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Development of bright excitons with long lifetime for quantum information devices

Research Project

Project/Area Number 21K18731
Research Category

Grant-in-Aid for Challenging Research (Exploratory)

Allocation TypeMulti-year Fund
Review Section Medium-sized Section 21:Electrical and electronic engineering and related fields
Research InstitutionKyushu University

Principal Investigator

Itagaki Naho  九州大学, システム情報科学研究院, 教授 (60579100)

Project Period (FY) 2021-07-09 – 2024-03-31
Project Status Completed (Fiscal Year 2023)
Budget Amount *help
¥6,500,000 (Direct Cost: ¥5,000,000、Indirect Cost: ¥1,500,000)
Fiscal Year 2022: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
Fiscal Year 2021: ¥4,940,000 (Direct Cost: ¥3,800,000、Indirect Cost: ¥1,140,000)
Keywords酸化物半導体 / スパッタリング / 結晶成長 / 量子構造 / エキシトン / 励起子 / ZnO / ZnMgO / 再結合寿命 / ZAION
Outline of Research at the Start

本研究は,代表者オリジナル技術を背景に,励起子が量子情報を記憶する革新的デバイスを創製するものである.励起子を「電子と正孔が再結合する過程 (=中間状態)としての準粒子」として扱い,受発光を伴うその生成と消滅に着目した工学的応用を行ってきたこれまでの励起子研究を転換させる点で,挑戦的研究としての意義を有する.この記憶する励起子を用い,大規模集積化において有利な光によるデータ伝送を前提とした量子コンピュータの実現を目指す点で,実用的観点からも意義を有する.本研究は,明るい励起子そのもののを長寿命化させる,というアイデアにより,従来の励起子において存在した寿命と制御性のトレードオフ問題を解決する.

Outline of Final Research Achievements

The purpose of this study is to realize bright excitons with long lifetime using a strained quantum well structure based on ZnO related materials. Conventional bright excitons are highly controllable by light but have short lifetimes, while dark excitons have long lifetimes but are difficult to control with light. This study aims to extend the lifetime of bright excitons using strained quantum wells consisting of ZnO materials. We have realized high-quality ZnMgO/ZnO heterointerfaces on sapphire substrates, which are key to achieving long-lived bright excitons, and confirmed exciton absorption and emission even at room temperature. Based on these results, we are currently fabricating ZnO/ZnMgO strained quantum wells and verifying their functionality as quantum bits.

Academic Significance and Societal Importance of the Research Achievements

本研究は,ZnO系半導体材料からなる歪量子井戸が,従来の明暗励起子において存在した寿命と制御性のトレードオフ問題を解決し,励起子研究に新たな変革点・転換点をもたらすと考え構想に至ったものである.励起子を「電子と正孔が再結合する過程 (=中間状態)としての準粒子」として扱い,受発光を伴うその生成と消滅に着目した工学的応用を行ってきたこれまでの励起子研究を転換させる点で,学術的意義を有する.また,明るい長寿命励起子の開発は,大規模集積化において有利な「光」によるデータ伝送を前提とした量子コンピュータの実現の一助となるものであり,実用的観点からも意義を有する.

Report

(4 results)
  • 2023 Annual Research Report   Final Research Report ( PDF )
  • 2022 Research-status Report
  • 2021 Research-status Report
  • Research Products

    (82 results)

All 2024 2023 2022 2021 Other

All Int'l Joint Research (2 results) Journal Article (15 results) (of which Int'l Joint Research: 5 results,  Peer Reviewed: 15 results,  Open Access: 3 results) Presentation (64 results) (of which Int'l Joint Research: 38 results,  Invited: 10 results) Remarks (1 results)

  • [Int'l Joint Research] Fraunhofer Institute/Group Leader/Dr. Alexander Hinz(ドイツ)

    • Related Report
      2023 Annual Research Report
  • [Int'l Joint Research] National Research Centre (NRC)(エジプト)

    • Related Report
      2022 Research-status Report
  • [Journal Article] Prediction by a hybrid machine learning model for high-mobility amorphous In2O3: Sn films fabricated by RF plasma sputtering deposition using a nitrogen-mediated amorphization method2023

    • Author(s)
      Kamataki Kunihiro、Ohtomo Hirohi、Itagaki Naho、Lesly Chawarambawa Fadzai、Yamashita Daisuke、Okumura Takamasa、Yamashita Naoto、Koga Kazunori、Shiratani Masaharu
    • Journal Title

      Journal of Applied Physics

      Volume: 134 Issue: 16 Pages: 163301-163301

    • DOI

      10.1063/5.0160228

    • Related Report
      2023 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Control of inhomogeneity and magnetic properties of ZnO:Co films grown by magnetron sputtering using nitrogen2023

    • Author(s)
      Agusutrisno M.N.、Narishige Ryota、Kamataki Kunihiro、Okumura Takamasa、Itagaki Naho、Koga Kazunori、Shiratani Masaharu、Yamashita Naoto
    • Journal Title

