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Metal oxyhidride epitaxy and creation of fascinating electronic/dielectric properties

Research Project

Project/Area Number 21H01629
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Review Section Basic Section 26020:Inorganic materials and properties-related
Research InstitutionNational Institute for Materials Science

Principal Investigator

OHSAWA Takeo  国立研究開発法人物質・材料研究機構, 電子・光機能材料研究センター, 主幹研究員 (00450289)

Project Period (FY) 2021-04-01 – 2024-03-31
Project Status Completed (Fiscal Year 2023)
Budget Amount *help
¥16,770,000 (Direct Cost: ¥12,900,000、Indirect Cost: ¥3,870,000)
Fiscal Year 2023: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000)
Fiscal Year 2022: ¥3,380,000 (Direct Cost: ¥2,600,000、Indirect Cost: ¥780,000)
Fiscal Year 2021: ¥12,220,000 (Direct Cost: ¥9,400,000、Indirect Cost: ¥2,820,000)
Keywords酸水素化物 / エピタキシャル薄膜 / 電子物性 / 光電子分光 / 質量分析 / 薄膜 / エピタキシャル成長
Outline of Research at the Start

酸化物イオンと水素化物イオンが共存する酸水素化物材料について、触媒作用やヒドリドイオンの高いイオン伝導性の研究が活発化している。荷電状態や構造歪みにより柔軟に変化する物性応答が期待されるが、電子伝導や誘電特性の報告は少ない。本研究では、エピタキシー技術を基盤とし、重水素を用いた遷移金属酸水素化物薄膜の合成へと発展させ、水素濃度や格子歪みを精密に制御して新奇な電子伝導・誘電機能を発現させること、および自発分極や相転移を利用したセンサ素子の実証を行う研究である。

Outline of Final Research Achievements

The objective was to elucidate fundamental electrical conductivity in epitaxial thin films of nanoscale thick oxyhydrides, which are single-crystal films free from grain boundary scattering that is unavoidable in bulk materials. The approach involved the oxyhydrogenation of anatase-type titanium dioxide thin films epitaxially grown by plasma-assisted molecular beam epitaxy. Hydrogen plasma irradiation successfully introduced hydrogen from the thin film surfaces. As a result, the electron concentration could be controlled, successfully inducing an insulator-metal transition. It was observed that these electron concentrations were comparable to the hydrogen concentrations quantified by mass spectrometry, indicating that transparent electrical conductivity could be achieved and controlled through oxyhydrogenation. This technique was extended to complex oxides, and metallic temperature dependence was successfully obtained in oxyhydrogenated thin films of lattice-relaxed barium titanate.

Academic Significance and Societal Importance of the Research Achievements

バルク体では作製が困難であった前周期遷移金属酸化物の酸水素化を、ナノスケール厚のエピタキシャル薄膜で成功した。従来のようなカチオン不純物を必要とせず、薄膜の水素化だけによる透明伝導性の発現と制御を見出した。

Report

(4 results)
  • 2023 Annual Research Report   Final Research Report ( PDF )
  • 2022 Annual Research Report
  • 2021 Annual Research Report
  • Research Products

    (15 results)

All 2024 2023 2022 2021

All Journal Article (6 results) (of which Peer Reviewed: 5 results,  Open Access: 1 results) Presentation (9 results) (of which Int'l Joint Research: 4 results,  Invited: 1 results)

  • [Journal Article] Nanoscale dynamics of hydrogen in VO2 studied by μSR2024

    • Author(s)
      Okabe H.、Hiraishi M.、Koda A.、Matsushita Y.、Ohsawa T.、Ohashi N.、Kadono R.
    • Journal Title

      Physical Review Materials

      Volume: 8 Issue: 2

    • DOI

      10.1103/physrevmaterials.8.024602

    • Related Report
      2023 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Full polarization reversal at room temperature in unsubstituted AlN2023

    • Author(s)
      Hasegawa Kota、Shimizu Takao、Ohsawa Takeo、Sakaguchi Isao、Ohashi Naoki
    • Journal Title

      Applied Physics Letters

      Volume: 123 Issue: 19 Pages: 192903-192903

    • DOI

      10.1063/5.0174236

    • Related Report
      2023 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Local electronic structure of dilute hydrogen in β-Ga2O3 probed by muons2023

    • Author(s)
      Hiraishi M., Okabe H., Koda A., Kadono R., Ohsawa T., Ohashi N., Ide K., Kamiya T., Hosono H.
    • Journal Title

      Physical Review B

      Volume: 107 Issue: 4 Pages: 1-7

    • DOI

      10.1103/physrevb.107.l041201

    • Related Report
      2022 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Electrical properties of zinc nitride and zinc tin nitride semiconductor thin films toward photovoltaic applications2022

