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Creation and Characterization of Nanomechanical Structures andits Applications to Devices

Research Project

Project/Area Number 22226004
Research Category

Grant-in-Aid for Scientific Research (S)

Allocation TypeSingle-year Grants
Research Field Production engineering/Processing studies
Research InstitutionThe University of Tokyo

Principal Investigator

ISHIHARA Sunao  東京大学, 大学院・工学系研究科, 教授 (00422329)

Co-Investigator(Kenkyū-buntansha) YAMAGUCHI Hiroshi  日本電信電話株式会社, NTT 物性科学基礎研究所, 研究部長主席特別研究員 (60374071)
WARISAWA Shin-ichi  東京大学, 大学院・新領域創成科学研究科, 准教授 (20262321)
DELAUNEY Jean-jacques  東京大学, 大学院・工学系研究科, 准教授 (80376516)
KOMETANI Reo  東京大学, 大学院・工学系研究科, 講師 (90466780)
Project Period (FY) 2010 – 2012
Project Status Completed (Fiscal Year 2012)
Budget Amount *help
¥205,790,000 (Direct Cost: ¥158,300,000、Indirect Cost: ¥47,490,000)
Fiscal Year 2012: ¥9,490,000 (Direct Cost: ¥7,300,000、Indirect Cost: ¥2,190,000)
Fiscal Year 2011: ¥89,700,000 (Direct Cost: ¥69,000,000、Indirect Cost: ¥20,700,000)
Fiscal Year 2010: ¥106,600,000 (Direct Cost: ¥82,000,000、Indirect Cost: ¥24,600,000)
Keywordsナノマイクロ加工 / NEMS / ナノメカニクス / ナノ計測 / ナノ振動子 / ナノ計測・ナノ加工 / 電子ビーム・イオンビーム / ナノメカニカル振動子 / 機械共振特性 / ナノ・マイクロデバイス / センシングデバイス / ナノ加工・ナノ計測
Research Abstract

Nanomechanical structures have great potential in realizing innovative electromechanical systems utilizing new properties and functions appeared due to its small scales. In this research, fundamental investigations into fabrication using electron and ion beams, measurement using electron beam and AFM, and characterization in frequency domain of nanomechanical structures, and their applications to innovative nanoelectromechanical systems (NEMS) i.e. ultra-small resonator-based sensing deviceswith high detection performances are conducted.

Assessment Rating
Verification Result (Rating)

A

Report

(5 results)
  • 2013 Research Progress Assessment (Verification Result) ( PDF )
  • 2012 Annual Research Report   Final Research Report ( PDF )
  • 2011 Annual Research Report
  • 2010 Annual Research Report
  • Research Products

    (137 results)

All 2013 2012 2011 2010 Other

All Journal Article (24 results) (of which Peer Reviewed: 16 results) Presentation (98 results) (of which Invited: 4 results) Remarks (4 results) Patent(Industrial Property Rights) (11 results)

  • [Journal Article] High Quality Factor Graphene Resonator Fabrication Using Resist Shrinkage-Induced Strain2012

    • Author(s)
      Y. Oshidari, T. Hatakeyama, R. Kometani, S.Warisawa, S. Ishihara
    • Journal Title

      Appl. Phys. Express

      Volume: 5 Issue: 11 Pages: 117201-117201

    • DOI

      10.1143/apex.5.117201

    • NAID

      10031126464

    • Related Report
      2012 Annual Research Report 2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Nanomechanical tuning forks fabricated using focused-ion-beam chemical vapor deposition2012

    • Author(s)
      Hiroki Ashiba
    • Journal Title

      Journal of Vacuum Science and Technology B

      Volume: 30 Issue: 6

    • DOI

      10.1116/1.4766315

    • Related Report
      2012 Annual Research Report 2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] A Nanomechanical Resonator from HSQ Fabricated by FIB/EB Dual Beam Lithography2012

    • Author(s)
      S. Warisawa, K. Kuroda, S. Chen, R.Kometani, S. Ishihara
    • Journal Title

      J. Photopolym. Sci. Technol

      Volume: 25 Pages: 37-37

    • NAID

      130004464942

    • Related Report
      2012 Final Research Report
  • [Journal Article] Three-Dimensional Nanostructure Fabrication by Controlling Downward Growth on Focused-Ion-Beam Chemical Vapor Deposition2012

    • Author(s)
      D. Guo, R. Kometani, S. Warisawa, and S.Ishihara
    • Journal Title

      Jpn. J. Appl. Phys

      Volume: 51 Issue: 6R Pages: 65001-65001

    • DOI

      10.1143/jjap.51.065001

    • NAID

      40019317176

    • Related Report
      2012 Annual Research Report 2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Motion detection of a micro- mechanical cantilever through magneto- piezovoltage in two-dimensional electron systems2012

    • Author(s)
      H. Yamaguchi, H. Okamoto, S. Ishihara and Y.Hirayama
    • Journal Title

      Appl. Phys. Lett

      Volume: 100 Issue: 1 Pages: 12106-12106

    • DOI

      10.1063/1.3674288

    • Related Report
      2012 Final Research Report 2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] ナノエレクトロメカニカルシステム(NEMS) のセンサ応用2012

    • Author(s)
      石原 直
    • Journal Title

      応用物理

      Volume: 81 Pages: 21-21

    • NAID

      10030158115

    • URL

      http://www.jsap.or.jp/ap/2012/01/ob810021.xml

    • Related Report
      2012 Final Research Report
  • [Journal Article] Nanoporous Structure Fabrication in Selective Areas by Block Copolymer Self-Assembly and Electron Beam Lithography2012

    • Author(s)
      H. Suzuki, R. Kometani, S. Ishihara, S. Warisawa
    • Journal Title

      Journal of Photopolymer Science and Technology

      Volume: 25 Issue: 1 Pages: 33-36

    • DOI

      10.2494/photopolymer.25.33

    • NAID

      130004464941

    • ISSN
      0914-9244, 1349-6336
    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] A Nanomechanical Resonator from HSQ Fabricated by FIB/EB Dual Beam Lithography2012

    • Author(s)
      S. Warisawa, K. Kuroda, S. Chen, R. Kometani, S. Ishihara
    • Journal Title

      Journal of Photopolymer Science and Technology

      Volume: 25 Issue: 1 Pages: 37-42

    • DOI

      10.2494/photopolymer.25.37

    • NAID

      130004464942

    • ISSN
      0914-9244, 1349-6336
    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] ナノエレクトロメカニカルシステム(NEMS)のセンサ応用2012

    • Author(s)
      石原 直
    • Journal Title

      応用物理

      Volume: 81 Pages: 21-25

    • NAID

      10030158115

    • Related Report
      2011 Annual Research Report
  • [Journal Article] Quality factor enhancement on nanomechanical resonators utilizing stiction phenomena2011

    • Author(s)
      H. Ashiba, R. Kometani, S. Warisawa, and S.Ishihara
    • Journal Title

      J. Vac. Sci. Technol. B

      Volume: 29 Issue: 6

    • DOI

      10.1116/1.3660384

    • Related Report
      2012 Final Research Report 2011 Annual Research Report
  • [Journal Article] Dynamic characteristics control of DLC nano-resonator fabricated by focused-ion-beam chemical vapor depo- sition2011

