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Ultra-fine ballistic spin transistors using ultra-high-quality full-epitaxial heterostructures

Research Project

Project/Area Number 21K18167
Research Category

Grant-in-Aid for Challenging Research (Pioneering)

Allocation TypeMulti-year Fund
Review Section Medium-sized Section 21:Electrical and electronic engineering and related fields
Research InstitutionThe University of Tokyo

Principal Investigator

Ohya Shinobu  東京大学, 大学院工学系研究科(工学部), 教授 (20401143)

Project Period (FY) 2021-07-09 – 2024-03-31
Project Status Completed (Fiscal Year 2023)
Budget Amount *help
¥25,870,000 (Direct Cost: ¥19,900,000、Indirect Cost: ¥5,970,000)
Fiscal Year 2023: ¥7,930,000 (Direct Cost: ¥6,100,000、Indirect Cost: ¥1,830,000)
Fiscal Year 2022: ¥8,450,000 (Direct Cost: ¥6,500,000、Indirect Cost: ¥1,950,000)
Fiscal Year 2021: ¥9,490,000 (Direct Cost: ¥7,300,000、Indirect Cost: ¥2,190,000)
Keywordsスピントロニクス / スピントランジスタ / 酸化物 / 半導体 / スピン依存伝導 / エピタキシャル / 分子線エピタキシー / 微細化 / 単結晶ヘテロ構造
Outline of Research at the Start

本提案では、研究代表者らが長年にわたり開拓してきた超高品質の強磁性金属/半導体ハイブリッドヘテロ構造作製技術および極微細加工技術を用いることにより、10 nm程度のチャネル長のスピントランジスタを実現し、バリスティック伝導を誘起することにより高い磁気抵抗比を得ることを目指す。スピントランジスタを実現する上での長年の問題点を、このような新しい技術を導入することにより克服することを目指す。

Outline of Final Research Achievements

We grew a ferromagnetic (La,Sr)MnO3 (LSMO) thin film on a SrTiO3 substrate, processed it into a bar-shaped device, and made a spin MOSFET with a channel length of 36 nm composed of semiconducting LSMO made by argon irradiation. We achieved large spin-valve ratios of up to 140%, 10-100 times larger than previous data obtained for semiconductor spin transistors, at 3 K. We fabricated a spin transistor based on a p-Ge channel with a length of 55 nm equipped with Fe/MgO electrodes and achieved a spin-valve ratio of up to 0.55%, about 500 times larger than the value expected from a diffusion conduction model, at 3 K, suggesting ballistic transport in our device. Using the same device with a channel length of 20 nm, we revealed a large resistive switching effect with a switching resistance ratio of up to 25000% that can be switched by a magnetic field at 3 K.

Academic Significance and Societal Importance of the Research Achievements

酸化物を用いることによりスピントランジスタのスピンバルブ比を大幅に増大させることができた。酸化物では強磁性体と半導体をコヒーレントに成長できオールエピタキシャルの単結晶ヘテロ構造を実現できることと、微細加工技術を用いて短チャネル素子を実現できたことにより、バリスティック伝導に近い状態を実現できたことにより本成果が得られたと考えられる。本成果はスピントランジスタの実現に向けた重要な一歩である。
抵抗スイッチ効果は従来電界だけで制御されてきたが、磁場でも大きく変調できることが明らかになった。このような原理を使ったマルチフィールドセンサなど、新たなデバイスの方向性を開拓した成果として重要だと言える。

Report

(5 results)
  • 2023 Annual Research Report   Final Research Report ( PDF )
  • 2022 Research-status Report
  • 2021 Comments on the Screening Results   Research-status Report
  • Research Products

    (37 results)

All 2024 2023 2022 2021 Other

All Journal Article (2 results) (of which Peer Reviewed: 2 results,  Open Access: 2 results) Presentation (32 results) (of which Int'l Joint Research: 10 results,  Invited: 13 results) Book (1 results) Remarks (2 results)

  • [Journal Article] Colossal magnetoresistive switching induced by d0 1 ferromagnetism of MgO in a semiconductor nanochannel device with ferromagnetic Fe/MgO electrodes"2024

    • Author(s)
      Ohya Shinobu、Tsuruoka Shun、Kaneda Masaya、Shinya Hikari、Fukushima Tetsuya、Takeda Takahito、Tadano Yuriko、Endo Tatsuro、Anh Le Duc、Masago Akira、Katayama‐Yoshida Hiroshi、Tanaka Masaaki
    • Journal Title

      Advanced Materials

      Volume: - Issue: 23 Pages: 2307389-2307389

    • DOI

      10.1002/adma.202307389

    • Related Report
      2023 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Giant Spin‐Valve Effect in Planar Spin Devices Using an Artificially Implemented Nanolength Mott‐Insulator Region2023

