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Development of X-ray nanobeam optics by precision wavefront control

Research Project

Project/Area Number 21H05004
Research Category

Grant-in-Aid for Scientific Research (S)

Allocation TypeSingle-year Grants
Review Section Broad Section C
Research InstitutionOsaka University

Principal Investigator

Yamauchi Kazuto  大阪大学, 大阪大学・理化学研究所科学技術融合研究センター, 特任教授(常勤) (10174575)

Co-Investigator(Kenkyū-buntansha) 山田 純平  大阪大学, 大学院工学研究科, 助教 (10845027)
佐野 泰久  大阪大学, 大学院工学研究科, 教授 (40252598)
藤 大雪  大阪大学, 大学院工学研究科, 助教 (70910678)
松山 智至  名古屋大学, 工学研究科, 准教授 (10423196)
Project Period (FY) 2021-07-05 – 2025-03-31
Project Status Completed (Fiscal Year 2024)
Budget Amount *help
¥154,180,000 (Direct Cost: ¥118,600,000、Indirect Cost: ¥35,580,000)
Fiscal Year 2024: ¥18,720,000 (Direct Cost: ¥14,400,000、Indirect Cost: ¥4,320,000)
Fiscal Year 2023: ¥29,380,000 (Direct Cost: ¥22,600,000、Indirect Cost: ¥6,780,000)
Fiscal Year 2022: ¥49,140,000 (Direct Cost: ¥37,800,000、Indirect Cost: ¥11,340,000)
Fiscal Year 2021: ¥56,940,000 (Direct Cost: ¥43,800,000、Indirect Cost: ¥13,140,000)
Keywords精密計測 / 精密加工 / X線ミラー / X線自由電子レーザー / X線顕微鏡
Outline of Research at the Start

X線自由電子レーザーや次世代の蓄積リング型X線源から得られる空間的にコヒーレントなX線を極限まで活用することができるナノビームを形成し、X線非線形光学や高分解能X線顕微鏡科学などの未踏の学術分野を開拓する。特に光学系の開発では、X線集光の課題であるコマ収差を効果的に抑制できる凸凹面複合ミラー光学系を実現し、波動光学を駆使した補償光学に基づく波面の精密制御を行うことによって、コヒーレントX線の極限サイズ(10nm以下)のナノビームを実現する。

Outline of Final Research Achievements

The objective of this research is to achieve sub-10 nm focusing of coherent X-rays. We proposed, designed and realized an optical system that uses two mirrors each for horizontal and vertical focusing, in order to satisfy the sine condition and reduce coma aberration, instead of the conventional Karkpatrick-Baez (KB) optical system that uses one mirror each for horizontal and vertical focusing. We also succeeded in observing nonlinear optical phenomena using the nanofocused beam with an unprecedentedly strong photon field.

Academic Significance and Societal Importance of the Research Achievements

学術的・社会的意義として,X線自由電子レーザーの極限集光を目指す中で,フーリエ光学の全面的な適用によってコヒーレントX線光学とも呼ぶべき学問領域を拓く点,X線領域の強光子場物理学への貢献,社会的に広く有用性が認められている放射光分析技術の高度化・高分解能化に大きく貢献する点などが挙げられる.

Assessment Rating
Ex-post Assessment

A: 期待どおりの成果があった

Assessment Rating
Interim Assessment

A: 順調に研究が進展しており、期待どおりの成果が見込まれる

Report

(10 results)
  • 2025 Ex-post Assessment (Comments) ( PDF )
  • 2024 Annual Research Report   Final Research Report ( PDF )
  • 2023 Abstract (Interim Assessment) ( PDF )   Annual Research Report   Interim Assessment (Comments) ( PDF )
  • 2022 Annual Research Report
  • 2021 Abstract ( PDF )   Comments on the Screening Results ( PDF )   Annual Research Report
  • Research Products

    (73 results)

