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Precise structure control of nano-composite films in low-temperature plasma reaction field with fast flow

Research Project

Project/Area Number 21H01076
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Review Section Basic Section 14030:Applied plasma science-related
Research InstitutionMeijo University

Principal Investigator

Uchida Giichiro  名城大学, 理工学部, 教授 (90422435)

Co-Investigator(Kenkyū-buntansha) 茂田 正哉  東北大学, 工学研究科, 教授 (30431521)
Project Period (FY) 2021-04-01 – 2024-03-31
Project Status Completed (Fiscal Year 2023)
Budget Amount *help
¥17,550,000 (Direct Cost: ¥13,500,000、Indirect Cost: ¥4,050,000)
Fiscal Year 2023: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000)
Fiscal Year 2022: ¥6,760,000 (Direct Cost: ¥5,200,000、Indirect Cost: ¥1,560,000)
Fiscal Year 2021: ¥8,970,000 (Direct Cost: ¥6,900,000、Indirect Cost: ¥2,070,000)
Keywords低温プラズマプロセス / プラズマ流れ反応場 / ナノ複合材料 / Liイオン電池 / ゲルマニウム / ナノ粒子プラズマプロセス / 反応性流れ場 / ナノ粒子プラズマロセス / 反応流れ場
Outline of Research at the Start

電気自動車の長距離走行を可能とする次世代の高性能Liイオン電池の実現には、ナノ材料膜の構造制御が必要不可欠である。この課題に対し本研究では、低温プラズマ流れ場をキーパラメータとした新規プラズマプロセスにより、ナノ構造が精密に制御されたナノ複合材料膜をシングルステップで作製する。その実現のために、低温プラズマ中のガス流速を低速から高速まで系統的に制御し、ナノ複合材料膜の微細形態と多孔度を定量的に評価する。その結果に基づき最終的にナノ構造制御のための学術モデルを提案する。さらに発展として、新規プラズマプロセスで作製したGe/Snナノ複合材料を負極に用いて、高容量・低劣化Liイオン電池を実証する。

Outline of Final Research Achievements

The purpose of this study is to control the microstructure of nanomaterial films using a low-temperature plasma flow reaction field. By changing the gas flow rate (velocity) in the plasma, the particle size of Ge nanoparticles could be controlled between 40 and 100 nm. In the plasma reaction field with two flows, nanostructured films with aggregated GeSn nanoparticles were formed at low gas flow velocities, while at high gas flow velocities above 300 sccm, specific nanostructured films with regularly arranged nanopillars of about 100 micron diameter were formed. As an application study, a Li ion battery using a C/Ge/C stacked film as the anode demonstrated 910 mAh/g after 90 cycles, which is a three times higher value than that of a carbon anode.

Academic Significance and Societal Importance of the Research Achievements

Liイオン電池の高容量負極の実現において、負極材料の物性に加え、膜の微細構造が電池性能を左右する重要因子となっている。本研究では低温プラズマ流れ反応場を用いて様々なナノ構造膜負極を作製し、最終的にLiイオン電池で90サイクル後にカーボン負極の約3倍の910 mAh/gを実証した。この研究成果の学術的意義は、低温プラズマ流れ反応場を用いてナノ構造膜の形態を多彩に制御できることを見出した点にある。また、この知見をLiイオン電池負極膜に展開し、実際に高容量と低劣化を達成した。この電池の実証はカーボンニュートラル社会の実現に貢献するものであり、社会的にも意義がある研究成果である。

Report

(4 results)
  • 2023 Annual Research Report   Final Research Report ( PDF )
  • 2022 Annual Research Report
  • 2021 Annual Research Report
  • Research Products

    (41 results)

All 2024 2023 2022 2021

All Journal Article (6 results) (of which Peer Reviewed: 6 results,  Open Access: 4 results) Presentation (35 results) (of which Int'l Joint Research: 18 results,  Invited: 5 results)

  • [Journal Article] Development of nanostructured Ge/C anodes with a multistacking layer fabricated via Ar high-pressure sputtering for high-capacity Li<sup>+</sup>-ion batteries2024

    • Author(s)
      Omae Tomoki、Yamada Teruya、Fujikake Daiki、Kozawa Takahiro、Uchida Giichiro
    • Journal Title

      Applied Physics Express

      Volume: 17 Issue: 2 Pages: 026001-026001

    • DOI

      10.35848/1882-0786/ad2785

    • Related Report
      2023 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Fabrication of amorphous LiPON, LiAlGePO, and GeSn films in low-temperature plasma sputtering process for all-solid-state Li+-ion battery2023

