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Elucidation of atomic structure and dynamics of carrier trap sites

Research Project

Project/Area Number 21K18706
Research Category

Grant-in-Aid for Challenging Research (Exploratory)

Allocation TypeMulti-year Fund
Review Section Medium-sized Section 21:Electrical and electronic engineering and related fields
Research InstitutionTohoku University

Principal Investigator

Cho Yasuo  東北大学, 未来科学技術共同研究センター, 特任教授 (40179966)

Project Period (FY) 2021-07-09 – 2023-03-31
Project Status Completed (Fiscal Year 2022)
Budget Amount *help
¥6,370,000 (Direct Cost: ¥4,900,000、Indirect Cost: ¥1,470,000)
Fiscal Year 2022: ¥2,080,000 (Direct Cost: ¥1,600,000、Indirect Cost: ¥480,000)
Fiscal Year 2021: ¥4,290,000 (Direct Cost: ¥3,300,000、Indirect Cost: ¥990,000)
Keywords走査型非線形誘電率顕微鏡 / 時間分解走査型非線形誘電率顕微鏡 / 界面準位密度 / MOS界面 / トラップ / 走査型非線形誘電率常磁性共鳴顕微鏡 / 間分解 SNDM装置
Outline of Research at the Start

走査型非線形誘電率顕微鏡法(SNDM)及びその発展形である局所DLTS法とESR技術を組み合わせ更にSNDM(または局所DLTS)に時間分解能も持たせ統合することにより,時間分解局所電子スピン共鳴法の開発をおこなう.
これをSiO2/SiC界面評価に適用しこの界面中に分布しているDitの種類と起源を明らかにする.更にHfO2/Si等のMOS界面で起こるPisitive (Negative) Bias Temperature Instabilityの原因解明や絶縁膜/GaN界面Al2O3/ダイアモンド界面等の評価にも活用し,現在まで得られていない高性能なMOS界面の実現に資する研究を行う.

Outline of Final Research Achievements

A major breakthrough in the characterization of GaN MOS interfaces has been achieved: it has been found that GaN interfaces exhibit potential barrier fluctuations that are larger than the thermal energy and are difficult for carriers to overcome. This result overturned the common belief in the semiconductor industry that the interface is homogeneous, including the distribution of defects, and pointed out that it is impossible to realize high-mobility power MOS devices using wide-gap semiconductors without solving this potential fluctuation problem. Furthermore, he developed and completed a SNDMR apparatus. The magnetic field can be rotated 360°C and applied up to 5000G or more, and the temperature can be controlled from cryogenic (30K) to room temperature.

Academic Significance and Societal Importance of the Research Achievements

SNDMRの装置開発を行い完成した。磁場は360℃回転でき5000G以上までかけられ、温度は極低温(30K)から常温迄コントロール可能とした。スピン反転用マイクロ波磁界の周波数可変範囲と最高強度はそれぞれ1~20GHzと0.23Gで、ESR計測に十分な値を達成している。
実際の実験条件を想定し、欠陥密度Nt=1012cm-2の測定サンプルを半径150 nmの探針電極を用いて信号検出を行うという仮定のもと試算を行ったところ、1.3×10-19 F/V程度の信号強度が得られるとの結果を得ており、現行のSNDMによって十分検出可能な信号強度である事が分かった。

Report

(3 results)
  • 2022 Annual Research Report   Final Research Report ( PDF )
  • 2021 Research-status Report
  • Research Products

    (34 results)

All 2023 2022 2021 Other

All Journal Article (8 results) (of which Peer Reviewed: 8 results,  Open Access: 2 results) Presentation (23 results) (of which Int'l Joint Research: 23 results,  Invited: 3 results) Remarks (2 results) Patent(Industrial Property Rights) (1 results) (of which Overseas: 1 results)

  • [Journal Article] Microscopic Evaluation of Al2O3/p-Type Diamond (111) Interfaces Using Scanning Nonlinear Dielectric Microscopy2022

    • Author(s)
      Yu Ogata, Kohei Yamasue, Xufang Zhang,Tsubasa Matsumoto, Norio Tokuda and Yasuo Cho
    • Journal Title

