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Control of giant thermoelectric properties based on group-IV band engineering and its device applications

Research Project

Project/Area Number 21H01366
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Review Section Basic Section 21050:Electric and electronic materials-related
Research InstitutionNagoya University

Principal Investigator

Kurosawa Masashi  名古屋大学, 工学研究科, 准教授 (40715439)

Co-Investigator(Kenkyū-buntansha) 片瀬 貴義  東京工業大学, 科学技術創成研究院, 准教授 (90648388)
Project Period (FY) 2021-04-01 – 2024-03-31
Project Status Completed (Fiscal Year 2023)
Budget Amount *help
¥17,940,000 (Direct Cost: ¥13,800,000、Indirect Cost: ¥4,140,000)
Fiscal Year 2023: ¥2,340,000 (Direct Cost: ¥1,800,000、Indirect Cost: ¥540,000)
Fiscal Year 2022: ¥2,340,000 (Direct Cost: ¥1,800,000、Indirect Cost: ¥540,000)
Fiscal Year 2021: ¥13,260,000 (Direct Cost: ¥10,200,000、Indirect Cost: ¥3,060,000)
KeywordsIV族混晶 / 半導体 / ゲルマニウムスズ / シリコンスズ / 薄膜 / 結晶成長 / フォノンドラッグ / 熱電変換 / バンドエンジニアリング / フォノンドラッグ熱電能 / ドーピング / 熱起電力
Outline of Research at the Start

IV族混晶(ゲルマニウムスズ)におけるバンドエンジニアリング技術を基軸とし、分担者と共同で見出した低温・巨大熱電能の発現温度を室温化する、そのガイドラインを構築することを目的とする。デバイ温度の高い第三元素の添加や圧縮歪みを印加することで発現温度を室温まで高温化できるか検証する。最終的には、フォノンドラッグ熱電能(格子振動に電子がひきずられて発電する現象)を司っている結晶構造、電子・フォノン構造を明確化するとともに、実デバイスにより電子冷却効果を検証する。シリコン集積回路上に混載できれば、CPUの抱える発熱の問題解決にも貢献できるなど、産業応用の観点からも先進的な研究領域になると考えられる。

Outline of Final Research Achievements

This project aimed to establish a guideline that shifts the temperatures of the giant phonon-drag effect, which appeared at low temperatures around 20 K, to higher temperatures based on the band engineering technology in group-IV alloys (germanium tin). Previous studies have grown the alloy films on conductive substrates; hence, their electronic and thermoelectric properties have not been fully understood. Therefore, this study used high-resistivity wafers as the crystal growth substrates. As a result, the high-quality formation of various group-IV alloys (germanium tin, silicon tin, and germanium silicon tin) thin films and clarification of their low-temperature thermoelectric properties were achieved.

Academic Significance and Societal Importance of the Research Achievements

本研究の推進により、IV族混晶半導体薄膜の基礎的な低温熱電物性や電子物性の計測に成功し、半導体/異種材料ヘテロ構造の高品位形成に関する知見も蓄積できた。これらは様々な半導体デバイスへの応用が可能であり、IV族混晶材料の新しい展開を拓く基礎となりうる。加えて、当該材料はシリコン集積回路プロセスとの親和性に優れるIV族元素から構成されており、半導体産業応用の観点からも先進的な研究領域になると期待できる。

Report

(4 results)
  • 2023 Annual Research Report   Final Research Report ( PDF )
  • 2022 Annual Research Report
  • 2021 Annual Research Report
  • Research Products

    (47 results)

All 2024 2023 2022 2021

All Journal Article (11 results) (of which Int'l Joint Research: 3 results,  Peer Reviewed: 11 results,  Open Access: 4 results) Presentation (36 results) (of which Int'l Joint Research: 19 results,  Invited: 9 results)

  • [Journal Article] Tensile-strained Ge1-xSnx layers on Si(001) substrate by solid-phase epitaxy featuring seed layer introduction2024

    • Author(s)
      Hiraide Tatsuma、Shibayama Shigehisa、Kurosawa Masashi、Sakashita Mitsuo、Nakatsuka Osamu
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 63 Issue: 4 Pages: 045505-045505

    • DOI

      10.35848/1347-4065/ad358f

    • Related Report
      2023 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Planar-type SiGe thermoelectric generator with double cavity structure2024