      Materials Science in Semiconductor Processing

      Volume: 162 Pages: 107503-107503

    • DOI

      10.1016/j.mssp.2023.107503

    • Related Report
      2023 Annual Research Report 2022 Research-status Report
    • Peer Reviewed
  • [Journal Article] Effects of substrate surface polarity on heteroepitaxial growth of pseudobinary ZnO-InN alloy films on ZnO substrates2022

    • Author(s)
      Narishige Ryota、Yamashita Naoto、Kamataki Kunihiro、Okumura Takamasa、Koga Kazunori、Shiratani Masaharu、Yabuta Hisato、Itagaki Naho
    • Journal Title

      Journal of Materials Research

      Volume: 38 Issue: 7 Pages: 1803-1812

    • DOI

      10.1557/s43578-022-00827-4

    • Related Report
      2022 Research-status Report
    • Peer Reviewed
  • [Journal Article] Performance comparison of nitrile-based liquid electrolytes on bifacial dye-sensitized solar cells under low-concentrated light2022

    • Author(s)
      Putri Tika E.、Chawarambwa Fadzai L.、Attri Pankaj、Kamataki Kunihiro、Itagaki Naho、Koga Kazunori、Shiratani Masaharu
    • Journal Title

      MRS Advances

      Volume: - Issue: 21 Pages: 427-432

    • DOI

      10.1557/s43580-022-00270-x

    • Related Report
      2021 Research-status Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] The Effects of Spin-Coating Rate on Surface Roughness, Thickness, and Electrochemical Properties of a Pt Polymer Counter Electrode2022

    • Author(s)
      Chawarambwa Fadzai Lesley、Putri Tika Erna、Attri Pankaj、Kamataki Kunihiro、Itagaki Naho、Koga Kazunori、Shiratani Masaharu
    • Journal Title

      Advanced Engineering Forum

      Volume: 45 Pages: 1-13

    • DOI

      10.4028/p-6l16rl

    • Related Report
      2021 Research-status Report
    • Peer Reviewed
  • [Journal Article] Epitaxial growth of Zn1-xMgxO films on sapphire substrates via inverted Stranski-Krastanov mode using magnetron sputtering2022

    • Author(s)
      Takahashi Daichi、Yamashita Naoto、Yamashita Daisuke、Okumura Takamasa、Kamataki Kunihiro、Koga Kazunori、Shiratani Masaharu、Itagaki Naho
    • Journal Title

      MRS Advances

      Volume: - Issue: 20 Pages: 415-419

    • DOI

      10.1557/s43580-022-00234-1

    • Related Report
      2021 Research-status Report
    • Peer Reviewed
  • [Journal Article] Nanostructured Ge and GeSn films by high-pressure He plasma sputtering for high-capacity Li ion battery anodes2022

    • Author(s)
      Giichiro Uchida, Kenta Nagai, Yuma Habu, Junki Hayashi, Yumiko Ikebe, Mineo Hiramatsu, Ryota Narishige, Naho Itagaki, Masaharu Shiratani, Yuichi Setsuhara
    • Journal Title

      Scientifc Reports

      Volume: 12 Issue: 1 Pages: 17421-12

    • DOI

      10.1038/s41598-022-05579-z

    • Related Report
      2021 Research-status Report
    • Peer Reviewed / Open Access
  • [Journal Article] Performances of Carbon Black-Titanium nitrate and Carbon Black-Titanium/Triton X-100 Composite Polymer Counter Electrodes for Dye-Sensitized Solar Cells2022

    • Author(s)
      Chawarambwa Fadzai Lesley、Putri Tika Erna、Pankaj Attri、Kamataki Kunihiro、Itagaki Naho、Koga Kazunori、Shiratani Masaharu
    • Journal Title

      Advanced Materials Research

      Volume: 1168 Pages: 35-47

    • DOI

      10.4028/www.scientific.net/amr.1168.35

    • Related Report
      2021 Research-status Report
    • Peer Reviewed
  • [Journal Article] Improved luminescence performance of Yb3+-Er3+-Zn2+: Y2O3 phosphor and its application to solar cells2022

    • Author(s)
      Chawarambwa Fadzai Lesley、Putri Tika Erna、Hwang Sung-Hwa、Attri Pankaj、Kamataki Kunihiro、Itagaki Naho、Koga Kazunori、Nakamura Daisuke、Shiratani Masaharu
    • Journal Title

      Optical Materials

      Volume: 123 Pages: 111928-111928

    • DOI

      10.1016/j.optmat.2021.111928

    • Related Report
      2021 Research-status Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Morphological control of nanostructured Ge films in high Ar-gas-pressure plasma sputtering process for Li ion batteries2021

    • Author(s)
      Junki Hayashi, Kenta Nagai, Yuma Habu, Yumiko Ikebe, Mineo Hiramatsu, Ryota Narishige, Naho Itagaki, Masaharu Shiratani, Yuichi Setsuhara, Giichiro Uchida
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 61 Issue: SA Pages: SA1002-SA1002

    • DOI

      10.35848/1347-4065/ac2b7b

    • Related Report
      2021 Research-status Report
    • Peer Reviewed
  • [Journal Article] Performance Characteristics of Bifacial Dye-Sensitized Solar Cells with a V-Shaped Low-Concentrating Light System2021

