Constructing of film-deposition system equipped precursor recycling system
| Project/Area Number |
21760593
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| Research Category |
Grant-in-Aid for Young Scientists (B)
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| Allocation Type | Single-year Grants |
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| Research Field |
Material processing/treatments
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| Research Institution | Sophia University |
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Principal Investigator |
UCHIDA Hiroshi Sophia University, 理工学部, 准教授 (60327880)
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| Project Period (FY) |
2009 – 2010
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| Project Status |
Completed (Fiscal Year 2010)
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| Budget Amount *help |
¥3,640,000 (Direct Cost: ¥2,800,000、Indirect Cost: ¥840,000)
Fiscal Year 2010: ¥780,000 (Direct Cost: ¥600,000、Indirect Cost: ¥180,000)
Fiscal Year 2009: ¥2,860,000 (Direct Cost: ¥2,200,000、Indirect Cost: ¥660,000)
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| Keywords | 薄膜プロセス / 超臨界流体 / 有機金属化合物 / 酸化物 / 金属酸化物 |
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| Research Abstract |
The purpose of this research is to develop novel thin-film deposition system equipped recycling system for metal-organic precursors, which is designed totally based on supercritical fluid technology. The present research project was accomplished through (i) the trial production of recycling system for metal-organic compounds by extraction and separation process using supercritical carbon dioxide (CO_2), (ii) simulated experiment for collecting metal-organic compounds under pseudo-condition in film-deposition equipment, and (iii) conclusive discussion for simultaneous collection of unreacted precursors and byproduct compounds during film-deposition process under supercritical CO_2. We obtained some valuable data and knowledge for dissolution and decomposition behavior of Ti β-diketonates, typical precursors for titanium dioxide (TiO_2) films, under supercritical CO_2 condition, and then clarified the reaction mechanism from metal-organic precursors to solid TiO_2 deposition.
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Report
(3 results)
Research Products
(10 results)
