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Development of MEMS Tunable Color Filter Based on Sub-wavelength Grating

Research Project

Project/Area Number 21810013
Research Category

Grant-in-Aid for Research Activity Start-up

Allocation TypeSingle-year Grants
Research Field Microdevices/Nanodevices
Research InstitutionToyohashi University of Technology

Principal Investigator

TAKAHASHI Kazuhiro  Toyohashi University of Technology, 大学院・工学研究科, 助教 (90549346)

Project Period (FY) 2009 – 2010
Project Status Completed (Fiscal Year 2010)
Budget Amount *help
¥2,678,000 (Direct Cost: ¥2,060,000、Indirect Cost: ¥618,000)
Fiscal Year 2010: ¥1,274,000 (Direct Cost: ¥980,000、Indirect Cost: ¥294,000)
Fiscal Year 2009: ¥1,404,000 (Direct Cost: ¥1,080,000、Indirect Cost: ¥324,000)
KeywordsNEMS / MEMS / サブ波長格子 / ナノフォトニクス / CMOS集積回路 / 静電アクチュエータ / 構造色 / NEMS/MEMS / LSI-MEMS集積化 / 導波モード共鳴
Research Abstract

We propose a MEMS (Micro Electro Mechanical Systems) tunable color filter using sub-wavelength grating, which can modulate the reflected light by changing the period of the sub-wavelength grating pixel by means of electrostatic actuation. We report the mechanical design of the MEMS actuator, optical design of the sub-wavelength grating, and device fabrication technique using a semiconductor technology. The MEMS electrostatic actuator could be designed a high mechanical resonance frequency with a relatively low drive voltage. The structural color was found from the fabricated sub-wavelength grating integrated with the MEMS actuator on a silicon wafer. The color tuning from yellow to green was demonstrated by voltage operation. We also developed a monolithic integration technique of the MEMS tunable color filter and LSI circuits. The fabricated driver circuits were successfully operated.

Report

(3 results)
  • 2010 Annual Research Report   Final Research Report ( PDF )
  • 2009 Annual Research Report
  • Research Products

    (14 results)

All 2011 2010 2009 Other

All Journal Article (2 results) (of which Peer Reviewed: 1 results) Presentation (8 results) Remarks (3 results) Patent(Industrial Property Rights) (1 results)

  • [Journal Article] Multi-Physics Analysis for Micro Electromechanical Systems Based on Electrical Circuit Simulator2011

    • Author(s)
      M.Mita, S.Maruyama, Y.Yi, K.Takahashi, H.Fujita, H.Toshiyoshi
    • Journal Title

      IEEJ Trans.on Electrical and Electronic Engineering vol.6, no.3

      Pages: 180-189

    • Related Report
      2010 Final Research Report
  • [Journal Article] Multi-Physics Analysis for Micro Electromechanical Systems Based on Electrical Circuit Simulator2011

    • Author(s)
      M.Mita, S.Maruyama, Y.Yi, K.Takahashi, H.Fujita, H.Toshiyoshi
    • Journal Title

      IEEJ Trans.on Electrical and Electronic Engineering

      Volume: 6 Pages: 180-189

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Presentation] Monolithic Integration of NEMS Tunable Color Filter and LSI Driver Circuits2011

    • Author(s)
      H.Honma, H.Miyao, K.Takahashi, M.Futagawa, F.Dasai, M.Ishida, K.Sawada
    • Organizer
      Proc.16th Int.Conf. on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS'11)
    • Place of Presentation
      Beijing, China, to be oral presented.
    • Related Report
      2010 Final Research Report
  • [Presentation] A Tunable Color Filter Using Sub-micron Grating Integrated with Electrostatic Actuator Mechanism2011