    • Author(s)
      Putri Tika E.、Chawarambwa Fadzai L.、Son Min-Kyu、Attri Pankaj、Kamataki Kunihiro、Itagaki Naho、Koga Kazunori、Shiratani Masaharu
    • Journal Title

      ACS Applied Energy Materials

      Volume: 4 Issue: 12 Pages: 13410-13414

    • DOI

      10.1021/acsaem.1c02774

    • Related Report
      2021 Research-status Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Effects of concentrated light on the performance and stability of a quasi-solid electrolyte in dye-sensitized solar cells2021

    • Author(s)
      Chawarambwa Fadzai Lesley、Putri Tika Erna、Attri Pankaj、Kamataki Kunihiro、Itagaki Naho、Koga Kazunori、Shiratani Masaharu
    • Journal Title

      Chemical Physics Letters

      Volume: 781 Pages: 138986-138986

    • DOI

      10.1016/j.cplett.2021.138986

    • Related Report
      2021 Research-status Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Passivating antireflection coating of crystalline silicon using i/n a-Si:H/SiN trilayer2021

    • Author(s)
      Nunomura Shota、Sakata Isao、Sato Aiko、Lozac'h Mickael、Misawa Tatsuya、Itagaki Naho、Shiratani Masaharu
    • Journal Title

      Journal of Physics and Chemistry of Solids

      Volume: 156 Pages: 110127-110127

    • DOI

      10.1016/j.jpcs.2021.110127

    • Related Report
      2021 Research-status Report
    • Peer Reviewed / Open Access
  • [Journal Article] Comparison between Ar+CH4 cathode and anode coupling chemical vapor depositions of hydrogenated amorphous carbon films2021

    • Author(s)
      Hwang Sung-Hwa、Iwamoto Ryosuke、Okumura Takamasa、Kamataki Kunihiro、Itagaki Naho、Koga Kazunori、Nakatani Tatsuyuki、Shiratani Masaharu
    • Journal Title

      Thin Solid Films

      Volume: 729 Pages: 138701-138701

    • DOI

      10.1016/j.tsf.2021.138701

    • Related Report
      2021 Research-status Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] Sputtering Growth of Metal Oxynitride Semiconductors for Excitonic Devices2021

    • Author(s)
      Narishige Ryota、Itagaki Naho、Shiratani Masaharu
    • Journal Title

      Proc. 5th IEEE Electron Devices Technology & Manufacturing Conference (EDTM)

      Volume: - Pages: 1-3

    • DOI

      10.1109/edtm50988.2021.9420921

    • Related Report
      2021 Research-status Report
    • Peer Reviewed
  • [Presentation] Sputtering deposition of low resistive 30-nm-thick ZnO:Al films on seed layers grown via solid phase crystallization of fractionally crystallized ZnON films2024

    • Author(s)
      Y. Wada, S. Zhiyuan, H. Yabuta, N. Yamashita, T. Okumura, K. Kamataki, H. Kiyama, K. Koga, M. Shiratani, N. Itagaki
    • Organizer
      ISPlasma
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Stability of insulative perovskite YBiO3 film grown on BaBiO3 buffer layer2024

    • Author(s)
      Naoto Yamashita, Philippa Shepley , Nathan Fox , Joel Burton , Joshua Freeman , Satoshi Sasaki
    • Organizer
      2024年第71回応用物理学会春季学術講演会
    • Related Report
      2023 Annual Research Report
  • [Presentation] スパッタだからできる薄膜の結晶性・モフォロジー制御2023

    • Author(s)
      板垣奈穂
    • Organizer
      化学工学会第54回秋季大会
    • Related Report
      2023 Annual Research Report
    • Invited
  • [Presentation] Fabrication of ZnO based transparent conducting oxides by sputtering combined with solid phase crystallization : a way to meet the future demand for transparent electrodes2023

    • Author(s)
      N. Itagaki, Y. Wada, H. Yabuta, M. Shiratani
    • Organizer
      AAPPS-DPP2023
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Fabrication of ZnO Based Transparent Conducting Oxide as an Alternative to In2O3:Sn by Sputtering Combined with Solid Phase Crystallization2023

    • Author(s)
      N. Itagaki, Z. Shen, Y. Wada, H. Yabuta, N. Yamashita, T. Okumura, K. Kamataki, K. Koga, M. Shiratani
    • Organizer
      MRM2023/IUMRS-ICA2023
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 逆 Stranski-Krastanov モードを利用した異なるオフ角を有するサファイア基板上への(ZnO)x(InN)1-x 膜の成長2023

    • Author(s)
      中野祐太郎,成重椋太,山下尚人,鎌滝晋礼,奥村賢直,古閑一憲,白谷正治,木山治樹,板垣奈穂
    • Organizer
      プラズマ・核融合学会 九州・沖縄・山口支部 第27回 支部大会
    • Related Report
      2023 Annual Research Report
  • [Presentation] 逆 Stranski-Krastanov モードによるサファイア基板上への(ZnO)x(InN)1-x 膜のエピタキシャル成長:バッファー層のモフォロジーの影響2023