    • Author(s)
      R. Kometani, S. Nishi, S. Warisawa, and S.Ishihara
    • Journal Title

      J. Vac. Sci. Technol. B

      Volume: 29 Issue: 6

    • DOI

      10.1116/1.3662493

    • Related Report
      2012 Final Research Report 2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Carbon nano- mechanical resonator fabrication from PMMA by FIB/electron-beam dual-beam lithography2011

    • Author(s)
      R. Kometani, T. Hatakeyama, K. Kuroda, S.Warisawa, and S. Ishihara
    • Journal Title

      J. Vac. Sci. Technol. B

      Volume: 29 Issue: 6

    • DOI

      10.1116/1.3662083

    • Related Report
      2012 Final Research Report 2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Electromechanical Displacement Detection With an On-chip High Electron Mobility Transistor Amplifier2011

    • Author(s)
      Y. Oda, K. Onomitsu, R. Kometani, S.Warisawa, S. Ishihara, and H. Yamaguchi
    • Journal Title

      Jpn. J. Appl. Phys

      Volume: 50 Issue: 6S Pages: 06GJ01-06GJ01

    • DOI

      10.1143/jjap.50.06gj01

    • NAID

      210000070732

    • Related Report
      2012 Final Research Report 2011 Annual Research Report
  • [Journal Article] High-sensitivity charge detection using antisymmetric vibration in coupled micromechanical oscillators2011

    • Author(s)
      H. Okamoto, N. Kitajima, K. Onomitsu, R.Kometani, S. Warisawa, S. Ishihara and H.Yamaguchi
    • Journal Title

      Appl. Phys. Lett

      Volume: 98 Issue: 1 Pages: 14103-14103

    • DOI

      10.1063/1.3541959

    • Related Report
      2012 Final Research Report
  • [Journal Article] Gradually shifting surface plasmon resonance by controlling the diameter of a nano-hole structure by self-assembly2011

    • Author(s)
      T.Takagi, K.Kurihara, K.Awazu, R.Kometani, S.Warisawa, S.Ishihara
    • Journal Title

      Journal of Vacuum Science and Technology B

      Volume: 29 Issue: 6 Pages: 06FF03-06FF03

    • DOI

      10.1116/1.3660387

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Selective graphene growth from DLC thin film patterned by focused-ion-beam chemical vapor deposition2011

    • Author(s)
      T. Hatakeyama, R. Kometani, S. Warisawa, and S. Ishihara
    • Journal Title

      Journal of Vacuum Science and Technology B

      Volume: 29 Issue: 6 Pages: 06FG04-06FG04

    • DOI

      10.1116/1.3655581

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] High-sensitivity charge detection using antisymmetric vibration in coupled micromechanical oscillators2011

    • Author(s)
      H.Okamoto, N.Kitajima, K.Onomitsu, R.Kometani, S.Warisawa, S.Ishihara, H.Yamaguchi
    • Journal Title

      Applied Physics Letters

      Volume: 98

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] The 3D nanostructure growth evaluations by the real-time current monitoring on focused-ion-beam chemical vapor deposition2010

    • Author(s)
      R.Kometani, S.Warisawa, S.Ishihara
    • Journal Title

      Microelectronic Engineering

      Volume: 87 Pages: 1044-1048

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Non-Core-Shell Nanostructure Deposition on Focused-Ion-Beam Chemical-Vapor-Deposition2010

    • Author(s)
      R.Kometani, S.Warisawa, S.Ishihara
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 49

    • NAID

      210000068637

    • Related Report
      2010 Annual Research Report
  • [Journal Article] Evaluation of Resonance Characteristics Change of Silicon Resonators Due to Surface Treatment2010

    • Author(s)
      H.Shimizu, J.-J.Delaunay, R.Kometani, S.Warisawa, S.Ishihara
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 49

    • NAID

      210000068736

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Dynamic Characteristics Design System for 3D Nanostructure Fabricated by FIB-CVD2010

    • Author(s)
      S.Nishi, R.Kometani, S.Warisawa, S.Ishihara
    • Journal Title

      Journal of Advanced Mechanical Design, Systems, and Manufacturing

      Volume: 4(5) Pages: 958-954

    • NAID

      130000335368

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Piezoresistive effect in the three-dimensional diamondlike carbon nanostructure fabricated by focused-ion-beam chemical vapor deposition2010

    • Author(s)
      R.Kometani, S.Warisawa, S.Ishihara
    • Journal Title

      Journal of Vaccum Science and Technology B

      Volume: 28(6)

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Nanostructure fabrication by self-assembly of block copolymers on three-dimensional diamond-like carbon structures2010

    • Author(s)
      H.Mino, R.Kometani, S.Warisawa, S.Ishihara
    • Journal Title

      Journal of Vaccum Science and Technology B

      Volume: 28(6)

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Direct Actuation of GaAs Membrane Resonator by Scanning Probe2010

    • Author(s)
      M.Nagase, K.Tamaru, K.Nonaka, S.Warisawa, S.Ishihara, H.Yamaguchi
    • Journal Title

      NTT Technical Review

      Volume: 8(8) Pages: 1-7

    • Related Report
      2010 Annual Research Report
  • [Presentation] Partial patterning of periodic nanostructures using block copolymer lithography2013

    • Author(s)
      H. Suzuki, R. Kometani, S. Ishihara, S. Warisawa
    • Organizer
      SPIE Advanced Lithography 2013
    • Place of Presentation
      San Jose, USA
    • Related Report
      2012 Annual Research Report
  • [Presentation] 光波長検出微小機械振動子の作製と特性評価2013

    • Author(s)
      米谷玲皇、劉琿、割澤伸一、石原直
    • Organizer
      第60回応用物理学会春季学術講演会
    • Place of Presentation
      神奈川工科大学、厚木市
    • Related Report
      2012 Annual Research Report
  • [Presentation] 集束イオンビーム実時間照射量制御によるオーバーハング微細構造の長尺作製2013

    • Author(s)
      郭登極、米谷玲皇、割澤伸一、石原直
    • Organizer
      第60回応用物理学会春季学術講演会
    • Place of Presentation
      神奈川工科大学、厚木市
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Presentation] ナノ機械振動子を用いた高感度光波長検出に関する研究2013

    • Author(s)
      劉琿、米谷玲皇、割澤伸一、石原直
    • Organizer
      2013年度精密工学会春季大会学術講演会
    • Place of Presentation
      東京工業大学、東京
    • Related Report
      2012 Annual Research Report
  • [Presentation] Evaluation of Resonance Detection Properties on Vibration Measurement of the Mechanical Resonator using Scanning Probe Microscope2012

    • Author(s)
      R. Kometani, S. Mifune, S. Warisawa and S.Ishihara
    • Organizer
      25th Int. Microprocesses and Nanotechnology Conf. (MNC2012)
    • Place of Presentation
      Kobe, Japan
    • Year and Date
      2012-11-01
    • Related Report
      2012 Final Research Report
  • [Presentation] Direct Fabrication of WxCy SNS Josephson Junction by Using Focused- ion-beam Chemical Vapor Deposition2012