      Materials Science Forum

      Volume: 1062 Pages: 298-303

    • DOI

      10.4028/p-n0z51t

    • Related Report
      2022 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Surface Potential Fluctuations of SiO2/SiC Interfaces Investigated by Local Capacitance-Voltage Profiling Based on Time-Resolved Scanning Nonlinear Dielectric Microscopy2022

    • Author(s)
      Kohei Yamasue and Yasuo Cho
    • Journal Title

      Materials Science Forum

      Volume: 1062 Pages: 335-340

    • DOI

      10.4028/p-2t7zak

    • Related Report
      2022 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Nanoscale mapping to assess the asymmetry of local C?V curves obtained from ferroelectric materials2022

    • Author(s)
      Hiranaga Yoshiomi、Mimura Takanori、Shimizu Takao、Funakubo Hiroshi、Cho Yasuo
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 61 Issue: SN Pages: SN1014-SN1014

    • DOI

      10.35848/1347-4065/ac7f7a

    • Related Report
      2022 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Local capacitance-voltage profiling and deep level transient spectroscopy of SiO2/SiC interfaces by scanning nonlinear dielectric microscopy2022

    • Author(s)
      Kohei Yamasue Yasuo Cho
    • Journal Title

      Microelectronics Reliability

      Volume: 135 Pages: 114588-114588

    • DOI

      10.1016/j.microrel.2022.114588

    • Related Report
      2022 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Boxcar averaging scanning nonlinear dielectric microscopy2022

    • Author(s)
      Kohei Yamasue and Yasuo Cho
    • Journal Title

      Nanomaterials

      Volume: 12 Issue: 5 Pages: 794-794

    • DOI

      10.3390/nano12050794

    • Related Report
      2021 Research-status Report
    • Peer Reviewed / Open Access
  • [Journal Article] High-precision local C?V mapping for ferroelectrics using principal component analysis2021

    • Author(s)
      Hiranaga Yoshiomi、Mimura Takanori、Shimizu Takao、Funakubo Hiroshi、Cho Yasuo
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 60 Issue: SF Pages: SFFB09-SFFB09

    • DOI

      10.35848/1347-4065/ac13d9

    • Related Report
      2021 Research-status Report
    • Peer Reviewed
  • [Journal Article] Flexoelectric nanodomains in rare-earth iron garnet thin films under strain gradient2021

    • Author(s)
      Yamahara Hiroyasu、Feng Bin、Seki Munetoshi、Adachi Masaki、Sarker Md Shamim、Takeda Takahito、Kobayashi Masaki、Ishikawa Ryo、Ikuhara Yuichi、Cho Yasuo、Tabata Hitoshi
    • Journal Title

      Communications Materials

      Volume: 2 Issue: 1 Pages: 95-95

    • DOI

      10.1038/s43246-021-00199-y

    • Related Report
      2021 Research-status Report
    • Peer Reviewed / Open Access
  • [Journal Article] Simulation of nanoscale domain growth for ferroelectric recording2021

    • Author(s)
      Fukuzawa Kenji、Hiranaga Yoshiomi、Cho Yasuo
    • Journal Title

      AIP Advances

      Volume: 11 Issue: 11 Pages: 115117-115117

    • DOI

      10.1063/5.0074004

    • Related Report
      2021 Research-status Report
    • Peer Reviewed
  • [Presentation] Correlation analysis on local capacitance-voltage profiles of a SiO2/SiC interface observed by time-resolved scanning nonlinear dielectric microscopy2023

    • Author(s)
      Kohei Yamasue and Yasuo Cho
    • Organizer
      7th IEEE Electron Devices Technology and Manufacturing(EDTM) Conference
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Quantitative measurement of active dopant density distribution in black silicon solar cell using scanning nonlinear dielectric microscopy2022

    • Author(s)
      Yasuo Cho, Beniamino Iandolo, Ole Hansen
    • Organizer
      49th IEEE Photovoltaic Specialists Conference (PVSC 49)
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Comparative study on carrier distribution of mechanically exfoliated WSe2/SiO2 and suspended WSe2 by scanning nonlinear dielectric microscopy2022