    • Author(s)
      畑昌太朗,中野祐太郎,成重椋太,山下尚人,鎌滝晋礼,奥村賢直,古閑一憲,白谷正治,木山治樹,板垣奈穂
    • Organizer
      プラズマ・核融合学会 九州・沖縄・山口支部 第27回 支部大会
    • Related Report
      2023 Annual Research Report
  • [Presentation] Sputtering deposition of single crystalline ZnO films on sapphire substrates via inverted Stranski-Krastanov mode: effects of thickness of 3D island buffer layer2023

    • Author(s)
      H. Otsuyama, R. Mitsuishi, T. Yunoue, K. Yataka, N. Yamashita, T. Okumura, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki
    • Organizer
      2023年(令和5年度)応用物理学会九州支部学術講演会 / The 8th Asian Applied Physics Conference
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 逆Stranski-Krastanovモードによる格子不整合基板上への原子平坦 (ZnO)x(InN)1-x 膜の成長2023

    • Author(s)
      中野祐太郎, 成重椋太, 山下尚人, 鎌滝晋礼, 奥村賢直, 古閑一憲, 白谷正治, 木山治樹, 薮田久人, 板垣奈穂
    • Organizer
      第84回応用物理学会秋季学術講演会
    • Related Report
      2023 Annual Research Report
  • [Presentation] ZnOおよびScAlMgO4ステップ基板上への(ZnO)x(InN)1-x膜の室温エピタキシャル成長2023

    • Author(s)
      成重椋太, 中野祐太朗, 山下尚人, 鎌滝晋礼, 奥村賢直, 木山治樹, 古閑一憲, 白谷正治, 薮田久人, 板垣奈穂
    • Organizer
      第84回応用物理学会秋季学術講演会
    • Related Report
      2023 Annual Research Report
  • [Presentation] サファイア基板上への原子ステップを有するZn1-xMgxO薄膜の形成:3次元島バッファー層の形成温度の影響2023

    • Author(s)
      矢高功太郎, 湯上貴文, 山下尚人, 奥村賢直, 鎌滝晋礼, 古閑一憲, 白谷正治, 板垣奈穂
    • Organizer
      第84回応用物理学会秋季学術講演会
    • Related Report
      2023 Annual Research Report
  • [Presentation] 逆Stranski-Krastanovモードを用いたサファイア基板上へのZnO単結晶膜成長:MgOバッファー層の効果2023

    • Author(s)
      湯上貴文, 矢高功太郎, 山下尚人, 山下大輔, 奥村賢直, 鎌滝晋礼, 木山治樹, 古閑一憲, 白谷正治, 板垣奈穂
    • Organizer
      第84回応用物理学会秋季学術講演会
    • Related Report
      2023 Annual Research Report
  • [Presentation] ZnON膜からの固相結晶化ZnO膜の形成と透明導電膜シード層としての効果:ZnON膜の結晶化度の影響2023

    • Author(s)
      和田義晴, 沈志遠, 薮田久人, 山下尚人, 奥村賢直, 鎌滝晋礼, 古閑一憲, 白谷正治, 板垣奈穂
    • Organizer
      第84回応用物理学会秋季学術講演会
    • Related Report
      2023 Annual Research Report
  • [Presentation] Sputter epitaxy of atomically flat (ZnO)x(InN)1-x films on sapphire substrates using ZnO(N) buffer layers fabricated by Ar/N2 discharges2023

    • Author(s)
      Y. Nakano, R. Narishige, N. Yamashita, K. Kamataki, T. Okumura, H. Kiyama, K. Koga, M. Shiratani, H. Yabuta, N. Itagaki
    • Organizer
      ICPIG2023
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Sputter deposition of low resistive 30-nm-thick ZnO:Al films using ZnO seed layers grown via solid-phase crystallization2023

    • Author(s)
      Y. Wada, Z. Shen, H. Yabuta, N. Yamashita, T. Okumura, K. Kamataki, H. Kiyama, K. Koga, M. Shiratani, N. Itagaki
    • Organizer
      ICPIG2023
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Pseudomorphic growth of (ZnO)x(InN)1-x films on ZnO substrates by magnetron sputtering using Ar/N2/O2 discharges2023

    • Author(s)
      R. Narishige, Y. Nakano, N. Yamashita, K. Kamataki, T. Okumura, H. Kiyama, K. Koga, M. Shiratani, H. Yabuta, N. Itagaki
    • Organizer
      ICPIG2023
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Sputter epitaxy of Zn1-xMgxO films on lattice-mismatched sapphire substrates utilizing ZnO(N)/MgO buffer layers fabricated by Ar/N2 and Ar/O2 discharges2023

    • Author(s)
      T. Yunoue, K. Yataka, N. Yamashita, D. Yamashita, T. Okumura, K. Kamataki, H. Kiyama, K. Koga, M. Shiratani, H. Yabuta, N. Itagaki
    • Organizer
      ICPIG2023
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Structural Control of Sputter Deposited Films Using Impurities2023

