Controlling the polarity of ScAlN via formation of cation/anion vacancy
| Project/Area Number |
21K04168
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Multi-year Fund |
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| Section | 一般 |
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| Review Section |
Basic Section 21050:Electric and electronic materials-related
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| Research Institution | National Institute of Advanced Industrial Science and Technology |
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Principal Investigator |
Anggraini SriAyu 国立研究開発法人産業技術総合研究所, エレクトロニクス・製造領域, 主任研究員 (80784123)
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| Project Period (FY) |
2021-04-01 – 2024-03-31
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| Project Status |
Completed (Fiscal Year 2023)
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| Budget Amount *help |
¥4,160,000 (Direct Cost: ¥3,200,000、Indirect Cost: ¥960,000)
Fiscal Year 2023: ¥1,950,000 (Direct Cost: ¥1,500,000、Indirect Cost: ¥450,000)
Fiscal Year 2022: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Fiscal Year 2021: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000)
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| Keywords | ScAlN / piezoelectric / polarity inversion / sputtering / thin films / AlN / nitride / polarity / defect / vacancy / Piezoelectricity / aluminum nitride / scandium / thin film |
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| Outline of Research at the Start |
This proposal aims to control the polarization direction of ScAlN piezoelectric thin films by forming cation vacancy and/or anion vacancy via doping.On application side, we will be the first to report the fabrication of N-polar ScAlN via doping that will significantly improve the capability of the current RF filter. On scientific aspect, I expect to gain fundamental understanding on the role of cation/anion vacancy on polarity inversion in nitride materials.
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| Outline of Annual Research Achievements |
Previously,the polarity of ScAlN was succesfully inversed from Al-polar to N-polar by addition of Si or Ge or Sn. However, addition of carbon (C) or 2+ cation such as Mg or Zn into ScAlN could not cause polarity inversion. This fiscal year we found via XPS measurement that Si or Ge indeed exist as 4+ cation in the thin film that occupied metal site forming aluminum or cation vacancy. However C was found to form carbon-metal bond which suggested that C sits on nitrogen sites forming nitrogen or anion vacancy which transform metal bond coordination and led to polarity inversion. Thus, the presence of cation vacancy is critical for polarity inversion. On the contrary, anion vacancy caused phase transition that did not facilitate polarity inversion.
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Report
(3 results)
Research Products
(8 results)
