フォトニクスとのアナロジーで拓くサーマルフォノンエンジニアリング

• Project/Area Number: 21H04635
• Research Category: Grant-in-Aid for Scientific Research (A)
• Allocation Type: Single-year Grants
• Section: 一般
• Review Section: Medium-sized Section 28:Nano/micro science and related fields
• Research Institution: The University of Tokyo
• Principal Investigator: 野村 政宏 東京大学, 生産技術研究所, 教授 (10466857)
• Co-Investigator(Kenkyū-buntansha): 中村 芳明 大阪大学, 大学院基礎工学研究科, 教授 (60345105) ; 澤野 憲太郎 東京都市大学, 理工学部, 教授 (90409376)
• Project Period (FY): 2021-04-05 – 2026-03-31
• Project Status: Granted (Fiscal Year 2025)
• Budget Amount: ¥42,770,000 (Direct Cost: ¥32,900,000、Indirect Cost: ¥9,870,000); Fiscal Year 2025: ¥5,980,000 (Direct Cost: ¥4,600,000、Indirect Cost: ¥1,380,000); Fiscal Year 2024: ¥5,720,000 (Direct Cost: ¥4,400,000、Indirect Cost: ¥1,320,000); Fiscal Year 2023: ¥5,720,000 (Direct Cost: ¥4,400,000、Indirect Cost: ¥1,320,000); Fiscal Year 2022: ¥5,720,000 (Direct Cost: ¥4,400,000、Indirect Cost: ¥1,320,000); Fiscal Year 2021: ¥19,630,000 (Direct Cost: ¥15,100,000、Indirect Cost: ¥4,530,000)
• Keywords: フォノンエンジニアリング / ナノスケール / 熱伝導 / フォノン輸送 / ナノスケール熱伝導 / ナノスケール熱輸送 / 熱電変換 / フォノン / 熱制御 / 熱伝導計測 / フォノニック結晶 / ナノ構造

Outline of Research at the Start

フォトンとフォノンのアナロジーを切り口として、学術・技術的に先行する光工学を伝熱工学に取り入れることで、半導体ナノ構造を用いた熱流制御技術であるサーマルフォノンエンジニアリング基盤技術を構築し、伝熱制御に新展開を創出する。半導体薄膜や二次元材料にも拡張し、新規物理探索、概念の提唱・実証、新機能の実現などの学術的価値を創出し、高い実用性により広範な産業分野に貢献することを目指す。

Outline of Annual Research Achievements

本研究の目的は、フォトンとフォノンのアナロジーを切り口とし、学術・技術的に先行する光工学を伝熱工学に取り入れることで、半導体ナノ構造を用いた熱流制御技術であるサーマルフォノンエンジニアリング基盤技術を構築し、伝熱制御に新展開を創出することである。室温においても数十ナノメートル程度の距離であれば、熱を輸送するフォノンの波動性に起因した干渉が熱輸送に影響を及ぼすことが期待される。そのため、そのレンジでフォノン散乱体を形成した半導体薄膜中の熱輸送について研究するとともに、デバイス展開につなげる。
本年度は、シリコンゲルマニウム超薄膜を、シリコン薄膜内に何層も形成することで、シリコン薄膜の機械強度を保持したまま表面散乱の増強効果を利用し、面内熱伝導率を低減できないかと考え、その実証に成功した。
研究分担者がシリコンゲルマニウム超薄膜を内包したシリコン活性層を有するSOI基板を作製し、研究代表者が加工し、熱伝導測定を行った。これまでにシリコンで開発した薄膜の面内方向の熱伝導計測に適用なエアブリッジ形状をシリコンゲルマニウム薄膜に適用可能にしたうえで、熱伝導計測を行った。観測した熱伝導率は、期待通り同じ厚みを有するシリコン薄膜より格段に低く、熱電変換効率の増強が期待できる成果を得た。

Current Status of Research Progress

2: Research has progressed on the whole more than it was originally planned.