All 2024 2023 2022 2021 Other

All Int'l Joint Research (3 results) Journal Article (8 results) (of which Int'l Joint Research: 2 results,  Peer Reviewed: 8 results,  Open Access: 8 results) Presentation (62 results) (of which Int'l Joint Research: 51 results,  Invited: 13 results)

  • [Int'l Joint Research] APS (Advanced Light Source)(米国)

    • Related Report
      2023 Annual Research Report
  • [Int'l Joint Research] APS (Advanced Light Source)(米国)

    • Related Report
      2022 Annual Research Report
  • [Int'l Joint Research] APS (Advanced Light Source)(米国)

    • Related Report
      2021 Annual Research Report
  • [Journal Article] High-Efficiency Polishing of Polymer Surface Using Catalyst-Referred Etching2024

    • Author(s)
      Toh Daisetsu、Takeda Kodai、Kayao Kiyoto、Ohkubo Yuji、Yamauchi Kazuto、Sano Yasuhisa
    • Journal Title

      International Journal of Automation Technology

      Volume: 18 Issue: 2 Pages: 240-247

    • DOI

      10.20965/ijat.2024.p0240

    • ISSN
      1881-7629, 1883-8022
    • Year and Date
      2024-03-05
    • Related Report
      2024 Annual Research Report 2023 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Extreme focusing of hard X-ray free-electron laser pulses enables 7 nm focus width and 1022 W cm^-2 intensity2024

    • Author(s)
      Yamada Jumpei、Matsuyama Satoshi、Inoue Ichiro、Osaka Taito、Inoue Takato、Nakamura Nami、Tanaka Yuto、Inubushi Yuichi、Yabuuchi Toshinori、Tono Kensuke、Tamasaku Kenji、Yumoto Hirokatsu、Koyama Takahisa、Ohashi Haruhiko、Yabashi Makina、Yamauchi Kazuto
    • Journal Title

      Nature Photonics

      Volume: - Issue: 7 Pages: 685-690

    • DOI

      10.1038/s41566-024-01411-4

    • Related Report
      2024 Annual Research Report 2023 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Role of Photoelectrochemical Oxidation in Enabling High-Efficiency Polishing of Gallium Nitride2023

    • Author(s)
      Kayao Kiyoto、Toh Daisetsu、Yamauchi Kazuto、Sano Yasuhisa
    • Journal Title

      ECS Journal of Solid State Science and Technology

      Volume: 12 Issue: 6 Pages: 063005-063005

    • DOI

      10.1149/2162-8777/acde61

    • Related Report
      2023 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Catalyst enhancement approach for improving the removal rate and stability of silica glass polishing via catalyzed chemical etching in pure water2023

    • Author(s)
      Toh Daisetsu、Kayao Kiyoto、Bui Pho Van、Inagaki Kouji、Morikawa Yoshitada、Yamauchi Kazuto、Sano Yasuhisa
    • Journal Title

      Precision Engineering

      Volume: 84 Pages: 21-27

    • DOI

      10.1016/j.precisioneng.2023.07.003

    • Related Report
      2023 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] Propagation-based phase-contrast imaging method for full-field X-ray microscopy using advanced Kirkpatrick-Baez mirrors2023

    • Author(s)
      Tanaka Yuto、Yamada Jumpei、Inoue Takato、Kimura Takashi、Shimura Mari、Kohmura Yoshiki、Yabashi Makina、Ishikawa Tetsuya、Yamauchi Kazuto、Matsuyama Satoshi
    • Journal Title

      Optics Express

      Volume: 31 Issue: 16 Pages: 26135-26135

    • DOI

      10.1364/oe.493789

    • Related Report
      2023 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Bias-assisted photoelectrochemical planarization of GaN (0001) with impurity concentration distribution2023

    • Author(s)
      Toh D.、Kayao K.、Ohnishi R.、Osaka A. I.、Yamauchi K.、Sano Y.
    • Journal Title

      AIP Advances

      Volume: 13 Issue: 9

    • DOI

      10.1063/5.0151387

    • Related Report
      2023 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Fabrication of YAG ceramics surface without damage and grain boundary steps using catalyzed chemical wet etching2023

