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Nanofabrication of Aluminum Surfaces by Nonlithographic Technique and Their Applications

Research Project

Project/Area Number 21760592
Research Category

Grant-in-Aid for Young Scientists (B)

Allocation TypeSingle-year Grants
Research Field Material processing/treatments
Research InstitutionKogakuin University

Principal Investigator

HIDETAKA Asoh  Kogakuin University, 工学部, 准教授 (80338277)

Project Period (FY) 2009 – 2010
Project Status Completed (Fiscal Year 2010)
Budget Amount *help
¥3,640,000 (Direct Cost: ¥2,800,000、Indirect Cost: ¥840,000)
Fiscal Year 2010: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000)
Fiscal Year 2009: ¥2,730,000 (Direct Cost: ¥2,100,000、Indirect Cost: ¥630,000)
Keywords微細加工 / アノード酸化 / 材料加工・処理 / アルミニウム / 自己組織化 / ナノ材料
Research Abstract

The nano-/microfabrication of solid substrates (e.g. aluminum) using self-assembled colloidal spheres as a mask for anodizing, which is often referred to as colloidal crystal templating, was studied. The preparation of ordered honeycomb oxide patterns based on this nonlithographic approach was applicable to different types of substrate such as silicon.

Report

(3 results)
  • 2010 Annual Research Report   Final Research Report ( PDF )
  • 2009 Annual Research Report
  • Research Products

    (70 results)

All 2011 2010 2009 Other

All Journal Article (15 results) (of which Peer Reviewed: 15 results) Presentation (50 results) Book (3 results) Remarks (2 results)

  • [Journal Article] High-aspect-ratio GaAs pores and pillars with triangular cross section2011

    • Author(s)
      H.Asoh, S.Kotaka, S.Ono
    • Journal Title

      Electrochemistry Communications 13

      Pages: 458-461

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] 自己組織化材料を利用したナノ・マイクロファブリケーション~ナチュラルリソグラフィー~(解説)2011

    • Author(s)
      阿相英孝, 小野幸子
    • Journal Title

      表面技術 62

      Pages: 92-97

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] High-aspect-ratio GaAs pores and pillars with triangular cross section2011

    • Author(s)
      H.Asoh, S.Kotaka, S.Ono
    • Journal Title

      Electrochemistry Communications

      Volume: 13 Pages: 458-461

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 自己組織化材料を利用したナノ・マイクロファブリケーション~ナチュラルリソグラフィー~2011

    • Author(s)
      阿相英孝, 小野幸子
    • Journal Title

      表面技術

      Volume: 62(解説) Pages: 92-97

    • NAID

      10027915046

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Site-Selective Anodic Etching of InP Substrate Using Self-Organized Spheres as Mask2010

    • Author(s)
      T.Yokoyama, H.Asoh, S.Ono
    • Journal Title

      Phys.Status Solidi A 207

      Pages: 943-946

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Periodic GaAs Convex and Hole Arrays Produced by Metal-Assisted Chemical Etching2010

    • Author(s)
      Y.Yasukawa, H.Asoh, S.Ono
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 49

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Site-Seledtive Anodic Etching of InP Substrate Using Self-Organized Spheres as Mask2010

    • Author(s)
      T.Yokoyama, H.Asoh, S.Ono
    • Journal Title

      Physica status solidi A 207

      Pages: 943-946

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Ordered Nanopore Boring in Silicon : Metal Assisted Etching Using a Self-Aligned Block Copolymer Au Nanoparticle Template and Gravity Accelerated Etching2010

    • Author(s)
      S.Bauer, J.Brunner, H.Jha, Y.Yasukawa, H.Asoh, S,Ono, H.Bohm, J.P.Spatz, P.Schmuki
    • Journal Title

      Electrochemistry Communications 12(4)

      Pages: 565-569

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Effect of Noble Metal Catalyst Species on the Morphology of Macroporous Silicon Formed by Metal-Assisted Chemical Etching2009

    • Author(s)
      H.Asoh, F.Arai, S.Ono
    • Journal Title

      Electrochimica Acta 54

      Pages: 5142-5148

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Structural Features of Anodic Oxide Films Formed on Aluminum Substrate Coated with Self-Assembled Microspheres2009

    • Author(s)
      H.Asoh, K.Uchibori, S.Ono
    • Journal Title

      Corrosion Science 51

      Pages: 1496-1500

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Control of Nano/Microstructure and Pit Initiation Sites on Aluminium Surface by Use of Self-Assembled Spheres2009

