| Co-Investigator(Renkei-kenkyūsha) |
MATSUMOTO Kiyoshi 東京大学, IRT 研究機構, 特任教授 (10282675)
KAN Tetsuo 東京大学, 大学院情報理工学系研究科, 助教 (30504815)
TAKEI Yusuke 東京大学, 大学院情報理工学系研究科, 特任助教 (00513011)
NODA Kentaro 東京大学, 大学院情報理工学系研究科, 特任助教 (00547482)
TAKAHASHI Hidetoshi 東京大学, IRT 研究機構, 特任研究員 (90625485)
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| Budget Amount *help |
¥41,600,000 (Direct Cost: ¥32,000,000、Indirect Cost: ¥9,600,000)
Fiscal Year 2013: ¥7,800,000 (Direct Cost: ¥6,000,000、Indirect Cost: ¥1,800,000)
Fiscal Year 2012: ¥14,170,000 (Direct Cost: ¥10,900,000、Indirect Cost: ¥3,270,000)
Fiscal Year 2011: ¥7,800,000 (Direct Cost: ¥6,000,000、Indirect Cost: ¥1,800,000)
Fiscal Year 2010: ¥11,830,000 (Direct Cost: ¥9,100,000、Indirect Cost: ¥2,730,000)
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| Research Abstract |
In this project, a triaxial MEMS force sensing cantilever was studied. The sensor is equipped with a piezoresistor for force sensing at the root of the cantilever so that a quantitative mechanical stimuli could be applied to biological cells. The MEMS cantilever was made from an SOI wafer. A piezoresistive layer was formed by thermal diffusion on the surface of either cantilever root or the sidewall of the beam structure so that the corresponding three dimensional forces can be detected simultaneously. The resolution of the measurable force was as small as 1 uN for all the three directional forces, and the triaxial force could be independently measured with the device.
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