Development of Reactive Plasma Spray Process for Fabrication of High Quality Aluminum Nitride Coating

• Project/Area Number: 21760583
• Research Category: Grant-in-Aid for Young Scientists (B)
• Allocation Type: Single-year Grants
• Research Field: Material processing/treatments
• Research Institution: Toyohashi University of Technology
• Principal Investigator: YAMADA Motohiro Toyohashi University of Technology, 大学院・工学研究科, 助教 (00432295)
• Project Period (FY): 2009 – 2010
• Project Status: Completed (Fiscal Year 2010)
• Budget Amount: ¥4,550,000 (Direct Cost: ¥3,500,000、Indirect Cost: ¥1,050,000); Fiscal Year 2010: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000); Fiscal Year 2009: ¥2,990,000 (Direct Cost: ¥2,300,000、Indirect Cost: ¥690,000)
• Keywords: プラズマ溶射 / 窒化アルミニウム / 窒化反応 / コーティング

Research Abstract

Aluminum nitride (AlN) possesses high thermal conductivity with dielectric property. AlN is very useful in several applications though it hasn't been developed a thick coating process. In this research, AlN coating was successfully fabricated by reactive plasma spray using nitrogen/hydrogen plasma for the reaction of feedstock aluminum or alumina powders. The crystal of the AlN coating was cubic structure which is similar to aluminum oxynitride. It became clear that the nitrding process of feedstock powder is through oxynitride phase during flight in the plasma.

Research Products

• [Journal Article] Reactive atmospheric plasma spraying of AlN coating:Influence of aluminum feedstock particle size (2011)
  • Author(s): M.Shahien, M.Yamada, T.Yasui, M.Fukumoto
  • Journal Title: Journal of Thermal Spray Technology Vol.20, No.3 Pages: 580-589
  • Peer Reviewed
• [Journal Article] Influence of NH4Cl powder addition for fabrication of aluminum nitride coating in reactive atmospheric plasma spray process (2011)
  • Author(s): M.Shahien, M.Yamada, T.Yasui, M.Fukumoto
  • Journal Title: Journal of Thermal Spray Technology Vol.20, No.1-2 Pages: 205-212
  • Peer Reviewed
• [Journal Article] Reaction and nitridation of Al2O3 powder in reactive atmospheric plasma spraying (2011)
  • Author(s): M.Yamada, M.Shahien, T.Yasui, M.Fukumoto
  • Journal Title: Proceedings of Processing and Fabrication of Advanced Materials XIX Pages: 1452-1463
• [Journal Article] Reactive atmospheric plasma spraying of AlN coating : Influence of aluminum feedstock particle size (2011)
  • Author(s): M.Shahien
  • Journal Title: Journal of Thermal Spray Technology Volume: 20-3 Pages: 580-589
  • Peer Reviewed
• [Journal Article] Microstructure of interfacial region between cold-sprayed copper coating and AlN substrate coated with sputtered titanium and copper (2011)
  • Author(s): H.Nakano
  • Journal Title: Journal of Thermal Spray Technology Volume: 20-3 Pages: 407-411
  • Peer Reviewed
• [Journal Article] Influence of NH_4Cl powder addition for fabrication of aluminum nitride coating in reactive atmospheric plasma spray process (2011)
  • Author(s): M.Shahien
  • Journal Title: Journal of Thermal Spray Technology Volume: 20-1-2 Pages: 205-212
  • Peer Reviewed
• [Journal Article] Synthesis of titanium dioxide (TiO2) powders for cold spray (2011)
  • Author(s): N.Tjitra Salim
  • Journal Title: Proceedings of Processing and Fabrication of Advanced Materials XIX Pages: 1174-1184