    • Author(s)
      S.Ono, K.Uchibori, H.Asoh
    • Journal Title

      Surface and Interface Analysis 42(4)

      Pages: 264-268

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Effect of Noble Metal Catalyst Species on the Morphology of Macroporous Silicon Formed by Metal-Assisted Chemical Etching2009

    • Author(s)
      H.Asoh, F.Arai, S.Ono
    • Journal Title

      Electrochimica Acta 54(22)

      Pages: 5142-5148

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Site-Selective Metal Patterning/Metal-Assisted Chemical Etching on GaAs Substrate through Colloidal Crystal Templating2009

    • Author(s)
      Y.Yasukawa, H.Asoh, S.Ono
    • Journal Title

      J.Electrochemical Society 156(10)

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Structural Features of Anodic Oxide Films Formed on Aluminum Substrate Coated with Self-Assembled Microspheres2009

    • Author(s)
      H.Asoh, K.Uchibori, S.Ono
    • Journal Title

      Corrosion Science 51(7)

      Pages: 1496-1500

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Micro-Patterning of Semiconductors by Metal-Assisted Chemical Etching through Self-Assembled Colloidal Spheres2009

    • Author(s)
      S.Ono, F.Arai, H.Asoh
    • Journal Title

      ECS Transactions 19(3)

      Pages: 393-402

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Presentation] アノードエッチングによるGaAsナノワイヤーの作製2011

    • Author(s)
      小鷹俊介, 阿相英孝, 小野幸子
    • Organizer
      電気化学会第78回大会
    • Place of Presentation
      横浜国立大学,神奈川
    • Related Report
      2010 Annual Research Report
  • [Presentation] α-アルミナメンブレン作製のためのアノード酸化皮膜のスルーホール処理2011

    • Author(s)
      増田達也, 阿相英孝, 小野幸子
    • Organizer
      電気化学会第78回大会
    • Place of Presentation
      横浜国立大学,神奈川
    • Related Report
      2010 Annual Research Report
  • [Presentation] 高アスペクト比ポーラスInPの孔の直進性に及ぼす電解条件の影響2011

    • Author(s)
      岩田惇, 阿相英孝, 小野幸子
    • Organizer
      表面技術協会第123回講演大会
    • Place of Presentation
      関東学院大学,神奈川
    • Related Report
      2010 Annual Research Report
  • [Presentation] ナノ・マイクロ複合周期を持つアノード酸化ポーラスアルミナの作製2010

    • Author(s)
      阿相英孝, 小野幸子
    • Organizer
      表面技術協会第122回講演大会 講演要旨集p.99
    • Place of Presentation
      東北大学,宮城
    • Year and Date
      2010-09-06
    • Related Report
      2010 Final Research Report
  • [Presentation] 結晶性アノード酸化ポーラスアルミナメンブレンの作製2010

    • Author(s)
      増田達也, 阿相英孝, 小野幸子
    • Organizer
      軽金属学会関東支部第2回若手研究者ポスター発表会
    • Place of Presentation
      工学院大学,東京
    • Year and Date
      2010-08-09
    • Related Report
      2010 Annual Research Report
  • [Presentation] 構造制御したアノード酸化アルミナメンブレンの作製2010

    • Author(s)
      阿相英孝, 小野幸子
    • Organizer
      表面技術協会・ライトメタル表面技術部会第30回表面技術協会ライトメタル・サマーセミナー(依頼講演)講演予稿集p.25-28
    • Place of Presentation
      工学院大学,東京
    • Year and Date
      2010-07-27
    • Related Report
      2010 Final Research Report
  • [Presentation] 構造制御したアノード酸化アルミナメンブレンの作製2010

    • Author(s)
      阿相英孝, 小野幸子
    • Organizer
      表面技術協会・ライトメタル表面技術部会第30回表面技術協会ライトメタル・サマーセミナー
    • Place of Presentation
      工学院大学,東京(依頼講演)
    • Year and Date
      2010-07-27
    • Related Report
      2010 Annual Research Report
  • [Presentation] アノード酸化ポーラスアルミナをテンプレートとしたSiの金属触媒エッチング2010

    • Author(s)
      藤原洸輔, 阿相英孝, 小野幸子
    • Organizer
      金属のアノード酸化皮膜の機能化部会第27回鎌倉コンファレンス
    • Place of Presentation
      KKR江ノ島ニュー向洋,神奈川
    • Related Report
      2010 Annual Research Report
  • [Presentation] ナノポーラス構造を持つα-アルミナメンブレンの作製2010