    • Author(s)
      Toh Daisetsu、Kayao Kiyoto、Yamauchi Kazuto、Sano Yasuhisa
    • Journal Title

      CIRP Journal of Manufacturing Science and Technology

      Volume: 47 Pages: 1-6

    • DOI

      10.1016/j.cirpj.2023.09.001

    • Related Report
      2023 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Optimal deformation procedure for hybrid adaptive x-ray mirror based on mechanical and piezo-driven bending system2021

    • Author(s)
      Inoue Takato、Nishioka Yuka、Matsuyama Satoshi、Sonoyama Junki、Akiyama Kazuteru、Nakamori Hiroki、Ichii Yoshio、Sano Yasuhisa、Shi Xianbo、Shu Deming、Wyman Max D.、Harder Ross、Kohmura Yoshiki、Yabashi Makina、Assoufid Lahsen、Ishikawa Tetsuya、Yamauchi Kazuto
    • Journal Title

      Review of Scientific Instruments

      Volume: 92 Issue: 12 Pages: 123706-123706

    • DOI

      10.1063/5.0070465

    • Related Report
      2021 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Presentation] Leakage current reduction with atomically smooth GaN (0001) surface fabricated by photoelectrochemical reaction assisted catalyst-referred etching2024

    • Author(s)
      K. Kayao, T. Fukagawa, D. Toh, J. Yamada, K. Yamauchi, Y. Sano
    • Organizer
      12th International Workshop on Nitride Semiconductors (IWN 2024)
    • Related Report
      2024 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Preparation of a highly smoothed Si surface via catalyst-referred etching2024

    • Author(s)
      D. Toh, J. Yamada, K. Yamauchi, Y. Sano
    • Organizer
      The 19th International Conference on Planarization/CMP Technology 2024 (ICPT2024)
    • Related Report
      2024 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Ultra-intense sub-10 nm focusing at a hard X-ray FEL2024

    • Author(s)
      J. Yamada
    • Organizer
      15th International Conference on Synchrotron Radiation Instrumentation (SRI2024)
    • Related Report
      2024 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Ultra-intense XFEL 7 nm focusing with advanced KB mirror2024

    • Author(s)
      J. Yamada
    • Organizer
      16th International Conference on X-Ray Microscopy (XRM2024)
    • Related Report
      2024 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] XAFS imaging & phase-contrast imaging using full-field X-ray microscope based on advanced KB mirror2024

    • Author(s)
      A. Yakushigawa, J. Yamada, A. Nagamatsu, T. Uruga, H. Takano, H. Matsui, D. Toh, Y. Sano, M. Yabashi, and K. Yamauchi
    • Organizer
      16th International Conference on X-Ray Microscopy (XRM2024)
    • Related Report
      2024 Annual Research Report
    • Int'l Joint Research
  • [Presentation] High-pressure Plasma Etching Technique Up to 900 kPa for Damage-free Ultra-precision Machining2024

    • Author(s)
      S. Matsumura, M. Miyake, Y. Sano, K. Morita, K. Yamauchi
    • Organizer
      39th ASPE Annual Meeting
    • Related Report
      2024 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Development of X-ray wavefront-corrected multilayer mirrors for high-resolution holography imaging2024

    • Author(s)
      K. Shioi, J. Yamada, A. Ito, I. Inoue, T. Osaka, G. Yamaguchi, Y. Inubushi, D. Toh, Y. Sano, M. Yabashi, and K. Yamauchi
    • Organizer
      International Conference on X-ray Optics and Applications (XOPT2024)
    • Related Report
      2024 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Ultra-intense hard X-ray FEL with sub-10 nm focusing2024

    • Author(s)
      J. Yamada
    • Organizer
      13th Ringberg Workshop: Science with FELs
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Generation of extremely intense photon field by condensation of X-ray free electron laser SACLA less than 10 nm2023