• [Journal Article] Reaction and nitridation of Al2O3 powder in reactive atmospheric plasma spraying (2011)
  • Author(s): M.Yamada
  • Journal Title: Proceedings of Processing and Fabrication of Advanced Materials XIX Pages: 1452-1463
• [Journal Article] A New Method for measuring shear adhesion strength of ceramic cold spray splats (2010)
  • Author(s): M.E.Dickinson
  • Journal Title: Nanoscience and Nanotechnology Letters Volume: 2 Pages: 348-351
  • Peer Reviewed
• [Journal Article] Cold Spraying of TiO2 photocatalyst coating with nitrogen process gas (2010)
  • Author(s): M.Yamada
  • Journal Title: Journal of Thermal Spray Technology Volume: 19-6 Pages: 1218-1223
  • Peer Reviewed
• [Journal Article] Influence of feedstock powder for fabrication of aluminum nitride in reactive atmospheric plasma spray process (2010)
  • Author(s): M.Shahien
  • Journal Title: Proceedings of International Thermal Spray Conference 2010 Volume: (CD)
• [Journal Article] Deposition of TiO2 ceramic particles on cold spray process (2010)
  • Author(s): M.Yamada
  • Journal Title: Proceedings of International Thermal Spray Conference 2010 Volume: (CD)
• [Journal Article] Fabrication of A1N coatings by reactive atmospheric plasma spray nitriding of Al powders (2010)
  • Author(s): M.Shahien
  • Journal Title: Materials Transactions 51-55(In press)
  • Peer Reviewed
• [Journal Article] Deposition behavior of copper fine particles onto flat substrate surface in cold spraying (2010)
  • Author(s): M.Fukumoto
  • Journal Title: Journal of Thermal Spray Technology 19(1-2) Pages: 89-94
  • Peer Reviewed
• [Journal Article] Reactive atmospheric plasma spraying of aluminum nitride based coating (2009)
  • Author(s): M.Yamada
  • Journal Title: Proceedings of Processing and Fabrication of Advanced Materials XVIII Pages: 1999-2006
• [Journal Article] Effect of ambient pressure on flattening behavior of thermal sprayed particles (2009)
  • Author(s): K.Yang
  • Journal Title: Journal of Thermal Spray Technology 18(4) Pages: 510-518
  • Peer Reviewed
• [Journal Article] Study of wetting on flattening behavior of thermal sprayed particles (2009)
  • Author(s): K.Yang
  • Journal Title: Proceedings of the 4^<th> Asian Thermal Spray Conference Pages: 226-231
• [Journal Article] Fabrication of aluminum nitride based coating by reactive atmospheric plasma spray (2009)
  • Author(s): M.Shahien
  • Journal Title: Proceedings of the 4^<th> Asian Thermal Spray Conference Pages: 124-129
• [Journal Article] Cold spraying of Ti02 photocatalyst coating (2009)
  • Author(s): M.Yamada
  • Journal Title: Proceedings of the 4^<th> Asian Thermal Spray Conference Pages: 12-16
• [Journal Article] Fabrication of aluminum nitride coating by atmospheric plasma spray (2009)
  • Author(s): M.Yamada
  • Journal Title: Proceedings of 19th International Symposium on Plasma Chemistry
• [Journal Article] Nitriding of Al powder and fabrication of A1N films by atmospheric plasma spray (2009)
  • Author(s): M.Shahien
  • Journal Title: Proceedings of the tenth International Symposiumon Sputtering & Plasma Processes Pages: 468-471
• [Journal Article] Influence of process gas conditions upon fabrication of titanium dioxide coating by cold spray (2009)
  • Author(s): M.Yamada
  • Journal Title: Proceedings of ASMP 2009