    • Author(s)
      阿相英孝, 増田達也, 小野幸子
    • Organizer
      金属のアノード酸化皮膜の機能化部会第27回鎌倉コンファレンス
    • Place of Presentation
      KKR江ノ島ニュー向洋,神奈川
    • Related Report
      2010 Annual Research Report
  • [Presentation] アノード酸化で作製したナノポーラス構造を持つα-アルミナメンブレン2010

    • Author(s)
      増田達也, 阿相英孝, 小野幸子
    • Organizer
      軽金属学会第119回秋期大会
    • Place of Presentation
      長岡技術科学大学,新潟
    • Related Report
      2010 Annual Research Report
  • [Presentation] Fabrication of Si Nanohole Arrays by Metal-Assisted Chemical Etching through Anodic Porous Alumina2010

    • Author(s)
      K.Fujihara, H.Asoh, S.Ono
    • Organizer
      9th International Symposium on Advanced Technology (ISAT-9th)
    • Place of Presentation
      Tokyo, Japan
    • Related Report
      2010 Annual Research Report
  • [Presentation] Preparation of Crystalline Anodic Porous Alumina Membrane with Controlled Pore Diameter2010

    • Author(s)
      T.Masuda, H.Asoh, S.Ono
    • Organizer
      9th International Symposium on Advanced Technology (ISAT-9th)
    • Place of Presentation
      Tokyo, Japan
    • Related Report
      2010 Annual Research Report
  • [Presentation] Fabrication of Thick Crystalline Anodic Porous Alumina Membrane with Acid Resistance2010

    • Author(s)
      H.Asoh, S.Ono
    • Organizer
      61th Annual Meeting of the International Society of Electrochemistry
    • Place of Presentation
      Nice, France
    • Related Report
      2010 Annual Research Report
  • [Presentation] ナノ・マイクロ複合周期を持つアノード酸化ポーラスアルミナの作製2010

    • Author(s)
      阿相英孝, 小野幸子
    • Organizer
      表面技術協会第122回講演大会
    • Place of Presentation
      東北大学,宮城
    • Related Report
      2010 Annual Research Report
  • [Presentation] アノード酸化ポーラスアルミナをテンプレートとした金属触媒エッチングによるSiナノホールアレイの作製2010

    • Author(s)
      藤原洸輔, 阿相英孝, 小野幸子
    • Organizer
      表面技術協会第122回講演大会
    • Place of Presentation
      東北大学,宮城
    • Related Report
      2010 Annual Research Report
  • [Presentation] 微粒子フォトリソグラフィーマスクを用いたアノードエッチングによるInPのマイクロパターニング2010

    • Author(s)
      岩田惇, 阿相英孝, 小野幸子
    • Organizer
      電気化学秋季大会
    • Place of Presentation
      神奈川工科大学,神奈川
    • Related Report
      2010 Annual Research Report
  • [Presentation] 2次アノード酸化によるポーラスGaAsの構造制御2010

    • Author(s)
      小鷹俊介, 阿相英孝, 小野幸子
    • Organizer
      電気化学秋季大会
    • Place of Presentation
      神奈川工科大学,神奈川
    • Related Report
      2010 Annual Research Report
  • [Presentation] Preparation of Thick Anodic Porous Alumina Membrane with Controlled Pore Diameter2010

    • Author(s)
      T.Masuda, H.Asoh, S.Ono
    • Organizer
      The 2nd Japan-Korea Joint Symposium for ARS Capacitor
    • Place of Presentation
      Gyeongju, Korea
    • Related Report
      2010 Annual Research Report
  • [Presentation] 加熱変形を抑制したアノード酸化ポーラスアルミナメンブレンの作製2010

    • Author(s)
      増田達也, 中村昌弘, 阿相英孝, 小野幸子
    • Organizer
      軽金属学会第118回春期大会
    • Place of Presentation
      関西大学,大阪
    • Related Report
      2010 Annual Research Report
  • [Presentation] 微粒子フォトリソグラフィーマスクを介したInPのアノードエッチング2010

    • Author(s)
      岩田惇, 横山誉幸, 阿相英孝, 小野幸子
    • Organizer
      電気化学会第77回大会
    • Place of Presentation
      富山大学,富山
    • Related Report
      2009 Annual Research Report
  • [Presentation] アノードエッチングによる高アスペクト比ポーラスGaAsの作製2010

