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A new high speed nano-profiler using the normal vector tracing method for next generation ultraprecision mirrors.

Research Project

Project/Area Number 22226005
Research Category

Grant-in-Aid for Scientific Research (S)

Allocation TypeSingle-year Grants
Research Field Production engineering/Processing studies
Research InstitutionOsaka University

Principal Investigator

ENDO Katsuyoshi  大阪大学, 工学(系)研究科(研究院), 教授 (90152008)

Co-Investigator(Kenkyū-buntansha) UCHIKOSHI Jyunichi  大阪大学, 工学研究科, 招聘教員 (90273581)
Project Period (FY) 2010-05-31 – 2014-03-31
Project Status Completed (Fiscal Year 2013)
Budget Amount *help
¥203,320,000 (Direct Cost: ¥156,400,000、Indirect Cost: ¥46,920,000)
Fiscal Year 2013: ¥13,780,000 (Direct Cost: ¥10,600,000、Indirect Cost: ¥3,180,000)
Fiscal Year 2012: ¥14,300,000 (Direct Cost: ¥11,000,000、Indirect Cost: ¥3,300,000)
Fiscal Year 2011: ¥108,680,000 (Direct Cost: ¥83,600,000、Indirect Cost: ¥25,080,000)
Fiscal Year 2010: ¥66,560,000 (Direct Cost: ¥51,200,000、Indirect Cost: ¥15,360,000)
Keywords形状測定 / 高精度ミラー / 非球面ミラー / 法線ベクトル / ナノ精度 / 形状誤差 / 走査型形状測定装置 / 5軸同時制御 / 5軸同時制御
Research Abstract

It is necessary to measure the high accuracy aspherical mirror and lens with nano scale precision. We succeeded to develop the high speed nano-profiler using the normal vector tracing method. The performances of the nano-profiler are as follows. The precision in other words reputability is greater than 1nm. The measuring time is less than 10min/sample.
The convex spherical mirrors with 100mm, 400mm and 1000mm radius of curvature, a reference sphere with 46.818489mm+-10nm radius of curvature, plane mirror and an aspherical mirror measured by the nano-profiler. In the case of an aspherical mirror measurement, the reputability indicated by the standard deviation is 0.37nm. The reputability indicated by the deviation value equivalent is 1.60nm PV. We also compared the aspherical mirror measurement results with those obtained using a Fizeau interferometer. The two measurement results of the mirror were consistent within the range of the each equipment systematic error.

Assessment Rating
Verification Result (Rating)

B

Report

(6 results)
  • 2014 Research Progress Assessment (Verification Result) ( PDF )
  • 2013 Annual Research Report   Final Research Report ( PDF )
  • 2012 Annual Research Report
  • 2011 Annual Research Report
  • 2010 Annual Research Report
  • Research Products

    (43 results)

All 2014 2013 2012 2011 2010 Other

All Journal Article (8 results) (of which Peer Reviewed: 8 results) Presentation (29 results) Book (2 results) Remarks (2 results) Patent(Industrial Property Rights) (2 results) (of which Overseas: 1 results)

  • [Journal Article] Three-dimensional surface figure measurement of high-accuracy spherical mirror with nanoprofiler using normal vector tracing method2014

    • Author(s)
      R. Kudo, K. Okuda, K. Usuki, M. Nakano, K. Yamamura, K. Endo
    • Journal Title

      Review of Scientific Instruments

      Volume: vol.85 Issue: 4 Pages: 45101-45105

    • DOI

      10.1063/1.4869473

    • Related Report
      2013 Annual Research Report 2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] Profile measurement of concave spherical mirror and a flat mirror using a high-speed nanoprofiler2013

    • Author(s)
      Koji Usuki, Takao Kitayama, Hiroki Matsumura, Takuya Kojima, Junichi Uchikoshi, Yasuo Higashi and Katsuyoshi Endo
    • Journal Title

      Nanoscale Research Letters

      Volume: vol.8 Issue: 1 Pages: 231-241

    • DOI

      10.1186/1556-276x-8-231

    • Related Report
      2013 Annual Research Report 2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] Effects of a laser beam profile to measure an aspheric mirror on a high-speed nanoprofiler using normal vector tracing method2012

    • Author(s)
      Hiroki Matsumura, Daisuke Tonaru, Takao Kitayama, Koji Usuki, Takuya, Kojima, Junichi Uchikoshi, Yasuo Higashi, Katsuyoshi Endo
    • Journal Title

      Current Applied Physics

      Volume: vol.12 Pages: S47-S51

    • DOI

      10.1016/j.cap.2012.04.022

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] Absolute calibration of the rotary encorder considering the influence on-machine for development of High-Speed Nanoprofiler2012