Reason

計画通り、研究分担者と連携して着実に結果が得られており、順調に進展しているといえる。

Strategy for Future Research Activity

シリコンゲルマニウム超薄膜を内包したシリコン活性層を有するSOI基板を用いて、ゼーベック係数測定および電気伝導率測定を行い、熱電材料の性能指数を算出する。また、本熱電薄膜に、さらに面内方向のフォノン輸送を阻害するナノ構造を形成することで、さらに性能の増強を図る。これまでにシリコンデバイスで確立した平面型熱電変換デバイスの技術をシリコンゲルマニウム薄膜に適用できるように技術開発を進める。

Research Products

• [Journal Article] Planar-type SiGe thermoelectric generator with double cavity structure (2024)
  • Author(s): Koike S.、Yanagisawa R.、Jalabert L.、Anufriev R.、Kurosawa M.、Mori T.、Nomura M.
  • Journal Title: Applied Physics Letters Volume: 124 Issue: 12 Pages: 1-6
  • DOI: 10.1063/5.0191450
  • Peer Reviewed / Open Access / Int'l Joint Research
• [Journal Article] Quasi-ballistic thermal transport in silicon carbide nanowires (2024)
  • Author(s): R. Anufriev, Y. Wu, S. Volz, and M. Nomura
  • Journal Title: Appl. Phys. Lett. Volume: 124 Issue: 2
  • DOI: 10.1063/5.0180685
  • Peer Reviewed / Open Access / Int'l Joint Research
• [Journal Article] Effect of nanostructuring on thermoelectric performance of SiGe thin films (2023)
  • Author(s): Koike Sota、Yanagisawa Ryoto、Kurosawa Masashi、Jha Rajveer、Tsujii Naohito、Mori Takao、Nomura Masahiro
  • Journal Title: Japanese Journal of Applied Physics Volume: 62 Issue: 9 Pages: 095001-095001
  • DOI: 10.35848/1347-4065/acf355
  • Peer Reviewed / Open Access
• [Journal Article] Suppressed thermal transport in mathematically inspired 2D heterosystems (2023)
  • Author(s): Wu Xin、Huang Xin、Yang Lei、Zhang Zhongwei、Guo Yangyu、Volz Sebastian、Han Qiang、Nomura Masahiro
  • Journal Title: Carbon Volume: 213 Pages: 118264-118264
  • DOI: 10.1016/j.carbon.2023.118264
  • Peer Reviewed / Open Access / Int'l Joint Research
• [Journal Article] Super-Ballistic Width Dependence of Thermal Conductivity in Graphite Nanoribbons and Microribbons (2023)
  • Author(s): Huang Xin、Masubuchi Satoru、Watanabe Kenji、Taniguchi Takashi、Machida Tomoki、Nomura Masahiro
  • Journal Title: Nanomaterials Volume: 13 Issue: 12 Pages: 1854-1854
  • DOI: 10.3390/nano13121854
  • Peer Reviewed / Open Access
• [Journal Article] Observation of phonon Poiseuille flow in isotopically purified graphite ribbons (2023)
  • Author(s): Huang Xin、Guo Yangyu、Wu Yunhui、Masubuchi Satoru、Watanabe Kenji、Taniguchi Takashi、Zhang Zhongwei、Volz Sebastian、Machida Tomoki、Nomura Masahiro
  • Journal Title: Nature Communications Volume: 14 Issue: 1 Pages: 2044-2044
  • DOI: 10.1038/s41467-023-37380-5
  • Peer Reviewed / Open Access / Int'l Joint Research
• [Journal Article] Parabolic mirrors collimating and focusing fluxes of thermal phonons (2023)
  • Author(s): Singh Dhanishtha、Anufriev Roman、Nomura Masahiro
  • Journal Title: Applied Physics Letters Volume: 122 Issue: 9 Pages: 092203-092203
  • DOI: 10.1063/5.0137221
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] Impact of nanopillars on phonon dispersion and thermal conductivity of silicon membranes (2023)
  • Author(s): Anufriev Roman、Ohori Daisuke、Wu Yunhui、Yanagisawa Ryoto、Jalabert Laurent、Samukawa Seiji、Nomura Masahiro