    • Author(s)
      小鷹俊介, 三上幸彦, 阿相英孝, 小野幸子
    • Organizer
      電気化学会第77回大会
    • Place of Presentation
      富山大学,富山
    • Related Report
      2009 Annual Research Report
  • [Presentation] 金属触媒エッチングと異方性エッチングを併用したシリコンマイクロマシニング2010

    • Author(s)
      藤原洸輔, 阿相英孝, 小野幸子
    • Organizer
      電気化学会第77回大会
    • Place of Presentation
      富山大学,富山
    • Related Report
      2009 Annual Research Report
  • [Presentation] 耐酸性を付与したアノード酸化ポーラスアルミナメンブレンの作製2010

    • Author(s)
      阿相英孝, 中村昌弘, 小野幸子
    • Organizer
      電気化学会第77回大会
    • Place of Presentation
      富山大学,富山
    • Related Report
      2009 Annual Research Report
  • [Presentation] 金属触媒フォトエッチングによるInPのマイクロパターニング2010

    • Author(s)
      阿相英孝, 横山誉幸, 小野幸子
    • Organizer
      表面技術協会第121回講演大会
    • Place of Presentation
      成蹊大学,東京
    • Related Report
      2009 Annual Research Report
  • [Presentation] Morphology of Anodic Alumina Films Formed on Aluminum Substrate Coated with Self-Assembled Polystyrene Spheres2009

    • Author(s)
      H.Asoh, S.Ono
    • Organizer
      The 1st Joint Symposium between Kogakuin University and Institute of Chemistry, Chinese Academy of Science (KU-ICCAS ; JS1-2009) Abstracts p.33
    • Place of Presentation
      Tokyo, Japan
    • Year and Date
      2009-12-10
    • Related Report
      2010 Final Research Report
  • [Presentation] 自己組織化微粒子を用いたAlのピット開始点制御およびAlエッチピット中でのアノード酸化皮膜成長挙動(依頼講演)2009

    • Author(s)
      小野幸子, 阿相英孝
    • Organizer
      金属のアノード酸化皮膜の機能化部会第74回例会
    • Place of Presentation
      工学院大学,東京
    • Year and Date
      2009-12-10
    • Related Report
      2009 Annual Research Report
  • [Presentation] アノード酸化アルミナメンブレンの構造制御と熱安定性2009

    • Author(s)
      中村昌弘, 阿相英孝, 小野幸子
    • Organizer
      軽金属学会関東支部第1回若手研究者ポスター講演会
    • Place of Presentation
      芝浦工業大学,東京
    • Year and Date
      2009-11-28
    • Related Report
      2009 Annual Research Report
  • [Presentation] 局所アノード酸化による規則パターンの形成とマイクロ・ナノ加工技術への応用2009

    • Author(s)
      阿相英孝, 小野幸子
    • Organizer
      金属のアノード酸化皮膜の機能化部会第73回例会(依頼講演) 講演予稿集p.10-22
    • Place of Presentation
      工学院大学,東京
    • Year and Date
      2009-10-01
    • Related Report
      2010 Final Research Report
  • [Presentation] 局所アノード酸化による規則パターンの形成とマイクロ・ナノ加工技術への応用(依頼講演)2009

    • Author(s)
      阿相英孝, 小野幸子
    • Organizer
      金属のアノード酸化皮膜の機能化部会第73回例会
    • Place of Presentation
      工学院大学,東京
    • Year and Date
      2009-10-01
    • Related Report
      2009 Annual Research Report
  • [Presentation] Micro-Patterning of Semiconductors by Metal-Assisted Chemical Etching through Self-Assembled Colloidal Spheres (Invited lecture)2009

    • Author(s)
      S.Ono, H.Asoh
    • Organizer
      215th Meeting of the Electrochemical Society Abstracts No.917
    • Place of Presentation
      San Francisco, USA(CD-ROM)
    • Year and Date
      2009-05-28
    • Related Report
      2010 Final Research Report
  • [Presentation] アノード酸化により形成したハニカム状酸化物マスクを介したアルミニウムの電解エッチング2009

