010 Annual Research Report
  • [Presentation] コールドスプレー酸化チタン粒子の密着強度評価2010

    • Author(s)
      山田基宏
    • Organizer
      日本溶射協会第92回全国講演大会
    • Place of Presentation
      川崎市産業振興会館
    • Year and Date
      2010-11-29
    • Related Report
      2010 Annual Research Report
  • [Presentation] コールドスプレー法によるCFRP基材上への金属皮膜の作製2010

    • Author(s)
      Jon Affi
    • Organizer
      第18回機械材料・材料加工技術講演会
    • Place of Presentation
      東京大学
    • Year and Date
      2010-11-28
    • Related Report
      2010 Annual Research Report
  • [Presentation] コールドスプレー法によるアナターゼ型酸化チタン成膜2010

    • Author(s)
      山田基宏
    • Organizer
      第18回機械材料・材料加工技術講演会
    • Place of Presentation
      東京大学
    • Year and Date
      2010-11-28
    • Related Report
      2010 Annual Research Report
  • [Presentation] Controlling of nitriding process on reactive plasma spraying of Al particles2010

    • Author(s)
      M.Shahien, M.Yamada, T.Yasui, M.Fukumoto
    • Organizer
      3rd International Congress on Ceramics
    • Place of Presentation
      グランキューブ大阪
    • Year and Date
      2010-11-17
    • Related Report
      2010 Annual Research Report 2010 Final Research Report
  • [Presentation] The synthesis of sol-gel titanium dioxide (TiO2) powder for cold spray2010

    • Author(s)
      N.Tjitra Salim
    • Organizer
      3rd International Congress on Ceramics
    • Place of Presentation
      グランキューブ大阪
    • Year and Date
      2010-11-17
    • Related Report
      2010 Annual Research Report
  • [Presentation] コールドスプレー粒子/基材界面の微細組織観察2010

    • Author(s)
      山田基宏
    • Organizer
      日本機械学会2010年度年次大会
    • Place of Presentation
      名古屋工業大学
    • Year and Date
      2010-09-06
    • Related Report
      2010 Annual Research Report
  • [Presentation] Influence of particle shape on low pressure cold spraying2010

    • Author(s)
      Jon Affi
    • Organizer
      日本機械学会2010年度年次大会
    • Place of Presentation
      名古屋工業大学
    • Year and Date
      2010-09-06
    • Related Report
      2010 Annual Research Report
  • [Presentation] コールドスプレー粒子の密着強度評価2010

    • Author(s)
      島幸一郎
    • Organizer
      日本機械学会2010年度年次大会
    • Place of Presentation
      名古屋工業大学
    • Year and Date
      2010-09-06
    • Related Report
      2010 Annual Research Report
  • [Presentation] アルミナ粉末を用いた大気中反応性プラズマ溶射による窒化アルミニウム皮膜の作製2010

    • Author(s)
      山田基宏, M.Shahien, 安井利明, 福本昌宏
    • Organizer
      日本溶射協会第91回全国講演大会
    • Place of Presentation
      たかつガーデン,大阪
    • Year and Date
      2010-07-05
    • Related Report
      2010 Annual Research Report 2010 Final Research Report
  • [Presentation] 溶射粒子偏平挙動および皮膜特性に及ぼす雰囲気圧力の影響2010

    • Author(s)
      山田基宏
    • Organizer
      日本溶射協会第91回全国講演大会
    • Place of Presentation
      たかつガーデン,大阪
    • Year and Date
      2010-07-05
    • Related Report
      2010 Annual Research Report
  • [Presentation] 溶射およびコールドスプレー銅粒子の付着メカニズム2010

    • Author(s)
      山田基宏
    • Organizer
      日本溶射協会第91回全国講演大会
    • Place of Presentation
      たかつガーデン,大阪
    • Year and Date
      2010-07-05
    • Related Report
      2010 Annual Research Report
  • [Presentation] Cold spray deposition of TiO2 nanostructured particles2010

    • Author(s)
      M.Yamada
    • Organizer
      12th International Ceramics Congress
    • Place of Presentation
      Montecatini Terme, Italy
    • Year and Date
      2010-06-07
    • Related Report
      2010 Annual Research Report
  • [Presentation] Deposition of TiO2 ceramic particles on cold spray process2010

    • Author(s)
      M.Yamada
    • Organizer
      International Thermal Spray Conference 2010
    • Place of Presentation
      Raffles City Convention Centre, Singapore
    • Year and Date
      2010-05-03
    • Related Report
      2010 Annual Research Report
  • [Presentation] Influence of feedstock powder for fabrication of aluminum nitride in reactive atmospheric plasma spray process2010

    • Author(s)
      M.Shahien
    • Organizer
      International Thermal Spray Conference 2010
    • Place of Presentation
      Raffles City Convention Centre, Singapore
    • Year and Date
      2010-05-03
    • Related Report
      2010 Annual Research Report
  • [Presentation] Enhancement of Reactive Atmospheric Plasma Sprayed Aluminum Particles2010

    • Author(s)
      M.Shahien
    • Organizer
      IC-PLANTS 2010
    • Place of Presentation
      名古屋
    • Year and Date
      2010-03-11
    • Related Report
      2009 Annual Research Report
  • [Presentation] Reactive atmospheric plasma spraying of aluminum nitride based coating2009

    • Author(s)
      M.Yamada
    • Organizer
      PFAM XVIII
    • Place of Presentation
      仙台
    • Year and Date
      2009-12-14
    • Related Report
      2009 Annual Research Report
  • [Presentation] Study of wetting on flattening behavior of thermal sprayed particles2009

    • Author(s)
      K.Yang
    • Organizer
      ATSC 2009
    • Place of Presentation
      Xi'an, China
    • Year and Date
      2009-10-23
    • Related Report
      2009 Annual Research Report
  • [Presentation] Fabrication of aluminum nitride based coating by reactive atmospheric plasma spray2009

    • Author(s)
      M.Shahien
    • Organizer
      ATSC 2009
    • Place of Presentation
      Xi'an, China
    • Year and Date
      2009-10-23
    • Related Report
      2009 Annual Research Report
  • [Presentation] Cold spraying of Ti02 photocatalyst coating2009

    • Author(s)
      M.Yamada
    • Organizer
      ATSC 2009
    • Place of Presentation
      Xi'an, China
    • Year and Date
      2009-10-22
    • Related Report
      2009 Annual Research Report
  • [Presentation] Fabrication of aluminum nitride coating by atmospheric plasma spray2009

    • Author(s)
      M.Yamada
    • Organizer
      ISPC-19
    • Place of Presentation
      Bochum, Germany
    • Year and Date
      2009-07-28
    • Related Report
      2009 Annual Research Report
  • [Presentation] Nitriding of Al powder and fabrication of A1N films by atmospheric plasma spray2009

    • Author(s)
      M.Shahien
    • Organizer
      ISSP 2009
    • Place of Presentation
      金沢
    • Year and Date
      2009-07-10
    • Related Report
      2009 Annual Research Report
  • [Presentation] Influence of process gas conditions upon fabrication of titanium dioxide coating by cold spray2009

    • Author(s)
      M.Yamada
    • Organizer
      ASMP 2009
    • Place of Presentation
      Penag, Malaysia
    • Year and Date
      2009-06-02
    • Related Report
      2009 Annual Research Report
  • [Remarks] ホームページ等

    • URL

      http://isf.me.tut.ac.jp/

    • Related Report
      2010 Final Research Report

URL: 

Published: 2009-04-01   Modified: 2016-04-21  

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