    • Author(s)
      J. Dai, K. Onomitsu, R. Kometani, Y.Krockenberger, H. Yamaguchi, S. Ishihara and S. Warisawa
    • Organizer
      25th International Microprocesses and Nano- technology Conference (MNC2012)
    • Place of Presentation
      Kobe, Japan
    • Year and Date
      2012-10-31
    • Related Report
      2012 Final Research Report
  • [Presentation] Height and Edge Shape Correction on the Nanostructure Fabrication by Focused- ion-beam Chemical Vapor Deposition2012

    • Author(s)
      Y. Murao, R. Kometani, S. Warisawa and S.Ishihara
    • Organizer
      25th Int. Microprocesses and Nanotechnology Conf. (MNC2012)
    • Place of Presentation
      Kobe, Japan
    • Year and Date
      2012-10-02
    • Related Report
      2012 Final Research Report
  • [Presentation] Ultra-long horizontal free-space- nanowire growth by the real-time feedback control of the scanning speed on focused- ion-beam chemical vapor deposition2012

    • Author(s)
      D. Guo, R. Kometani, S. Warisawa, S.Ishihara
    • Organizer
      38th Int. Conf. on Micro and Nano Engineering (MNE2012)
    • Place of Presentation
      Toulose, France
    • Year and Date
      2012-09-20
    • Related Report
      2012 Final Research Report
  • [Presentation] Vibration measurement technique of micro and nano mechanical resonators using tilt dependence of electron beam-induced secondary electron emission2012

    • Author(s)
      K. Nakano, R. Kometani, S. Warisawa, S.Ishihara
    • Organizer
      38th Int. Conf. on Micro and Nano Engineering (MNE2012)
    • Place of Presentation
      Toulose, France
    • Year and Date
      2012-09-18
    • Related Report
      2012 Final Research Report
  • [Presentation] Vibration Characteristics of DLC Nanomechanical Resonator under Parametric Excitation2012

    • Author(s)
      K. Fuse, R. Kometani, S. Ishihara, S.Warisawa
    • Organizer
      38th Int. Conf. on Micro and Nano Engineering (MNE2012)
    • Place of Presentation
      Toulose, France
    • Year and Date
      2012-09-18
    • Related Report
      2012 Final Research Report
  • [Presentation] Strained-nanomechanical resonator fabrication from HSQ by FIB/EB dual-beam lithography and annealing treatment2012

    • Author(s)
      R. Kometani, K. Kuroda, S. Warisawa and S.Ishihara
    • Organizer
      38th Int. Conf. on Micro and Nano Engineering (MNE2012)
    • Place of Presentation
      Toulose, France
    • Year and Date
      2012-09-18
    • Related Report
      2012 Final Research Report
  • [Presentation] Quality factor improvement of grapheme resonator by SU-8 shrinkage-induced strain2012

    • Author(s)
      Oshidari, T. Hatakeyama, R. Kometani, S.Warisawa and S. Ishihara
    • Organizer
      The 56th Int. Conf. on Electron, Ion and Photon Beam Technol. and Nanofabrication (EIPBN2012)
    • Place of Presentation
      Hawaii
    • Year and Date
      2012-06-01
    • Related Report
      2012 Final Research Report
  • [Presentation] Superconductivity of tungsten- containing carbon nanowires fabricated focused-ion-beam chemical vapor deposition2012

    • Author(s)
      Jun Dai, R. Kometani, S. Warisawa, S.Ishihara, K. Onomitsu, Y. Krockenberger, H. Yamaguchi
    • Organizer
      The 56th Int. Conf. on Electron, Ion and Photon Beam Technol. and Nanofabrication (EIPBN2012)
    • Place of Presentation
      Hawaii
    • Year and Date
      2012-05-31
    • Related Report
      2012 Final Research Report
  • [Presentation] The three-dimensional nanostructure fabrication from HSQ by FIB/EB dual-beam lithography2012

    • Author(s)
      R. Kometani, K. Kuroda, S. Warisawa and S.Ishihar
    • Organizer
      The 56th Int. Conf. on Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN2012)
    • Place of Presentation
      Hawaii
    • Year and Date
      2012-05-31
    • Related Report
      2012 Final Research Report
  • [Presentation] Nanomechanical Tuning Forks Fabricated by Focused-Ion-Beam Chemical Vapor Deposition2012

    • Author(s)
      H. Ashiba, R. Kometani, S. Warisawa and S.Ishihar
    • Organizer
      The 56th Int. Conf. on Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN2012)
    • Place of Presentation
      Hawaii
    • Year and Date
      2012-05-30
    • Related Report
      2012 Final Research Report
  • [Presentation] Height and Edge Shape Correction on the Nanostructure Fabrication by Focused-ionbeam Chemical Vapor Deposition2012

    • Author(s)
      Y. Murao, R. Kometani, S. Warisawa and S. Ishihara
    • Organizer
      25th International Microprocesses and Nanotechnology Conference (MNC2012)
    • Place of Presentation
      Kobe, Japan
    • Related Report
      2012 Annual Research Report
  • [Presentation] Evaluation of Resonance Detection Properties on Vibration Measurement of the Mechanical Resonator using Scanning Probe Microscope2012

    • Author(s)
      R. Kometani, S. Mifune, S. Warisawa and S. Ishihara
    • Organizer
      25th International Microprocesses and Nanotechnology Conference (MNC2012)
    • Place of Presentation
      Kobe, Japan
    • Related Report
      2012 Annual Research Report
  • [Presentation] Direct Fabrication of WxCy SNS Josephson Junction by Using Focused-ion-beam Chemical Vapor Deposition2012

    • Author(s)
      J. Dai, K. Onomitsu, R. Kometani, Y. Krockenberger, H. Yamaguchi, S. Ishihara and S. Warisawa
    • Organizer
      25th International Microprocesses and Nanotechnology Conference (MNC2012)
    • Place of Presentation
      Kobe, Japan
    • Related Report
      2012 Annual Research Report
  • [Presentation] Issues and Strategy towards Long-term Digital Data Preservation2012

    • Author(s)
      Sunao Ishihara and Toshio Kobayashi
    • Organizer
      International Symposium on Optical Memory 2012 (ISOM'12)
    • Place of Presentation
      Mirai-kan, Tokyo, Japan
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Presentation] Ultra-long horizontal free-space-nanowire growth by the real-time feedback control of the scanning speed on focused-ion-beam chemical vapor deposition2012

    • Author(s)
      D. Guo, R. Kometani, S. Warisawa, S. Ishihara
    • Organizer
      38th International Conference on Micro and Nano Engineering (MNE2012)
    • Place of Presentation
      Toulose, France
    • Related Report
      2012 Annual Research Report
  • [Presentation] Vibration measurement technique of micro and nano mechanical resonators using tilt dependence of electron beam-induced secondary electron emission2012

    • Author(s)
      K. Nakano, R. Kometani, S. Warisawa, S. Ishihara
    • Organizer
      38th International Conference on Micro and Nano Engineering (MNE2012)
    • Place of Presentation
      Toulose, France
    • Related Report
      2012 Annual Research Report
  • [Presentation] Vibration Characteristics of DLC Nanomechanical Resonator under Parametric Excitation2012

    • Author(s)
      K. Fuse, R. Kometani, S. Ishihara, S. Warisawa
    • Organizer
      38th International Conference on Micro and Nano Engineering (MNE2012)
    • Place of Presentation
      Toulose, France
    • Related Report
      2012 Annual Research Report
  • [Presentation] Strained-nanomechanical resonator fabrication from HSQ by FIB/EB dual-beam lithography and annealing treatment2012