    • Author(s)
      阿相英孝, 山口まみ, 小野幸子
    • Organizer
      軽金属学会第116回春期大会 講演概要p.89-90
    • Place of Presentation
      グランドホテル,登別
    • Year and Date
      2009-05-22
    • Related Report
      2010 Final Research Report
  • [Presentation] アノード酸化ポーラスアルミナメンブレンの熱処理における形態変化の抑制2009

    • Author(s)
      中村昌弘, 阿相英孝, 小野幸子
    • Organizer
      表面技術協会第120回講演大会
    • Place of Presentation
      幕張メッセ,千葉
    • Related Report
      2009 Annual Research Report
  • [Presentation] UV照射下におけるInP基板の金属触媒エッチング2009

    • Author(s)
      横山誉幸, 阿相英孝, 小野幸子
    • Organizer
      電気化学秋季大会
    • Place of Presentation
      東京農工大学,東京
    • Related Report
      2009 Annual Research Report
  • [Presentation] 湿式エッチングによるGaAs上への規則配列微細孔の作製2009

    • Author(s)
      安川雪子, 阿相英孝, 小野幸子
    • Organizer
      電気化学秋季大会
    • Place of Presentation
      東京農工大学,東京
    • Related Report
      2009 Annual Research Report
  • [Presentation] 金属触媒エッチングを用いたSi(111)基板のマイクロパターニング2009

    • Author(s)
      藤原洸輔, 阿相英孝, 小野幸子
    • Organizer
      電気化学秋季大会
    • Place of Presentation
      東京農工大学,東京
    • Related Report
      2009 Annual Research Report
  • [Presentation] アノード酸化によるポーラスアルミナメンブレンの形態制御2009

    • Author(s)
      中村昌弘, 阿相英孝, 小野幸子
    • Organizer
      軽金属学会第116回春期大会
    • Place of Presentation
      登別グランドホテル
    • Related Report
      2009 Annual Research Report
  • [Presentation] アノード酸化により形成したハニカム状酸化物マスクを介したアルミニウムの電解エッチング2009

    • Author(s)
      阿相英孝, 山口まみ, 小野幸子
    • Organizer
      軽金属学会第116回春期大会
    • Place of Presentation
      登別グランドホテル
    • Related Report
      2009 Annual Research Report
  • [Presentation] Metal-Assisted Chemical Etching of InP Substrate under UV hradiation2009

    • Author(s)
      T.Yokoyama, H.Asoh, S.Ono
    • Organizer
      Tbe 1st Joint Symposium between Kogakuin University and Institute of Chemistry, Chinese Academy of Science (KU-ICCAS ; JS1-2009)
    • Place of Presentation
      Tokyo, Japan
    • Related Report
      2009 Annual Research Report
  • [Presentation] Fabrication of Microstructured GaAs Surfaces by Metal-Assisted Chemical Etching2009

    • Author(s)
      Y.Yasukawa, H.Asoh, S.Ono
    • Organizer
      The 1st Joint Symposium between Kogakuin University and Institute of Chemistry, Chinese Academy of Science(KU-ICCAS ; JS1-2009)
    • Place of Presentation
      Tokyo, Japan
    • Related Report
      2009 Annual Research Report
  • [Presentation] Thermal Stability of Thick Anodic Porous Alumina Membranes2009

    • Author(s)
      M.Nakamura, H.Asoh, S.Ono
    • Organizer
      The 1st Joint Symposium between Kogakuin University and Institute of Chemistry, Chinese Academy of Science(KU-ICCAS ; JS1-2009)
    • Place of Presentation
      Tokyo, Japan
    • Related Report
      2009 Annual Research Report
  • [Presentation] Morphology of Anodic Alumina Films Formed on Aluminum Substrate Coated with Self-Assembled Polystyrene Spheres2009

    • Author(s)
      H.Asoh, S.Ono
    • Organizer
      The 1st Joint Symposium between Kogakuin University and Institute of Chemistry, Chinese Academy of Science(KU-ICCAS ; JS1-2009)
    • Place of Presentation
      Tokyo, Japan
    • Related Report
      2009 Annual Research Report
  • [Presentation] Nano/Micro-Patterning of Semiconductors through Colloidal Crystal Templating(Invited lecture)2009

    • Author(s)
      S.Ono, H.Asoh
    • Organizer
      The 1st Joint Symposium between Kogakuin University and Institute of Chemistry, Chinese Academy of Science(KU-ICCAS ; JS1-2009)
    • Place of Presentation
      TOkyo, Japan
    • Related Report
      2009 Annual Research Report
  • [Presentation] Nano/Micro-Patterning of Silicon by Site-Selective Chemical Etching through Colloidal Crystal Templating(Invited lecture)2009