    • Author(s)
      K. Yamauchi
    • Organizer
      International Conference on X-ray Optics and Applications (XOPT2023)
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Design, fabrication, and implementation of XFEL sub-10 nm focusing mirrors2023

    • Author(s)
      J. Yamada, T. Inoue, S. Matsuyama, N. Nakamura, Y. Tanaka, A. Ito, K. Shioi, T. Osaka, I. Inoue, Y. Inubushi, Y. Sano, M. Yabashi, and K. Yamauchi
    • Organizer
      International Conference on X-ray Optics and Applications (XOPT2023)
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Surface finishing of a micro channel-cut crystal monochromator using high-pressure plasma etching2023

    • Author(s)
      S. Matsumura, I. Ogasahara, T. Osaka, I. Inoue, K. Yamauchi, M. Yabashi and Y, Sano
    • Organizer
      International Conference on X-ray Optics and Applications (XOPT2023)
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Direct focus characterization of sub-10 nm XFEL using speckle patterns from random nanoparticles2023

    • Author(s)
      A. Ito, J. Yamada, Y. Tanaka, K. Shioi, S. Matsuyama, T. Inoue, I. Inoue, T. Osaka, Y. Inubushi, M. Yabashi, T. Ishikawa, and K. Yamauchi
    • Organizer
      International Conference on X-ray Optics and Applications (XOPT2023)
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Development of distortion-free processing for narrow-gap channel-cut crystal monochromators using plasma chemical vaporization machining with a wire electrode2023

    • Author(s)
      I. Ogasahara, S. Matsumura, T. Osaka, K. Yamauchi, M. Yabashi and Y, Sano
    • Organizer
      International Conference on X-ray Optics and Applications (XOPT2023)
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Beam diameter characterization of sub-10 nm XFEL using ptychography2023

    • Author(s)
      K. Shioi, J. Yamada, A. Ito, Y. Tanaka, S. Matsuyama, T. Inoue, T. Osaka, I. Inoue, Y. Inubushi, M. Yabashi, T. Ishikawa, and K. Yamauchi
    • Organizer
      International Conference on X-ray Optics and Applications (XOPT2023)
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Development of phase-contrast imaging method for X-ray nanotomography with full-field X-ray microscope based on AKB mirror2023

    • Author(s)
      A. Yakushigawa, J. Yamada, Y. Tanaka, Y. Sano, H. Takano, M. Yabashi, T. Ishikawa, and K. Yamauchi
    • Organizer
      International Conference on X-ray Optics and Applications (XOPT2023)
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research
  • [Presentation] High-precision finihing method for a narrow-gap channel-cut crystal X-ray monochromators using atmospheric-pressure plasma with a wire electrode2023

    • Author(s)
      S. Matsumura, I. Ogasahara, T. Osaka, K. Yamauchi, M. Yabashi and Y. Sano
    • Organizer
      Optical Fabrication and Testing (OF&T)
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Catalyst Referred Etching Method for High Precision Optical Elements2023

    • Author(s)
      K. Yamauchi
    • Organizer
      International Conference on Precision Engineering and Sustainable Manufacturing 2023(PRESM2023)
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Advanced Mirror-Based Optics for Hard X-Ray Focusing and Imaging Applications2023

    • Author(s)
      J. Yamada
    • Organizer
      Gordon Research Conference: X-ray Scienece 2023
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] XFEL sub-10 nm focusing with 10^22 W/cm^2 intensity: wavefront corrected mirror and focus characterization2023

    • Author(s)
      J. Yamada
    • Organizer
      PhotonMEADOW2023
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Determination of astigmatism in XFEL sub-10 nm focusing system using speckle patterns from random nanoparticles2023

    • Author(s)
      A. Ito, J. Yamada, Y. Tanaka, K. Shioi, I. Inoue, T. Osaka, G. Yamaguchi, Y. Inubushi, M. Yabashi and K. Yamauchi
    • Organizer
      PhotonMEADOW2023
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research
  • [Presentation] High-speed planarization of GaN (0001) substrate using catalyst-referred etching enhanced with positive-biased photoelectrochemical oxidation2023