    • Author(s)
      Koike S.、Yanagisawa R.、Jalabert L.、Anufriev R.、Kurosawa M.、Mori T.、Nomura M.
    • Journal Title

      Applied Physics Letters

      Volume: 124 Issue: 12 Pages: 1-6

    • DOI

      10.1063/5.0191450

    • Related Report
      2023 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] Layer transfer of epitaxially grown Ge-lattice-matched Si27.8Ge64.2Sn8 films2024

    • Author(s)
      Maeda Tatsuro、Ishii Hiroyuki、Chang Wen Hsin、Zhang Shiyu、Shibayama Shigehisa、Kurosawa Masashi、Nakatsuka Osamu
    • Journal Title

      Materials Science in Semiconductor Processing

      Volume: 176 Pages: 108304-108304

    • DOI

      10.1016/j.mssp.2024.108304

    • Related Report
      2023 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Lattice-matched growth of high-Sn-content (x~0.1) Si1-xSnx layers on S1-yGey buffers using molecular beam epitaxy2023

    • Author(s)
      Fujimoto Kazuaki、Kurosawa Masashi、Shibayama Shigehisa、Sakashita Mitsuo、Nakatsuka Osamu
    • Journal Title

      Applied Physics Express

      Volume: 16 Issue: 4 Pages: 045501-045501

    • DOI

      10.35848/1882-0786/acc3da

    • Related Report
      2023 Annual Research Report 2022 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Preparation and thermoelectric characterization of boron-doped Si nanocrystals/silicon oxide multilayers2023

    • Author(s)
      Shibata Keisuke、Kato Shinya、Kurosawa Masashi、Gotoh Kazuhiro、Miyamoto Satoru、Usami Noritaka、Kurokawa Yasuyoshi
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 62 Issue: SC Pages: SC1074-SC1074

    • DOI

      10.35848/1347-4065/acb779

    • Related Report
      2023 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Superior power generation capacity of GeSn over Si demonstrated in cavity-free thermoelectric device architecture2023

    • Author(s)
      Mahfuz Md Mehdee Hasan、Katayama Kazuaki、Ito Yoshitsune、Fujimoto Kazuaki、Tomita Motohiro、Kurosawa Masashi、Matsuki Takeo、Watanabe Takanobu
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 62 Issue: SC Pages: SC1058-SC1058

    • DOI

      10.35848/1347-4065/acaed1

    • Related Report
      2022 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Investigation of Band Structure in Strained Single Crystalline Si1-xSnx2022

    • Author(s)
      Sahara Keita、Yokogawa Ryo、Shibayama Yuki、Hibino Yusuke、Kurosawa Masashi、Ogura Atsushi
    • Journal Title

      ECS Transactions

      Volume: 109 Issue: 4 Pages: 359-366

    • DOI

      10.1149/10904.0359ecst

    • Related Report
      2022 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Sn-incorporation effect on thermoelectric properties of Sb-doped Ge-rich Ge1-x-ySixSny epitaxial layers grown on GaAs(001)2022

    • Author(s)
      Kurosawa Masashi、Nakata Masaya、Zhan Tianzhuo、Tomita Motohiro、Watanabe Takanobu、Nakatsuka Osamu
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 61 Issue: 8 Pages: 085502-085502

    • DOI

      10.35848/1347-4065/ac7bc7

    • Related Report
      2022 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Constructed Ge Quantum Dots and Sn Precipitate SiGeSn Hybrid Film with High Thermoelectric Performance at Low Temperature Region2022

    • Author(s)
      Ying Peng, Lei Miao,* Chengyan Liu, Haili Song, Masashi Kurosawa, Osamu Nakatsuka, Song Yi Back, Jong Soo Rhyee, Masayuki Murata, Sakae Tanemura, Takahiro Baba, Tetsuya Baba, Takahiro Ishizaki, and Takao Mori
    • Journal Title

      Adv. Energy Mater.