    • Author(s)
      H.Miyao, K.Takahashi, M.Ishida, K.Sawada
    • Organizer
      219th ECS Meeting
    • Place of Presentation
      Montreal, Canada, to be oral presented.
    • Related Report
      2010 Final Research Report
  • [Presentation] Parylene Covered Selective Area HF Vapor Release For Silicon Photonic Wire Waveguides2010

    • Author(s)
      A.Higo, K.Takahashi, M.Nakada, H.Fujita, H.Toshiyoshi, Y.Nakano
    • Organizer
      Proc.5th Asia-Pacific Conference on Transducers and Micro-Nano Technology p.168.
    • Place of Presentation
      Perth, Australia
    • Related Report
      2010 Final Research Report
  • [Presentation] A wafer-level system integration technology for flexible pseudo-SOC incorporates MEMS-CMOS heterogeneous devices2010

    • Author(s)
      H.Yamada, Y.Onozuka, A.Iida, K.Itaya, H.Funaki, K.Takahashi, H.Toshiyoshi
    • Organizer
      IEEE Components, Packaging, and Manufacturing Technology Symposium Japan
    • Place of Presentation
      Tokyo, Japan
    • Related Report
      2010 Annual Research Report
  • [Presentation] A CMOS Compatible Low Temperature Process for Photonic Crystal MEMS Scanner2009

    • Author(s)
      K.Takahashi, I.W.Jung, A.Higo, Y.Mita, H.Fujita, H.Toshiyoshi, O.Solgaard
    • Organizer
      Proc.IEEE/LEOS Int.Conf.on Optical MEMS and Nanophotonics 2009 pp.77-78.
    • Place of Presentation
      Clearwater Beach, Florida, USA
    • Related Report
      2010 Final Research Report
  • [Presentation] A Novel Parylene/Al/Parylene Sandwitch Protection Mask for HF Vapor Release for Micro Electro Mechanical Systems2009

    • Author(s)
      A.Higo, K.Takahashi, H.Fujita, Y.Nakano, H.Toshiyoshi
    • Organizer
      Proc.15th Int.Conf.on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS'09) pp.196-199.
    • Place of Presentation
      Denver, Colorado, USA
    • Related Report
      2010 Final Research Report
  • [Presentation] A MEMS Digital Mirror Array Integrated with High-Voltage Level-Shifter2009

    • Author(s)
      S.Maruyama, K.Takahashi, H.Fujita, H.Toshiyoshi
    • Organizer
      Proc.15th Int.Conf.on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS'09) pp.2314-2317.
    • Place of Presentation
      Denver, Colorado, USA
    • Related Report
      2010 Final Research Report
  • [Presentation] A wafer-level system integration technology for flexible pseudo-SOC incorporates MEMS-CMOS heterogeneous devices

    • Author(s)
      H.Yamada, Y.Onozuka, A.Iida, K.Itaya, H.Funaki, K.Takahashi, H.Toshiyoshi
    • Organizer
      Proc.IEEE Components, Packaging, and Manufacturing Technology Symposium Japan 1-3.
    • Place of Presentation
      Tokyo, Japan
    • Related Report
      2010 Final Research Report
  • [Remarks] ホームページ等

    • URL

      http://www.int.ee.tut.ac.jp/icg/

    • Related Report
      2010 Final Research Report
  • [Remarks]

    • URL

      http://www.int.ee.tut.ac.jp/icg/

    • Related Report
      2010 Annual Research Report
  • [Remarks]

    • URL

      http://www.dev.eee.tut.ac.jp/ishidalab/index.html

    • Related Report
      2009 Annual Research Report
  • [Patent(Industrial Property Rights)] サブ波長格子及び表示装置2009

    • Inventor(s)
      高橋一浩, 宮尾肇, 澤田和明
    • Industrial Property Rights Holder
      豊橋技術科学大学
    • Industrial Property Number
      2009-253409
    • Filing Date
      2009-11-04
    • Related Report
      2010 Final Research Report 2009 Annual Research Report

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Published: 2009-04-01   Modified: 2016-04-21  

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