High-throughput reproduction of high-aspect-ratio nanostructures and development of new optical elements

• Project/Area Number: 21860015
• Research Category: Grant-in-Aid for Research Activity Start-up
• Allocation Type: Single-year Grants
• Research Field: Production engineering/Processing studies
• Research Institution: The University of Tokyo
• Principal Investigator: NAGATO Keisuke The University of Tokyo, 大学院・工学系研究科, 助教 (50546231)
• Project Period (FY): 2009 – 2010
• Project Status: Completed (Fiscal Year 2010)
• Budget Amount: ¥2,678,000 (Direct Cost: ¥2,060,000、Indirect Cost: ¥618,000); Fiscal Year 2010: ¥1,274,000 (Direct Cost: ¥980,000、Indirect Cost: ¥294,000); Fiscal Year 2009: ¥1,404,000 (Direct Cost: ¥1,080,000、Indirect Cost: ¥324,000)
• Keywords: 射出成形 / 高アスペクト比 / ナノ構造 / 生産技術 / 光学素子

Research Abstract

In this study, we propose and develope the injection molding system with a short cycle time for high-aspect-ratio nanostructures and replicate the new optical elements such as anti-reflection structure.

Research Products

• [Journal Article] Effect of duty ratio of patterned surface on planarization by gas cluster ionbeams (2011)
  • Author(s): K.Nagato, N.Toyoda, H.Naito, H.Tani, Y.Sakane, I.Yamada, M.Nakao, T.Hamaguchi
  • Journal Title: J. Appl. Phys. Volume: 109
  • Peer Reviewed
• [Journal Article] Field emission of vertically aligned single-walled carbon nanotubes patterned by pressing a microstructured mold (2011)
  • Author(s): K.Nagato, S.Inoue, S.Chiashi, S.Maruyama, T.Hamaguchi, M,Nakao
  • Journal Title: Microelectron. Eng. Volume: (in press)(印刷中)(掲載確定)
  • Peer Reviewed
• [Journal Article] Patterning of a-Fe2O3 nanowires by pressing a microstructured mold and their field-emission properties (2011)
  • Author(s): K.Nagato, M.Furubayashi, T.Hamaguchi, M.Nakao
  • Journal Title: Microelectron. Eng. Volume: (in press)(印刷中)(掲載確定)
  • Peer Reviewed
• [Journal Article] Rapid injection molding of high-aspect-ratio nanostructures (2010)
  • Author(s): S.Hattori, K.Nagato, T.Hamaguchi, M.Nakao
  • Journal Title: Microelectron.Eng. 87 Pages: 1546-1549
  • Peer Reviewed
• [Journal Article] Fabrication of antireflection-structured surface using vertical nanowires as an initial structure (2010)
  • Author(s): K.Nagato, H.Moritani, T.Hamaguchi, M.Nakao
  • Journal Title: J.Vac.Sci.Technol.B 28
  • Peer Reviewed
• [Journal Article] Direct synthesis of -Fe_2O_3 nanowires from sputtered thin film (2010)
  • Author(s): K.Nagato, M.Furubayashi, T.Hamaguchi, M.Nakao
  • Journal Title: J.Vac.Sci.Technol.B 28
  • Peer Reviewed
• [Journal Article] Rapid thermal imprinting of high-aspect-ratio nanostructures by dynamic heating of mold surface (2010)
  • Author(s): K.Nagato, S.Hattori, T.Hamguchi, M.Nakao
  • Journal Title: J.Vac.Sci.Technol.B 28
  • Peer Reviewed
• [Journal Article] Iterative roller imprint of multilayered nanostructures (2010)
  • Author(s): K.Nagato, S.Sugimoto, T.Hamaguchi, M.Nakao
  • Journal Title: Microelectron. Eng. Volume: 87 Pages: 1543-1545
  • Peer Reviewed
• [Journal Article] Field emission properties of discretely synthesized tungsten oxide nanowires (2010)