    • Author(s)
      Endo Tatsuro、Tsuruoka Shun、Tadano Yuriko、Kaneta‐Takada Shingo、Seki Yuichi、Kobayashi Masaki、Anh Le Duc、Seki Munetoshi、Tabata Hitoshi、Tanaka Masaaki、Ohya Shinobu
    • Journal Title

      Advanced Materials

      Volume: 未定 (Accepted) Issue: 28 Pages: 2300110-2300110

    • DOI

      10.1002/adma.202300110

    • Related Report
      2023 Annual Research Report 2022 Research-status Report
    • Peer Reviewed / Open Access
  • [Presentation] 高品質単結晶機能性ヘテロ界面を活用したスピントロニクス新機能開拓2024

    • Author(s)
      大矢忍
    • Organizer
      日本磁気学会第91回スピントロニクス専門研究会
    • Related Report
      2023 Annual Research Report
    • Invited
  • [Presentation] Giant spin-valve effect and gate modulation in nano-channel oxide devices made using metal-insulator transition2024

    • Author(s)
      Tatsuro Endo, Shun Tsuruoka, Yuriko Tadano, Shingo Kaneta-Takada, Yuichi Seki, Masaki Kobayashi, Le Duc Anh, Munetoshi Seki, Hitoshi Tabata, Masaaki Tanaka, and Shinobu Ohya
    • Organizer
      学術変革B 第2回研究成果報告会
    • Related Report
      2023 Annual Research Report
  • [Presentation] Spintronics function of the resistive switching in Fe/MgO/Ge2024

    • Author(s)
      Masaya Kaneda, Shun Tsuruoka, Hiroshi Katayama-Yoshida, Tatsuro Endo, Yuriko Tadano, Masaaki Tanaka, and Shinobu Ohya
    • Organizer
      第15回低温科学研究センター研究交流会
    • Related Report
      2023 Annual Research Report
  • [Presentation] Efficient spin-charge conversion in Rashba two-dimensional electron gas systems of single-crystalline oxide heterostructures2024

    • Author(s)
      Shinobu Ohya
    • Organizer
      superstrips2024
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] 酸化物ヘテロ構造を利用したスピン新機能創製2023

    • Author(s)
      大矢忍
    • Organizer
      界面最新科学研究会
    • Related Report
      2023 Annual Research Report 2022 Research-status Report
    • Invited
  • [Presentation] MgOベースの抵抗スイッチ効果デバイスにみられる巨大なスピンバルブライク動作2023

    • Author(s)
      金田 昌也、鶴岡 駿、遠藤達朗、但野 由梨子、武田 崇仁、福島 鉄也、新屋 ひかり、真砂 啓、田中 雅明、吉田 博、大矢 忍
    • Organizer
      強的秩序とその操作に関わる 第17回 夏の学校
    • Related Report
      2023 Annual Research Report
  • [Presentation] Developments of novel spintronics functionalities using oxide heterostructures2023

    • Author(s)
      Shinobu Ohya
    • Organizer
      EU-Japan Workshop on Spintronics and Quantum Transformation (Spin-QX 2023)
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Creation of novel spintronics functionalities using oxide heterostructures2023

    • Author(s)
      Shinobu Ohya
    • Organizer
      MRM2023/IUMRS-ICA2023
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Giant spin-valve effect and FET operation in nano-channel oxide devices made using metal-insulator transition2023

    • Author(s)
      Tatsuro Endo, Shun Tsuruoka, Yuriko Tadano, Shingo Kaneta-Takada, Yuichi Seki, Masaki Kobayashi, Le Duc Anh, Munetoshi Seki, Hitoshi Tabata, Masaaki Tanaka, and Shinobu Ohya
    • Organizer
      29th International Workshop on Oxide Electronics (iWOE-29)
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Giant spin-valve-like behavior induced by magnetic-field-controlled resistive switching in an Fe/MgO/Ge-based two-terminal device2023

    • Author(s)
      Masaya Kaneda, Shun Tsuruoka, Tatsuro Endo, Takahito Takeda, Yuriko Tadano, Tetsuya Fukushima, Hikari Shinya, Akira Masago, Masaaki Tanaka, Hiroshi Katayama-Yoshida, and Shinobu Ohya
    • Organizer
      2023 Annual Conference on Magnetism and Magnetic Materials (MMM)
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Gate modulation of the spin-dependent transport in the metal-insulator transition region of La0.67Sr0.33MnO3-based spin-MOSFET structure2023

    • Author(s)
      Tatsuro Endo, Shun Tsuruoka, Yuriko Tadano, Shingo Kaneta-Takada, Le Duc Anh, Masaaki Tanaka, and Shinobu Ohya
    • Organizer
      第14回低温科学研究センター研究交流会
    • Related Report
      2022 Research-status Report
  • [Presentation] Magnetic-field-controllable resistive-switching and spin-valve-like behavior in an Fe/MgO/Ge-based two-terminal device2023