    • Author(s)
      R. Kometani, K. Kuroda, S. Warisawa and S. Ishihara
    • Organizer
      38th International Conference on Micro and Nano Engineering (MNE2012)
    • Place of Presentation
      Toulose, France
    • Related Report
      2012 Annual Research Report
  • [Presentation] Selectively patterned metal nanodots fabrication by combining block copolymer self-assembly and electron beam lithography2012

    • Author(s)
      H. Suzuki, R. Kometani, S. Ishihara, S. Warisawa
    • Organizer
      SPIE Optics + Photonics 2012
    • Place of Presentation
      San Diego, California, USA
    • Related Report
      2012 Annual Research Report
  • [Presentation] Nanoporous Structure Fabrication in Selective Areas by Block Copolymer Self-Assembly and Electron Beam Lithography2012

    • Author(s)
      H. Suzuki, R. Kometani, S. Ishihara, S. Warisawa
    • Organizer
      29th International Conference of Photopolymer Science and Technology (ICPST-29)
    • Place of Presentation
      Chiba Univ., Chiba, Japan
    • Related Report
      2012 Annual Research Report
  • [Presentation] A Nanomechanical Resonator from HSQ Fabricated by FIB/EB Dual Beam Lithography2012

    • Author(s)
      S. Warisawa, K. Kuroda, S. Chen, R. Kometani, S. Ishihara
    • Organizer
      29th International Conference of Photopolymer Science and Technology (ICPST-29)
    • Place of Presentation
      Chiba Univ., Chiba, Japan
    • Related Report
      2012 Annual Research Report
  • [Presentation] Nanomechanical Tuning Forks Fabricated by Focused-Ion-Beam Chemical Vapor Deposition2012

    • Author(s)
      H. Ashiba, R. Kometani, S. Warisawa and S. Ishihara
    • Organizer
      The 56th International Conference on Electron, Ion and Photon Beam Technology and Nanaofabrication (EIPBN2012)
    • Place of Presentation
      Waikoloa, Hawaii, USA
    • Related Report
      2012 Annual Research Report
  • [Presentation] Superconductivity of tungsten-containing carbon nanowires fabricated focused-ion-beam chemical vapor deposition2012

    • Author(s)
      J. Dai, R. Kometani, S. Warisawa, S. Ishihara, K. Onomitsu, Y. Krockenberger and H. Yamaguchi
    • Organizer
      The 56th International Conference on Electron, Ion and Photon Beam Technology and Nanaofabrication (EIPBN2012)
    • Place of Presentation
      Waikoloa, Hawaii, USA
    • Related Report
      2012 Annual Research Report
  • [Presentation] The three-dimentional nanostructure fabrication from HSQ by FIB/EB dual-beam lithography2012

    • Author(s)
      R. Kometani, K. Kuroda, S. Warisawa and S. Ishihara
    • Organizer
      The 56th International Conference on Electron, Ion and Photon Beam Technology and Nanaofabrication (EIPBN2012)
    • Place of Presentation
      Waikoloa, Hawaii, USA
    • Related Report
      2012 Annual Research Report
  • [Presentation] Quality factor improvement of grapheme resonator by SU-8 shrinkage-induced strain2012

    • Author(s)
      Oshidari, T. Hatakeyama, R. Kometani, W. Warisawa and S. Ishihara
    • Organizer
      The 56th International Conference on Electron, Ion and Photon Beam Technology and Nanaofabrication (EIPBN2012)
    • Place of Presentation
      Waikoloa, Hawaii, USA
    • Related Report
      2012 Annual Research Report
  • [Presentation] Electron Beam Lithography by Using Self-Assembled Block Copolymer Thin Films as Positive/Negative Tone Combined Resist2012

    • Author(s)
      H. Suzuki, R. Kometani, S. Ishihara and S. Warisawa
    • Organizer
      The 56th International Conference on Electron, Ion and Photon Beam Technology and Nanaofabrication (EIPBN2012)
    • Place of Presentation
      Waikoloa, Hawaii, USA
    • Related Report
      2012 Annual Research Report
  • [Presentation] 真空・大気下における音叉型ナノメカニカル振動子の振動特性2012

    • Author(s)
      芦葉裕樹、米谷玲皇、割澤伸一、石原直
    • Organizer
      第4回マイクロ・ナノ工学シンポジウム
    • Place of Presentation
      北九州国際会議場、北九州市
    • Related Report
      2012 Annual Research Report
  • [Presentation] 集束イオンビーム化学気相成長法による空中水平長尺ナノ構造形成2012

    • Author(s)
      郭登極、米谷玲皇、割澤伸一、石原直
    • Organizer
      第4回マイクロ・ナノ工学シンポジウム
    • Place of Presentation
      北九州国際会議場、北九州市
    • Related Report
      2012 Annual Research Report
  • [Presentation] SU-8 の熱収縮を利用した高Q 値グラフェン振動子の作製2012

    • Author(s)
      忍足優太、畠山大輝、米谷玲皇、割澤伸一、石原直
    • Organizer
      2012年度精密工学会秋季大会学術講演会
    • Place of Presentation
      九州工業大学、北九州市
    • Related Report
      2012 Annual Research Report
  • [Presentation] Superconducting tungsten nanowire growth by focused-ionbeam chemical vapor deposition2012

    • Author(s)
      代俊、小野満恒二、米谷玲皇、Y. Krockenberger、割澤伸一、山口浩司、石原直
    • Organizer
      2012年度精密工学会秋季大会学術講演会
    • Place of Presentation
      九州工業大学、北九州市
    • Related Report
      2012 Annual Research Report
  • [Presentation] パラメトリック励振下におけるDLC ナノメカニカル振動子の振動特性2012

    • Author(s)
      布施健太、米谷玲皇、石原直、割澤伸一
    • Organizer
      第73回秋季応用物理学関係連合講演会
    • Place of Presentation
      愛媛大学・松山大学、松山市
    • Related Report
      2012 Annual Research Report
  • [Presentation] FIB-CVD の実時間走査速度制御による空中水平ナノワイヤの長尺形成2012

    • Author(s)
      郭登極、米谷玲皇、割澤伸一、石原直
    • Organizer
      第73回秋季応用物理学関係連合講演会
    • Place of Presentation
      愛媛大学・松山大学、松山市
    • Related Report
      2012 Annual Research Report
  • [Presentation] 二次電子の角度依存性を利用した微小機械振動子の振動計測法2012

    • Author(s)
      中野和洋、米谷玲皇、割澤伸一、石原直
    • Organizer
      第73回秋季応用物理学関係連合講演会
    • Place of Presentation
      愛媛大学・松山大学、松山市
    • Related Report
      2012 Annual Research Report
  • [Presentation] リング型ナノメカニカル振動子の作製法とその振動特性評価2012

    • Author(s)
      芦葉裕樹、米谷玲皇、割澤伸一、石原直
    • Organizer
      第73回秋季応用物理学関係連合講演会
    • Place of Presentation
      愛媛大学・松山大学、松山市
    • Related Report
      2012 Annual Research Report
  • [Presentation] ブロック共重合体リソグラフィによる選択的金属ナノドットアレイの作製2012