    • Author(s)
      Koki Takano, Kohei Yamasue, Toshiaki Kato, Toshiro Kaneko and Yasuo Cho
    • Organizer
      THE 22ND INTERNATIONAL VACUUM CONGRESS IVC-22
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Real-space analysis on surface potential fluctuations of Al2O3/GaN interfaces by scanning nonlinear dielectric microscopy2022

    • Author(s)
      Kohei Yamasue and Yasuo Cho
    • Organizer
      International Workshop on Nitride Semiconductor(IWN2022)
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Experimental research on curved photovoltaic modules : effects of hot spots, interconnect schemes and curvature on electrical PV performance2022

    • Author(s)
      Sachiko Jonai, Haruto Morishita, Yasuo Cho, Diego Bronneberg
    • Organizer
      The 33rd International Photovoltaic Science and Engineering Conference (PVSEC-33)
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Microscopic carrier distribution imaging of black silicon solar cell by scanning nonlinear dielectric microscopy2022

    • Author(s)
      Yasuo Cho, Beniamino Iandolo, Ole Hansen
    • Organizer
      The 33rd International Photovoltaic Science and Engineering Conference (PVSEC-33)
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Scanning Nonlinear Dielectric Microscopic Investigation of Mechanically Exfoliated WSe2/SiO2 and Suspended WSe22022

    • Author(s)
      Koki Takano, Kohei Yamasue, Toshiaki Kato, Toshiaki Kato and Yasuo Cho
    • Organizer
      2022 MRS Fall Meeting & Exhibit
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Statistical analysis of local C-V map data for ferroelectric thin films2022

    • Author(s)
      Yoshiomi Hiranaga, Yasuo Cho
    • Organizer
      7th International Symposium on Dielectric Materials and Applications (ISyDMA’7)
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Local Capacitance-Voltage Profiling on MoS2/SiO2 and MoS2/h-BN/SiO2 by Scanning Nonlinear Dielectric Microscopy Assisted with an Insulating Tip2022

    • Author(s)
      Taiyo Ishizuka, Kohei Yamasue, and Yasuo Cho
    • Organizer
      EDTM 2022
    • Related Report
      2021 Research-status Report
    • Int'l Joint Research
  • [Presentation] Carrier Profile Mapping in a 3D Flash Memory Cell using Scanning Nonlinear Dielectric Microscopy2022

    • Author(s)
      Jun Hirota, Ken Hoshino, Kohei Yamasue, and Yasuo Cho.
    • Organizer
      EDTM 2022
    • Related Report
      2021 Research-status Report
    • Int'l Joint Research / Invited
  • [Presentation] Local Capacitance-Voltage Profiling and Deep Level Transient Spectroscopy of SiO2/SiC Interfaces by Scanning Nonlinear Dielectric Microscopy2021

    • Author(s)
      Kohei Yamasue, Yasuo Cho
    • Organizer
      IPFA2021
    • Related Report
      2021 Research-status Report
    • Int'l Joint Research
  • [Presentation] Local capacitance-voltage profiling and high voltage stress effect study of SiO2/SiC structures by time-resolved scanning nonlinear dielectric microscopy2021

    • Author(s)
      Kohei Yamasue, Koharu Suzuki, Yasuo Cho
    • Organizer
      ESREF2021
    • Related Report
      2021 Research-status Report
    • Int'l Joint Research
  • [Presentation] Nanoscale capacitance-voltage profiling of DC bias induced stress on a high-κ/SiO2/Si gate stack2021

    • Author(s)
      Koharu Suzuki, Kohei Yamasue, Yasuo Cho
    • Organizer
      ESREF2021
    • Related Report
      2021 Research-status Report
    • Int'l Joint Research
  • [Presentation] Nanoscale characterization techniques for ultra-thin van der Waals semiconductors based on scanning nonlinear dielectric microscopy2021

    • Author(s)
      Kohei Yamasue, Yasuo Cho
    • Organizer
      The 5th international symposium on“Elucidation of Next Generation Functional Materials・Surface and Interface Properties”
    • Related Report
      2021 Research-status Report
    • Int'l Joint Research
  • [Presentation] Nanoscale evaluation of Al2O3/diamond MOS interfaces using time-resolved scanning nonlinear dielectric microscopy2021