    • Author(s)
      S.Ono, H.Asoh
    • Organizer
      8th International Symposium on Advanced Technology(ISAT-8th)
    • Place of Presentation
      Tainan, Taiwan
    • Related Report
      2009 Annual Research Report
  • [Presentation] Effect of UV Irradiation on Chemical Etching of InP Substrate Using Noble Metal Catalyst2009

    • Author(s)
      T.Yokoyama, H.Asoh, S.Ono
    • Organizer
      216th Meeting of the Electrochemical Society
    • Place of Presentation
      Vienna, Austria
    • Related Report
      2009 Annual Research Report
  • [Presentation] Control of Structure and Stability of Porous Alumina Membrane Formed by Anodization2009

    • Author(s)
      M.Nakamura, H.Asoh, S.Ono
    • Organizer
      60th Annual Meeting of the International Society of Electrochemistry
    • Place of Presentation
      Beijing, China
    • Related Report
      2009 Annual Research Report
  • [Presentation] Silicon Nano Hole Arrays Prepared by Metal-Assisted Chemical Etching Using Hexagonally Arranged Au Nanoparticles2009

    • Author(s)
      T.Kameyama, H.Asoh, S.Ono
    • Organizer
      60th Annual Meeting of the International Society of Electrochemistry
    • Place of Presentation
      Beijing, China
    • Related Report
      2009 Annual Research Report
  • [Presentation] Structuring of GaAs Hole Arrays through Metal-Assisted Chemical Etching2009

    • Author(s)
      Y.Yasukawa, H.Asoh, S.Ono
    • Organizer
      60th Annual Meeting of the International Society of Electrochemistry
    • Place of Presentation
      Beijing, China
    • Related Report
      2009 Annual Research Report
  • [Presentation] Ordered Hole Arrays on GaAs Fabricated by Metal-Assisted Chemical Etching2009

    • Author(s)
      Y.Yasukawa, H.Asoh, S.Ono
    • Organizer
      215th Meeting of the Electrochemical Society
    • Place of Presentation
      San Francisco, USA
    • Related Report
      2009 Annual Research Report
  • [Presentation] Micro-Patterbing of Semiconductors by Metal-Assisted Chemical Etching through Self-Assembled Colloidal Spheres(Invited lecture)2009

    • Author(s)
      S.Ono, H.Asoh
    • Organizer
      215th Meeting of the Electrochemical Society
    • Place of Presentation
      San Francisco, USA
    • Related Report
      2009 Annual Research Report
  • [Presentation] Micro/Nanostructure Control of Aluminum Surface by Use of Self-Assembled Spheres2009

    • Author(s)
      S.Ono, K.Uchibori, M.Nakamura, H.Asoh
    • Organizer
      5th International Symposium on Aluminium Surface Science and Technology(ASST 2009)
    • Place of Presentation
      Leiden, Netherland
    • Related Report
      2009 Annual Research Report
  • [Book] Handbook of Nanophysics : Functional Nanomaterials (Taylor & Francis Books, Inc. Chapter 28 p28-1-28-14)(分担執筆(K.Sattler編))2010

    • Author(s)
      H.Asoh, S.Ono
    • Total Pages
      787
    • Publisher
      Nanohole arrays on silicon
    • Related Report
      2010 Final Research Report
  • [Book] Handbook of Nanophysics : Functional Nanomaterials分担執筆(K.Sattler編)Chapter 28 p28-1-28-142010

    • Author(s)
      H.Asoh, S.Ono
    • Total Pages
      787
    • Publisher
      Taylor & Francis Books, Inc.
    • Related Report
      2010 Annual Research Report
  • [Book] Handbook of nanophysics分担執筆(K.Sattler編):Chapter 28 "Nanohole arrays on silicon"2010

    • Author(s)
      H.Asoh, S.Ono
    • Publisher
      Taylor & Francis Books,(印刷中)
    • Related Report
      2009 Annual Research Report
  • [Remarks]

    • URL

      http://www.ns.kogakuin.ac.jp/~wwb1027/

    • Related Report
      2010 Annual Research Report
  • [Remarks]

    • URL

      http://www.ns.kogakuin.ac.jp/~wwb1027/

    • Related Report
      2009 Annual Research Report

URL: 

Published: 2009-04-01   Modified: 2016-04-21  

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