    • Author(s)
      Giichiro Uchida, Yuma Habu, Junki Hayashi, Kenta Nagai, Yumiko Ikebe
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 63 Issue: SL Pages: SL1010-SL1010

    • DOI

      10.35848/1347-4065/acd55d

    • Related Report
      2023 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Single-step fabrication of fibrous Si/Sn composite nanowire anodes by high-pressure He plasma sputtering for high-capacity Li-ion batteries2023

    • Author(s)
      Uchida Giichiro、Masumoto Kodai、Sakakibara Mikito、Ikebe Yumiko、Ono Shinjiro、Koga Kazunori、Kozawa Takahiro
    • Journal Title

      Scientific Reports

      Volume: 13 Issue: 1 Pages: 14280-14280

    • DOI

      10.1038/s41598-023-41452-3

    • Related Report
      2023 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Low-Temperature and High-Speed Fabrication of Nanocrystalline Ge Films on Cu Substrates Using Sub-Torr-Pressure Plasma Sputtering2022

    • Author(s)
      Giichiro Uchida,Kenta Nagai,Ayaka Wakana,Yumiko Ikebe
    • Journal Title

      IEEE Open Journal of Nanotechnology

      Volume: 3 Pages: 153-158

    • DOI

      10.1109/ojnano.2022.3221462

    • Related Report
      2022 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Nanostructured Ge and GeSn films by high-pressure He plasma sputtering for high-capacity Li ion battery anodes2022

    • Author(s)
      Giichiro Uchida, Kenta Nagai, Yuma Habu, Junki Hayashi, Yumiko Ikebe, Mineo Hiramatsu, Ryota Narishige, Naho Itagaki, Masaharu Shiratani, Yuichi Setsuhara
    • Journal Title

      Scientifc Reports

      Volume: 12 Issue: 1 Pages: 17421-12

    • DOI

      10.1038/s41598-022-05579-z

    • Related Report
      2021 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Morphological control of nanostructured Ge films in high Ar-gas-pressure plasma sputtering process for Li ion batteries2021

    • Author(s)
      Junki Hayashi, Kenta Nagai, Yuma Habu, Yumiko Ikebe, Mineo Hiramatsu, Ryota Narishige, Naho Itagaki, Masaharu Shiratani, Yuichi Setsuhara, Giichiro Uchida
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 61 Issue: SA Pages: SA1002-SA1002

    • DOI

      10.35848/1347-4065/ac2b7b

    • Related Report
      2021 Annual Research Report
    • Peer Reviewed
  • [Presentation] 高圧Heスパッタリングを用いたSi/Snナノワイヤーの生成・構造制御と高容量Liイオン電池の実証2024

    • Author(s)
      益本 幸泰, 花井 稜, 小野 晋次郎, 古閑 一憲, 内田 儀一郎
    • Organizer
      第41回プラズマプロセシング研究会
    • Related Report
      2023 Annual Research Report
  • [Presentation] 高圧スパッタリングGe/Cナノ複合膜の次世代高容量Liイオン電池負極への応用2024

    • Author(s)
      大前 知輝, 花井 稜, 益本 幸泰, 石原 雅之, 中田 智久, 丹羽 亮斗, 横井 玲音, 藤掛 大貴, 内田 儀一郎
    • Organizer
      第71回応用物理学会春季学術講演会
    • Related Report
      2023 Annual Research Report
    • Invited
  • [Presentation] Fabrication of Ge/C composite film for Li-ion battery in the co-sputtering process2024

    • Author(s)
      Tomoki Omae, Ryo Hanai, Kodai Masumoto, Masayuki Ishihara, Tomohisa Nakada, Ryoto Niwa, Reon Yokoi, Giichiro Uchida
    • Organizer
      ISPlasma2024
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Crystallinity control of LiTiO thin films for Li ion batteries by RF plasma sputtering2024

    • Author(s)
      Ryoto Niwa, Ryo Hanai, Kodai Masumoto, Masayuki Ishihara, Tomoki Omae, Tomohisa Nakada, Reon Yokoi, Giichiro Uchida
    • Organizer
      ISPlasma2024
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Fabrication of GeSn anode film for Li ion batteries by high He-gas-pressure plasma sputtering2024

    • Author(s)
      Reon Yokoi, Masayuki Ishihara, Tomoki Omae, Tomohisa Nakada, Ryoto Niwa, Ryo Hanai, Kodai Masumoto, Giichiro Uchida
    • Organizer
      ISPlasma2024
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Deposition of RF sputtered SiGe composite films and their application to high-capacity Li ion battery anodes2024

    • Author(s)
      Tomohisa Nakada, Ryo Hanai, Kodai Masumoto, Masayuki Ishihara, Tomoki Omae, Ryoto Niwa, Reon Yokoi, Giichiro Uchida
    • Organizer
      ISPlasma2024
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Development of Li ion battery by combining powder coating process and RF magnetron sputtering for high-capacity2024

