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Environmentally Friendly Thermoelectric Conversion Sheet by Controlling Quantum Transport in Narrow-Gap Semiconductors

Research Project

Project/Area Number 21H01358
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Review Section Basic Section 21050:Electric and electronic materials-related
Research InstitutionUniversity of Tsukuba

Principal Investigator

Toko Kaoru  筑波大学, 数理物質系, 准教授 (30611280)

Project Period (FY) 2021-04-01 – 2024-03-31
Project Status Completed (Fiscal Year 2023)
Budget Amount *help
¥17,290,000 (Direct Cost: ¥13,300,000、Indirect Cost: ¥3,990,000)
Fiscal Year 2023: ¥5,720,000 (Direct Cost: ¥4,400,000、Indirect Cost: ¥1,320,000)
Fiscal Year 2022: ¥5,200,000 (Direct Cost: ¥4,000,000、Indirect Cost: ¥1,200,000)
Fiscal Year 2021: ¥6,370,000 (Direct Cost: ¥4,900,000、Indirect Cost: ¥1,470,000)
Keywords半導体 / 熱電発電 / 熱電変換 / 薄膜 / 結晶成長
Outline of Research at the Start

軽くてやわらかいプラスチック上に熱電材料を薄膜合成した「フレキシブル熱電変換シート」の社会実装には、無毒で安全かつ高い信頼性をもつエコマテリアルの選択が重要となる。本研究では、狭ギャップ環境半導体であるGe系IV族混晶の熱電薄膜としての高いポテンシャルを実証する。研究代表者のGe薄膜技術をベースとし、「混晶」「粒界」「フェルミ準位」の3要素と量子(キャリア・フォノン)輸送特性の相関を解明・制御するとともに、高環境調和型熱電変換シートとして最高性能を実証する。

Outline of Final Research Achievements

Flexible thermoelectric conversion sheets, which are thin films of thermoelectric materials synthesized on light and soft plastics, are expected to be applied to sensors and wearable devices that utilize micro energy, which is indispensable in the IoT society. For their social implementation, it is important to select eco-materials that are non-toxic, safe, and highly reliable. In this study, we focused on thermoelectric thin films of Ge-based group IV crystals, which are narrow-gap environmental semiconductors, and developed low-temperature synthesis technology to achieve the highest level of performance as environmentally friendly thermoelectric conversion sheets.

Academic Significance and Societal Importance of the Research Achievements

高度情報化社会におけるエネルギーの確保のため、身の回りの熱を電気に変換する熱電発電の技術が注目されている。環境調和型材料を用いて高性能なフレキシブル熱電変換シートを実証した点に、本研究の社会的意義がある。また、IV族系混晶半導体材料の結晶性と熱電特性の相関が実験的に明らかにされたことは学術的に特筆すべき点であり、トランジスタや太陽電池など他分野への応用も期待される。

Report

(4 results)
  • 2023 Annual Research Report   Final Research Report ( PDF )
  • 2022 Annual Research Report
  • 2021 Annual Research Report
  • Research Products

    (48 results)

All 2024 2023 2022 2021

All Journal Article (13 results) (of which Peer Reviewed: 13 results,  Open Access: 6 results) Presentation (28 results) (of which Int'l Joint Research: 13 results,  Invited: 12 results) Book (1 results) Patent(Industrial Property Rights) (6 results) (of which Overseas: 3 results)

  • [Journal Article] Bayesian-Optimization-Driven Enhancement of Thermoelectric Properties of Polycrystalline III-V Semiconductor Thin Films2024

    • Author(s)
      T. Ishiyama, K. Nozawa, T. Nishida, T. Suemasu, and K. Toko
    • Journal Title

      NPG Asia Materials

      Volume: 16 Issue: 1 Pages: 17-17

    • DOI

      10.1038/s41427-024-00536-w

    • Related Report
      2023 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] High Thermoelectric Performance in Polycrystalline Yb3Ge5 Thin Films2024

    • Author(s)
      T. Ishiyama, T. Ozawa, N. Saitoh, N. Yoshizawa, T. Suemasu, and K. Toko
    • Journal Title

      APL Materials

      Volume: 12 Issue: 2 Pages: 54848-54848

    • DOI

      10.1063/5.0172322

    • Related Report
      2023 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Thermoelectric properties of low-temperature-grown polycrystalline InAs1?xSbx films2024

    • Author(s)
      T. Nishida, T. Ishiyama, K. Nozawa, T. Suemasu, and K. Toko
    • Journal Title

      Applied Physics Letters

      Volume: 119 Issue: 1 Pages: 132101-132101

    • DOI

      10.1063/5.0178996

    • Related Report
      2023 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Metal-induced lateral crystallization of germanium thin films2023