    • Author(s)
      Takuya Kojima
    • Journal Title

      Key Engineering Materials

      Volume: vol.523-524 Pages: 842-846

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Development of a high-speed nanoprofiler using normal vector tracing2012

    • Author(s)
      Takao Kitayama
    • Journal Title

      Engineering Materials

      Volume: vol.516 Pages: 606-611

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Effects of a laser beam profile to measure an aspheric mirror on a high-speed nanoprofiler using normal vector tracing method2012

    • Author(s)
      Hiroki Matsumura
    • Journal Title

      Currnt Applied Physics

      Volume: vol.12

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Development of a High-Speed Nanoprofiler Using Normal Vector Tracing2012

    • Author(s)
      Takao Kitayama, Daisuke Tonaru, Hiroki Matsumura,Junichi Uchikoshi, Yasuo Higashi and Katsuyoshi Endo
    • Journal Title

      Key Engineering Materials

      Volume: Vol. 516 Pages: 606-611

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Effects of a Laser Beam Profile to Measure an Aspheric Mirror on a High-Speed Nanoprofiler Using Normal Vector Tracing Method2012

    • Author(s)
      H. Matsumura, D.Tanarua,T. Kitayama, K. Usuki, T.Kojima, J. Uchikoshi, Y. Higashi, and K. Endo
    • Journal Title

      Current Applied Physics

      Volume: vol.12

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Presentation] Profile measurement of a convex spherical mirror by high-speed nanoprofiler using normal vector tracing method2013

    • Author(s)
      Kenya Okita
    • Organizer
      ASPEN2013
    • Place of Presentation
      Taipei, Taiwan
    • Related Report
      2013 Annual Research Report 2013 Final Research Report
  • [Presentation] Development of high-speed nanoprofiler using normal vector tracing method for high-accuracy mirrors2013

    • Author(s)
      Kohei Okuda
    • Organizer
      SPIE Optifab 2013
    • Place of Presentation
      Rochester, New York, USA
    • Related Report
      2013 Final Research Report
  • [Presentation] 法線ベクトル検出型超精密形状測定法による凸球面ミラーの形状測定2013

    • Author(s)
      沖田賢哉
    • Organizer
      2013年度精密工学会春季大会学術講演会講演会
    • Place of Presentation
      東京工業大学
    • Related Report
      2012 Annual Research Report
  • [Presentation] 高速ナノ形状測定法による凹球面・平面ミラーの形状測定2013

    • Author(s)
      奥田晃平
    • Organizer
      2013年度精密工学会春季大会学術講演会講演会
    • Place of Presentation
      東京工業大学
    • Related Report
      2012 Annual Research Report
  • [Presentation] 法線ベクトル追跡型高速ナノ形状測定法の開発-自律較正法を用いた光路の絶対長決定-2012

    • Author(s)
      北山貴雄, 戸成大輔, 松村拓己, 薄木宏治, 小嶋拓也, 打越純一, 遠藤勝義, 東保男
    • Organizer
      2012年度精密工学会春季大会学術講演会
    • Place of Presentation
      首都大学東京(Japan)
    • Year and Date
      2012-03-14
    • Related Report
      2011 Annual Research Report
  • [Presentation] Development of a nanoprofiler using the follow-up normal vector to the surface for next-generation ultraprecise mirrors2012

    • Author(s)
      Koji Usuki
    • Organizer
      SPIE Optical System Design
    • Place of Presentation
      Barcelona, Spain
    • Related Report
      2013 Final Research Report
  • [Presentation] Absolute calibration of the rotary encorder considering the influence on-machine for development of High-Speed Nanoprofiler2012

    • Author(s)
      Takuya Kojima
    • Organizer
      14th International Conference on Precision Engineering
    • Place of Presentation
      Hyogo Japan
    • Related Report
      2013 Final Research Report 2012 Annual Research Report
  • [Presentation] Development of a high-speed nanoprofiler using normal vector tracing2012

    • Author(s)
      Takao Kitayama
    • Organizer
      SPIE Optics+Photonics
    • Place of Presentation
      San Diego, California, USA
    • Related Report
      2013 Final Research Report
  • [Presentation] Development of a nanoprofiler using the follow-up normal vector to the surface for next-generation ultraprecise mirrors2012

    • Author(s)
      Koji Usuki
    • Organizer
      SPIE Optical System Design
    • Place of Presentation
      Barcelona Spain
    • Related Report
      2012 Annual Research Report
  • [Presentation] Development of a new high-speed nano-profiler based on normal vector tracing for high-accuracy aspheric mirrors2012