    • Author(s)
      Masayuki Ishihara, Kodai Masumoto, Ryo Hanai, Tomoki Omae, Tomohisa Nakada, Ryoto Niwa, Reon Yokoi, Giichiro Uchida
    • Organizer
      ISPlasma2024
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Property control of Ge and Si nanostructured films by high-pressure He sputtering process for next-generation Li ion battery2023

    • Author(s)
      Giichiro Uchida
    • Organizer
      Global Plasma Forum in Aomori
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Synthesis of Si/Sn composite nanowires by using plasma sputtering process for Li-ion battery anode2023

    • Author(s)
      Giichiro Uchida, Kodai Masumoto
    • Organizer
      MRM2023/IUMRS-ICA2023
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research
  • [Presentation] プラズマスパッタリングによるLiイオン電池Ge系負極膜のナノ物性制御2023

    • Author(s)
      横井 玲音, 石原 雅之, 大前 知輝, 中田 智久, 丹羽 亮斗, 花井 稜, 益本 幸泰, 内田 儀一郎
    • Organizer
      第84回応用物理学会秋季学術講演会
    • Related Report
      2023 Annual Research Report
  • [Presentation] GeSnナノ柱状薄膜の構造制御とLiイオン電池負極への応用2023

    • Author(s)
      花井 稜, 益本 幸泰, 石原 雅之, 大前 知輝, 中田 智久, 丹羽 亮斗, 横井 玲音, 内田 儀一郎
    • Organizer
      第84回応用物理学会秋季学術講演会
    • Related Report
      2023 Annual Research Report
  • [Presentation] RFマグネトロンスパッタリング法を用いたSiナノワイヤーの堆積と酸化膜のLiイオン電池性能への効果2023

    • Author(s)
      益本 幸泰, 花井 稜, 石原 雅之,大前 知輝, 中田 智久, 丹羽 亮斗,横井 玲音, 内田 儀一郎
    • Organizer
      第84回応用物理学会秋季学術講演会
    • Related Report
      2023 Annual Research Report
  • [Presentation] 高容量Liイオン電池のための2元スパッタリングを用いたGe/C複合負極の開発2023

    • Author(s)
      大前 知輝, 花井 稜, 益本 幸泰, 石原 雅之, 中田 智久, 丹羽 亮斗, 横井 玲音, 内田 儀一郎
    • Organizer
      第84回応用物理学会秋季学術講演会
    • Related Report
      2023 Annual Research Report
  • [Presentation] Siナノ粒子/C微粒子ハイブリッド多孔質膜を負極とする Liイオン電池の開発2023

    • Author(s)
      石原 雅之, 花井 稜, 益本 幸泰, 大前 知輝, 丹羽 亮斗, 中田 智久, 横井 玲音, 内田 儀一郎
    • Organizer
      第84回応用物理学会秋季学術講演会
    • Related Report
      2023 Annual Research Report
  • [Presentation] プラズマスパッタリングRF電力によるLiTiO薄膜の結晶性制御と Liイオン電池への応用2023

    • Author(s)
      丹羽 亮斗, 石原 雅之, 大前 知輝, 中田 智久, 横井玲音, 花井 稜, 益本 幸泰, 内田 儀一郎
    • Organizer
      第84回応用物理学会秋季学術講演会
    • Related Report
      2023 Annual Research Report
  • [Presentation] High electrical conductivity LiAlGePO films deposited by plasma co-sputtering for Li-ion battery application2023

    • Author(s)
      G. Uchida, J. Hayashi, Y. Habu, K. Nagai
    • Organizer
      Advances in Functional Materials 2023
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Deposition of Si nanowire films by using high-pressure He plasma sputtering2023

    • Author(s)
      K. Masumoto, M. Kiga, T. Yamada, R. Hanai, G. Uchida
    • Organizer
      15th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Deposition of Ge nanoparticle anode films for Li ion battery2023

    • Author(s)
      R. Hanai, M. Kiga, T. Yamada, K. Masumoto, G. Uchida
    • Organizer
      15th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Next-generation Li-ion battery achieved by the low temperature plasma process2022

    • Author(s)
      G. Uchida
    • Organizer
      75th Annual Gaseous Electronics Conference
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] High-capacity Li ion battery with nanostructured Ge and GeSn anode fabricated in the low temperature plasma process2022

    • Author(s)
      G. Uchida
    • Organizer
      The international Conference on Battery for Renewable Energy and Electric Vehicles 2022
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Precise control of the nanostructure of Ge films by high-pressure plasma sputtering for Li-ion battery with super-high capacity2022

