Study on Negative Aberration Control in Acceleration Lens System

• Project/Area Number: 21760709
• Research Category: Grant-in-Aid for Young Scientists (B)
• Allocation Type: Single-year Grants
• Research Field: Nuclear engineering
• Research Institution: Japan Atomic Energy Agency
• Principal Investigator: OHKUBO Takeru 独立行政法人日本原子力研究開発機構, 放射線高度利用施設部, 研究員 (40446456)
• Project Period (FY): 2009 – 2011
• Project Status: Completed (Fiscal Year 2011)
• Budget Amount: ¥3,120,000 (Direct Cost: ¥2,400,000、Indirect Cost: ¥720,000); Fiscal Year 2011: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000); Fiscal Year 2010: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000); Fiscal Year 2009: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000)
• Keywords: 放射線工学 / ビーム科学 / 加速器 / 量子ビーム / イオンビーム / ナノビーム / 加速レンズ

Research Abstract

The aberration control technology which is effective in reduction of a beam diameter was developed by adding a deceleration lens to an acceleration lens system. The compact lens system to form gaseous ion nanobeam will be a great tool for applications in nanofabrication.

Research Products

• [Journal Article] Theoretical Approach Of The Reduction Of Chromatic And Spherical Aberrations In An Acceleration Lens System For Hundreds Of keV Gaseous Ion Nanobeam (2011)
  • Author(s): T. Ohkubo, Y. Ishii and T. Kamiya
  • Journal Title: AIP Conference Proceedings Volume: vol.1336 Pages: 176-180
  • DOI: 10.1063/1.3586083
  • Peer Reviewed
• [Presentation] ガスイオンナノビーム形成のための300kV小型装置の構築 (2011)
  • Author(s): 大久保猛
  • Organizer: 日本原子力学会2011年秋の大会
  • Place of Presentation: 福岡県北九州市
  • Year and Date: 2011-09-21
• [Presentation] Theoretical Approach of the Reduction of Chromatic and Spherical Aberrations in an Acceleration Lens System for Gas-FIB to Form Gaseous Nanobeam (2010)
  • Author(s): Takeru Ohkubo
  • Organizer: 21st International Conference on the Application of Accelerators in Research and Industry(CAARI2010)
  • Place of Presentation: Fort Worth, Texas, USA
  • Year and Date: 2010-08-10
• [Presentation] Theoretical Approach of the Reduction of Chromatic and Spherical Aberrations in an Acceleration Lens System for Gas-FIB to Form Gaseous Nanobeam (2010)
  • Author(s): Takeru Ohkubo
  • Organizer: 21st International Conference on the Application of Accelerators in Research and Industry (CAARI2010)
  • Place of Presentation: Fort Worth, Texas, USA
  • Year and Date: 2010-08-10
• [Presentation] 300kV小型ガスイオンナノビーム形成装置のレンズ系開発 (2010)
  • Author(s): 大久保猛
  • Organizer: 日本物理学会第65回年次大会
  • Place of Presentation: 岡山大学
  • Year and Date: 2010-03-21
• [Presentation] 300kV小型ガスイオンナノビーム形成装置のレンズ系開発 (2010)
  • Author(s): 大久保猛
  • Organizer: 日本物理学会 第65回年次大会
  • Place of Presentation: 岡山大学
  • Year and Date: 2010-03-21
• [Presentation] ガスイオンナノビーム形成装置小型化のための加速管一体型レンズ系開発 (2009)
  • Author(s): 大久保猛
  • Organizer: 日本原子力学会2009年秋の大会
  • Place of Presentation: 東北大学
  • Year and Date: 2009-09-17
• [Presentation] ガスイオンナノビーム形成装置小型化のための加速管一体型レンズ系開発 (2009)
  • Author(s): 大久保猛
  • Organizer: 日本原子力学会 2009年秋の大会
  • Place of Presentation: 東北大学
  • Year and Date: 2009-09-17