    • Author(s)
      Naho Itagaki
    • Organizer
      International C+Nano Convergence Technology Symposium (ICTS)
    • Related Report
      2022 Research-status Report
    • Int'l Joint Research / Invited
  • [Presentation] Study of Solid-phase Crystallization of Amorphous ZnON Films2023

    • Author(s)
      Z. Shen, Y. Mido, N. Yamashita, T. Okumura, K. Kamataki, K. Koga, M. Shiratani1, H. Yabuta, N. Itagaki
    • Organizer
      7th International Conference on Advances in Functional Materials(AFM-2022)
    • Related Report
      2022 Research-status Report
    • Int'l Joint Research
  • [Presentation] Microscopic analysis of single crystalline Zn1-xMgxO thin films on sapphire grown via inverted Stranski-Krastanov mode2023

    • Author(s)
      N. Yamashita, D. Takahashi, T. Okumura, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki
    • Organizer
      7th International Conference on Advances in Functional Materials(AFM-2022)
    • Related Report
      2022 Research-status Report
    • Int'l Joint Research
  • [Presentation] Effects of thermal treatment of ZnO substrates on epitaxial growth of (ZnO)x(InN)1-x films fabricated by magnetron sputtering2023

    • Author(s)
      R. Narishige, N. Yamashita, K. Kamataki, T. Okumura, K. Koga, M. Shiratani, N. Itagaki
    • Organizer
      7th International Conference on Advances in Functional Materials(AFM-2022)
    • Related Report
      2022 Research-status Report
    • Int'l Joint Research
  • [Presentation] Sputtering deposition of single crystalline Zn1-xMgxO films on sapphire substrate via inverted Staranski-Krastanov mode: effects of substrate2023

    • Author(s)
      K.Yataka, N. Yamashita, D. Takahashi, T. Okumura, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki
    • Organizer
      7th International Conference on Advances in Functional Materials(AFM-2022)
    • Related Report
      2022 Research-status Report
    • Int'l Joint Research
  • [Presentation] サファイア基板上への Zn1-xMgxO 膜のスパッタエピタキシー:ZnON/MgO バッファー層の効果2022

    • Author(s)
      湯上貴文, 矢高功太郎, 三石遼, 山下尚人, 山下大輔, 奥村賢直, 鎌滝晋礼, 木山治樹, 古閑一憲,白谷正治, 薮田久人, 板垣奈穂
    • Organizer
      プラズマ・核融合学会 九州・沖縄・山口支部 第26回 支部大会
    • Related Report
      2022 Research-status Report
  • [Presentation] 固相結晶成長した ZnO シード層上への ZnO:Al 膜のスパッタリング成膜2022

    • Author(s)
      和田義晴, 沈志遠, 薮田久人, 山下尚人, 奥村賢直, 鎌滝晋礼, 木山治樹, 古閑一憲,白谷正治, 板垣奈穂
    • Organizer
      プラズマ・核融合学会 九州・沖縄・山口支部 第26回 支部大会
    • Related Report
      2022 Research-status Report
  • [Presentation] 不純物でスパッタ膜のモフォロジーを制御する~アモルファスからエピ膜まで~2022

    • Author(s)
      板垣奈穂
    • Organizer
      第78回CVD研究会
    • Related Report
      2022 Research-status Report
    • Int'l Joint Research
  • [Presentation] Sputtering Growth of Single-Crystalline ZnO Based Semiconducting Films on Large Lattice-Mismatched Substrates2022

    • Author(s)
      Naho Itagaki
    • Organizer
      International Workshop on Magnetron Sputter Epitaxy (IWMSE)
    • Related Report
      2022 Research-status Report
    • Int'l Joint Research / Invited
  • [Presentation] Sputter epitaxy of (ZnO)x(InN)1-x films on sapphire substrates using ZnON buffer layers2022

    • Author(s)
      Y. Nakano, R. Narishige, N. Yamashita, K. Kamataki, T. Okumura, K. Koga, M. Shiratani, H. Kiyama, H. Yabuta, N. Itagaki
    • Organizer
      The 7th Asian Applied Physics Conference
    • Related Report
      2022 Research-status Report
    • Int'l Joint Research
  • [Presentation] Sputtering deposition of ZnO:Al Transparent Conducting Films on Seed Layers Crystallized via Thermal Annealing of Amorphous ZnON Films2022

    • Author(s)
      Z. Shen, H. Yabuta, Y. Wada, N. Yamashita, T. Okumura, K. Kamataki, K. Koga, M. Shiratani, H. Kiyama, N. Itagaki
    • Organizer
      The 7th Asian Applied Physics Conference
    • Related Report
      2022 Research-status Report
    • Int'l Joint Research
  • [Presentation] Structural Control of Sputter Deposited Films beyond the Thornton Diagram Using Impurities2022

    • Author(s)
      Naho Itagaki
    • Organizer
      AAPPS-DPP 2022
    • Related Report
      2022 Research-status Report
    • Int'l Joint Research / Invited
  • [Presentation] 固相結晶化シード層上へのZnO:Al透明導電膜のスパッタリング成膜:固相結晶化温度の影響2022