    • Author(s)
      G. Uchida
    • Organizer
      MRS 2022 SPRING MEETING and EXHIBIT
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Fabrication of Si nanowire by using sub-Torr He plasma sputtering process2022

    • Author(s)
      G. Uchida, K. Masumoto, M. Sakakibara, R. Hanai, T. Yamada, M. Kiga
    • Organizer
      The 32nd Annual meeting of MRS-J
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Ge/C nanocomposite anode fabricated in co-sputtering plasma process for high capacity Li ion battery2022

    • Author(s)
      G. Uchida, T. Omae, T. Yamada, K. Masumoto, R. Hanai, M. Kiga
    • Organizer
      The 32nd Annual meeting of MRS-J
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 中圧サブトールプラズマプロセスを用いたSiナノ複合材料の作製2022

    • Author(s)
      内田儀一郎
    • Organizer
      第38回九州・山口プラズマ研究会
    • Related Report
      2022 Annual Research Report
  • [Presentation] RFスパッタリングSi/C複合膜の堆積と高容量Liイオン電池負極への応用2022

    • Author(s)
      山田輝也,木賀海晴,花井稜,益本幸泰,内田儀一郎
    • Organizer
      第83回応用物理学学会秋季学術講演会
    • Related Report
      2022 Annual Research Report
  • [Presentation] プラズマスパッタリング法を用いたLiTiO膜の結晶性制御とLiイオン電池負極への応用2022

    • Author(s)
      木賀海晴,山田輝也,花井稜,益本幸泰,内田儀一郎
    • Organizer
      第83回応用物理学学会秋季学術講演会
    • Related Report
      2022 Annual Research Report
  • [Presentation] Siナノワイヤー/Siナノ粒子ポーラス膜の堆積とLiイオン電池負極への応用2022

    • Author(s)
      益本幸泰,木賀海晴,山田輝也,花井稜,内田儀一郎
    • Organizer
      第83回応用物理学学会秋季学術講演会
    • Related Report
      2022 Annual Research Report
  • [Presentation] Geナノ粒子薄膜の粒径制御とLiイオン電池負極への応用2022

    • Author(s)
      花井稜,木賀海晴,山田輝也,益本幸泰,内田儀一郎
    • Organizer
      第83回応用物理学学会秋季学術講演会
    • Related Report
      2022 Annual Research Report
  • [Presentation] sub-Torrプラズマスパッタリングを用いたGe薄膜のナノ構造制御とLiイオン電池アノードへの応用2022

    • Author(s)
      永井健太、若菜文佳、花井稜、林純希、羽生侑真、内田儀一郎
    • Organizer
      第39回プラズマプロセシング研究会/第34回プラズマ材料科学シンポジウム
    • Related Report
      2021 Annual Research Report
  • [Presentation] プラズマ生成ナノ粒子を用いた2次電池応用2022

    • Author(s)
      内田儀一郎
    • Organizer
      令和3年度東北大学電気通信研究所共同研究プロジェクト研究会「物理・化学混成系プラズマにおける情報系機能発現」
    • Related Report
      2021 Annual Research Report
  • [Presentation] Fabrication of nanostructured GeSn films by using plasma sputtering process for Li ion battery anode2021

    • Author(s)
      Giichiro Uchida
    • Organizer
      INTERFINISH2020
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] プラズマスパッタリング法を用いたGeSn薄膜ナノ構造制御とLiイオン電池への応用2021

    • Author(s)
      永井健太、若菜文佳、林純希、羽生侑真、木賀海晴、山田輝也、内田儀一郎
    • Organizer
      第82回応用物理学会秋期学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] Sub-TorrプラズマプロセスによるGeナノ構造膜制御と高容量Liイオン電池への応用2021

    • Author(s)
      内田儀一郎
    • Organizer
      第37回九州・山口プラズマ研究会
    • Related Report
      2021 Annual Research Report
  • [Presentation] Fabrication of Ge nanostructured films by high-pressure plasma sputtering for high-capacity Li ion battery electrode2021

    • Author(s)
      Giichiro Uchida, Kenta Nagai, Ayaka Wakana, Ryo Hanai, Junki Hayashi, Yuma Habu
    • Organizer
      The 12th Asia-Pacific International Symposium on the Basics and Applications of Plasma Technology
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Nanostructured Ge films by high-pressure plasma sputtering for high-capacity Li ion battery anode2021

    • Author(s)
      Giichiro Uchida, Kenta Nagai, Junki Hayashi, Yuma Habu
    • Organizer
      Material Research Meeting 2021
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research

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Published: 2021-04-28   Modified: 2025-01-30  

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