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Fabrication of highly-functional polymer surface using very-low-potential plasma and its evaluation

Research Project

Project/Area Number 21760587
Research Category

Grant-in-Aid for Young Scientists (B)

Allocation TypeSingle-year Grants
Research Field Material processing/treatments
Research InstitutionOsaka University

Principal Investigator

TAKENAKA Kosuke  Osaka University, 接合科学研究所, 助教 (60432423)

Project Period (FY) 2009 – 2010
Project Status Completed (Fiscal Year 2010)
Budget Amount *help
¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000)
Fiscal Year 2010: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Fiscal Year 2009: ¥3,120,000 (Direct Cost: ¥2,400,000、Indirect Cost: ¥720,000)
Keywordsプラズマ処理・レーザー加工 / 機能性表面 / 表面改質・加工 / 有機系材料 / 超低電位プラズマ / 有機/プラズマ反応機構 / 機能性材料 / 表面処理 / 有機 / プラズマ反応機構
Research Abstract

For fabrication of highly-functional polymer surface, modification of plasma surface modification has been performed using inductivity-coupled plasma sources have been developed with multiple low-inductance antenna (LIA) modules, which have allowed low-voltage operation of ICPs. Non-destructive depth analysis of chemical bonding states showed that low-potential ICP of argon/oxygen mixture gas resulted in oxidation of polymer surface only in a few nm regions, without degradation beneath the 10nm depth by oxygen radicals or ions. Surface roughness of the polymer slightly increased with increasing ion dose, while the average peak interval considerably decreased with ion dose. These results indicate the feasibility of control of structure and chemical bonding state of polymer surface via controlling the plasma.

Report

(3 results)
  • 2010 Annual Research Report   Final Research Report ( PDF )
  • 2009 Annual Research Report
  • Research Products

    (18 results)

All 2010 2009 Other

All Journal Article (8 results) (of which Peer Reviewed: 8 results) Presentation (9 results) Remarks (1 results)

  • [Journal Article] Combinatorial Analysis of Plasma-Surface Interactions of Polyethyleneterephthalate with X-ray Photoelectron Spectroscopy2010

    • Author(s)
      K.Takenaka, Y.Setsuhara, K.Cho, M.Shiratani, M.Sekine M.Hori
    • Journal Title

      Japanese Journal of Applied Physics 49

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Advanced Research and Development for Plasma Processing of Polymers with Combinatorial Plasma-Process Analyzer,2010

    • Author(s)
      Y.Setsuhara, K.Cho, K.Takenaka, M.Shiratani, M.Sekine M.Hori
    • Journal Title

      Thin Solid Films 518

      Pages: 6320-6324

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Low-damage surface modification of polymethylmethacrylate with argon.oxygen mixture plasmas driven by multiple low-inductance antenna units,2010

    • Author(s)
      Y.Setsuhara, K.Cho, K.Takenaka, M.Shiratani, M.Sekine, M.Hori, E.Ikenaga, S.Zaima,
    • Journal Title

      Thin Solid Films 518

      Pages: 3561-3565

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Combinatorial Analysis of Plasma-Surface Interactions of Polyethyleneterephthalate with X-ray Photoelectron Spectroscopy2010

    • Author(s)
      Kosuke Takenaka
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: Vol.49

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Advanced Research and Development for Plasma Processing of Polymers with Combinatorial Plasma-Process Analyzer2010

    • Author(s)
      Yuichi Setsuhara, Ken Cho, Kosuke Takenaka
    • Journal Title

      Thin Solid Films

      Volume: Vol.518 Pages: 6320-6324

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Low-damage Surface Modification of Polymethylmethacrylate with Argon-oxygen Mixture Plasmas Driven by Multiple Low-inductance Antenna Units2010

    • Author(s)
      Y.Setsuhara
    • Journal Title

      Thin Solid Films 518

      Pages: 3561-3565

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Plasma Surface Treatment of Polymers with Inductivity Coupled RF Plasmas Driven by Low inductance Antenna Units,2009

    • Author(s)
      Y.Setsuhara, K.Cho, K.Takenaka, A.Ebe, M.Shiratani, M.Sekine, M.Hori, E.Ikeitaga, H.Kondo, O.Nakatsuka, S.Zaima
    • Journal Title

      Thin Solid Films 518

      Pages: 1006-1011

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Plasma Surface Treatment of Polymers with Inductivity Coupled RF Plasmas Driven by Low inductance Antenna Units2009