  • Author(s): M.Furubayashi, K.Nagato, H.Moritani, T.Hamaguchi, M.Nakao
  • Journal Title: Microelectron. Eng. Volume: 87 Pages: 1594-1596
  • NAID: 130004659138
  • Peer Reviewed
• [Journal Article] Rapid injection molding of high-aspect-ratio nanostructures (2010)
  • Author(s): S.Hattori, K.Nagato, T.Hamaguchi, M.Nakao
  • Journal Title: Microelectron. Eng. Volume: 87 Pages: 1546-1549
  • Peer Reviewed
• [Journal Article] Planarization of nonmagnetic films on bit patterned substrates by gas-cluster ion beams (2010)
  • Author(s): K.Nagato, H.Hoshino, H.Naito, T.Hirota, H.Tani, Y.Sakane, N.Toyoda, I.Yamada, M.Nakao, T.Hamaguchi
  • Journal Title: IEEE Trans. Magn. Volume: 46 Pages: 2504-2506
  • NAID: 40020674804
  • Peer Reviewed
• [Journal Article] Fabrication of antireflection-structured surface using vertical nanowires as aninitial structure (2010)
  • Author(s): K.Nagato, H.Moritani, T.Hamaguchi, M.Nakao
  • Journal Title: J.Vac. Sci. Technol. B Volume: 28
  • Peer Reviewed
• [Journal Article] Direct synthesis of a-Fe2O3 nanowires from sputtered thin film (2010)
  • Author(s): K.Nagato, M.Furubayashi, T.Hamaguchi, M.Nakao
  • Journal Title: J. Vac. Sci. Technol. B Volume: 28
  • Peer Reviewed
• [Journal Article] Rapid thermal imprinting of high-aspect-ratio nanostructures by dynamic heating of mold surface (2010)
  • Author(s): K.Nagato, S.Hattori, T.Hamguchi, M.Nakao
  • Journal Title: J. Vac. Sci. Technol. B Volume: 28
  • Peer Reviewed
• [Journal Article] Field emission properties of discretely synthesized tungsten oxide nanowires (2010)
  • Author(s): M.Furubayashi, K.Nagato, H.Moritani, T.Hamaguchi, M.Nakao
  • Journal Title: Microelectronic Engineering 87 Pages: 1594-1596
  • NAID: 130004659138
  • Peer Reviewed
• [Journal Article] Rapid injection molding of high-aspect-ratio nanostructures (2010)
  • Author(s): S.Hattori, K.Nagato, T.Hamaguchi, M.Nakao
  • Journal Title: Microelectronic Engineering 87 Pages: 1546-1549
  • Peer Reviewed
• [Presentation] 熱アシスト射出成形による高アスペクト比ナノ構造の転写 (2010)
  • Author(s): 長藤圭介, 服部俊太郎, 濱口哲也, 中尾政之
  • Organizer: 応用物理学会学術講演会
  • Place of Presentation: 東海大学
  • Year and Date: 2010-03-19
• [Presentation] 熱アシスト射出成形を用いた高アスペクト比ナノ構造の高速転写 (2010)
  • Author(s): 光田健洋, 長藤圭介, 服部俊太郎, 濱口哲也, 中尾政之
  • Organizer: 精密工学会春季講演会
  • Place of Presentation: 埼玉大学
  • Year and Date: 2010-03-17
• [Presentation] 熱アシスト射出成形を用いた高アスペクト比ナノ構造の転写 (2010)
  • Author(s): 光田健洋,長藤圭介,服部俊太郎,濱口哲也,中尾政之
  • Organizer: 精密工学会春季大会
  • Place of Presentation: 埼玉大学
• [Presentation] 熱アシスト射出成形による高アスペクト比ナノ構造の転写 (2010)
  • Author(s): 長藤圭介,服部俊太郎,光田健洋,濱口哲也,中尾政之
  • Organizer: 2010年春季第57回応用物理学関係連合講演会
  • Place of Presentation: 東海大学
• [Presentation] Direct synthesis of vertical a-Fe2O3 nanowires from sputtered Fe thin film (2010)
  • Author(s): K.Nagato, M.Furubayashi, T.Hamaguchi, M.Nakao
  • Organizer: The 54th internatinal conference on electron, ion, and photon beam technology and nanofabrication (EIPBN)
  • Place of Presentation: Anchorage, AL, USA
• [Presentation] Rapid thermal imprint of high-aspect-ratio nanostructures with dynamically heating of mold surface (2010)
  • Author(s): K.Nagato, S.Hattori, T.Hamaguchi, M.Nakao