      Volume: 12 Issue: 2 Pages: 2103191-2103191

    • DOI

      10.1002/aenm.202103191

    • Related Report
      2021 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] Reinforcement of power factor in N-type multiphase thin film of Si1-x-yGexSny by mitigating the opposing behavior of Seebeck coefficient and electrical conductivity2021

    • Author(s)
      Lai Huajun、Peng Ying、Gao Jie、Song Haili、Kurosawa Masashi、Nakatsuka Osamu、Takeuchi Tsunehiro、Miao Lei
    • Journal Title

      Applied Physics Letters

      Volume: 119 Issue: 11 Pages: 113903-113903

    • DOI

      10.1063/5.0062339

    • Related Report
      2021 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] (Invited) Thermoelectric Properties of Tin-Incorporated Group-IV Thin Films2021

    • Author(s)
      Kurosawa Masashi、Nakatsuka Osamu
    • Journal Title

      ECS Transactions

      Volume: 104 Issue: 4 Pages: 183-189

    • DOI

      10.1149/10404.0183ecst

    • Related Report
      2021 Annual Research Report
    • Peer Reviewed
  • [Presentation] GaAs基板に形成したSbドープGe1-x-ySixSny薄膜の低温熱電物性2024

    • Author(s)
      椙村樹, 中田壮哉, 柴山茂久, 坂下満男, 中塚理, 片瀬貴義, 黒澤昌志
    • Organizer
      第71回応用物理学会春季学術講演会
    • Related Report
      2023 Annual Research Report
  • [Presentation] 高抵抗Si(111)基板上へのCaSi2薄膜形成と低温熱電物性評価2024

    • Author(s)
      加藤高, 柴山茂久, 坂下満男 , 中塚理, 片瀬貴義, 黒澤昌志
    • Organizer
      第71回応用物理学会春季学術講演会
    • Related Report
      2023 Annual Research Report
  • [Presentation] Low-temperature Thermoelectric Properties of GeSn Alloys Films2023

    • Author(s)
      M. Kurosawa, T. Katase, Y. Imai, M. Nakata, M. Kimura, T. Kamiya, S. Shibayama, M. Sakashita, and O. Nakatsuka
    • Organizer
      The Joint ISDTM/ICSI conference 2023
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Determining the Superiority of Cavity-Free Thermoelectric Generators Composed of GeSn and Si Wires2023

    • Author(s)
      M. M. H. Mahfuz, M. Kurosawa, T. Matsuki, and T. Watanabe
    • Organizer
      The Joint ISDTM/ICSI conference 2023
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 高濃度n型ドープSi1-xSnx薄膜の低温熱電物性評価2023

    • Author(s)
      大岩樹, 柴山茂久, 坂下満男, 中塚理, 片瀬貴義, 黒澤昌志
    • Organizer
      第7回フォノンエンジニアリング研究会
    • Related Report
      2023 Annual Research Report
  • [Presentation] Giant thermoelectric power of n-type Si1-xSnx layers grown on FZ-Si(001) substrates2023

    • Author(s)
      T. Oiwa, S. Shibayama, M. Sakashita, O. Nakatsuka, T. Katase, and M. Kurosawa
    • Organizer
      International Conference on Solid State Devices and Materials 2023 (SSDM2023)
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Low-temperature thermoelectric power-factor enhancement of n-type Ge-rich Ge1-x-ySixSny layers2023

    • Author(s)
      I. Sugimura, M. Nakata, S. Shibayama, M. Sakashita, O. Nakatsuka, T. Katase, and M. Kurosawa
    • Organizer
      International Conference on Solid State Devices and Materials 2023 (SSDM2023)
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Seed-layer driven solid phase epitaxy of amorphous Ge1-xSnx layers on Si(001) substrates toward in-plane strain control2023

    • Author(s)
      T. Hiraide, M. Kurosawa, S. Shibayama, M. Sakashita, and O. Nakatsuka
    • Organizer
      International Conference on Solid State Devices and Materials 2023 (SSDM2023)
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Si1-xSnx薄膜で観測される巨大熱電能の電子濃度依存性2023

    • Author(s)
      大岩樹, 柴山茂久, 坂下満男, 中塚理, 片瀬貴義, 黒澤昌志
    • Organizer
      第84回応用物理学会秋季学術講演会
    • Related Report
      2023 Annual Research Report
  • [Presentation] PL法及びXPSによる単結晶Si1-xSnxのバンド構造評価2023

    • Author(s)
      石崎寛規, 横川凌, 伊藤佑太, 大岩樹, 黒澤昌志, 小椋厚志
    • Organizer
      第84回応用物理学会秋季学術講演会
    • Related Report
      2023 Annual Research Report
  • [Presentation] SiGe薄膜におけるナノ構造作製の熱電性能に与える影響2023