  • Journal Title: Nanoscale Volume: 15 Issue: 5 Pages: 2248-2253
  • DOI: 10.1039/d2nr06266f
  • Peer Reviewed / Open Access / Int'l Joint Research
• [Journal Article] Mapping phonon hydrodynamic strength in micrometer-scale graphite structures (2022)
  • Author(s): Huang Xin、Guo Yangyu、Volz Sebastian、Nomura Masahiro
  • Journal Title: Applied Physics Express Volume: 15 Issue: 10 Pages: 105001-105001
  • DOI: 10.35848/1882-0786/ac8f82
  • Peer Reviewed / Open Access / Int'l Joint Research
• [Journal Article] Nanoscale limit of the thermal conductivity in crystalline silicon carbide membranes, nanowires, and phononic crystals (2022)
  • Author(s): Anufriev Roman、Wu Yunhui、Ordonez-Miranda Jose、Nomura Masahiro
  • Journal Title: NPG Asia Materials Volume: 14 Issue: 1 Pages: 35-35
  • DOI: 10.1038/s41427-022-00382-8
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] Review of thermal transport in phononic crystals (2022)
  • Author(s): Nomura Masahiro、Anufriev Roman、Zhang Zhongwei、Maire Jeremie、Guo Yangyu、Yanagisawa Ryoto、Volz Sebastian
  • Journal Title: Materials Today Physics Volume: 22 Pages: 100613-100613
  • DOI: 10.1016/j.mtphys.2022.100613
  • Peer Reviewed / Open Access / Int'l Joint Research
• [Presentation] Si-based Planar-type Thermoelectric Generators (2024)
  • Author(s): M. Nomura and R. Yanagisawa
  • Organizer: TMS2024 153rd Annual Meeting & Exhibition
  • Int'l Joint Research / Invited
• [Presentation] Hydrodynamic heat transfer in graphite micro ribbons (2024)
  • Author(s): M. Nomura
  • Organizer: SNU-IIS UTokyo Joint Workshop on Innovative Micro/Nano Systems
  • Int'l Joint Research / Invited
• [Presentation] フォノンエンジニアリング：フォトンとフォノンの連成による熱輸送の新展開 (2024)
  • Author(s): 野村政宏
  • Organizer: 第170回微小光学研究会
  • Invited
• [Presentation] 同位体純化グラファイトにおける流体力学的熱輸送 (2024)
  • Author(s): 野村政宏
  • Organizer: 応用電子物性分科会2月研究例会
  • Invited
• [Presentation] Field experiment of planar-type Si thermoelectric generator (2023)
  • Author(s): M. Nomura
  • Organizer: International Workshop on Recent Advances in Thermoelectric Materials & Device Development
  • Int'l Joint Research / Invited
• [Presentation] Planar-type Si thermoelectric generator for 100 μW harvesting (2023)
  • Author(s): M. Nomura, R. Yanagisawa, T. Sujii, T. Mori, P. Ruther, and O. Paul
  • Organizer: MRM2023 IUMRS-ICA2023
  • Int'l Joint Research / Invited
• [Presentation] Phononic applications: Thermoelectrics, thermal management, and quantum Transducers (2023)
  • Author(s): M. Nomura
  • Organizer: IEMN-LIMMS Workshop
  • Int'l Joint Research
• [Presentation] Enhancement of Thermal Conductance in Isotopically Purified Graphite by Phonon Hydrodynamic Behavior (2023)
  • Author(s): M. Nomura
  • Organizer: 5th International Conference on Nanomaterials, Materials and Manufacturing Engineering (ICNMM)
  • Int'l Joint Research / Invited
• [Presentation] Hydrodynamic heat transport in isotopically purified graphite (2023)
  • Author(s): X. Huang, Y. Guo, Y. Wu, S. Masubuchi, K. Watanabe, T. Taniguchi, Z. Zhang, S. Volz, T. Machida, and M. Nomura
