A MEMS cantilever for stimulus response measurements of single cells
Project/Area Number |
22241033
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Research Category |
Grant-in-Aid for Scientific Research (A)
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Allocation Type | Single-year Grants |
Section | 一般 |
Research Field |
Microdevices/Nanodevices
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Research Institution | The University of Tokyo |
Principal Investigator |
SHIMOYAMA Isao 東京大学, 情報理工学(系)研究科, 教授 (60154332)
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Co-Investigator(Renkei-kenkyūsha) |
MATSUMOTO Kiyoshi 東京大学, IRT 研究機構, 特任教授 (10282675)
KAN Tetsuo 東京大学, 大学院情報理工学系研究科, 助教 (30504815)
TAKEI Yusuke 東京大学, 大学院情報理工学系研究科, 特任助教 (00513011)
NODA Kentaro 東京大学, 大学院情報理工学系研究科, 特任助教 (00547482)
TAKAHASHI Hidetoshi 東京大学, IRT 研究機構, 特任研究員 (90625485)
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Project Period (FY) |
2010-04-01 – 2014-03-31
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Project Status |
Completed (Fiscal Year 2013)
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Budget Amount *help |
¥41,600,000 (Direct Cost: ¥32,000,000、Indirect Cost: ¥9,600,000)
Fiscal Year 2013: ¥7,800,000 (Direct Cost: ¥6,000,000、Indirect Cost: ¥1,800,000)
Fiscal Year 2012: ¥14,170,000 (Direct Cost: ¥10,900,000、Indirect Cost: ¥3,270,000)
Fiscal Year 2011: ¥7,800,000 (Direct Cost: ¥6,000,000、Indirect Cost: ¥1,800,000)
Fiscal Year 2010: ¥11,830,000 (Direct Cost: ¥9,100,000、Indirect Cost: ¥2,730,000)
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Keywords | マイクロセンサー / MEMS / 3軸力センサ / ピエゾ抵抗型カンチレバー |
Research Abstract |
In this project, a triaxial MEMS force sensing cantilever was studied. The sensor is equipped with a piezoresistor for force sensing at the root of the cantilever so that a quantitative mechanical stimuli could be applied to biological cells. The MEMS cantilever was made from an SOI wafer. A piezoresistive layer was formed by thermal diffusion on the surface of either cantilever root or the sidewall of the beam structure so that the corresponding three dimensional forces can be detected simultaneously. The resolution of the measurable force was as small as 1 uN for all the three directional forces, and the triaxial force could be independently measured with the device.
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Report
(4 results)
Research Products
(22 results)
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[Journal Article] A photoresponse -compensated parallel piezoresistive cantilever for cellular force measurements2013
Author(s)
Uijin G. Jung, Kenta Kuwana, Yoshiharu Ajiki, Hidetoshi Takahashi, Tetsuo Kan, Yusuke Takei, Kentaro Noda, Eiji Iwase, Kiyoshi Matsumoto and Isao Shimoyama
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Journal Title
Journal of Micromechanics and Microengineering
Volume: vol.23, no.5, (article no.045015)
Issue: 4
Pages: 45015-45015
DOI
Related Report
Peer Reviewed
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[Presentation] 50nm-thick piezo-resistive cantilever2012
Author(s)
Takanori Usami, Akihito Nakai, Kiyoshi Matsumoto and Isao Shimoyama
Organizer
The 7th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS2012)
Place of Presentation
Kyoto, Japan
Related Report
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[Presentation] 50nm-Thick Piezo-Resistive Cantilever2012
Author(s)
Takanori Usami, Akihito Nakai, Kiyoshi Matsumoto, Isao Shimoyama
Organizer
IEEE 7th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS2012)
Place of Presentation
Kyoto, Japan
Related Report
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