    • Author(s)
      鈴木裕之、米谷玲皇、石原 直、割澤伸一
    • Organizer
      第73回秋季応用物理学関係連合講演会
    • Place of Presentation
      愛媛大学・松山大学、松山市
    • Related Report
      2012 Annual Research Report
  • [Presentation] FIB/EB 複合リソグラフィーによるHSQ からの3次元ナノ構造作製2012

    • Author(s)
      米谷玲皇、黒田耕平、割澤伸一、石原直
    • Organizer
      第73回秋季応用物理学関係連合講演会
    • Place of Presentation
      愛媛大学・松山大学、松山市
    • Related Report
      2012 Annual Research Report
  • [Presentation] Electron Beam Lithography on Block Copolymer Self-Assembled Thin Films2012

    • Author(s)
      H. Suzuki, R. Kometani, S. Warisawa, S. Ishihara
    • Organizer
      Next Generation Lithography Workshop 2012 (NGL2012)
    • Place of Presentation
      蔵前会館、東京
    • Related Report
      2012 Annual Research Report
  • [Presentation] EB/FIB Dual-beam Lithography2012

    • Author(s)
      R. Kometani
    • Organizer
      Next Generation Lithography Workshop 2012 (NGL2012)
    • Place of Presentation
      蔵前会館、東京
    • Related Report
      2012 Annual Research Report
  • [Presentation] ナノエレクトロメカニカルシステム(NEMS)のセンサ応用2012

    • Author(s)
      石原直
    • Organizer
      応用物理学会電子物性分科会
    • Place of Presentation
      秋葉原、東京
    • Related Report
      2012 Annual Research Report
  • [Presentation] Electron-mediated mechanical back-action in quantum hole systems2012

    • Author(s)
      H. Yamaguchi, H. Okamoto, S. Ishihara, and Y. Hirayama
    • Organizer
      Gordon Research Conferences, Mechanical Systems in the Quantum Regime
    • Place of Presentation
      Galveston, Texas, USA
    • Related Report
      2011 Annual Research Report
    • Invited
  • [Presentation] Evaluations of the Downward Growth Characteristics on the 3-DNanostructure Fabrication using Focused-Ion-Beam Chemical Vapor Deposition2012

    • Author(s)
      D.J. Guo, R. Kometani, S. Warisawa, and S. Ishihara
    • Organizer
      4th International Symposium on Global Center for Excellence for Mechanical Systems Innovation (GMSI)
    • Place of Presentation
      The Univ. of Tokyo, Tokyo, Japan
    • Related Report
      2011 Annual Research Report
  • [Presentation] Partial Control of Nanoporous Structures Using Block Copolymer Self-Assembly and Electron Beam Lithography2012

    • Author(s)
      H. Suzuki, R. Kometani, S. Warisawa, S. Ishihara
    • Organizer
      4th International Symposium on Global Center for Excellence for Mechanical Systems Innovation (GMSI)
    • Place of Presentation
      The Univ. of Tokyo, Tokyo, Japan
    • Related Report
      2011 Annual Research Report
  • [Presentation] FIB-CVDの下方成長を利用した三次元ナノ構造の作製2012

    • Author(s)
      郭登極、米谷玲皇、割澤伸一、石原直
    • Organizer
      第59回応用物理学関係連合講演会
    • Place of Presentation
      早稲田大学、東京
    • Related Report
      2011 Annual Research Report
  • [Presentation] Superconductivity of tungsten-containing carbon nanowires fabricated by focused-ion-beam chemical vapor deposition2012

    • Author(s)
      代俊、小野満恒二、米谷玲皇、Yoshiharu Krockenberger,割澤伸一、山口浩司、石原直
    • Organizer
      第59回応用物理学関係連合講演会
    • Place of Presentation
      早稲田大学、東京
    • Related Report
      2011 Annual Research Report
  • [Presentation] FIB-CVD による音叉型ナノメカニカル振動子作製とその振動特性評価2012

    • Author(s)
      芦葉裕樹、米谷玲皇、割澤伸一、石原直
    • Organizer
      第59回応用物理学関係連合講演会
    • Place of Presentation
      早稲田大学、東京
    • Related Report
      2011 Annual Research Report
  • [Presentation] FIB/EB 複合リソグラフィーによるカーボンナノ機械振動子の作製とその特性評価2012

    • Author(s)
      米谷玲皇、畠山大輝、黒田耕平、割澤伸一、石原直
    • Organizer
      第59回応用物理学関係連合講演会
    • Place of Presentation
      早稲田大学、東京
    • Related Report
      2011 Annual Research Report
  • [Presentation] SU-8の熱収縮を用いた歪印加によるグラフェン振動子の高Q値化2012

    • Author(s)
      忍足優太、畠山大輝、米谷玲皇、割澤伸一、石原直
    • Organizer
      第59回応用物理学関係連合講演会
    • Place of Presentation
      早稲田大学、東京
    • Related Report
      2011 Annual Research Report
  • [Presentation] 電子線リソグラフィを用いたジブロック共重合体ミクロ相分離膜の選択的パターニング2012

    • Author(s)
      鈴木裕之,米谷玲皇,割澤伸一,石原直
    • Organizer
      精密工学会 2012年度春季学術講演会
    • Place of Presentation
      首都大学東京、東京
    • Related Report
      2011 Annual Research Report
  • [Presentation] FIB-CVD法により堆積させたDLCによるグラフェンの選択成長2011

    • Author(s)
      畠山大輝, 米谷玲皇, 割澤伸一, 石原直
    • Organizer
      2011年春季第58回応用物理学関係連合講演会
    • Place of Presentation
      神奈川工科大学,神奈川
    • Year and Date
      2011-03-27
    • Related Report
      2010 Annual Research Report
  • [Presentation] スティクションを利用したナノ振動子の高Q値化2011

    • Author(s)
      葉裕樹, 米谷玲皇, 割澤伸一, 石原直
    • Organizer
      2011年春季第58回応用物理学関係連合講演会
    • Place of Presentation
      神奈川工科大学,神奈川
    • Year and Date
      2011-03-26
    • Related Report
      2010 Annual Research Report
  • [Presentation] フッ素表面コーティングによるFIB-CVD形成DLC振動子の高Q値化2011

    • Author(s)
      米谷玲皇, 割澤伸一, 石原直
    • Organizer
      2011年春季第58回応用物理学関係連合講演会
    • Place of Presentation
      神奈川工科大学,神奈川
    • Year and Date
      2011-03-26
    • Related Report
      2010 Annual Research Report
  • [Presentation] FIB/EB複合リソグラフィによる歪印加振動子作製技術2011

    • Author(s)
      黒田耕平, 米谷玲皇, 割澤伸一, 石原直
    • Organizer
      精密工学会2011年度春季大会学術講演会
    • Place of Presentation
      埼玉大学,埼玉
    • Year and Date
      2011-03-14
    • Related Report
      2010 Annual Research Report
  • [Presentation] FIB-CVDによる三次元微細構造作製の高精度化に関する研究2011

    • Author(s)
      村尾裕規, 米谷玲皇, 割澤伸一, 石原直
    • Organizer
      精密工学会2011年度春季大会学術講演会
    • Place of Presentation
      埼玉大学,埼玉
    • Year and Date
      2011-03-14
    • Related Report
      2010 Annual Research Report
  • [Presentation] FIB-CVD形成DLCナノ振動子のフッ素表面コーティングの効果2011