    • Author(s)
      沈志遠, 薮田久人, 山下尚人, 鎌滝晋礼, 奥村賢直, 古閑一憲, 白谷正治, 板垣奈穂
    • Organizer
      第83回応用物理学会秋季学術講演会
    • Related Report
      2022 Research-status Report
  • [Presentation] スパッタエピタキシー法による(ZnO)x(InN)1-x単結晶薄膜の室温成膜2022

    • Author(s)
      成重椋太, 山下尚人, 鎌滝晋礼, 奥村賢直, 古閑一憲, 白谷正治, 板垣奈穂
    • Organizer
      第83回応用物理学会秋季学術講演会
    • Related Report
      2022 Research-status Report
  • [Presentation] 格子不整合サファイア基板上への単結晶ZnO膜のスパッタリング成膜: ZnONバッファー層の効果2022

    • Author(s)
      三石遼, 矢高功太郎, 山下尚人, 奥村賢直, 鎌滝晋礼, 古閑一憲, 白谷正治, 板垣奈穂
    • Organizer
      第83回応用物理学会秋季学術講演会
    • Related Report
      2022 Research-status Report
  • [Presentation] 異なるMg組成を有する単結晶ZnO1-xMgxO膜成長におけるZnONバッファー層の効果2022

    • Author(s)
      矢高功太郎, 高橋大智, 山下尚人, 山下大輔, 奥村賢直, 鎌滝晋礼, 古閑一憲, 白谷正治, 板垣奈穂
    • Organizer
      第83回応用物理学会秋季学術講演会
    • Related Report
      2022 Research-status Report
  • [Presentation] サファイア基板上の単結晶ZnO薄膜作製におけるバッファー層評価指標2022

    • Author(s)
      山下尚人, 中村優太, 鎌滝晋礼, 奥村賢直, 板垣奈穂, 古閑一憲, 白谷正治
    • Organizer
      第83回応用物理学会秋季学術講演会
    • Related Report
      2022 Research-status Report
  • [Presentation] Fabrication of Low-Resistive Amorphous In2O3 :Sn Films at 600°C by Magnetron Sputtering Using Nitrogen2022

    • Author(s)
      N. Itagaki, Y. Mido, Z. Shen, N. Yamashita, T. Okumura, K. Kamataki, K. Koga, M. Shiratani
    • Organizer
      9th International Symposium on Control of Semiconductor Interfaces
    • Related Report
      2022 Research-status Report
    • Int'l Joint Research
  • [Presentation] Control of Crystal Structure and Magnetic Properties of ZnO: Co Films Grown by Magnetron Sputtering Using Nitrogen2022

    • Author(s)
      A. M. Nurut, R. Narishige, N. Yamashita, K. Kamataki, T. Okumura, K. Koga, M. Shiratani, N. Itagaki
    • Organizer
      9th International Symposium on Control of Semiconductor Interfaces
    • Related Report
      2022 Research-status Report
    • Int'l Joint Research
  • [Presentation] Effects of surface polarity of ZnO substrates on epitaxial growth of (ZnO)x(InN)1-x films fabricated at room temperature2022

    • Author(s)
      R. Narishige, N. Yamashita, K. Kamataki, T. Okumura, K. Koga, M. Shiratani, N. Itagaki
    • Organizer
      9th International Symposium on Control of Semiconductor Interfaces
    • Related Report
      2022 Research-status Report
    • Int'l Joint Research
  • [Presentation] 逆Stranski-Krastanovモードによる単結晶ZnO薄膜のスパッタリング成膜:窒素流量の影響2022

    • Author(s)
      三石遼, 山下尚人, 矢高功太郎, 奥村賢直, 鎌滝晋礼, 古閑一憲, 白谷正治, 板垣奈穂
    • Organizer
      2022年度日本表面真空学会 九州支部学術講演会
    • Related Report
      2022 Research-status Report
  • [Presentation] Epitaxial Growth of Atomically Flat Single-crystalline (ZnO) (InN) Films on O-polar ZnO Substrates by Magnetron Sputtering2022

    • Author(s)
      R. Narishige, N. Yamashita, K. Kamataki, T. Okumura, K. Koga, M. Shiratani, N.Itagaki
    • Organizer
      MRS spring meeting 2022
    • Related Report
      2022 Research-status Report 2021 Research-status Report
    • Int'l Joint Research
  • [Presentation] Key parameters for single crystalline ZnO film growth by magnetron sputtering via inverted Stranski-Krastanov mode2022

    • Author(s)
      N. Yamashita, Y. Nakamura, K. Kamataki, T. Okumura, K. Koga, M. Shiratani, N. Itagaki
    • Organizer
      MRS spring meeting 2022
    • Related Report
      2022 Research-status Report 2021 Research-status Report
    • Int'l Joint Research
  • [Presentation] Epitaxial Growth of Single-Crystalline ZnO Films on Sapphire Substrates via Inverted Stranski-Krastanov Mode by Low-Power Magnetron Sputtering2022

