Creation and Characterization of Nanomechanical Structures andits Applications to Devices
| Project/Area Number |
22226004
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| Research Category |
Grant-in-Aid for Scientific Research (S)
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| Allocation Type | Single-year Grants |
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| Research Field |
Production engineering/Processing studies
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| Research Institution | The University of Tokyo |
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Principal Investigator |
ISHIHARA Sunao 東京大学, 大学院・工学系研究科, 教授 (00422329)
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| Co-Investigator(Kenkyū-buntansha) |
YAMAGUCHI Hiroshi 日本電信電話株式会社, NTT 物性科学基礎研究所, 研究部長主席特別研究員 (60374071)
WARISAWA Shin-ichi 東京大学, 大学院・新領域創成科学研究科, 准教授 (20262321)
DELAUNEY Jean-jacques 東京大学, 大学院・工学系研究科, 准教授 (80376516)
KOMETANI Reo 東京大学, 大学院・工学系研究科, 講師 (90466780)
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| Project Period (FY) |
2010 – 2012
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| Project Status |
Completed (Fiscal Year 2012)
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| Budget Amount *help |
¥205,790,000 (Direct Cost: ¥158,300,000、Indirect Cost: ¥47,490,000)
Fiscal Year 2012: ¥9,490,000 (Direct Cost: ¥7,300,000、Indirect Cost: ¥2,190,000)
Fiscal Year 2011: ¥89,700,000 (Direct Cost: ¥69,000,000、Indirect Cost: ¥20,700,000)
Fiscal Year 2010: ¥106,600,000 (Direct Cost: ¥82,000,000、Indirect Cost: ¥24,600,000)
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| Keywords | ナノマイクロ加工 / NEMS / ナノメカニクス / ナノ計測 / ナノ振動子 / ナノ計測・ナノ加工 / 電子ビーム・イオンビーム / ナノメカニカル振動子 / 機械共振特性 / ナノ・マイクロデバイス / センシングデバイス / ナノ加工・ナノ計測 |
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| Research Abstract |
Nanomechanical structures have great potential in realizing innovative electromechanical systems utilizing new properties and functions appeared due to its small scales. In this research, fundamental investigations into fabrication using electron and ion beams, measurement using electron beam and AFM, and characterization in frequency domain of nanomechanical structures, and their applications to innovative nanoelectromechanical systems (NEMS) i.e. ultra-small resonator-based sensing deviceswith high detection performances are conducted.
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| Assessment Rating |
Verification Result (Rating)
A
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Report
(5 results)
Research Products
(137 results)