    • Author(s)
      D. Toh, K. Kayao, K. Yamauchi and Y. Sano
    • Organizer
      International Conference on Silicon Carbide and Related Materials (ICSCRM2023)
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Characteristics of Photoelectrochemical Oxidation Enabling High-efficiency Polishing of Gallium Nitride2023

    • Author(s)
      K. Kayao, D. Toh, K. Yamauchi and Y. Sano
    • Organizer
      International Conference on Silicon Carbide and Related Materials (ICSCRM2023)
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Distortion-free Processing Method Using Plasma Chemical Vaporization Machining with a Wire Electrode for Narrow-gap Channel-cut Crystal Monochromators2023

    • Author(s)
      I. Ogasahara, S. Matsumura, K. Yamauchi and Y. Sano; T. Osaka, M. Yabashi
    • Organizer
      American Society for Precision Engineering (ASPE) 2023 Annual Meeting
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Surface Planarization of YAG Ceramics Using Catalyst-Referred Etching2023

    • Author(s)
      Y. Yoshida, K. Kayao, D. Toh, K. Yamauchi and Y. Sano
    • Organizer
      American Society for Precision Engineering (ASPE) 2023 Annual Meeting
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Sub-10 nm focusing of hard X-ray free-electron laser for reaching 10^22 W/cm^2 intensity2023

    • Author(s)
      J. Yamada
    • Organizer
      The International Conference on Optical and Photonic Engineering (icOPEN) 2023
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Recent Developments in Reflective X-ray Focusing Devices for Synchrotron Radiation Science2022

    • Author(s)
      K. Yamauchi
    • Organizer
      14th International Conference on Synchrotron Radiation Instrumentation (SRI2021)
    • Related Report
      2022 Annual Research Report 2021 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] XFEL sub-10nm focusing system using Wolter type III-based advanced KB mirrors" 14th International Conference on Synchrotron Radiation Instrumentation (SRI2021)2022

    • Author(s)
      J. Yamada, S. Matsuyama, T. Inoue, N. Nakamura, Y. Tanaka, A. Ito, T. Osaka, I. Inoue, Y. Inubushi, H. Yumoto, T. Koyama, H. Ohashi, K. Yamauchi, and M. Yabashi
    • Organizer
      14th International Conference on Synchrotron Radiation Instrumentation (SRI2021)
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Development of hard X-ray sub-5-nm focusing system with an adaptive multilayer focusing mirror2022

    • Author(s)
      T. Inoue, S. Matsuyama, Y. Tanaka, Y. Ichii, J. Yamada, Y. Sano, Y. Kohmura, M. Yabashi, T. Ishikawa, and K. Yamauchi
    • Organizer
      14th International Conference on Synchrotron Radiation Instrumentation (SRI2021)
    • Related Report
      2022 Annual Research Report 2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Surface processing of micro-channel-cut crystal monochromator using plasma chemical vaporization machining with wire electrode2022

    • Author(s)
      S. Matsumura, S. Nakano, T. Osaka, I. Inoue, M. Yabashi, and K. Yamauchi
    • Organizer
      14th International Conference on Synchrotron Radiation Instrumentation (SRI2021)
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Development of image-based wavefront measurement for adaptive full-field X-ray microscopy2022

    • Author(s)
      Y. Tanaka, S. Matsuyama, T. Inoue, N. Nakamura, J. Yamada, Y. Kohmura, M. Yabashi, K. Omote, T. Ishikawa, and K. Yamauchi
    • Organizer
      14th International Conference on Synchrotron Radiation Instrumentation (SRI2021)
    • Related Report
      2022 Annual Research Report 2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Fabrication of XFEL sub-10 nm focusing optics based on advanced Kirkpatrick-Baez mirrors2022