  • Organizer: 10th US-Japan Joint Seminar on Nanoscale Transport Phenomena
  • Int'l Joint Research / Invited
• [Presentation] Rapid heat flow driven by collective phonons in 12C enriched sub-um graphite (2023)
  • Author(s): X. Huang, Y. Guo, Y. Wu, S. Masubuchi, K. Watanabe, T. Taniguchi, Z. Zhang, S. Volz, T. Machida, and M. Nomura
  • Organizer: Phonons 2023
  • Int'l Joint Research
• [Presentation] Ray phononics for thermal management in micro and nano-electronics (2023)
  • Author(s): R. Anufriev, D. Singh, and M. Nomura
  • Organizer: IEEE-NANO 2023
  • Int'l Joint Research / Invited
• [Presentation] Advances in Si-based Planar-type Thermoelectric Generators (2023)
  • Author(s): M. Nomura
  • Organizer: ICMAT2023
  • Int'l Joint Research
• [Presentation] Behavior of thermal phononis in contrast to photons (2023)
  • Author(s): M. Nomura
  • Organizer: Phononics2023
  • Int'l Joint Research / Invited
• [Presentation] Towards silicon based thermoelectric energy harvesting (2023)
  • Author(s): M. Nomura
  • Organizer: PCOS2023
  • Invited
• [Presentation] 同位体純化グラファイトにおける流体力学的熱輸送 (2023)
  • Author(s): 野村 政宏
  • Organizer: 第84回応用物理学会秋季学術講演会
  • Invited
• [Presentation] Development of Two-dimensional Time-domain Thermoreflectance for Imaging of Microstructures (2022)
  • Author(s): Y. Ogawara, B. Kim, and M. Nomura
  • Organizer: NAMIS Marathon Workshop 2023
  • Int'l Joint Research
• [Presentation] Ballistic phonon and thermal transport at nanoscale (2022)
  • Author(s): R. Anufriev, Y. Wu, S. Gluchko, S. Volz, and M. Nomura
  • Organizer: Plasmons and Vibrational Dynamics in Nanomaterials Seminar
  • Int'l Joint Research / Invited
• [Presentation] Phonon mean free path in Si and SiC nanostructures linked to their thermal conductivity (2022)
  • Author(s): R. Anufriev, J. Ordonez-Miranda, Y. Wu, S. Volz, and M. Nomura
  • Organizer: Photon, Phonon, and Electron Transitions in Coupled Nanoscale Systems 745
  • Int'l Joint Research / Invited
• [Presentation] Hydrodynamic phonon transport in graphite micro ribbons (2022)
  • Author(s): M. Nomura, and X. Huang
  • Organizer: International Conference on Thermodynamics and Thermal Metamaterials 2022
  • Int'l Joint Research / Invited
• [Presentation] Ballistic heat conduction at nanoscale: demonstrations and applications (2022)
  • Author(s): R. Anufriev, A. Ramiere, J. Maire, S. Gluchko, J. Ordonez-Miranda, S. Volz, and M. Nomura
  • Organizer: Colloquium at Los Alamos National Laboratory
  • Int'l Joint Research / Invited
• [Presentation] Thermal phonon mean free path analysis of semiconductor membranes (2022)
  • Author(s): M. Nomura, J. Ordonez-Miranda, and R. Anufriev
  • Organizer: META 2022
  • Int'l Joint Research / Invited
• [Presentation] Heat conduction engineering in semiconductor films by phononic nanostructures (2022)
  • Author(s): M. Nomura
  • Organizer: The 6th A3 Metamaterials Forum
  • Int'l Joint Research / Invited