    • Author(s)
      R. Mitsuishi, N. Yamashita, D.Takahashi, T. Okumura, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki
    • Organizer
      MRS spring meeting 2022
    • Related Report
      2022 Research-status Report 2021 Research-status Report
    • Int'l Joint Research
  • [Presentation] A Study of Solid-phase Crystallization of Amorphous ZnON Films2022

    • Author(s)
      Z. Shen, Y. Mido, N. Yamashita, T. Okumura, K. Kamataki, K. Koga, M. Shiratani1, H. Yabuta, N. Itagaki
    • Organizer
      7th International Conference on Advances in Functional Materials(AFM-2022)
    • Related Report
      2021 Research-status Report
    • Int'l Joint Research
  • [Presentation] Microscopic analysis of single crystalline Zn1-xMgxO thin films on sapphire grown via inverted Stranski-Krastanov mode2022

    • Author(s)
      N. Yamashita, D. Takahashi, T. Okumura, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki
    • Organizer
      7th International Conference on Advances in Functional Materials(AFM-2022)
    • Related Report
      2021 Research-status Report
    • Int'l Joint Research
  • [Presentation] Effects of RF powers on the crystal quality and surface morphology of single crystalline ZnO films deposited by magnetron sputtering2022

    • Author(s)
      R. Mitsuishi, N. Yamashita, D. Takahashi, T. Okumura, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki
    • Organizer
      7th International Conference on Advances in Functional Materials(AFM-2022)
    • Related Report
      2021 Research-status Report
    • Int'l Joint Research
  • [Presentation] Effects of thermal treatment of ZnO substrates on epitaxial growth of (ZnO)x(InN)1-x films fabricated by magnetron sputtering2022

    • Author(s)
      R. Narishige, N. Yamashita, K. Kamataki, T. Okumura, K. Koga, M. Shiratani, N. Itagaki
    • Organizer
      7th International Conference on Advances in Functional Materials(AFM-2022)
    • Related Report
      2021 Research-status Report
    • Int'l Joint Research
  • [Presentation] Sputtering deposition of single crystalline Zn1-xMgxO films on sapphire substrate via inverted Staranski-Krastanov mode: effects of substrate2022

    • Author(s)
      K.Yataka, N. Yamashita, D. Takahashi, T. Okumura, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki
    • Organizer
      7th International Conference on Advances in Functional Materials(AFM-2022)
    • Related Report
      2021 Research-status Report
    • Int'l Joint Research
  • [Presentation] Sputtering Deposition with Impurities: Another Key Parameter to Control Film Structures(Invited)2021

    • Author(s)
      N. Itagaki
    • Organizer
      MRS fall meeting 2021
    • Related Report
      2021 Research-status Report
    • Int'l Joint Research / Invited
  • [Presentation] Development of New Oxynitride Semiconductors with Tunable Band Gaps Using Magnetron Sputtering(Invited)2021

    • Author(s)
      N. Itagaki
    • Organizer
      Materials Research Meeting 2021 (MRM2021)
    • Related Report
      2021 Research-status Report
    • Int'l Joint Research / Invited
  • [Presentation] Inverted Stranski-Krastanov Growth of ZnO Based Semiconductors for Excitonic Devices(Invited)2021

    • Author(s)
      N. Itagaki
    • Organizer
      Materials Research Meeting 2021 (MRM2021)
    • Related Report
      2021 Research-status Report
    • Int'l Joint Research / Invited
  • [Presentation] Sputter epitaxy of ZnO based oxide/oxynitride semiconductors for excitonic transistors(Invited)2021

    • Author(s)
      N. Itagaki
    • Organizer
      5th Asia-Pacific Conference on Plasma Physics
    • Related Report
      2021 Research-status Report
    • Int'l Joint Research / Invited
  • [Presentation] 非晶質ZnON膜からの固相結晶化ZnO膜の形成とシード層としての効果(招待講演)2021

    • Author(s)
      板垣奈穂, 沈志遠, 御堂雄大, 薮田久人
    • Organizer
      第82回応用物理学会秋季学術講演会
    • Related Report
      2021 Research-status Report
    • Invited
  • [Presentation] 逆 Stranski-Krastanov モードを利用した単結晶 ZnMgO 薄膜のスパッタリング成膜2021

    • Author(s)
      矢髙功太郎, 山下尚人, 髙橋大智, 山下大輔, 奥村賢直, 鎌滝晋礼, 古閑一憲, 白谷正治, 板垣奈穂
    • Organizer
      プラズマ・核融合学会九州・沖縄・山口支部 第24回支部大会
    • Related Report
      2021 Research-status Report
  • [Presentation] Solid-phase Crystallization of Sputter-deposited ZnON Films and Their Impacts as Seed Layers for ZnO:Al Transparent Conducting Oxides2021