    • Author(s)
      J. Yamada, S. Matsuyama, T. Inoue, A. Ito, T. Osaka, I. Inoue, Y. Inubushi, H. Yumoto, T. Koyama, H. Ohashi, K. Yamauchi, and M. Yabashi
    • Organizer
      7th International Workshop on Metrology for X-ray Optics, Mirror Design and Fabrication (IWXM2022)
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Development of mirror-based full-field X-ray microscope toward XANES nano-CT measurement2022

    • Author(s)
      J. Yamada, S. Matsuyama, Y. Tanaka, H. Takano, T. Uruga, K. Yamauchi and M. Yabashi
    • Organizer
      7th International Conference on X-ray Optics and Applications 2022 (XOPT2022) in OPIC2022
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Stretching pulse duration of hard X-ray laser up to 50 ps using rotated-inclined crystal2022

    • Author(s)
      S. Matsumura, S. Nakano, T. Osaka, I. Inoue, J. Yamada, T. Togashi, K. Tono, K. Yamauchi, Y. Sano and M. Yabashi
    • Organizer
      7th International Conference on X-ray Optics and Applications 2022 (XOPT2022) in OPIC2022
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Propagation-based phase-contrast imaging for full-field X-ray microscope with advanced Kirkpatrick-Baez mirror2022

    • Author(s)
      Y. Tanaka, S. Matsuyama, T. Inoue, J. Yamada, T. Kimura, M. Shimura, Y. Kohmura, M. Yabashi, T. Ishikawa, and K. Yamauchi
    • Organizer
      7th International Conference on X-ray Optics and Applications 2022 (XOPT2022) in OPIC2022
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Beam size characterization method of sub-10 nm focused XFEL using uniform nanospheres2022

    • Author(s)
      A. Ito, J. Yamada, S. Matsuyama, T. Inoue, Y. Tanaka, I. Inoue, T. Osaka, H. Yumoto, T. Koyama, H. Ohashi, M. Yabashi, T. Ishikawa, and K. Yamauchi
    • Organizer
      7th International Conference on X-ray Optics and Applications 2022 (XOPT2022) in OPIC2022
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Advanced Kirkpatrick-Baez mirror optics based on Wolter type I and III configurations for hard X-ray full-field microscopy2022

    • Author(s)
      J. Yamada, S. Matsuyama, Y. Tanaka, H. Takano, T. Uraga, K. Yamauchi, and M. Yabashi
    • Organizer
      15th International Conference on X-ray Microscopy (XRM2022)
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Propagation-based phase-contrast imaging with full-field X-ray microscope using advanced Kirkpatrick-Baez mirrors2022

    • Author(s)
      Y. Tanaka, S. Matsuyama, J. Yamada, T. Inoue, T. Kimura, M. Shimura, Y. Kohmura, M. Yabashi, T. Ishikawa, and K. Yamauchi
    • Organizer
      15th International Conference on X-ray Microscopy (XRM2022)
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] XFEL sub-10 nm focusing system based on X-ray imaging mirrors2022

    • Author(s)
      A. Ito, J. Yamada, S. Matsuyama, T. Inoue, Y. Tanaka, I. Inoue, T. Osaka, Y. Inubushi, H. Yumoto, T. Koyama, H. Ohashi, M. Yabashi, K. Yamauchi
    • Organizer
      15th International Conference on X-ray Microscopy (XRM2022)
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Fabrication of an atomically smooth polycrystalline surface without grain boundary steps using catalyst-referred etching2022

    • Author(s)
      D. Toh, P. V. Bui, S. Matsuyama, K. Yamauchi and Y. Sano
    • Organizer
      Euspen's 22nd International Conference
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Preparation of highly planarized optical surface on Si substrate via catalyst-referred etching2022

    • Author(s)
      K. Itagaki, D. Toh, P. V. Bui, S. Matsuyama, K. Yamauchi and Y. Sano
    • Organizer
      Euspen's 22nd International Conference
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Planarization of polymer materials using catalytic reaction in pure water2022

    • Author(s)
      K. Takeda, D. Toh, P. V. Bui, S. Matsuyama, K. Yamauchi and Y. Sano
    • Organizer
      Euspen's 22nd International Conference
    • Related Report
      2022 Annual Research Report
  • [Presentation] XFEL single-nanometer focusing system at SACLA2022