    • Author(s)
      米谷玲皇, 割澤伸一, 石原直
    • Organizer
      精密工学会2011年度春季大会学術講演会
    • Place of Presentation
      埼玉大学,埼玉
    • Year and Date
      2011-03-14
    • Related Report
      2010 Annual Research Report
  • [Presentation] スティクションを利用した引張応力印加ナノ振動子の作製法2011

    • Author(s)
      芦葉裕樹, 米谷玲皇, 割澤伸一, 石原直
    • Organizer
      精密工学会2011年度春季大会学術講演会
    • Place of Presentation
      埼玉大学,埼玉
    • Year and Date
      2011-03-14
    • Related Report
      2010 Annual Research Report
  • [Presentation] Selective Patterning of Self-Assembled Block Copolymer Thin Films by Electron Beam Lithography2011

    • Author(s)
      H. Suzuki, R. Kometani, S. Warisawa and S. Ishihara
    • Organizer
      2011 MRS Fall Meeting & Exhibit
    • Place of Presentation
      Boston, USA
    • Related Report
      2011 Annual Research Report
  • [Presentation] Fabrication of Self-Assembled Cylindrical Structures within Free-Standing Block Copolymer Ultrathin Membranes2011

    • Author(s)
      S. Warisawa, H. Mino, R. Kometani and S. Ishihara
    • Organizer
      2011 MRS Fall Meeting & Exhibit
    • Place of Presentation
      Boston, USA
    • Related Report
      2011 Annual Research Report
  • [Presentation] Q Factor Improvement of DLC Nanoresonator using a Fluorine Surface Coating2011

    • Author(s)
      R. Kometani, S. Warisawa, and S. Ishihara
    • Organizer
      The 6th International Conference on Leading Edge Manufacturing in 21st Century (LEM21 2011)
    • Place of Presentation
      Omiya Sonic City, Saitama, Japan
    • Related Report
      2011 Annual Research Report
  • [Presentation] The 3-D Nanostructure Fabrication by controlling Downward Growth on Focused-ion-beam Chemical Vapor Deposition2011

    • Author(s)
      D.J. Guo, R. Kometani, S. Warisawa and S. Ishihara
    • Organizer
      24th International Microprocesses and Nanotechnology Conference (MNC2011)
    • Place of Presentation
      ANA Hotel Kyoto, Kyoto, Japan
    • Related Report
      2011 Annual Research Report
  • [Presentation] Strained Carbon Nanomechanical Resonator Fabrication from SU-8 by FIB/EB Dual-beam Lithography and Annealing Treatment2011

    • Author(s)
      R. Kometani, K. Kuroda, S. Warisawa and S. Ishihara
    • Organizer
      24th International Microprocesses and Nanotechnology Conference (MNC2011)
    • Place of Presentation
      ANA Hotel Kyoto, Kyoto, Japan
    • Related Report
      2011 Annual Research Report
  • [Presentation] Effect of Annealing on Ultra-thin Silicon Nanomechanical Resonators Fabricated by Focused-Ion-Beam Implantation2011

    • Author(s)
      H. Liu, R. Kometani, S. Warisawa, and S. Ishihara
    • Organizer
      37th International Conference on Micro and Nano Engineering (MNE2011)
    • Place of Presentation
      Berlin, Germany
    • Related Report
      2011 Annual Research Report
  • [Presentation] Relationship between Q factor and the surface condition of the DLC nanoresonator fabricated by focused-ion-beam chemical vapor deposition2011

    • Author(s)
      R. Kometani, H. Shimizu, S. Warisawa, and S. Ishihara
    • Organizer
      37th International Conference on Micro and Nano Engineering (MNE2011)
    • Place of Presentation
      Berlin, Germany
    • Related Report
      2011 Annual Research Report
  • [Presentation] A wide-range frequency tunable nanomechanical resonator with parametric resonance characteristics2011

    • Author(s)
      S. Warisawa, S. Nishi, R. Kometani, S. Ishihar
    • Organizer
      37th International Conference on Micro and Nano Engineering (MNE2011)
    • Place of Presentation
      Berlin, Germany
    • Related Report
      2011 Annual Research Report
  • [Presentation] Stressed Nanomechanical Resonator Fabrication Utilizing Stiction Phenomena2011

    • Author(s)
      H. Ashiba, R. Kometani, S. Warisawa, and S. Ishihara
    • Organizer
      IEEE International Conference on Mechatronics and Automation (ICMA2011)
    • Place of Presentation
      Beijing, China
    • Related Report
      2011 Annual Research Report
  • [Presentation] EUV Lithography – from the beginning to the future -2011

    • Author(s)
      S. Ishihara
    • Organizer
      EIDEC Symposium
    • Place of Presentation
      Tokyo, Japan
    • Related Report
      2011 Annual Research Report
    • Invited
  • [Presentation] Fabrication of Nanowire SQUID by means of FIB-CVD2011

    • Author(s)
      J. Dai, R. Kometani, S. Warisawa, and S. Ishihara
    • Organizer
      5th TU-SNU-UT Joint Symposium
    • Place of Presentation
      Beijing, China
    • Related Report
      2011 Annual Research Report
  • [Presentation] Selective Graphene Growth from DLC Thin Film Patterned by Focused-ion-beam Chemical Vapor Deposition2011

    • Author(s)
      T. Hatakeyama, R. Kometani, S. Warisawa, and S. Ishihara
    • Organizer
      The 55th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN2011)
    • Place of Presentation
      Las Vegas, Nevada, USA
    • Related Report
      2011 Annual Research Report
  • [Presentation] Quality Factor Enhancement on Nano Mechanical Resonators Utilizing Stiction Phenomena2011

    • Author(s)
      H. Ashiba, R. Kometani, S. Warisawa and S. Ishihara
    • Organizer
      The 55th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN2011)
    • Place of Presentation
      Las Vegas, Nevada, USA
    • Related Report
      2011 Annual Research Report
  • [Presentation] A gradually shifted surface plasmon resonance with a controlled diameter of a nano-hole structure by self-assembly technique2011

    • Author(s)
      T. Takagi, R. Kometani, S. Warisawa and S. Ishihara
    • Organizer
      The 55th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN2011)
    • Place of Presentation
      Las Vegas, Nevada, USA
    • Related Report
      2011 Annual Research Report
  • [Presentation] Dynamic Characteristics Control of DLC Nano-Resonator Fabricated by Focused-Ion-Beam Chemical Vapor Deposition2011

    • Author(s)
      R. Kometani, S. Nishi, S. Warisawa and S. Ishihara
    • Organizer
      The 55th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN2011)
    • Place of Presentation
      Las Vegas, Nevada, USA
    • Related Report
      2011 Annual Research Report
  • [Presentation] Carbon Nanomechanical Resonator Fabrication from PMMA by FIB/EB Dual-Beam Lithography2011

    • Author(s)
      R. Kometani, T. Hatakeyama, S. Warisawa, and S. Ishihara
    • Organizer
      The 55th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN2011)
    • Place of Presentation
      Las Vegas, Nevada, USA
    • Related Report
      2011 Annual Research Report
  • [Presentation] FIB/EBデュアルビームリソグラフィーによるカーボンナノ機械振動子の作製2011