    • Author(s)
      小池壮太, 柳澤亮人, 黒澤昌志, Jha Rajveer, 辻井直人, 森孝雄, 野村政宏
    • Organizer
      第84回応用物理学会秋季学術講演会
    • Related Report
      2023 Annual Research Report
  • [Presentation] Epitaxial Growth Technique for Si1-xSnx Binary Alloy Thin Films2023

    • Author(s)
      M. Kurosawa, S. Shibayama, M. Sakashita, and O. Nakatsuka
    • Organizer
      244th ECS Meeting
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Thermoelectric properties of P-doped and B-doped polycrystalline silicon thin films2023

    • Author(s)
      K. Shibata, S. Kato, M. Kurosawa, K. Gotoh, S. Miyamoto, T. Itoh, N. Usami, and Y. Kurokawa
    • Organizer
      2023 MRS Fall Meeting & Exhibit
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research
  • [Presentation] A new challenge in group-IV materials: energy harvesting application & 2D crystal synthesizing2023

    • Author(s)
      M. Kurosawa, A. Ohta, M. Araidai, S. Shibayama, M. Sakashita, and O. Nakatsuka
    • Organizer
      14th International Workshop on New Group IV Semiconductor Nanoelectronics
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Thermoelectric properties of Sb-doped Ge1-x-ySixSny ternary alloy layers lattice matched to GaAs substrates2023

    • Author(s)
      I. Sugimura, M. Nakata, S. Shibayama, M. Sakashita, O. Nakatsuka, T. Katase, and M. Kurosawa
    • Organizer
      14th International Workshop on New Group IV Semiconductor Nanoelectronics
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 半絶縁性基板上Ge1-xSnx薄膜の低温熱電物性2023

    • Author(s)
      今井志明, 中田壮哉, 木村公俊, 片瀬貴義, 神谷利夫, 柴山茂久, 坂下満男, 中塚理, 黒澤昌志
    • Organizer
      第70回応用物理学会春季学術講演会
    • Related Report
      2022 Annual Research Report
  • [Presentation] 高濃度n型ドープSi1-xSnx薄膜で観測された巨大熱電能2023

    • Author(s)
      大岩樹, 柴山茂久, 坂下満男, 中塚理, 片瀬貴義, 黒澤昌志
    • Organizer
      第70回応用物理学会春季学術講演会
    • Related Report
      2022 Annual Research Report
  • [Presentation] 固相成長法による Si(001)基板上の伸長歪み Ge1-xSnx薄膜の形成2023

    • Author(s)
      平出達磨, 大岩樹, 柴山茂久, 坂下満男, 中塚理, 黒澤昌志
    • Organizer
      第70回応用物理学会春季学術講演会
    • Related Report
      2022 Annual Research Report
  • [Presentation] Potential of Silicon-Germanium-Tin Thin Films for Future Thermoelectric Device Applications2023

    • Author(s)
      M. Kurosawa, S. Shibayama, M. Sakashita, and O. Nakatsuka
    • Organizer
      ISPlasma2023/IC-PLANTS2023
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Investigating the superiority of the cavity-free architectural GeSn and Si wires-based thermoelectric generators2023

    • Author(s)
      M. M. H. Mahfuz, M. Tomita, M. Kurosawa, T. Matsuki, and T. Watanabe
    • Organizer
      第28回 電子デバイス界面テクノロジー研究会
    • Related Report
      2022 Annual Research Report
  • [Presentation] Determination superiority of the cavity-free thermoelectric generators consisting of GeSn and Si wires2022

    • Author(s)
      M. M. H. Mahfuz, M. Tomita, M. Kurosawa, T. Matsuki, and T. Watanabe
    • Organizer
      Integrated Nanocomposites for Thermal and Kinetic Energy Harvesting (INTAKE) Seminar 2022
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 14 族半導体ナノシートの結晶成長とデバイス応用2022

    • Author(s)
      黒澤昌志
    • Organizer
      2022年度 東海NFRW・若手チャプタージョイントワークショップ
    • Related Report
      2022 Annual Research Report
    • Invited
  • [Presentation] Investigation of Band Structure in Strained Single Crystalline Si1-xSnx2022