    • Author(s)
      J. Yamada, S. Matsuyama, T. Inoue, A. Ito, I. Inoue, T. Osaka, Y. Inubushi, H. Yumoto, T. Koyama, H. Ohashi, K. Yamauchi, M. Yabashi
    • Organizer
      The 15th Pacific Rim Conference on Lasers and Electro-Optics (CLEO-PR 2022)
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] XFEL Sub-10 nm Focusing Mirror System at SACLA for Achieving 10^22 w/cm^2 Intensity2022

    • Author(s)
      J. Yamada, K. Yamauchi and M. Yabashi
    • Organizer
      The 40th International Free Electron Laser Conference (FEL2022)
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Sub-10 nm XFEL focusing mirror system at SACLA for 10^22 W/cm^2 intensity2022

    • Author(s)
      J. Yamada, K. Yamauchi and M. Yabashi
    • Organizer
      The international Science@FELs 2022 conference
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] High-Speed Catalyst-Referred Etching of Gallium Nitride Assisted by Ultraviolet Light Irradiation" American Society for Precision Engineering (ASPE) 2022 Annual Meeting2022

    • Author(s)
      K. Kayao, D. Toh, K. Yamauchi and Y. Sano
    • Organizer
      American Society for Precision Engineering (ASPE) 2022 Annual Meeting
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Surface planarization of polycrystalline silicon carbide by catalyst-referred etching2022

    • Author(s)
      K. Futamura, D. Toh, K. Yamauchi and Y. Sano
    • Organizer
      American Society for Precision Engineering (ASPE) 2022 Annual Meeting
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Development of a Fourier Ptychography-based wavefront measurement method for mirror-based full-field X-ray microscopes2022

    • Author(s)
      Y. Tanaka, S. Kurimoto, T. Inoue, J. Yamada, Y. Kohmura, M. Yabashi, T. Ishikawa, and S. Matsuyama
    • Organizer
      Asia-Oceania Conference on Synchrotron Radiation Instrumentation 2022(AO-SRI2022)
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Damage-free processing of narrow-gap channel-cut crystal X-ray monochromators using atmospheric-pressure plasma with a wire electrode2022

    • Author(s)
      I. Ogasahara, S. Matsumura, T. Osaka, K. Yamauchi, M. Yabashi and Y. Sano
    • Organizer
      The 19th International Conference on Precision Engineering (ICPE2022)
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 硬X線領域におけるバックグラウンドフリー強度自己相関法の実証2022

    • Author(s)
      大坂泰斗,井上伊知郎,山田純平,犬伏雄一,登野健介,松村正太郎,中野勝太,小笠原伊織,佐野泰久,山内和人,玉作賢治,矢橋牧名
    • Organizer
      第35回日本放射光学会年会・放射光科学合同シンポジウム
    • Related Report
      2021 Annual Research Report
  • [Presentation] 全反射結像素子を用いた色収差の無いX線ナノイメージング/CT装置の開発2022

    • Author(s)
      山田純平,松山智至,田中優人,山内和人,宇留賀朋哉,高野秀和,矢橋牧名
    • Organizer
      第35回日本放射光学会年会・放射光科学合同シンポジウム
    • Related Report
      2021 Annual Research Report
  • [Presentation] dvanced KBミラーに基づく硬X線自由電子レーザー sub-10 nm 集光システム2022

    • Author(s)
      山田純平,松山智至,井上陽登,伊藤篤輝,田中優人,大坂泰斗,井上伊知郎,犬伏雄一,小山貴久,湯本博勝,大橋治彦,山内和人,矢橋牧名
    • Organizer
      第35回日本放射光学会年会・放射光科学合同シンポジウム
    • Related Report
      2021 Annual Research Report
  • [Presentation] 形状可変ミラーを用いたX線sub-5 nm集光システムの開発2022