    • Author(s)
      米谷玲皇、畠山大輝、黒田耕平、割澤伸一、石原直
    • Organizer
      第3回マイクロ・ナノ工学シンポジウム
    • Place of Presentation
      船堀、東京
    • Related Report
      2011 Annual Research Report
  • [Presentation] FIB-CVDの下方成長を利用した三次元ナノ構造の作製2011

    • Author(s)
      郭登極、米谷玲皇、割澤伸一、石原直
    • Organizer
      第3回マイクロ・ナノ工学シンポジウム
    • Place of Presentation
      船堀、東京
    • Related Report
      2011 Annual Research Report
  • [Presentation] 照射ドーズ量制御によるFIB-CVD三次元微細構造形成の高精度化に関する研究2011

    • Author(s)
      村尾裕規、米谷玲皇、割澤伸一、石原直
    • Organizer
      2011年度精密工学会秋季大会学術講演会
    • Place of Presentation
      金沢大学、金沢
    • Related Report
      2011 Annual Research Report
  • [Presentation] FIB/EB 複合リソグラフィーによるHSQ3次元ナノ構造作製2011

    • Author(s)
      黒田耕平、米谷玲皇、割澤伸一、石原直
    • Organizer
      第72回応用物理学会学術講演会
    • Place of Presentation
      山形大学、山形
    • Related Report
      2011 Annual Research Report
  • [Presentation] Layer-by-layer Stacking Method for 3-D Nano Structure Fabrication Using Block Copolymer Self Assembly2010

    • Author(s)
      S.Warisawa, R.Kanameda, R.Kometani, S.Ishihara
    • Organizer
      2010 MRS Fall Meeting
    • Place of Presentation
      Boston,USA
    • Year and Date
      2010-12-02
    • Related Report
      2010 Annual Research Report
  • [Presentation] Nano Patterning on Surfaces of 3-D Micro Structures by Means of Block Copolymer Self Assembly2010

    • Author(s)
      S.Warisawa, H.Mino, R.Kometani, S.Ishihara
    • Organizer
      2010 MRS Fall Meeting
    • Place of Presentation
      Boston,USA
    • Year and Date
      2010-12-02
    • Related Report
      2010 Annual Research Report
  • [Presentation] A Novel Fabrication Process for the Tensile Strained Resonators2010

    • Author(s)
      K.Kuroda, R.Kometani, S.Warisawa, S.Ishihara
    • Organizer
      The 23rd International Microprocesses and Nanotechnology Conference(MNC2010)
    • Place of Presentation
      Fukuoka,Japan
    • Year and Date
      2010-11-12
    • Related Report
      2010 Annual Research Report
  • [Presentation] A new displacement detection system using a HEMT amplifier2010

    • Author(s)
      Y.Oda, K.Onomitsu, R.Kometani, S.Warisawa, S.Ishihara, H.Yamaguchi
    • Organizer
      The 23rd International Microprocesses and Nanotechnology Conference(MNC2010)
    • Place of Presentation
      Fukuoka,Japan
    • Year and Date
      2010-11-11
    • Related Report
      2010 Annual Research Report
  • [Presentation] Effect of a Fluorine Surface Coating on Vibration Characteristics of Diamond-like Carbon Mechanical Resonator Fabricated by FIB-CVD2010

    • Author(s)
      R.Kometani, S.Warisawa, S.Ishihara
    • Organizer
      The 23rd International Microprocesses and Nanotechnology Conference(MNC2010)
    • Place of Presentation
      Fukuoka,Japan
    • Year and Date
      2010-11-10
    • Related Report
      2010 Annual Research Report
  • [Presentation] 集束イオンビーム励起表面反応による超薄膜DLC機械振動子の作製とその特性2010

    • Author(s)
      米谷玲皇, 割澤伸一, 石原直
    • Organizer
      精密工学会2010年度秋季大会学術講演会
    • Place of Presentation
      名古屋大学,名古屋
    • Year and Date
      2010-09-27
    • Related Report
      2010 Annual Research Report
  • [Presentation] Ultra thin diamond-like carbon film mechanical resonator fabrication by a combined process of FIB-CVD and wet-etching2010

    • Author(s)
      R.Kometani, S.Warisawa, S.Ishihara
    • Organizer
      The 36th International Conference on Micro and Nano Engineering(MNE2010)
    • Place of Presentation
      Genova,Italy
    • Year and Date
      2010-09-21
    • Related Report
      2010 Annual Research Report
  • [Presentation] 表面プラズモンセンサーへ向けた連続変化自己組織化膜の作製法2010

    • Author(s)
      高木崇光, 栗原一真, 粟津浩一, 米谷玲皇, 割澤伸一, 石原直
    • Organizer
      第71回応用物理学術講演会
    • Place of Presentation
      長崎大学,長崎
    • Year and Date
      2010-09-16
    • Related Report
      2010 Annual Research Report
  • [Presentation] 集束イオンビーム化学気相成長法による超薄膜DLC機械振動子の作製2010

    • Author(s)
      米谷玲皇, 割澤伸一, 石原直
    • Organizer
      第71回応用物理学術講演会
    • Place of Presentation
      長崎大学,長崎
    • Year and Date
      2010-09-14
    • Related Report
      2010 Annual Research Report
  • [Presentation] Mechanical to electrical power transduction using a micromechanical 2DES cantilever2010

    • Author(s)
      H.Yamaguchi, H.Okamoto, Y.Maruta, S.Ishihara, Y.Hirayama
    • Organizer
      16th International Conference on Molecular Beam Epitaxy(MBE2010)
    • Place of Presentation
      Berlin,Germany(Invited)
    • Year and Date
      2010-08-22
    • Related Report
      2010 Annual Research Report
  • [Presentation] 3次元DLC構造へのブロック共重合体の自己組織化2010

    • Author(s)
      三野宏之, 米谷玲皇, 割澤伸一, 石原直
    • Organizer
      次世代リソグラフィワークショップ(NGL2010)
    • Place of Presentation
      蔵前会館,東京
    • Year and Date
      2010-07-13
    • Related Report
      2010 Annual Research Report
  • [Presentation] Vibration Characteristics of Monolayer Graphene Resonator2010

    • Author(s)
      T.Hatakeyama, R.Kometani, M.Nagase, S.Warisawa, S.Ishihara
    • Organizer
      The 54th International Conference on Electron, Ion, Photon Beams and Nanotechnology
    • Place of Presentation
      Anchorage,USA
    • Year and Date
      2010-06-03
    • Related Report
      2010 Annual Research Report
  • [Presentation] The piezoresistive effect in the 3-D diamond-like carbon nanostructure fabricated by focused-ion-beam chemical vapor deposition2010

    • Author(s)
      R.Kometani, K.Yusa, S.Warisawa, S.Ishihara
    • Organizer
      The 54th International Conference on Electron, Ion, Photon Beams and Nanotechnology
    • Place of Presentation
      Anchorage,USA
    • Year and Date
      2010-06-02
    • Related Report
      2010 Annual Research Report
  • [Presentation] Nanostructure Fabrication by Self-assembly of Block Copolymer on 3-D DLC Structure2010