    • Author(s)
      Y.Setsuhara
    • Journal Title

      Thin Solid Films 518

      Pages: 1006-1011

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Presentation] X線光電子分光によるプラズマーソフト材料相互作用の解析-UV-VUV領域の発光がナノ表面に及ぼす影響-2010

    • Author(s)
      趙研, 節原裕一, 竹中弘祐
    • Organizer
      第71回応用物理学会学術講演会
    • Place of Presentation
      長崎大学文教キャンパス(長崎県)
    • Year and Date
      2010-09-14
    • Related Report
      2010 Annual Research Report
  • [Presentation] 低温・低ダメージプラズマプロセスによる無機/有機ハイブリッド積層構造の形成2010

    • Author(s)
      竹中弘祐
    • Organizer
      応用物理学関係連合講演会
    • Place of Presentation
      東海大学湘南キャンパス
    • Year and Date
      2010-03-19
    • Related Report
      2009 Annual Research Report
  • [Presentation] 低温・低ダメージプラズプロセスの開発に向けたプラズマ・ポリマー相互作用のナノ表面解析2010

    • Author(s)
      趙研
    • Organizer
      応用物理学関係連合講演会
    • Place of Presentation
      東海大学湘南キャンパス
    • Year and Date
      2010-03-19
    • Related Report
      2009 Annual Research Report
  • [Presentation] 低温・低ダメージプラズマプロセスの開発に向けたX線光電子分光を用いたプラズマ-ポリマー相互作用の解析2010

    • Author(s)
      趙研
    • Organizer
      第27回プラズマプロセシング研究会
    • Place of Presentation
      横浜市開港記念会館
    • Year and Date
      2010-02-02
    • Related Report
      2009 Annual Research Report
  • [Presentation] Effects of Photoemissions in UV and VUV Regions on Nano-Surface Structures of Soft Materials during Plasma Processes2010

    • Author(s)
      K.Cho, K.Takenaka, Y.Setsuhara, M.Shiratani, M.Sekine, M.Hori
    • Organizer
      7th International Conference on Reactive Plasmas, 28th Symposium on Plasma Processing and 63rd Gaseous Electronics Conference (ICRP-7/SPP-28/GEC-63)
    • Place of Presentation
      Maison de la Chimie, Paris, France
    • Related Report
      2010 Annual Research Report 2010 Final Research Report
  • [Presentation] X線光電子分光によるプラズマーソフト材料相互作用の解析-UV-VUV領域の発光がナノ表面に及ぼす影響-2010

    • Author(s)
      趙研、節原裕一、竹中弘祐、白谷正治、関根誠、堀勝
    • Organizer
      第71回応用物理学会学術講演会
    • Place of Presentation
      長崎大学文教キャンパス
    • Related Report
      2010 Final Research Report
  • [Presentation] 低温・低ダメージプラズプロセスの開発に向けたプラズマ・ポリマー相互作用のナノ表面解析2010

    • Author(s)
      趙研、竹中弘祐、節原裕一、白谷正治、関根誠、堀勝
    • Organizer
      第57回応用物理学関係連合講演会
    • Place of Presentation
      東海大学湘南キャンパス
    • Related Report
      2010 Final Research Report
  • [Presentation] 低温・低ダメージプラズマプロセスによる無機/有機ハイブリッド積層構造の形成2010

    • Author(s)
      竹中弘祐、趙研、節原裕一、白谷正治、関根誠、堀勝
    • Organizer
      第57回応用物理学関係連合講演会
    • Place of Presentation
      東海大学湘南キャンパス
    • Related Report
      2010 Final Research Report
  • [Presentation] 低温・低ダメージプラズマプロセスの開発に向けたX線光電子分光法を用いたプラズマ-ポリマー相互作用の解析2010

    • Author(s)
      趙研、竹中弘祐、節原裕一、白谷正治、関根誠、堀勝、池永英司、中塚理、財満鎭明
    • Organizer
      第27回プラズマプロセシング研究会
    • Place of Presentation
      横浜市開港記念会館
    • Related Report
      2010 Final Research Report
  • [Remarks] ホームページ等

    • URL

      http://www.jwri.osaka-u.ac.jp/~dpt2/index.html

    • Related Report
      2010 Final Research Report

URL: 

Published: 2009-04-01   Modified: 2016-04-21  

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