    • Author(s)
      井上陽登,松山智至,田中優人,伊藤篤輝,一井愛雄,山田純平,佐野泰久,香村芳樹,矢橋牧名,石川哲也,山内和人
    • Organizer
      第35回日本放射光学会年会・放射光科学合同シンポジウム
    • Related Report
      2021 Annual Research Report
  • [Presentation] 結像型 X 線顕微鏡を用いた波動伝搬ベースの位相イメージング2022

    • Author(s)
      田中優人,松山智至,井上陽登,山田純平,木村隆志,志村まり,香村芳樹,矢橋牧名,石川哲也,山内和人
    • Organizer
      第35回日本放射光学会年会・放射光科学合同シンポジウム
    • Related Report
      2021 Annual Research Report
  • [Presentation] 高空間分解能な結像型X線顕微鏡のためのin-situ波面計測法の開発2022

    • Author(s)
      田中優人,松山智至,井上陽登,山田純平,香村芳樹,矢橋牧名,表和彦,石川哲也,山内和人
    • Organizer
      2022年度精密工学会春季大会学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] XFEL sub-10nm focusing system using Wolter type III-based advanced KB mirrors2022

    • Author(s)
      J. Yamada, S. Matsuyama, T. Inoue, N. Nakamura, Y. Tanaka, A. Ito, T. Osaka, I. Inoue, Y. Inubushi, H. Yumoto, T. Koyama, H. Ohashi, K. Yamauchi, and M. Yabashi
    • Organizer
      14th International Conference on Synchrotron Radiation Instrumentation (SRI2021)
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 触媒表面基準エッチング法を用いた粒界段差フリーな 超平滑多結晶材料表面の作製2021

    • Author(s)
      藤大雪,Bui Van Pho,松山智至,佐野泰久,山内和人
    • Organizer
      2021年度精密工学会秋季大会学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] 圧電素子駆動型形状可変ミラーを用いたX線sub-5 nm集光システムの開発(第2報) 差分成膜を組み合わせたハイブリッド波面修正2021

    • Author(s)
      井上陽登,松山智至,田中優人,二村浩平,一井愛雄,山田純平,佐野泰久,香村芳樹,矢橋牧名,石川哲也,山内和人
    • Organizer
      2021年度精密工学会秋季大会学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] 結像型X線顕微鏡における位相イメージング手法の開発2021

    • Author(s)
      田中優人,松山智至,井上陽登,山田純平,木村隆志,志村まり,香村芳樹,矢橋牧名,石川哲也,山内和人
    • Organizer
      2021年度精密工学会秋季大会学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] 結像型 X 線顕微鏡を用いた位相イメージング手法の開発2021

    • Author(s)
      田中優人,松山智至,井上陽登,山田純平,木村隆志,志村まり,香村芳樹,矢橋牧名,石川哲也,山内和人
    • Organizer
      日本光学会年次学術講演会 Optics and Photonics Japan 2021
    • Related Report
      2021 Annual Research Report
  • [Presentation] Optimization of mirror deformation strategy using mechanical and piezoelectric bending system2021

    • Author(s)
      T. Inoue, Y. Nishioka, S. Matsuyama, J. Sonoyama, K. Akiyama, H. Nakamori, Y. Sano, Y. Kohmura, M. Yabashi, T. Ishikawa, L. Assoufid, K. Yamauchi
    • Organizer
      SPIE Optics+Photonics2021
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Image-based wavefront measurement for full-field X-ray microscopy2021

    • Author(s)
      Y. Tanaka, S. Matsuyama, T. Inoue, N. Nakamura, J. Yamada, Y. Kohmura, M. Yabashi, K. Omote, T. Ishikawa, K. Yamauchi
    • Organizer
      SPIE Optics+Photonics2021
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Atomically controlled polishing for precision optics2021

    • Author(s)
      K. Yamauchi
    • Organizer
      The 7th International Conference on Nanomanufacturing (nanoMan2021)
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research / Invited

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Published: 2021-07-08   Modified: 2026-03-16  

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