• [Journal Article] Fabrication of Cu-MoS2 composite coating by cold spraying and evaluative of its property (2009)
  • Author(s): M.Yamada
  • Journal Title: Proceedings of the International Thermal Spray Conference 2009 Pages: 326-330
  • Peer Reviewed
• [Journal Article] Deposition behavior of copper particles onto flat substrate surface in cold spraying (2009)
  • Author(s): M.Fukumoto
  • Journal Title: Proceedings of the International Thermal Spray Conference 2009 Pages: 273-278
  • Peer Reviewed
• [Presentation] コールドスプレーおよびサスペンション溶射により作製した光触媒酸化チタン皮膜の特性 (2011)
  • Author(s): 山田基宏
  • Organizer: 日本セラミックス協会2011年年会
  • Place of Presentation: 静岡大学
  • Year and Date: 2011-03-17
• [Presentation] The effect of substrate on adhesion strength of cold-sprayed TiO2 coating (2011)
  • Author(s): N.Tjitra Salim
  • Organizer: 日本セラミックス協会2011年年会
  • Place of Presentation: 静岡大学
  • Year and Date: 2011-03-17
• [Presentation] The synthesis of TiO2 powder via hydrolysis method for cold spray process (2011)
  • Author(s): N.Tjitra Salim
  • Organizer: 日本セラミックス協会2011年年会
  • Place of Presentation: 静岡大学
  • Year and Date: 2011-03-17
• [Presentation] Reaction and nitridation of Al2O3 powder in reactive atmospheric plasma spraying (2011)
  • Author(s): M.Yamada, M.Shahien, T.Yasui, M.Fukumoto
  • Organizer: Processing and Fabrication of Advanced Materials XIX
  • Place of Presentation: The University of Auckland, New Zealand
  • Year and Date: 2011-01-17
• [Presentation] Synthesis of titanium dioxide (TiO2) powders for cold spray (2011)
  • Author(s): N.Tjitra Salim
  • Organizer: Processing and Fabrication of Advanced Materials XIX
  • Place of Presentation: The University of Auckland, New Zealand
  • Year and Date: 2011-01-16
• [Presentation] Synthesis of titanium dioxide powders via hydrolysis of titanyl sulphate for cold spray coating (2010)
  • Author(s): N.Tjitra Salim
  • Organizer: 日本溶射協会第92回全国講演大会
  • Place of Presentation: 川崎市産業振興会館
  • Year and Date: 2010-11-30
• [Presentation] コールドスプレー酸化チタン粒子の密着強度評価 (2010)
  • Author(s): 山田基宏
  • Organizer: 日本溶射協会第92回全国講演大会
  • Place of Presentation: 川崎市産業振興会館
  • Year and Date: 2010-11-29
• [Presentation] コールドスプレー法によるCFRP基材上への金属皮膜の作製 (2010)
  • Author(s): Jon Affi
  • Organizer: 第18回機械材料・材料加工技術講演会
  • Place of Presentation: 東京大学
  • Year and Date: 2010-11-28
• [Presentation] コールドスプレー法によるアナターゼ型酸化チタン成膜 (2010)
  • Author(s): 山田基宏
  • Organizer: 第18回機械材料・材料加工技術講演会
  • Place of Presentation: 東京大学
  • Year and Date: 2010-11-28
• [Presentation] Controlling of nitriding process on reactive plasma spraying of Al particles (2010)
  • Author(s): M.Shahien, M.Yamada, T.Yasui, M.Fukumoto
  • Organizer: 3rd International Congress on Ceramics
  • Place of Presentation: グランキューブ大阪
  • Year and Date: 2010-11-17
• [Presentation] The synthesis of sol-gel titanium dioxide (TiO2) powder for cold spray (2010)
  • Author(s): N.Tjitra Salim
  • Organizer: 3rd International Congress on Ceramics
  • Place of Presentation: グランキューブ大阪
  • Year and Date: 2010-11-17
• [Presentation] コールドスプレー粒子/基材界面の微細組織観察 (2010)
  • Author(s): 山田基宏
  • Organizer: 日本機械学会2010年度年次大会
  • Place of Presentation: 名古屋工業大学
  • Year and Date: 2010-09-06
• [Presentation] Influence of particle shape on low pressure cold spraying (2010)
  • Author(s): Jon Affi
  • Organizer: 日本機械学会2010年度年次大会
  • Place of Presentation: 名古屋工業大学