    • Author(s)
      Z. Shen, N. Yamashita, Y. Mido, T. Okumura, K. Kamataki, K. Koga, M. Shiratani, H. Yabuta, N. Itagaki
    • Organizer
      プラズマ・核融合学会九州・沖縄・山口支部 第24回支部大会
    • Related Report
      2021 Research-status Report
  • [Presentation] Inverted Stranski-Krastanov Growth of Single-Crystalline Zn Mg O Films on Sapphire Substrates using Magnetron Sputtering2021

    • Author(s)
      D. Takahashi, D. Yamashita, T. Okumura, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki
    • Organizer
      MRS fall meeting 2021
    • Related Report
      2021 Research-status Report
    • Int'l Joint Research
  • [Presentation] Epitaxial Growth of Atomically Flat Single-crystalline (ZnO) (InN) Films on O-polar ZnO Substrates by Magnetron Sputtering2021

    • Author(s)
      R. Narishige, N. Yamashita, K. Kamataki, T. Okumura, K. Koga, M. Shiratani, N. Itagaki
    • Organizer
      MRS fall meeting 2021
    • Related Report
      2021 Research-status Report
    • Int'l Joint Research
  • [Presentation] High-temperature Growth of Amorphous In O :Sn Films by Magnetron Sputtering using Nitrogen2021

    • Author(s)
      Y. Mido, K. Takeda, D. Yamashita, T. Okumura, K. Kamataki, K. Koga, M. Shiratani, M. Hori, N. Itagaki
    • Organizer
      MRS fall meeting 2021
    • Related Report
      2021 Research-status Report
    • Int'l Joint Research
  • [Presentation] Sputtering deposition of single crystalline ZnO films on sapphire substrates via inverted Stranski-Krastanov mode: effects of RF power2021

    • Author(s)
      R. Mitsuishi, D. Takahashi, D. Yamashita, T. Okumura, N. Yamashita, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki
    • Organizer
      The 6th Asian Applied Physics Conference (Asian-APC)
    • Related Report
      2021 Research-status Report
    • Int'l Joint Research
  • [Presentation] Epitaxial growth of (ZnO)X(InN)1-X films by magnetron sputtering: effects of surface polarity of ZnO substrates2021

    • Author(s)
      R. Narishige, D. Yamashita, K. Kamataki, T. Okumura, K. Koga, M. Shiratani, N. Itagaki
    • Organizer
      Plathinium 2021
    • Related Report
      2021 Research-status Report
    • Int'l Joint Research
  • [Presentation] 窒素添加スパッタ法による高移動度アモルファスIn2O3:Sn薄膜の高温成膜2021

    • Author(s)
      御堂雄大, 山下大輔, 奥村賢直, 鎌滝晋礼, 古閑一憲, 白谷正治, 板垣奈穂
    • Organizer
      第82回応用物理学会秋季学術講演会
    • Related Report
      2021 Research-status Report
  • [Presentation] ZnONバッファー層を用いたサファイア基板上への単結晶Zn1-xMgxO薄膜の成長2021

    • Author(s)
      高橋大智, 山下大輔, 奥村賢直, 鎌滝晋礼, 古閑一憲, 白谷正治, 板垣奈穂
    • Organizer
      第82回応用物理学会秋季学術講演会
    • Related Report
      2021 Research-status Report
  • [Presentation] マグネトロンスパッタリング法で作製した(ZnO)x(InN)1-x膜の表面モフォロジーに及ぼす基板極性の影響2021

    • Author(s)
      成重椋太, 山下大輔, 鎌滝晋礼, 奥村賢直, 古閑一憲, 白谷正治, 板垣 奈穂
    • Organizer
      第82回応用物理学会秋季学術講演会
    • Related Report
      2021 Research-status Report
  • [Presentation] (ZnO)x (InN)1-x 膜のスパッタエピタキシーに及ぼす基板表面極性の影響2021

    • Author(s)
      成重椋太, 山下大輔, 鎌滝晋礼, 奥村賢直, 古閑一憲, 白谷正治, 板垣奈穂
    • Organizer
      令和3年度日本表面真空学会九州支部学術講演会
    • Related Report
      2021 Research-status Report
  • [Presentation] スパッタ法によるサファイア基板上への原子平坦なZnMgO薄膜の作製2021

    • Author(s)
      髙橋大智, 山下大輔, 奥村賢直, 鎌滝晋礼, 古閑一憲, 白谷正治, 板垣奈穂
    • Organizer
      令和3年度日本表面真空学会九州支部学術講演会
    • Related Report
      2021 Research-status Report
  • [Presentation] 窒素添加スパッタ法による高移動度アモルファス In2 O3 :Sn 薄膜の作製2021

    • Author(s)
      御堂雄大, 山下大輔, 奥村賢直, 鎌滝晋礼, 古閑一憲, 白谷正治, 板垣奈穂
    • Organizer
      令和3年度日本表面真空学会九州支部学術講演会
    • Related Report
      2021 Research-status Report
  • [Remarks] 九州大学 板垣研究室Website

    • URL

      https://plasma.ed.kyushu-u.ac.jp/~inorganic/index.html

    • Related Report
      2023 Annual Research Report

URL: 

Published: 2021-07-13   Modified: 2025-01-30  

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