    • Author(s)
      T. Ishiyama, K. Igura, T. Suemasu, and K. Toko
    • Journal Title

      Materials & Design

      Volume: 232 Pages: 112116-112116

    • DOI

      10.1016/j.matdes.2023.112116

    • Related Report
      2023 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] High-electron mobility P-doped polycrystalline GeSn layers formed on insulators at low temperatures2023

    • Author(s)
      K. Nozawa, T. Ishiyama, T. Nishida, N. Saitoh, N. Yoshizawa, T. Suemasu, and K. Toko
    • Journal Title

      Applied Physics Letters

      Volume: 122 Issue: 20 Pages: 201901-201901

    • DOI

      10.1063/5.0152677

    • Related Report
      2023 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Interfacial Nucleation Control in Amorphous GeSn Thin Films Using Bilayer Structure2023

    • Author(s)
      S. Maeda, T. Ishiyama, N. Saitoh, N. Yoshizawa, T. Suemasu, and K. Toko
    • Journal Title

      Crystal Growth & Design

      Volume: 23 Issue: 8 Pages: 5535-5535

    • DOI

      10.1021/acs.cgd.3c00163

    • Related Report
      2023 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Machine learning of fake micrographs for automated analysis of crystal growth process2022

    • Author(s)
      T. Ishiyama, T. Imajo, T. Suemasu, and K. Toko
    • Journal Title

      Science and Technology of Advanced Materials: Methods

      Volume: 2 Issue: 1 Pages: 213-213

    • DOI

      10.1080/27660400.2022.2082235

    • Related Report
      2022 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Acceptor defects in polycrystalline Ge layers evaluated using linear regression analysis2022

    • Author(s)
      T. Imajo, T. Ishiyama, K. Nozawa, T. Suemasu, and K. Toko
    • Journal Title

      Scientific Reports

      Volume: 12 Issue: 1 Pages: 14941-14941

    • DOI

      10.1038/s41598-022-19221-5

    • Related Report
      2022 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Metal-Catalyzed Nanostructured Silicon Films as Potential Anodes for Flexible Rechargeable Batteries2022

    • Author(s)
      K. Nozawa, H. Murata, T. Suemasu, and K. Toko
    • Journal Title

      ACS Applied Nano Materials

      Volume: 5 Issue: 11 Pages: 170050-170050

    • DOI

      10.1021/acsanm.2c04476

    • Related Report
      2022 Annual Research Report
    • Peer Reviewed
  • [Journal Article] High Thermoelectric Performance in Polycrystalline GeSiSn Ternary Alloy Thin Films2022

    • Author(s)
      S. Maeda, T. Ishiyama, T. Nishida, T. Ozawa, N. Saitoh, N. Yoshizawa, T. Suemasu, and K. Toko
    • Journal Title

      ACS Applied Materials & Interfaces

      Volume: 14 Issue: 49 Pages: 54848-54848

    • DOI

      10.1021/acsami.2c14785

    • Related Report
      2022 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Solid-phase crystallization of GeSn thin films on GeO2-coated glass2022

    • Author(s)
      T. Mizoguchi, T. Ishiyama, K. Moto, T. Imajo, T. Suemasu, and K. Toko
    • Journal Title

      phisica status solidi (RRL) - Rapid Research Letters

      Volume: 16 Issue: 1 Pages: 2100509-2100509

    • DOI

      10.1002/pssr.202100509

    • Related Report
      2021 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Flexible Thermoelectric Generator Based on Polycrystalline SiGe Thin Films2022

    • Author(s)
      T. Ozawa, M. Murata, T. Suemasu, and K. Toko
    • Journal Title

      Materials

      Volume: 15 Issue: 2 Pages: 608-608

    • DOI

      10.3390/ma15020608

    • Related Report
      2021 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] High thermoelectric power factors in polycrystalline germanium thin films2021

    • Author(s)
      T. Ozawa, T. Imajo, T. Suemasu, and K. Toko
    • Journal Title

      Applied Physics Letters

      Volume: 119 Issue: 13 Pages: 132101-132101

    • DOI

      10.1063/5.0056470

    • Related Report
      2021 Annual Research Report
    • Peer Reviewed
  • [Presentation] 多結晶n型Ge薄膜における水素パッシベーション効果2024

    • Author(s)
      野沢 公暉, 末益 崇, 都甲 薫
    • Organizer
      第71回応用物理学会春季学術講演会
    • Related Report
      2023 Annual Research Report
    • Invited
  • [Presentation] 表面電位測定による多結晶 Ge 薄膜の粒界特性評価2024

    • Author(s)
      前田 真太郎, 末益 崇, 都甲 薫
    • Organizer
      第71回応用物理学会春季学術講演会
    • Related Report
      2023 Annual Research Report
  • [Presentation] Improvement of Thermoelectric Performance of Polycrystalline III-V Semiconductor Thin Films using Bayesian Optimization2023

