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Development of Fundamental Technologies for Fabricating Nitride Semiconductor and Superconductor Hybrid Devices

Research Project

Project/Area Number 21H01827
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Review Section Basic Section 30010:Crystal engineering-related
Research InstitutionTokyo University of Science (2023)
The University of Tokyo (2021-2022)

Principal Investigator

Kobayashi Atsushi  東京理科大学, 先進工学部マテリアル創成工学科, 准教授 (20470114)

Project Period (FY) 2021-04-01 – 2024-03-31
Project Status Completed (Fiscal Year 2023)
Budget Amount *help
¥17,810,000 (Direct Cost: ¥13,700,000、Indirect Cost: ¥4,110,000)
Fiscal Year 2023: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000)
Fiscal Year 2022: ¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000)
Fiscal Year 2021: ¥11,570,000 (Direct Cost: ¥8,900,000、Indirect Cost: ¥2,670,000)
Keywords窒化物半導体 / 窒化物超伝導体
Outline of Research at the Start

本研究では、超伝導LEDやオンチップ単一光子回路などの窒化物量子デバイスの作製に必要な、窒化物超伝導体と窒化物半導体の高品質ヘテロ界面作製プロセスを開拓する。エピタキシャル成長によって窒化物半導体と超伝導体が接合できれば、単一光子やクーパー対がキャリアとなる新しい窒化物量子デバイスが設計できるようになる。

Outline of Final Research Achievements

In this study, we developed a technology for epitaxial integration of nitride semiconductors and nitride superconductors. We focused on the structural characteristics of the interface between the nitride superconductor and semiconductor fabricated using the sputtering method, and successfully controlled the properties of the heterojunction.The epitaxial growth technology established in this study contributes to the development of novel quantum devices utilizing superconductor/semiconductor heterojunctions.

Academic Significance and Societal Importance of the Research Achievements

窒化物半導体を基板とする薄膜成長法を採用することで、これまでに明らかにされてこなかったNbN薄膜の結晶構造と電気的特性を詳細に理解することできた。今回の研究成果は、窒化物半導体とNbN超伝導体薄膜を均質な状態でエピタキシャルに融合できる可能性を示すものであり、次世代超伝導・半導体融合デバイスの開発に向けた基盤技術となる。

Report

(4 results)
  • 2023 Annual Research Report   Final Research Report ( PDF )
  • 2022 Annual Research Report
  • 2021 Annual Research Report
  • Research Products

    (27 results)

All 2023 2022 2021

All Journal Article (5 results) (of which Peer Reviewed: 5 results,  Open Access: 1 results) Presentation (22 results) (of which Int'l Joint Research: 8 results,  Invited: 5 results)

  • [Journal Article] Epitaxial Junction of Inversion Symmetry Breaking AlN and Centrosymmetric NbN: A Polarity Control of Wide-Bandgap AlN2023

    • Author(s)
      Kobayashi Atsushi、Kihira Shunya、Akiyama Toru、Kawamura Takahiro、Maeda Takuya、Ueno Kohei、Fujioka Hiroshi
    • Journal Title

      ACS Applied Electronic Materials

      Volume: 5 Issue: 1 Pages: 240-246

    • DOI

      10.1021/acsaelm.2c01288

    • Related Report
      2022 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Crystal‐Phase Controlled Epitaxial Growth of NbNx Superconductors on Wide‐Bandgap AlN Semiconductors2022

    • Author(s)
      Kobayashi Atsushi、Kihira Shunya、Takeda Takahito、Kobayashi Masaki、Harada Takayuki、Ueno Kohei、Fujioka Hiroshi
    • Journal Title

      Advanced Materials Interfaces

      Volume: 9 Issue: 31 Pages: 2201244-2201244

    • DOI

      10.1002/admi.202201244

    • Related Report
      2022 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Epitaxial growth of superconducting NbN on wide-bandgap AlN2022

    • Author(s)
      Atsushi Kobayashi, Kohei Ueno, Hiroshi Fujioka
    • Journal Title

