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Grading of silicon isotope thin films using localized hydrogen functionalities for quantum computing

Research Project

Project/Area Number 21H01808
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Review Section Basic Section 29020:Thin film/surface and interfacial physical properties-related
Research InstitutionNagoya University

Principal Investigator

MIYAMOTO Satoru  名古屋大学, 工学研究科, 特任准教授 (70709097)

Project Period (FY) 2021-04-01 – 2024-03-31
Project Status Completed (Fiscal Year 2023)
Budget Amount *help
¥16,770,000 (Direct Cost: ¥12,900,000、Indirect Cost: ¥3,870,000)
Fiscal Year 2023: ¥2,990,000 (Direct Cost: ¥2,300,000、Indirect Cost: ¥690,000)
Fiscal Year 2022: ¥3,120,000 (Direct Cost: ¥2,400,000、Indirect Cost: ¥720,000)
Fiscal Year 2021: ¥10,660,000 (Direct Cost: ¥8,200,000、Indirect Cost: ¥2,460,000)
Keywordsシリコン / 半導体 / 同位体 / 局在水素 / 量子計算 / 同位体工学 / 水素
Outline of Research at the Start

本研究では、水素局在機能を利用した独自薄膜形成技術を新たに提案し、シリコンゲルマニウム下地層における効率的な歪み緩和と極限的な界面傾斜抑制を同時達成することで、量子計算用基板材料としてのシリコン同位体薄膜の飛躍的な高性能化・高品質化を実現する。この過程において、その場観察技術を適用したハイスループット実験という新たな方法論に加え、同位体制御技術を援用した水素局在状態の直接可視化に挑戦し、その機能発現要因の解明を進める。

Outline of Final Research Achievements

We have developed a methodology and fundamental technology for interface control using localized hydrogens in silicon isotope thin films that implement silicon-based qubits. We have succeeded in developing an efficient condition search method by process measurement of hydrogen incorporation and desorption, highly sensitive detection and precise evaluation of hydrogen cluster defects with isotope engineering, and an apparatus capable of room-temperature evaluation of electrical noise originating from device interface. We also verified the qubit performance of valley separation using isotopically engineered silicon thin films as quantum platforms.

Academic Significance and Societal Importance of the Research Achievements

水素プロセス挙動のハイスループット計測、高感度な水素検出が可能な質量分析標準、デバイス界面性能の室温評価装置など、同位体薄膜の界面制御に必要な計測技術として高い有用性を示す。半導体産業レベルで広く利用される局在水素による欠陥制御工学の学理構築と、シリコン同位体薄膜の量子計算基板の性能を引き上げる技術基盤として学術的および社会的に意義がある。

Report

(4 results)
  • 2023 Annual Research Report   Final Research Report ( PDF )
  • 2022 Annual Research Report
  • 2021 Annual Research Report
  • Research Products

    (16 results)

All 2024 2023 2022 2021 Other

All Int'l Joint Research (1 results) Presentation (15 results) (of which Int'l Joint Research: 11 results,  Invited: 6 results)

  • [Int'l Joint Research] Seoul National University(韓国)

    • Related Report
      2023 Annual Research Report
  • [Presentation] Effect of localized hydrogen on crystal tilting in strained SiGe substrates2024

    • Author(s)
      Y. Yoneyama, S. Miyamoto, and N. Usami
    • Organizer
      2024 Korea-Japan PV Joint Workshop
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Defect engineering for interface control of Si-qubit integrated layers2023

    • Author(s)
      S. Miyamoto, M. Kano, Y. Kurokawa, and N. Usami
    • Organizer
      Silicon Quantum Electronics Workshop 2023
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Design investigations of devices and circuits for reflectometry-based defect assessment in Si quantum platforms2023

    • Author(s)
      K. Masuda, N. Usami, and S. Miyamoto
    • Organizer
      Silicon Quantum Electronics Workshop 2023
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Atom-probe tomographic study of localized hydrogen functionalities in silicon-based thin-film heterostructures2023

    • Author(s)
      S. Miyamoto, K. Inoue, Y. Shimizu, M. Kano, N. Usami, T. Yokoi, and Y. Nagai
    • Organizer
      GIMRT Joint International Symposium on Radiation Effects in Materials and Actinide Science (GIMRT-REMAS2023)
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research
  • [Presentation] SiGe薄膜における歪み緩和と結晶傾斜への水素局在効果2023

    • Author(s)
      加納 光樹, 宮本 聡, 黒川 康良, 宇佐美 徳隆
    • Organizer
      2023年春季 第70回応用物理学会学術講演会
    • Related Report
      2022 Annual Research Report
  • [Presentation] Functionalization of Localized Hydrogens at Isotopically Engineered Silicon Hetero-Interface2022

    • Author(s)
      S. Miyamoto and N. Usami
    • Organizer
      2nd International Symposium “Hydrogenomics”
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] 多接合太陽電池の普及を加速する最新技術II~印刷と焼成による擬似基板材料の非真空高速成長~2022

    • Author(s)
      宮本 聡
    • Organizer
      日本学術振興会第R032 委員会第 8 回研究会「太陽電池結晶素材の今」
    • Related Report
      2022 Annual Research Report
    • Invited
  • [Presentation] Hydrogen defect clustering in strained SiGe host matrixes2022

    • Author(s)
      M. Kano, S. Miyamoto, Y. Kurokawa, and N. Usami
    • Organizer
      The 22nd International Vacuum Congress (IVC-22)
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Atom-probe tomographic study of localized hydrogen functionalities in silicon-based thin-film heterostructures2022

    • Author(s)
      S. Miyamoto
    • Organizer
      GIMRT Joint International Symposium on Radiation Effects in Materials and Actinide Science (GIMRT-REMAS2022)
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] ゲート制御Si-MOSデバイスにおける非平衡ダイナミクスと電荷雑音評価2022

    • Author(s)
      佐藤 克哉,宮本 聡,宇佐美 徳隆
    • Organizer
      2022年春季 第69回応用物理学会学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] Isotopically Engineered Silicon Testbeds for Advanced CMOS and Quantum Information2021

    • Author(s)
      S. Miyamoto, N. Usami, and K. M. Itoh
    • Organizer
      239th ECS Meeting
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] アドバンスドCMOSのための同位体援用アトムプローブ解析とTEMトラッキング観察2021

    • Author(s)
      宮本 聡
    • Organizer
      日本顕微鏡学会 第77回学術講演会
    • Related Report
      2021 Annual Research Report
    • Invited
  • [Presentation] Isotope Engineering and Nanoscale Imaging for Scaling Silicon Quantum Technology2021

    • Author(s)
      S. Miyamoto, K. M. Itoh, and N. Usami
    • Organizer
      The 22nd International Union of Materials Research Societies International Conference in Asia (IUMRS-ICA 2021)
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Atom-probe tomographic study of localized hydrogen functionalities in silicon-based thin-film heterostructures2021

    • Author(s)
      S. Miyamoto, Y. Shimizu, M. Kano, K. Inoue, N. Usami, and Y. Nagai
    • Organizer
      GIMRT Joint International Symposium on Radiation Effects in Materials and Actinide Science (GIMRT-REMAS2021)
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Microwave photoconductivity decay under gate-bias application to detect charge traps in Si-MOS devices2021

    • Author(s)
      K. Sato, S. Miyamoto, and N. Usami
    • Organizer
      2021 International Workshop on Dielectric Thin Films for Future Electron Devices - Science and Technology - (IWDTF 2021)
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research

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Published: 2021-04-28   Modified: 2025-01-30  

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