    • Author(s)
      T. Ishiyama, K. Nozawa, T. Suemasu, and K. Toko
    • Organizer
      2023 International Conference on Solid State Devices and Materials
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research
  • [Presentation] High carrier mobilities in polycrystalline germanium layers for flexible electronics2023

    • Author(s)
      Koki Nozawa, Takashi Suemasu, and Kaoru Toko
    • Organizer
      E-MRS 2023 Spring Meeting
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Thermoelectric application of Ge-based group IV semiconductor layers2023

    • Author(s)
      Shintaro Maeda, Kaoru Toko and Takashi Suemasu
    • Organizer
      E-MRS 2023 Spring Meeting
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Record-High Electron Mobility in Polycrystalline GeSn Thin Films on Insulators2023

    • Author(s)
      Koki Nozawa, Takashi Suemasu, and Kaoru Toko
    • Organizer
      ISTDM-ICSI2023
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research
  • [Presentation] ベイズ最適化による多結晶III-V族半導体薄膜の熱電性能向上2023

    • Author(s)
      石山 隆光, 野沢 公暉, 末益 崇, 都甲 薫
    • Organizer
      第84回応用物理学会秋季学術講演会
    • Related Report
      2023 Annual Research Report
  • [Presentation] 核発生制御による多結晶GeSn薄膜の低欠陥・高移動度化2023

    • Author(s)
      前田 真太郎, 石山 隆光, 茂藤 健太, 山本 圭介, 末益 崇, 都甲 薫
    • Organizer
      第84回応用物理学会秋季学術講演会
    • Related Report
      2023 Annual Research Report
  • [Presentation] 半導体薄膜の低温結晶化プロセスとデバイス応用2023

    • Author(s)
      都甲 薫
    • Organizer
      東京大学マテリアル工学セミナー
    • Related Report
      2023 Annual Research Report
    • Invited
  • [Presentation] Thermoelectric properties of low-temperature polycrystalline group IV semiconductor thin films2023

    • Author(s)
      K. Toko
    • Organizer
      ISSP Regular Workshop
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] 次世代電子デバイスに向けた高機能半導体薄膜の開発2023

    • Author(s)
      都甲 薫
    • Organizer
      会いに行ける科学者フェス
    • Related Report
      2023 Annual Research Report
    • Invited
  • [Presentation] 多結晶Ge薄膜の三元混晶化による熱電性能向上2022

    • Author(s)
      前田 真太郎, 石山 隆光, 末益 崇, 都甲 薫
    • Organizer
      第83回応用物理学会秋季学術講演会
    • Related Report
      2022 Annual Research Report
  • [Presentation] IV 族三元混晶の薄膜合成と高熱電性能実証2022

    • Author(s)
      前田真太郎, 末益崇, 都甲薫
    • Organizer
      薄膜材料デバイス研究会
    • Related Report
      2022 Annual Research Report
  • [Presentation] Grain size control of in solid-phase crystallization of Ge thin films using nucleation layer?2022

    • Author(s)
      Shintaro Maeda, Takamitsu Ishiyama, Toshifumi Imajo, Takashi Suemasu and Kaoru Toko
    • Organizer
      The 22nd International Vacuum Congress
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Group IV Semiconductor Alloy Thin Films for Environmentally Friendly Thermoelectric Generators2022

    • Author(s)
      Shintaro Maeda, Tomoki Ozawa, Takashi Suemasu and Kaoru Toko
    • Organizer
      2022 International Conference on Solid State Devices and Materials
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Nucleation control in the solid-phase crystallization of amorphous Ge layer leading to high hole mobility2022

    • Author(s)
      Shintaro Maeda, Takamitsu Ishiyama, Toshifumi Imajo, Takashi Suemasu and Kaoru Toko
    • Organizer
      IURMS-ICYRAM 2022
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Thermoelectric Properties in Group IV Ternary Alloy Thin Films Formed by Advanced Solid-phase Crystallization2022

    • Author(s)
      Shintaro Maeda, Tomoki Ozawa, Takashi Suemasu and Kaoru Toko
    • Organizer
      The 6th Asia-Pacific Conference on Semiconducting Silicides and Related Materials
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Low-temperature thin-film growth of group IV semiconductors for thermoelectric applications2022

    • Author(s)
      K. Toko
    • Organizer
      JST Colloquium
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Layer exchange of group IV materials: crystal growth and device applications2022

    • Author(s)
      K. Toko
    • Organizer
      International Conference on Solid State Devices and Materials (SSDM)
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] 低温多結晶IV族半導体薄膜の熱電性能2022

    • Author(s)
      都甲 薫
    • Organizer
      熱電研究会
    • Related Report
      2022 Annual Research Report
    • Invited
  • [Presentation] SiGeを用いたフレキシブル熱電変換素子2022