• [Presentation] Nanostructuring for heat flux engineering in Si nanofilms (2022)
  • Author(s): M. Nomura
  • Organizer: Global Experts Meet on Condensed Matter Physics
  • Int'l Joint Research / Invited
• [Presentation] Ballistic heat conduction at nanoscale: demonstrations and applications (2022)
  • Author(s): R. Anufriev, A. Ramiere, J. Maire, S. Gluchko, J. Ordonez-Miranda, S. Volz, and M. Nomura
  • Organizer: Telluride workshop: Thermal Transport at the Nanoscale
  • Int'l Joint Research / Invited
• [Presentation] Phonon Poiseuille flow in isotopically purified submicron graphite ribbons (2022)
  • Author(s): X. Huang, Y. Guo, Y. Wu, S. Masubuchi, K. Watanabe, T. Taniguchi, Z. Zhang, S. Volz, T. Machida, and M. Nomura
  • Organizer: Compound Semiconductor Week 2022
  • Int'l Joint Research
• [Presentation] Phonon hydrodynamic conduction facilitated with isotopic enrichment (2022)
  • Author(s): X. Huang, Y. Guo, Y. Wu, S. Masubuchi, K. Watanabe, T. Taniguchi, Z. Zhang, S. Volz, T. Machida, and M. Nomura
  • Organizer: Nanoscale and Microscale Heat Transfer VII
  • Int'l Joint Research
• [Presentation] Thermal phononics and photonics: similarity, difference, and hybridization (2022)
  • Author(s): M. Nomura
  • Organizer: Nanoscale and Microscale Heat Transfer VII
  • Int'l Joint Research
• [Presentation] Ray phononics for advanced heat flux manipulations in ballistic regime (2022)
  • Author(s): R. Anufriev, and M. Nomura
  • Organizer: Nanoscale and Microscale Heat Transfer VII
  • Int'l Joint Research
• [Presentation] Nanoscale limit of the thermal conductivity in SiC membranes, nanowires, and phononic crystals (2022)
  • Author(s): R. Anufriev, Y. Wu, J. Ordonez-Miranda, and M. Nomura
  • Organizer: Nanoscale and Microscale Heat Transfer VII
  • Int'l Joint Research
• [Presentation] Phonon mean free path spectroscopy in Si and SiC nanomembranes in the 4-400 K range (2022)
  • Author(s): R. Anufriev, Y. Wu, J. Ordonez-Miranda, M. Nomura
  • Organizer: MRS Spring Meeting and Exhibits
  • Int'l Joint Research
• [Presentation] Advanced thermal transport control in semiconductors by nanostructuring (2021)
  • Author(s): M. Nomura
  • Organizer: POSTEC Korea
  • Int'l Joint Research / Invited
• [Presentation] Ray Phononics for Advanced Heat Flux Manipulations in Ballistic Regime (2021)
  • Author(s): R. Anufriev, M. Nomura
  • Organizer: 2021 Virtual MRS Spring Meeting & Exhibit
  • Int'l Joint Research
• [Presentation] フォノンエンジニアリングによる熱流制御と環境熱発電 (2021)
  • Author(s): 野村 政宏
  • Organizer: 第33回中四国伝熱セミナー
  • Invited
• [Presentation] フォトンとフォノンの連成による熱輸送の新展開 (2021)
  • Author(s): 野村 政宏
  • Organizer: 応用電子物性分科会 7月研究例会
  • Invited
• [Presentation] フォトニクスの視点から見たフォノンエンジニアリングの新展開 (2021)
  • Author(s): 野村 政宏
  • Organizer: 第2回光集積及びシリコンフォトニクス(PICS)研究会
  • Invited
• [Presentation] 光とのアナロジー・融合による熱輸送の新展開 (2021)
  • Author(s): 野村 政宏
  • Organizer: 第5回フォノンエンジニアリング研究会
  • Invited
• [Remarks] 野村研究室Webページ
  • URL: https://www.nlab.iis.u-tokyo.ac.jp/
• [Remarks] 野村研究室Webページ
  • URL: http://www.nlab.iis.u-tokyo.ac.jp/