  • Organizer: The 54th international conference on electron, ion, and photon beam teehnology and nanofabrication (EIPBN)
  • Place of Presentation: Anchorage, AL, USA
• [Presentation] Field emission of vertically aligned single-walled carbon nanotubes patterned by pressing a microstructured mold (2010)
  • Author(s): Shota Inoue, Keisuke Nagato, Masaki Furubayashi, Shohei Chiashi, Shigeo Maruyama, Tetsuya Hamaguchi, Msayuki Nakao
  • Organizer: The 36th International Conference on Micro & Nano Engineering (MNE)
  • Place of Presentation: Genova, Italy
• [Presentation] Patterning of iron oxide nanowires by pressing a microstructured mold (2010)
  • Author(s): Masaki Furubayasbi, Keisuke Nagato, Tetsuya Hamaguchi, Masayuki Nakao
  • Organizer: The 36tb International Conference on Micro & Nano Engineering (MNE)
  • Place of Presentation: Genova, Italy
• [Presentation] Heat-controlled injection molding of nanostructured optical elements (2010)
  • Author(s): Takehiro Mitsuda, Keisuke Nagato, Shuntaro Hattori, Tetsuya Hamaguchi, Masayuki Nakao
  • Organizer: The 24 the American Society for Precision Engineering (ASPE)
  • Place of Presentation: Atlanta, USA
• [Presentation] Penetration of residual layer in nanoimprint lithography by direct oxidation of photocatalytic films (2010)
  • Author(s): Makoto Shimoda, Keisuke Nagato, Tetsuya Hamaguchi, Masayuki Nakao
  • Organizer: The 24 the American Society for Precision Engineering (ASPE)
  • Place of Presentation: Atlanta, USA
• [Presentation] Effect of duty ratio of patterned surface on planarization by gas cluster ion beams (2010)
  • Author(s): K.Nagato, N.Toyoda, H.Naito, H.Tani, Y.Sakane, I.Yamada, M.Nakao, T.Hamaguchi
  • Organizer: Magnetism and Magnetic Materials (MMM)
  • Place of Presentation: Atlanta, USA
• [Presentation] 熱アシスト射出成形による高アスペクト比ナノ構造の高速転写 (2009)
  • Author(s): 長藤圭介, 服部俊太郎, 中尾政之
  • Organizer: 第1回マイクロ・ナノ工学シンポジウム
  • Place of Presentation: タワーホール船堀(東京都)
  • Year and Date: 2009-10-15
• [Presentation] Field emission properties of discretely synthesized tungsten oxide nanowires (2009)
  • Author(s): M.Furubayashi, 長藤圭介, H.Moritani, 濱口哲也, 中尾政之
  • Organizer: Micro-Nano-Engineering
  • Place of Presentation: Ghent, Belgium
  • Year and Date: 2009-09-30
• [Presentation] Rapid injection molding of high-aspect-ratio nanostructures (2009)
  • Author(s): 服部俊太郎, 長藤圭介, 濱口哲也, 中尾政之
  • Organizer: Micro-Nano-Engineering
  • Place of Presentation: Ghent, Belgium
  • Year and Date: 2009-09-30
• [Presentation] 射出成形を用いた高アスペクト比ナノ構造の転写 (2009)
  • Author(s): 服部俊太郎, 長藤圭介, 濱口哲也, 中尾政之
  • Organizer: 第70回応用物理学会学術講演会
  • Place of Presentation: 富山大学
  • Year and Date: 2009-09-09
• [Presentation] 先進ナノインプリントの挑戦～積層構造,射出成形,ローラインプリント～ (2009)
  • Author(s): 長藤圭介, 杉本俊太郎, 服部俊太郎, 濱口哲也, 中尾政之
  • Organizer: 次世代リソグラフィ(NGL)ワークショップ
  • Place of Presentation: 日本科学未来館(東京都)
  • Year and Date: 2009-07-10
• [Presentation] 射出成形を用いた高アスペクト比ナノ構造の転写 (2009)
  • Author(s): 服部俊太郎,長藤圭介,濱口哲也,中尾政之
  • Organizer: 第70回応用物理学会学術講演会(講演予稿集9a-D-4,p.642)
  • Place of Presentation: 富山大学
• [Remarks] ホームページ等
  • URL: http://hockey.t.u-tokyo.ac.jp/nagato/frameTop_j.html
• [Remarks]
  • URL: http://hockey.tu-tokyo.ac.jp/nagato/frameTop_j/html/