    • Author(s)
      K. Sahara, R. Yokogawa, Y. Shibayama, Y. Hibino, M. Kurosawa, and A. Ogura
    • Organizer
      242nd ECS Meeting
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Molecular beam epitaxy of Si1-xSnx layers with 10%-Sn content on Si1-yGey buffers2022

    • Author(s)
      K. Fujimoto, S. Shibayama, M. Sakashita, M. Kurosawa, and O. Nakatsuka
    • Organizer
      International Conference on Solid State Devices and Materials 2022 (SSDM2022)
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Study on doping by ion implantation to Si1-xSnx epitaxial layers2022

    • Author(s)
      T. Oiwa, S. Shibayama, M. Sakashita, M. Kurosawa, and O. Nakatsuka
    • Organizer
      International Conference on Solid State Devices and Materials 2022 (SSDM2022)
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Experimental Demonstration of The Cavity-Free GeSn and Si Wire Thermoelectric Generators2022

    • Author(s)
      M. M. H. Mahfuz, K. Katayama, Y. Ito, K. Fujimoto, M. Tomita, M. Kurosawa, T. Matsuki, and T. Watanabe
    • Organizer
      International Conference on Solid State Devices and Materials 2022 (SSDM2022)
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] シリコン系マイクロ熱電発電デバイスの開発2022

    • Author(s)
      渡邉孝信, 富田基裕, ハサン マフス, 黒澤昌志, 松木武雄, シルビア チュン, 王 海東
    • Organizer
      M&M2022 材料力学カンファレンス
    • Related Report
      2022 Annual Research Report
    • Invited
  • [Presentation] 単結晶歪Si1-xSnxのバンド構造評価2022

    • Author(s)
      佐原敬太, 横川凌, 柴山裕貴, 日比野祐介, 黒澤昌志, 小椋厚志
    • Organizer
      第83回応用物理学会秋季学術講演会
    • Related Report
      2022 Annual Research Report
  • [Presentation] Silicon Thermoelectric Energy Harvester Compatible with CMOS Technology2022

    • Author(s)
      T. Watanabe, M. Tomita, M. M. H. Mahfuz, M. Kurosawa, and T. Matsuki
    • Organizer
      2022 Asia-Pacific Workshop on Fundamentals and Applications of Advanced Semiconductor Devices (AWAD)
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Comparative Thermoelectric Performance Demonstration Between Cavity-free GeSn and Si Thermoelectric Generators2022

    • Author(s)
      M. M. H. Mahfuz, K. Katayama, Y. Ito, K. Fujimoto, M. Tomita, M. Kurosawa, T. Matsuki, and T. Watanabe
    • Organizer
      第69回応用物理学会春季学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] Si1-xGexバッファ上におけるSi1-xSnx薄膜の結晶成長2022

    • Author(s)
      藤本一彰, 黒澤昌志, 中塚理
    • Organizer
      第69回応用物理学会春季学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] 固相エピタキシャル成長法によるPドープSi1-xSnx薄膜の形成2022

    • Author(s)
      大岩樹, 黒澤昌志, 中塚理
    • Organizer
      第69回応用物理学会春季学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] Group-IV materials grown on insulator for advanced thin-film thermoelectric applications2021

    • Author(s)
      M. Kurosawa and O. Nakatsuka
    • Organizer
      International Conference on Solid State Devices and Materials 2021 (SSDM2021)
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Thermoelectric properties of tin-incorporated group-IV thin films2021

    • Author(s)
      M. Kurosawa and O. Nakatsuka
    • Organizer
      240th ECS Meeting
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Demonstration of Cavity-free GeSn Thermoelectric Generator2021

    • Author(s)
      K. Katayama, M. M. H. Mahfuz, M. Nakata, Y. Ito, K. Fujimoto, M. Tomita, M. Kurosawa, T. Matsuki, and T. Watanabe
    • Organizer
      2021 International Workshop on Dielectric Thin Films for Future Electron Devices: Science and Technology (2021 IWDTF)
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] GaAs基板上におけるSi1-xSnx薄膜の結晶成長2021

    • Author(s)
      藤本一彰, 黒澤昌志, 中塚理
    • Organizer
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Published: 2021-04-28   Modified: 2025-01-30  

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