      JSAP Review

      Volume: 2022 Issue: 0 Pages: n/a

    • DOI

      10.11470/jsaprev.220408

    • ISSN
      2437-0061
    • Related Report
      2022 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Reduction of Twin Boundary in NbN Films Grown on Annealed AlN2022

    • Author(s)
      Kihira Shunya、Kobayashi Atsushi、Ueno Kohei、Fujioka Hiroshi
    • Journal Title

      Crystal Growth & Design

      Volume: 22 Issue: 3 Pages: 1720-1723

    • DOI

      10.1021/acs.cgd.1c01287

    • Related Report
      2021 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Ultrathin rock-salt type NbN films grown on atomically flat AlN/sapphire substrates2021

    • Author(s)
      Kobayashi Atsushi、Ueno Kohei、Fujioka Hiroshi
    • Journal Title

      Journal of Crystal Growth

      Volume: 572 Pages: 126269-126269

    • DOI

      10.1016/j.jcrysgro.2021.126269

    • Related Report
      2021 Annual Research Report
    • Peer Reviewed
  • [Presentation] 窒化物半導体・超伝導体・強誘電体のエピタキシャル融合2023

    • Author(s)
      小林 篤
    • Organizer
      第4回半導体ナノフォトニクス研究会
    • Related Report
      2023 Annual Research Report
    • Invited
  • [Presentation] Study on 2DEG Density in ScAlN/GaN and AlGaN/GaN Heterostructures Based on Simulation and Analytical Modeling2023

    • Author(s)
      Yusuke Wakamoto,Atsushi Kobayashi,Yoshiaki Nakano,Takuya Maeda
    • Organizer
      14th International Conference on Nitride Semiconductors (ICNS-14)
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Structural Properties of Epitaxial ScAlN Films Grown by Sputtering: Experimental and Machine Learning Approaches2023

    • Author(s)
      Atsushi Kobayashi,Yoshio Honda,Takuya Maeda,Kohei Ueno,Hiroshi Fujioka
    • Organizer
      14th International Conference on Nitride Semiconductors (ICNS-14)
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Electronic States at the Interface of β-Nb2N/AlN Superlattices2023

    • Author(s)
      Takahiro Kawamura,Toru Akiyama,Atsushi Kobayashi
    • Organizer
      14th International Conference on Nitride Semiconductors (ICNS-14)
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Selectively regrown heavily Si-doped degenerate GaN contact to AlN/AlGaN HEMTs prepared via pulsed sputtering2023

    • Author(s)
      Ryota Maeda,Takao Kozaka,Kohei Ueno,Atsushi Kobayashi,Hiroshi Fujioka
    • Organizer
      14th International Conference on Nitride Semiconductors (ICNS-14)
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Sputtering Epitaxial Integration of AlN and NbN for Polarity Control and Crystal Phase Manipulation2023

    • Author(s)
      Atsushi Kobayashi,Shunya Kihira,Takahito Takeda,Masaki Kobayashi,Takuya Maeda,Takayuki Harada,Toru Akiyama,Takahiro Kawamura,Kohei Ueno,Hiroshi Fujioka
    • Organizer
      14th International Conference on Nitride Semiconductors (ICNS-14)
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Characterization of Optical Properties and Bandgaps of ScxAl1-xN Epitaxially Grown on GaN Bulk Substrate by Sputtering Method2023

    • Author(s)
      Takuya Maeda,Yusuke Wakamoto,Shota Kaneki,Hajime Fujikura,Atsushi Kobayashi
    • Organizer
      14th International Conference on Nitride Semiconductors (ICNS-14)
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research
  • [Presentation] ScAlN/GaNとAlGaN/GaNに対する数値計算・解析式による2DEGモデリング2023

    • Author(s)
      Y. Wakamoto,A. Kobayashi,Y. Nakano,T. Maeda
    • Organizer
      第42回電子材料シンポジウム(EMS-42)
    • Related Report
      2023 Annual Research Report
  • [Presentation] GaN基板上にスパッタ成長したScAlN薄膜の構造・光学物性の評価2023