    • Author(s)
      K. Endo
    • Organizer
      Fifth International Symposium on Atomically Controlled Fabrication Technology
    • Place of Presentation
      Osaka Japan
    • Related Report
      2012 Annual Research Report
  • [Presentation] Profile measurement of concave spherical mirror and a flat mirror using a high-speed nanoprofiler2012

    • Author(s)
      K. Usuki
    • Organizer
      Fifth International Symposium on Atomically Controlled Fabrication Technology
    • Place of Presentation
      Osaka Japan
    • Related Report
      2012 Annual Research Report
  • [Presentation] Development of a high-speed nanoprofiler using normal vector tracing2012

    • Author(s)
      Takao Kitayama
    • Organizer
      SPIE Optics+Photonics
    • Place of Presentation
      San Diego California USA
    • Related Report
      2012 Annual Research Report
  • [Presentation] 法線ベクトル検出型超精密形状測定法の開発-球面および平面ミラーの形状測定-2012

    • Author(s)
      薄木宏治
    • Organizer
      精密工学会2012年度関西地方定期学術講演会講演会
    • Place of Presentation
      立命館大学
    • Related Report
      2012 Annual Research Report
  • [Presentation] Siウェハ表面の原子構造・電子状態2011

    • Author(s)
      遠藤勝義
    • Organizer
      第31回表面科学学術講演会講演
    • Place of Presentation
      タワーホール船堀(Japan)(招待講演)
    • Year and Date
      2011-12-17
    • Related Report
      2011 Annual Research Report
  • [Presentation] Development of a High-Speed Nanoprofiler Using NormalVector Tracing2011

    • Author(s)
      T.Kitayama, D.Tonaru, H.Matsumura, J.Uchikoshi, Y.Higashi, and K.Endo
    • Organizer
      4th International Conference of Asian Society for Precision Engineering and Nanotechnology
    • Place of Presentation
      Hong Kong, China
    • Year and Date
      2011-11-14
    • Related Report
      2011 Annual Research Report
  • [Presentation] Design of Optical Head for New High-Speed Nanoprofiler2011

    • Author(s)
      H. Matsumura, D. Tonaru,T. Kitayama, K. Usuki, T.Kojima, J. Uchikoshi, Y. Higashi, and K. Endo
    • Organizer
      Fourth International Symposium on Atomically Controlled Fabrication Technology
    • Place of Presentation
      Osaka, Japan
    • Year and Date
      2011-10-31
    • Related Report
      2011 Annual Research Report
  • [Presentation] 法線ベクトル追跡型高速ナノ精度形状測定法の開発-誤差解析と測定装置の校正-2011

    • Author(s)
      戸成大祐, 松村拓己, 北山貴雄, 打越純一, 東保男, 遠藤勝義
    • Organizer
      2011年度精密工学会秋季大会学術講演会
    • Place of Presentation
      金沢大学(Japan)
    • Year and Date
      2011-09-20
    • Related Report
      2011 Annual Research Report
  • [Presentation] 表面の原子構造観察とナノ形状測定2011

    • Author(s)
      遠藤勝義
    • Organizer
      精密工学会2011年度関西地方定期学術講演会
    • Place of Presentation
      兵庫県立大学(Japan)(招待講演)
    • Year and Date
      2011-06-30
    • Related Report
      2011 Annual Research Report
  • [Presentation] 法線ベクトル追跡型高速ナノ形状測定法の開発-小曲率半径R=10mm球面ミラー形状測定の可能性-2011

    • Author(s)
      松村拓己, 戸成大祐, 北山貴雄, 薄木宏治, 小嶋拓也, 打越純一, 東保男, 遠藤勝義
    • Organizer
      精密工学会2011年度関西地方定期学術講演会
    • Place of Presentation
      兵庫県立大学(Japan)
    • Year and Date
      2011-06-30
    • Related Report
      2011 Annual Research Report
  • [Presentation] Nano-radian resolution gradient integrated surface profiler2011

    • Author(s)
      Y. Higashi, Zhang Xiao-Wei,J. Uchikoshi, T. Kume, K.Enami, and K. Endo
    • Organizer
      SPIE 0ptifab2011
    • Place of Presentation
      Rochester, NY, USA
    • Year and Date
      2011-05-10
    • Related Report
      2011 Annual Research Report
  • [Presentation] 法線ベクトル検出型超精密形状測定法による球面ミラーの形状測定2011