    • Author(s)
      Y. OGATA, K. YAMASUE, X. ZHANG, T. MATSUMOTO, N. TOKUDA, Y. CHO
    • Organizer
      ECSCRM 2021
    • Related Report
      2021 Research-status Report
    • Int'l Joint Research
  • [Presentation] Surface potential fluctuations of SiO2/SiC interfaces investigated by local capacitance-voltage profiling based on time-resolved scanning nonlinear dielectric microscopy2021

    • Author(s)
      K. YAMASUE, Y. CHO
    • Organizer
      ECSCRM 2021
    • Related Report
      2021 Research-status Report
    • Int'l Joint Research
  • [Presentation] Simultaneous interface defect density and differential capacitance imaging by time-resolved scanning nonlinear dielectric microscopy2021

    • Author(s)
      Kohei Yamasue and Yasuo Cho
    • Organizer
      ISTFA 2021
    • Related Report
      2021 Research-status Report
    • Int'l Joint Research
  • [Presentation] A Scanning Nonlinear Dielectric Microscopic Investigation of Al2O3/Diamond MOS Interfaces2021

    • Author(s)
      Yasuo Cho, Yu Ogata, Kohei Yamasue, Xufang Zhang, Tsubasa Matsumoto, Norio Tokuda
    • Organizer
      2021 MRS Fall Meeting & Exhibit
    • Related Report
      2021 Research-status Report
    • Int'l Joint Research
  • [Presentation] Microscopic Carrier Distribution Imaging of Atomically-Thin van der Waals Semiconductors by Scanning Nonlinear Dielectric Microscopy2021

    • Author(s)
      Yasuo Cho, Kohei Yamasue
    • Organizer
      Microscopic Carrier Distribution Imaging of Atomically-Thin van der Waals Semiconductors by Scanning Nonlinear Dielectric Microscopy
    • Related Report
      2021 Research-status Report
    • Int'l Joint Research
  • [Presentation] Scanning Nonlinear Dielectric Microscopic Investigation of Active Dopant Density Distribution in Black Silicon Solar Cell2021

    • Author(s)
      Yasuo Cho, Beniamino Iandolo, Ole Hansen
    • Organizer
      2021 MRS Fall Meeting & Exhibit
    • Related Report
      2021 Research-status Report
    • Int'l Joint Research
  • [Presentation] Nanoscale study on surface potential fluctuations of SiO2/SiC interfaces by time-resolved scanning nonlinear dielectric microscopy2021

    • Author(s)
      Kohei Yamasue, and Yasuo Cho
    • Organizer
      52th IEEE Semiconductor Interface Specialists Conference
    • Related Report
      2021 Research-status Report
    • Int'l Joint Research
  • [Presentation] Nanoscale Domain Dynamics Characterization Using Local C-V Mapping2021

    • Author(s)
      Yoshiomi Hiranaga and Yasuo Cho
    • Organizer
      The Sixth International Symposium on Dielectric Materials and Applications
    • Related Report
      2021 Research-status Report
    • Int'l Joint Research / Invited
  • [Presentation] Recording Medium Design Aiming at Realizing Ferroelectric Probe Data Storage2021

    • Author(s)
      Yoshiomi Hiranaga and Yasuo Cho
    • Organizer
      The Sixth International Symposium on Dielectric Materials and Applications
    • Related Report
      2021 Research-status Report
    • Int'l Joint Research
  • [Remarks] 東北大学未来科学技術共同研究センター 長研究室

    • URL

      http://d-nanodev.niche.tohoku.ac.jp/

    • Related Report
      2022 Annual Research Report
  • [Remarks] 誘電ナノデバイス研究室

    • URL

      http://www.d-nanodev.riec.tohoku.ac.jp/

    • Related Report
      2021 Research-status Report
  • [Patent(Industrial Property Rights)] 誘電体再生装置および誘電体記録再生装置2023

    • Inventor(s)
      長 康雄
    • Industrial Property Rights Holder
      国立大学法人東北大学
    • Industrial Property Rights Type
      特許
    • Filing Date
      2023
    • Related Report
      2022 Annual Research Report
    • Overseas

URL: 

Published: 2021-07-13   Modified: 2024-01-30  

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