  • Year and Date: 2010-09-06
• [Presentation] コールドスプレー粒子の密着強度評価 (2010)
  • Author(s): 島幸一郎
  • Organizer: 日本機械学会2010年度年次大会
  • Place of Presentation: 名古屋工業大学
  • Year and Date: 2010-09-06
• [Presentation] アルミナ粉末を用いた大気中反応性プラズマ溶射による窒化アルミニウム皮膜の作製 (2010)
  • Author(s): 山田基宏, M.Shahien, 安井利明, 福本昌宏
  • Organizer: 日本溶射協会第91回全国講演大会
  • Place of Presentation: たかつガーデン,大阪
  • Year and Date: 2010-07-05
• [Presentation] 溶射粒子偏平挙動および皮膜特性に及ぼす雰囲気圧力の影響 (2010)
  • Author(s): 山田基宏
  • Organizer: 日本溶射協会第91回全国講演大会
  • Place of Presentation: たかつガーデン,大阪
  • Year and Date: 2010-07-05
• [Presentation] 溶射およびコールドスプレー銅粒子の付着メカニズム (2010)
  • Author(s): 山田基宏
  • Organizer: 日本溶射協会第91回全国講演大会
  • Place of Presentation: たかつガーデン,大阪
  • Year and Date: 2010-07-05
• [Presentation] Cold spray deposition of TiO2 nanostructured particles (2010)
  • Author(s): M.Yamada
  • Organizer: 12th International Ceramics Congress
  • Place of Presentation: Montecatini Terme, Italy
  • Year and Date: 2010-06-07
• [Presentation] Deposition of TiO2 ceramic particles on cold spray process (2010)
  • Author(s): M.Yamada
  • Organizer: International Thermal Spray Conference 2010
  • Place of Presentation: Raffles City Convention Centre, Singapore
  • Year and Date: 2010-05-03
• [Presentation] Influence of feedstock powder for fabrication of aluminum nitride in reactive atmospheric plasma spray process (2010)
  • Author(s): M.Shahien
  • Organizer: International Thermal Spray Conference 2010
  • Place of Presentation: Raffles City Convention Centre, Singapore
  • Year and Date: 2010-05-03
• [Presentation] Enhancement of Reactive Atmospheric Plasma Sprayed Aluminum Particles (2010)
  • Author(s): M.Shahien
  • Organizer: IC-PLANTS 2010
  • Place of Presentation: 名古屋
  • Year and Date: 2010-03-11
• [Presentation] Reactive atmospheric plasma spraying of aluminum nitride based coating (2009)
  • Author(s): M.Yamada
  • Organizer: PFAM XVIII
  • Place of Presentation: 仙台
  • Year and Date: 2009-12-14
• [Presentation] Study of wetting on flattening behavior of thermal sprayed particles (2009)
  • Author(s): K.Yang
  • Organizer: ATSC 2009
  • Place of Presentation: Xi'an, China
  • Year and Date: 2009-10-23
• [Presentation] Fabrication of aluminum nitride based coating by reactive atmospheric plasma spray (2009)
  • Author(s): M.Shahien
  • Organizer: ATSC 2009
  • Place of Presentation: Xi'an, China
  • Year and Date: 2009-10-23
• [Presentation] Cold spraying of Ti02 photocatalyst coating (2009)
  • Author(s): M.Yamada
  • Organizer: ATSC 2009
  • Place of Presentation: Xi'an, China
  • Year and Date: 2009-10-22
• [Presentation] Fabrication of aluminum nitride coating by atmospheric plasma spray (2009)
  • Author(s): M.Yamada
  • Organizer: ISPC-19
  • Place of Presentation: Bochum, Germany
  • Year and Date: 2009-07-28
• [Presentation] Nitriding of Al powder and fabrication of A1N films by atmospheric plasma spray (2009)
  • Author(s): M.Shahien
  • Organizer: ISSP 2009
  • Place of Presentation: 金沢
  • Year and Date: 2009-07-10
• [Presentation] Influence of process gas conditions upon fabrication of titanium dioxide coating by cold spray (2009)
  • Author(s): M.Yamada
  • Organizer: ASMP 2009
  • Place of Presentation: Penag, Malaysia
  • Year and Date: 2009-06-02
• [Remarks] ホームページ等
  • URL: http://isf.me.tut.ac.jp/