    • Author(s)
      Wang Yong、Ohsawa Takeo、Alnjiman Fahad、Pierson Jean-Francois、Ohashi Naoki
    • Journal Title

      High Temperature Materials and Processes

      Volume: 41 Issue: 1 Pages: 343-352

    • DOI

      10.1515/htmp-2022-0028

    • Related Report
      2022 Annual Research Report
  • [Journal Article] Atomic-scale growth, imaging, spectroscopy, and electronic transport properties of metal-oxide films and interfaces2022

    • Author(s)
      Ohsawa Takeo
    • Journal Title

      Journal of Vacuum Science & Technology A

      Volume: 40 Issue: 1 Pages: 010806-010806

    • DOI

      10.1116/6.0001469

    • Related Report
      2021 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Investigation of Temperature-Dependent Hard X-ray Photoemission Spectra on Au/Nb:SrTiO3 Schottky Junctions2021

    • Author(s)
      Ohsawa Takeo、Murakami Taisei、Hosaka Takumi、Ueda Shigenori、Ishigaki Takamasa、Ohashi Naoki
    • Journal Title

      The Journal of Physical Chemistry C

      Volume: 125 Issue: 27 Pages: 14836-14842

    • DOI

      10.1021/acs.jpcc.1c04022

    • Related Report
      2021 Annual Research Report
    • Peer Reviewed
  • [Presentation] Migration of nitrogen impurity in titanium dioxide and perovskite titanates2023

    • Author(s)
      OHASHI, Naoki, SAKAGUCHI, Isao, SEGAWA, Hiroyo, OHSAWA, Takeo, MATSUI, Yoshio
    • Organizer
      32nd International Conference on Defects in Semiconductors
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] プラズマ支援MBE 法で作製したTiO2薄膜の水素化による絶縁体-金属伝導転移2022

    • Author(s)
      大澤 健男, 坂口 勲, 大橋 直樹
    • Organizer
      日本セラミックス協会 2023年年会
    • Related Report
      2022 Annual Research Report
  • [Presentation] Pt/Nb:SrTiO3ショットキー接合の巨大抵抗変化におけるPt電極への不純物効果と光電子分光評価2022

    • Author(s)
      大澤 健男, 上田 茂典, 保井 晃, 石垣 隆正, 大橋 直樹
    • Organizer
      日本セラミックス協会 第35回秋季シンポジウム
    • Related Report
      2022 Annual Research Report
  • [Presentation] . Local electronic structure of dilute hydrogen in gallium oxide2022

    • Author(s)
      Masatoshi HIRAISHI, Hirotaka OKABE, Akihiro KODA, Ryosuke KADONO, OHSAWA, Takeo, OHASHI, Naoki, Keisuke IDE, Toshio KAMIYA, HOSONO, Hideo
    • Organizer
      15th International Conference on Muon Spin Rotation, Relaxation and Resonance. 2022
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Local Magnetism in the Spin-singlet State of VO22022

    • Author(s)
      Hirotaka OKABE, Masatoshi HIRAISHI, Akihiro KODA, MATSUSHITA, Yoshitaka, OHSAWA, Takeo, OHASHI, Naoki, Ryosuke KADONO
    • Organizer
      The 29th International Conference on Low Temperature Physics (LT29). 2022
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Nb:SrTiO3基板上のエピタキシャル(Al,Sc)N薄膜における強誘電体特性2022

    • Author(s)
      長谷川 浩太, 清水 荘雄, 陳 君, 大澤 健男, 坂口 勲, 大橋 直樹
    • Organizer
      第69回応用物理学会春季学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] Investigating Temperature Dependence of Resistive Switching and Photoemission Spectroscopy in Pt/Nb:SrTiO3 Heterojunctions2021

    • Author(s)
      Takeo Ohsawa, Taisei Murakami, Shigenori Ueda, Takamasa Ishigaki, Naoki Ohashi
    • Organizer
      Materials Research Meeting 2021
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Pt/Nb:SrTiO3 ショットキー接合の抵抗スイッチングにおける Pt 電極への不純物添加効果2021

    • Author(s)
      村上大晟、大澤健男、石垣隆正、大橋直樹
    • Organizer
      第41回電子材料研究討論会
    • Related Report
      2021 Annual Research Report
  • [Presentation] 単結晶(Al,Sc)N薄膜の合成と強誘電体特性評価2021

    • Author(s)
      長谷川 浩太、清水 荘雄、大澤 健男、坂口 勲、大橋 直樹
    • Organizer
      第41回電子材料研究討論会
    • Related Report
      2021 Annual Research Report

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Published: 2021-04-28   Modified: 2025-01-30  

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