    • Author(s)
      H.Mino, R.Kometani, S.Warisawa, S.Ishihara
    • Organizer
      The 54th International Conference on Electron, Ion, Photon Beams and Nanotechnology
    • Place of Presentation
      Anchorage,USA
    • Year and Date
      2010-06-02
    • Related Report
      2010 Annual Research Report
  • [Presentation] Sensitive charge detection using perfectly-tuned coupled nanomechanical oscillators2010

    • Author(s)
      H.Okamoto, N.Kitajima, K.Onomitsu, R.Kometani, S.Warisawa, S.Ishihara H.Yamaguchi
    • Organizer
      7th International Workshop on Nanomechanical Cantilever Sensors(NMC2010)
    • Place of Presentation
      Bannif,Canada
    • Year and Date
      2010-05-26
    • Related Report
      2010 Annual Research Report
  • [Presentation] 集束イオンビーム化学気相成長法を利用したピエゾ抵抗特性を有する3次元DLCナノ構造体の作製法2010

    • Author(s)
      米谷玲皇, 遊佐幸樹, 割澤伸一, 石原直
    • Organizer
      ナノ学会第8回大会
    • Place of Presentation
      自然科学研究機構,岡崎
    • Year and Date
      2010-05-14
    • Related Report
      2010 Annual Research Report
  • [Presentation] 架橋グラフェンの振動特性評価2010

    • Author(s)
      畠山大輝, 米谷玲皇, 永瀬雅夫, 割澤伸一, 石原直
    • Organizer
      ナノ学会第8回大会
    • Place of Presentation
      自然科学研究機構,岡崎
    • Year and Date
      2010-05-13
    • Related Report
      2010 Annual Research Report
  • [Presentation] Frequency Tunable Coupled Nanomechanical Resonators and their Sensing Applications2010

    • Author(s)
      H.Okamoto, N.Kitajima, K.Onomitsu, R.Kometani, S.Warisawa, S.Ishihara, H.Yamaguchi
    • Organizer
      International Conference on Quantum Nanostructures and Spin-related Phenomena(QNSP)
    • Place of Presentation
      Tokyo,Japan
    • Year and Date
      2010-03-09
    • Related Report
      2010 Annual Research Report
  • [Remarks]

    • URL

      http://www.nanome.t.u-tokyo.ac.jp/jp/

    • Related Report
      2012 Final Research Report
  • [Remarks] ナノメカニクス研究室ホームページ

    • URL

      http://www.nanome.t.u-tokyo.ac.jp/jp/

    • Related Report
      2012 Annual Research Report
  • [Remarks] ナノメカニクス研究室ホームページ

    • URL

      http://nanome.t.u-tokyo.ac.jp/jp/

    • Related Report
      2011 Annual Research Report
  • [Remarks]

    • URL

      http://www.nanome.t.u-tokvo.ac.jp/

    • Related Report
      2010 Annual Research Report
  • [Patent(Industrial Property Rights)] 微小構造物の製造装置、及び製造方法2012

    • Inventor(s)
      米谷玲皇, 郭登極,割澤伸一,石原直
    • Industrial Property Rights Holder
      東京大学
    • Industrial Property Number
      2012-018557
    • Filing Date
      2012-10-01
    • Related Report
      2012 Final Research Report
  • [Patent(Industrial Property Rights)] 超伝導回路の作製方法2012

    • Inventor(s)
      米谷玲皇,代俊,割澤伸一,石原 直,小野満恒二,山口浩司
    • Industrial Property Rights Holder
      東京大学、日本電信電話株式会社
    • Industrial Property Number
      2012-187329
    • Filing Date
      2012-08-28
    • Related Report
      2012 Final Research Report
  • [Patent(Industrial Property Rights)] 微小共振器およびその製造方法2012

    • Inventor(s)
      山口浩司、小野満恒二、加藤慶一、石原 直、割沢伸一
    • Industrial Property Rights Holder
      日本電信電話株式会社、東京大学
    • Acquisition Date
      2012-07-06
    • Related Report
      2012 Final Research Report
  • [Patent(Industrial Property Rights)] 超伝導回路の作製方法2012

    • Inventor(s)
      米谷玲皇、代俊、割澤伸一、石原 直,小野満恒二,山口浩司
    • Industrial Property Rights Holder
      米谷玲皇、代俊、割澤伸一、石原 直,小野満恒二,山口浩司
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2012-187329
    • Filing Date
      2012-08-28
    • Related Report
      2012 Annual Research Report
  • [Patent(Industrial Property Rights)] 微小構造物の製造装置、及び製造方法2012

    • Inventor(s)
      米谷玲皇、郭登極、割澤伸一、石原直
    • Industrial Property Rights Holder
      米谷玲皇、郭登極、割澤伸一、石原直
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2012-018557
    • Filing Date
      2012-10-01
    • Related Report
      2012 Annual Research Report
  • [Patent(Industrial Property Rights)] 微小機械振動子とその製造方法2011

    • Inventor(s)
      西駿次郎,米谷玲皇,割澤伸一,石原 直,山口浩司
    • Industrial Property Rights Holder
      東京大学,日本電信電話株式会社
    • Industrial Property Number
      2011-111521
    • Filing Date
      2011-05-18
    • Related Report
      2012 Final Research Report
  • [Patent(Industrial Property Rights)] 微小機械振動子の製造方法および微小 機械振動子2011

    • Inventor(s)
      芦葉裕樹,米谷玲皇,石原 直,割澤伸 一,山口浩司
    • Industrial Property Rights Holder
      東京大学、日本電信電話株式会社
    • Industrial Property Number
      2011-111517
    • Filing Date
      2011-05-18
    • Related Report
      2012 Final Research Report
  • [Patent(Industrial Property Rights)] 微小機械振動子の製造方法および微小機械振動子2011

    • Inventor(s)
      芦葉裕樹、米谷玲皇、石原直、割澤伸一、山口浩司
    • Industrial Property Rights Holder
      芦葉裕樹、米谷玲皇、石原直、割澤伸一、山口浩司
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2011-111517
    • Filing Date
      2011-05-18
    • Related Report
      2011 Annual Research Report
  • [Patent(Industrial Property Rights)] 微小機械振動子とその製造方法2011

    • Inventor(s)
      西駿次郎、米谷玲皇、割澤伸一、石原直、山口浩司
    • Industrial Property Rights Holder
      西駿次郎、米谷玲皇、割澤伸一、石原直、山口浩司
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2011-111521
    • Filing Date
      2011-05-18
    • Related Report
      2011 Annual Research Report
  • [Patent(Industrial Property Rights)] 微小構造体の作製方法2010

    • Inventor(s)
      米谷玲呈,石原直, 割澤伸一, 遊佐幸樹, 山口浩司, 永瀬雅夫, 岡本創
    • Industrial Property Rights Holder
      東京大学,日本電信電話(株)
    • Filing Date
      2010-05-28
    • Related Report
      2010 Annual Research Report
  • [Patent(Industrial Property Rights)] 微小構造体の製造方法2010

    • Inventor(s)
      米谷玲呈,石原直, 割澤伸一, 黒田耕平, 山口浩司, 永瀬雅夫, 岡本創
    • Industrial Property Rights Holder
      東京大学,日本電信電話(株)
    • Filing Date
      2010-06-22
    • Related Report
      2010 Annual Research Report

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Published: 2010-08-23   Modified: 2019-07-29  

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