    • Author(s)
      Masaya Kaneda, Shun Tsuruoka, Hiroshi Katayama-Yoshida, Tatsuro Endo, Yuriko Tadano, Masaaki Tanaka, and and Shinobu Ohya
    • Organizer
      第14回低温科学研究センター研究交流会
    • Related Report
      2022 Research-status Report
  • [Presentation] Gate modulation of current in the metal-insulator transition region of La0.67Sr0.33MnO32023

    • Author(s)
      Tatsuro Endo, Shun Tsuruoka, Yuriko Tadano, Shingo Kaneta-Takada, Le Duc Anh, Masaaki Tanaka, and Shinobu Ohya
    • Organizer
      第70回応用物理学会春季学術講演会
    • Related Report
      2022 Research-status Report
  • [Presentation] Magnetic-field-controllable resistive-switching and spin-valve-like behavior in an Fe/MgO/Ge-based two-terminal device2023

    • Author(s)
      Masaya Kaneda, Shun Tsuruoka, Hiroshi Katayama-Yoshida, Tatsuro Endo, Yuriko Tadano, Masaaki Tanaka, and and Shinobu Ohya
    • Organizer
      第70回応用物理学会春季学術講演会
    • Related Report
      2022 Research-status Report
  • [Presentation] Nanoscale metal-insulator transition of La0.67Sr0.33MnO3 and its application to two-terminal spin-valve devices and spin MOSFET2023

    • Author(s)
      Tatsuro Endo, Shun Tsuruoka, Yuriko Tadano, Shingo Kaneta-Takada, Le Duc Anh, Masaaki Tanaka, and Shinobu Ohya
    • Organizer
      Spin-RNJシンポジウム(2022年度報告会)
    • Related Report
      2022 Research-status Report
  • [Presentation] Highly efficient spin-charge conversions in all-epitaxial single-crystalline ferromagnetic heterostructures2022

    • Author(s)
      Shinobu Ohya
    • Organizer
      TSMC-Utokyo symposium
    • Related Report
      2022 Research-status Report
    • Int'l Joint Research / Invited
  • [Presentation] Efficient spin-charge conversion using two-dimensional electrons gas systems of all-epitaxial single-crystalline perovskite-oxide heterostructures2022

    • Author(s)
      Shinobu Ohya
    • Organizer
      The 8th Quantum Science (QS) symposium, ICCMSE 2022 -Computational Chemistry and Computational Physics
    • Related Report
      2022 Research-status Report
    • Int'l Joint Research / Invited
  • [Presentation] Giant spin-valve effect in oxide-based lateral nano-scale channel devices2022

    • Author(s)
      Tatsuro Endo, Shun Tsuruoka, Shingo Kaneta-Takada, Le Duc Anh, Masaaki Tanaka and Shinobu Ohya
    • Organizer
      2022 Annual Conference on Magnetism and Magnetic Materials (MMM)
    • Related Report
      2022 Research-status Report
    • Int'l Joint Research / Invited
  • [Presentation] Creation of novel spintronics functionalities using high-quality oxide heterostructures2022

    • Author(s)
      Shinobu Ohya
    • Organizer
      VANJ 2022, UTokyo -VietnamDIALOGUES
    • Related Report
      2022 Research-status Report
    • Int'l Joint Research / Invited
  • [Presentation] オール不揮発エレクトロニクス時代の実現を目指して2022

    • Author(s)
      大矢忍
    • Organizer
      パナソニックP-MOTワークショップ
    • Related Report
      2022 Research-status Report
    • Invited
  • [Presentation] 強相関酸化物スピントロニクスの実現に向けて:放射光の役割2022

    • Author(s)
      大矢忍
    • Organizer
      第83回応用物理学会秋季学術講演会 シンポジウム T8.先端計測と機能性酸化物研究の共進化
    • Related Report
      2022 Research-status Report
    • Invited
  • [Presentation] マンガン酸化物極薄膜ヘテロ構造における金属絶縁体転移に伴う磁気異方性の変化2022

    • Author(s)
      小林 正起, L. D. Anh, 鈴木 雅弘, 金田 真悟, 竹田 幸治, 藤森 伸一, 芝田 悟朗, 田中 新, 田中 雅明, 大矢 忍, 藤森 淳
    • Organizer
      日本物理学会2022年秋季大会
    • Related Report
      2022 Research-status Report
  • [Presentation] マンガン酸化物極薄膜ヘテロ構造における金属絶縁体転移に伴う磁気異方性の変化2022