    • Author(s)
      戸成大祐、松村拓己、北山貴雄、打越純一、東保男、遠藤勝義
    • Organizer
      2011年度精密工学会春季大会学術講演会
    • Place of Presentation
      東洋大学、東京都
    • Year and Date
      2011-03-14
    • Related Report
      2010 Annual Research Report
  • [Presentation] Development of a High-Speed Nanoprofiler Using Normal Vector Tracing2011

    • Author(s)
      Takao Kitayama
    • Organizer
      4th International Conference of Asian Society for Precision Engineering and Nanotechnology
    • Place of Presentation
      Hong Kong, China
    • Related Report
      2013 Final Research Report
  • [Presentation] 次世代非球面レンズ製作のための傾斜角積分型ナノ精度形状測定装置の開発-測定原理と測定方法-2010

    • Author(s)
      東保夫、遠藤勝義、打越純一、久米達哉、江並和宏
    • Organizer
      2010年度精密工学会秋季大会学術講演会
    • Place of Presentation
      名古屋大学、名古屋市
    • Year and Date
      2010-09-28
    • Related Report
      2010 Annual Research Report
  • [Presentation] Development of a new high-speed nano-profiler using normal vector tracing method for next-generation ultraprecision mirrors2010

    • Author(s)
      K.Endo, J.Uchikoshi, Y.Higashi
    • Organizer
      Third International Symposium on Atomically Controlled Fabrication Technology
    • Place of Presentation
      Osaka、Japan
    • Year and Date
      2010-09-28
    • Related Report
      2010 Annual Research Report
  • [Presentation] 法線ベクトル検出型超精密形状測定装置における形状測定再現性

    • Author(s)
      奥田晃平
    • Organizer
      精密工学会2013年度関西地方定期学術講演会
    • Place of Presentation
      大阪工業大学(大阪)
    • Related Report
      2013 Annual Research Report
  • [Presentation] 法線ベクトル検出型超精密形状測定法の開発

    • Author(s)
      小嶋拓也
    • Organizer
      2013年度精密工学会秋季大会学術講演会
    • Place of Presentation
      関西大学(大阪)
    • Related Report
      2013 Annual Research Report
  • [Presentation] Development of high-speed nanoprofiler using normal vector tracing method for high-accuracy mirrors

    • Author(s)
      Kohei Okuda
    • Organizer
      SPIE Optifab 2013
    • Place of Presentation
      Rochester, New York, USA.
    • Related Report
      2013 Annual Research Report
  • [Presentation] Profile measurement of aspheric mirror using High-Speed Nanoprofiler

    • Author(s)
      K. Okuda
    • Organizer
      International Workshop on Atomically Controlled Fabrication Technology
    • Place of Presentation
      Osaka, Japan
    • Related Report
      2013 Annual Research Report
  • [Presentation] 高速ナノ形状測定装置による非球面ミラーの形状測定

    • Author(s)
      徳田有亮
    • Organizer
      2014年度精密工学会春季大会学術講演会
    • Place of Presentation
      東京大学(東京)
    • Related Report
      2013 Annual Research Report
  • [Book] 超精密加工と表面科学原子レベルの-生産技術2014

    • Author(s)
      遠藤 勝義
    • Related Report
      2013 Final Research Report
  • [Book] 超精密加工と表面科学-原子レベルの生産技術-2014

    • Author(s)
      大阪大学グローバルCOEプログラム 高機能原子制御製造プロセス教育研究拠点/精密工学会超精密加工専門委員会 編
    • Total Pages
      379
    • Publisher
      大阪大学出版会
    • Related Report
      2013 Annual Research Report
  • [Remarks] 超精密科学研究センターHP

    • URL

      http://www.upst.eng.osaka-u.ac.jp/

    • Related Report
      2013 Final Research Report
  • [Remarks] 超精密科学研究センター

    • URL

      http://www.upst.eng.osaka-u.ac.jp/

    • Related Report
      2013 Annual Research Report
  • [Patent(Industrial Property Rights)] NORMAL VECTOR TRACING ULTRA-PRECISION SHAPE MEASUREMENT METHOD2013

    • Inventor(s)
      遠藤勝義、打越純一、東保男
    • Industrial Property Rights Holder
      大阪大学
    • Industrial Property Rights Type
      特許
    • Filing Date
      2013-02-17
    • Related Report
      2012 Annual Research Report
    • Overseas
  • [Patent(Industrial Property Rights)] 法線ベクトル追跡型超精密形状測定法2011

    • Inventor(s)
      遠藤勝義, 打越純一
    • Industrial Property Rights Holder
      国立大学法人大阪大学
    • Industrial Property Rights Type
      特許
    • Filing Date
      2011-06-11
    • Related Report
      2013 Final Research Report

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Published: 2010-08-23   Modified: 2019-07-29  

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