    • Author(s)
      T. Maeda,Y. Wakamoto,S. Kaneki,H. Fujikura,A. Kobayashi
    • Organizer
      第42回電子材料シンポジウム(EMS-42)
    • Related Report
      2023 Annual Research Report
  • [Presentation] ScAlN/GaNおよびAlGaN/GaNの二次元電子ガス濃度の数値計算と解析モデルの提案2023

    • Author(s)
      若本裕介,小林篤,中野義昭,前田拓也
    • Organizer
      第84回応用物理学会秋季学術講演会
    • Related Report
      2023 Annual Research Report
  • [Presentation] 分光エリプソメトリーによるScAlN/GaNの光学物性評価2023

    • Author(s)
      前田 拓也,若本 裕介,金木 奨太,藤倉 序章,小林 篤
    • Organizer
      第84回応用物理学会秋季学術講演会
    • Related Report
      2023 Annual Research Report
  • [Presentation] β-Nb2N/AlN超格子構造における界面の電子状態の解析2023

    • Author(s)
      河村 貴宏,秋山 亨,小林 篤
    • Organizer
      第84回応用物理学会秋季学術講演会
    • Related Report
      2023 Annual Research Report
  • [Presentation] ScAlN/GaNヘテロ接合界面における二次元電子ガス濃度の数値計算2023

    • Author(s)
      若本裕介,小林篤,中野義昭,前田拓也
    • Organizer
      第15回ナノ構造・エピタキシャル成長講演会
    • Related Report
      2023 Annual Research Report
  • [Presentation] β-Nb2N/AlN超格子の電子構造解析2023

    • Author(s)
      河村貴宏,秋山亨,小林篤
    • Organizer
      第15回ナノ構造・エピタキシャル成長講演会
    • Related Report
      2023 Annual Research Report
  • [Presentation] NbN/AlNヘテロ構造の作製とAlN極性反転技術への応用2023

    • Author(s)
      小林篤, 上野耕平, 藤岡洋
    • Organizer
      日本学術振興会 第R032産業イノベーションのための結晶成長委員会 第10回研究会
    • Related Report
      2022 Annual Research Report
    • Invited
  • [Presentation] Epitaxial growth of NbN superconductors on lattice-matched AlN wide-bandgap semiconductors (Invited Paper)2023

    • Author(s)
      Atsushi Kobayashi,Shunya Kihira,Kohei Ueno,Hiroshi Fujioka
    • Organizer
      SPIE Photonics West 2023 - Gallium Nitride Materials and Devices XVIII
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] AlNに格子整合する六方晶Nb2N超伝導体のエピタキシャル成長2022

    • Author(s)
      小林 篤, 紀平 俊矢, 武田 崇仁, 小林 正起, 秋山 亨, 河村 貴宏, 原田 尚之, 上野 耕平, 藤岡 洋
    • Organizer
      第83回応用物理学会秋季学術講演会
    • Related Report
      2022 Annual Research Report
  • [Presentation] NbNを利用したAl極性AlN上へのN極性AlNエピタキシャル成長2022

    • Author(s)
      紀平俊矢,小林篤,上野耕平,藤岡洋
    • Organizer
      第69回応用物理学会春季学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] Epitaxial integration of NbN superconductors with AlN2022

    • Author(s)
      Atsushi Kobayashi,Shunya Kihira,Kohei Ueno,Hiroshi Fujioka
    • Organizer
      IWSingularity 2022
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] 格子整合AlN上へのNbN低温エピタキシャル成長2021

    • Author(s)
      趙康,紀平俊矢,小林篤,上野耕平,藤岡洋
    • Organizer
      第13回ナノ構造・エピタキシャル成長講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] 表面平坦化処理を施したAlN上へのNbNエピタキシャル成長2021

    • Author(s)
      紀平俊矢,前田亮太,小林篤,上野耕平,藤岡洋
    • Organizer
      第82回 応用物理学会 秋季学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] 窒化物半導体と超伝導体の融合をめざして2021

    • Author(s)
      小林篤
    • Organizer
      応用物理学会中国四国支部・若手半導体研究会
    • Related Report
      2021 Annual Research Report
    • Invited

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Published: 2021-04-28   Modified: 2025-01-30  

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