Novel mode-matched MEMS gyroscope with high capacity to tune frequency and Q-factor
| Project/Area Number |
21J11628
|
|---|
| Research Category |
Grant-in-Aid for JSPS Fellows
|
| Allocation Type | Single-year Grants |
|---|
| Section | 国内 |
|---|
| Review Section |
Basic Section 20010:Mechanics and mechatronics-related
|
|---|
| Research Institution | Tohoku University |
|---|
Principal Investigator |
陳 建霖 東北大学, 工学研究科, 特別研究員(DC2)
|
|---|
| Project Period (FY) |
2021-04-28 – 2023-03-31
|
| Project Status |
Completed (Fiscal Year 2022)
|
| Budget Amount *help |
¥1,500,000 (Direct Cost: ¥1,500,000)
Fiscal Year 2022: ¥700,000 (Direct Cost: ¥700,000)
Fiscal Year 2021: ¥800,000 (Direct Cost: ¥800,000)
|
|---|
| Keywords | Rate integrating gyro / MEMS resonator / triple mass resonator / Triple mass resonator / Anchor loss tuning / Squeeze film damping / Frequency tuning / Mode matched resonator |
|---|
| Outline of Research at the Start |
We would like to design a highly symmetric resonator for frequency modulated (FM) gyroscope, which can further increase the performance of MEMS gyroscope and can be applied to the automotive applications.
The novel gyroscope resonator will be design and fabricated. The device will be evaluated in the vacuum chamber firstly and the electrostatic tuning method to achieve frequency and Q-factor matching will be investigated.
Furthermore, this resonator will be vacuum packaged and applied to the FM system. The performance of this highly symmetric resonator will be characterized in the FM system.
|
| Outline of Annual Research Achievements |
This research introduces a novel triple mass resonator (TMR) and a two-axis symmetric resonator with multiple proof masses for improving stiffness sensitivity and tuning capability of MEMS res- onators. The frequencies of the anti-phase (ωanti) and in-phase (ωin) modes have a strong dependency on the suspension and inner stiffness, respectively. Therefore the frequency difference can be electro- statically tuned by either suspension stiffness nor inner stiffness. The amplitude ratio can be adjusted largely by decreasing the inner stiffness, which brings a significant change in Q-factor related to anchor loss or squeeze film damping, while a negligible shift in frequency ωanti. When the frequency ωanti is tuned by decreasing suspension stiffness of two main proof masses, only a slight change in the mode shape, i.e. the amplitude ratio, is observed causing a minor adjustment to Q-factor. Therefore the frequency ωanti and Q-factor can be tuned independently under a little mutual influence.
A two-axis symmetric tuning fork resonator based on TMR technique is applied for QFM/RIG. Two dynamically equivalent proof masses provide a balance dynamic system and four extra-small masses is implemented in between them, which could tune the Q-factor of two anti-phase modes independently with small effect on the frequency. Frequency is mainly affected by suspension stiffness and Q-factor is strongly dependent on the squeeze film damping through the mode coupling between two balanced masses and small masses.
|
| Research Progress Status |
令和4年度が最終年度であるため、記入しない。
|
| Strategy for Future Research Activity |
令和4年度が最終年度であるため、記入しない。
|
Report
(2 results)
Research Products
(13 results)