    • Author(s)
      前田真太郎, 小澤知輝, 今城利文, 末益崇, 都甲薫
    • Organizer
      JST CREST・さきがけ複合領域 令和3年度成果展開VRシンポジウム
    • Related Report
      2021 Annual Research Report
  • [Presentation] 多結晶Ge膜の熱電応用と高出力因子の実証2021

    • Author(s)
      小澤知輝, 今城利文, 末益崇, 都甲薫
    • Organizer
      第12回半導体材料・デバイスフォーラム
    • Related Report
      2021 Annual Research Report
  • [Presentation] 拡散剤を用いた多結晶Ge薄膜の伝導制御と熱電応用2021

    • Author(s)
      小澤 知輝, 今城 利文, 末益 崇, 都甲 薫
    • Organizer
      第82回応用物理学会秋季学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] 半導体薄膜の低温合成とエネルギーデバイス応用2021

    • Author(s)
      都甲薫
    • Organizer
      JACIエネルギー分科会研究会
    • Related Report
      2021 Annual Research Report
    • Invited
  • [Presentation] IV族材料薄膜の金属誘起固相成長2021

    • Author(s)
      都甲薫
    • Organizer
      応用物理学会
    • Related Report
      2021 Annual Research Report
    • Invited
  • [Presentation] IV族半導体を用いたフレキシブル熱電素子2021

    • Author(s)
      都甲薫
    • Organizer
      磁気学会スピントロニクス専門研究会
    • Related Report
      2021 Annual Research Report
    • Invited
  • [Presentation] Low-temperature solid-phase crystallization of group IV material thin films2021

    • Author(s)
      K. Toko
    • Organizer
      AMFPD21
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Solid-phase Diffusion Doping in Polycrystalline Ge Thin Films Leading to High Thermoelectric Power Factors2021

    • Author(s)
      Tomoki Ozawa, Toshifumi Imajo, Takashi Suemasu, and Kaoru Toko
    • Organizer
      SSDM2021
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Book] 環境調和型材料による高信頼性熱電変換シートの研究開発2023

    • Author(s)
      都甲薫
    • Total Pages
      7
    • Publisher
      技術情報協会
    • Related Report
      2022 Annual Research Report
  • [Patent(Industrial Property Rights)] 電気的特性推定装置、推定モデル生成装置、電気的特性推定方法、推定モデル生成方法及びコンピュータプログラム2023

    • Inventor(s)
      野沢公暉,石山隆光,都甲薫
    • Industrial Property Rights Holder
      野沢公暉,石山隆光,都甲薫
    • Industrial Property Rights Type
      特許
    • Filing Date
      2023
    • Related Report
      2023 Annual Research Report
  • [Patent(Industrial Property Rights)] 半導体装置、及び、半導体装置の製造方法2022

    • Inventor(s)
      都甲薫、中村宗敦,前田郷司
    • Industrial Property Rights Holder
      都甲薫、中村宗敦,前田郷司
    • Industrial Property Rights Type
      特許
    • Filing Date
      2022
    • Acquisition Date
      2023
    • Related Report
      2023 Annual Research Report
    • Overseas
  • [Patent(Industrial Property Rights)] 半導体装置とその製造方法2022

    • Inventor(s)
      都甲薫,末益崇
    • Industrial Property Rights Holder
      都甲薫,末益崇
    • Industrial Property Rights Type
      特許
    • Filing Date
      2022
    • Related Report
      2022 Annual Research Report
  • [Patent(Industrial Property Rights)] 半導体装置、及び、半導体装置の製造方法2022

    • Inventor(s)
      都甲薫,中村宗敦,前田郷司
    • Industrial Property Rights Holder
      都甲薫,中村宗敦,前田郷司
    • Industrial Property Rights Type
      特許
    • Filing Date
      2022
    • Related Report
      2022 Annual Research Report
    • Overseas
  • [Patent(Industrial Property Rights)] 半導体装置、及び、半導体装置の製造方法2022

    • Inventor(s)
      都甲薫,中村宗敦,前田郷司
    • Industrial Property Rights Holder
      都甲薫,中村宗敦,前田郷司
    • Industrial Property Rights Type
      特許
    • Filing Date
      2022
    • Related Report
      2022 Annual Research Report
    • Overseas
  • [Patent(Industrial Property Rights)] 半導体装置とその製造方法2021

    • Inventor(s)
      都甲薫、末益崇
    • Industrial Property Rights Holder
      都甲薫、末益崇
    • Industrial Property Rights Type
      特許
    • Filing Date
      2021
    • Acquisition Date
      2023
    • Related Report
      2023 Annual Research Report

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Published: 2021-04-28   Modified: 2025-01-30  

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