    • Author(s)
      小林 正起, L. D. Anh, 鈴木 雅弘, 金田 真悟, 竹田 幸治, 藤森 伸一, 芝田 悟朗, 田中 新, 田中 雅明, 大矢 忍, 藤森 淳
    • Organizer
      第83回応用物理学会秋季学術講演会
    • Related Report
      2022 Research-status Report
  • [Presentation] Giant spin-valve effect in oxide-based lateral nano-scale channel devices2022

    • Author(s)
      Tatsuro Endo, Shun Tsuruoka, Shingo Kaneta-Takada, Le Duc Anh, Masaaki Tanaka and Shinobu Ohya
    • Organizer
      第83回応用物理学会秋季学術講演会
    • Related Report
      2022 Research-status Report
  • [Presentation] Giant voltage-controllable magnetoresistance switching in Ge short-channel devices with epitaxial ultra-thin Fe electrodes2022

    • Author(s)
      Shun Tsuruoka, Yuriko Tadano, Le Duc Anh, Masaaki Tanaka, and Shinobu Ohya
    • Organizer
      第83回応用物理学会秋季学術講演会
    • Related Report
      2022 Research-status Report
  • [Presentation] Giant voltage-controllable magnetoresistance switching in Ge short-channel devices with epitaxial ultra-thin Fe electrodes2022

    • Author(s)
      Shun Tsuruoka, Yuriko Tadano, Le Duc Anh, Masaaki Tanaka, and Shinobu Ohya
    • Organizer
      2022 Annual Conference on Magnetism and Magnetic Materials (MMM)
    • Related Report
      2022 Research-status Report
    • Int'l Joint Research
  • [Presentation] 100 nm以下の短チャネルを有するGeベース単結晶横型スピンバルブ素子における磁気抵抗効果の増大2022

    • Author(s)
      鶴岡駿、但野由梨子、Le Duc Anh、田中雅明、大矢忍
    • Organizer
      応用物理学会 強的秩序とその操作に関わる研究会 第14回研究会
    • Related Report
      2021 Research-status Report
  • [Presentation] Geベースオールエピタキシャル単結晶横型短チャネルスピンバルブ素子における 大きな磁気抵抗効果の観測2022

    • Author(s)
      鶴岡駿、但野由梨子、Le Duc Anh、田中雅明、大矢忍
    • Organizer
      第13回低温科学研究センター研究交流会
    • Related Report
      2021 Research-status Report
  • [Presentation] Geベースオールエピタキシャル単結晶横型短チャネルスピンバルブ素子における大きな磁気抵抗効果の観測2022

    • Author(s)
      鶴岡駿、但野由梨子、Le Duc Anh、田中雅明、大矢忍
    • Organizer
      第69回応用物理学会春季学術講演会
    • Related Report
      2021 Research-status Report
  • [Presentation] オールエピタキシャル単結晶ヘテロ接合を用いた新スピン機能創成2021

    • Author(s)
      大矢忍、Le Duc Anh、金田真悟、荒井勝真、徳永将史, 関宗俊、田畑仁、田中雅明
    • Organizer
      日本物理学会
    • Related Report
      2021 Research-status Report
    • Invited
  • [Presentation] 酸化物界面における高移動度二次元p型伝導とトランジスタ応用2021

    • Author(s)
      大矢忍
    • Organizer
      日本学術振興会・産学協力委員会 R025先進薄膜界面機能創成委員会 リトリート学習会
    • Related Report
      2021 Research-status Report
    • Invited
  • [Presentation] Geベース単結晶横型スピンバルブ素子におけるチャネル微細化による磁気抵抗比の増大2021

    • Author(s)
      鶴岡駿、但野由梨子、Le Duc Anh、田中雅明、大矢忍
    • Organizer
      第26回半導体におけるスピン工学の基礎と応用(PASPS-26)
    • Related Report
      2021 Research-status Report
  • [Book] 光と物質の量子相互作用ハンドブック2023

    • Author(s)
      荒川 泰彦、島野 亮、金光 義彦、岩本 敏、髙原 淳一、立間 徹
    • Total Pages
      992
    • Publisher
      エヌ・ティー・エス
    • ISBN
      9784860438265
    • Related Report
      2022 Research-status Report
  • [Remarks] 東京大学 大学院工学系研究科 電気系工学専攻 大矢研究室

    • URL

      http://www.cryst.t.u-tokyo.ac.jp/ohya/

    • Related Report
      2023 Annual Research Report
  • [Remarks] 東京大学 大学院工学系研究科 電気系工学専攻 大矢研究室

    • URL

      http://www.cryst.t.u-tokyo.ac.jp/ohya/

    • Related Report
      2022 Research-status Report 2021 Research-status Report

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Published: 2021-07-13   Modified: 2025-01-30  

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