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Silicon waveguide photonic functional devices based on direct bondingof heterogeneous crystals and their applications to photonic integrated circuits

Research Project

Project/Area Number 22246009
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section一般
Research Field Applied optics/Quantum optical engineering
Research InstitutionTokyo Institute of Technology

Principal Investigator

MIZUMOTO Tetsuya  東京工業大学, 大学院・理工学研究科, 教授 (00174045)

Project Period (FY) 2010 – 2012
Project Status Completed (Fiscal Year 2012)
Budget Amount *help
¥48,360,000 (Direct Cost: ¥37,200,000、Indirect Cost: ¥11,160,000)
Fiscal Year 2012: ¥6,760,000 (Direct Cost: ¥5,200,000、Indirect Cost: ¥1,560,000)
Fiscal Year 2011: ¥6,240,000 (Direct Cost: ¥4,800,000、Indirect Cost: ¥1,440,000)
Fiscal Year 2010: ¥35,360,000 (Direct Cost: ¥27,200,000、Indirect Cost: ¥8,160,000)
Keywords光制御 / 光集積回路 / シリコンフォトニクス / 異種結晶接合 / シリコン細線導波路 / 光アイソレータ / 光サーキュレータ / 磁気光学ガーネット / 異種材料直接接合 / 表面活性化接合 / 回折格子 / シリコン細線光導波路 / 光非相反デバイス / 発光デバイス / 光合分波回路 / 果種材料直接接合
Research Abstract

As a fundamental technique for realizing functional photonic integrated circuits based on silicon waveguides, a surface-activated direct bonding technique has been investigated for integrating III-V compound semiconductors and magneto-optical crystals used for light sources and nonreciprocal devices, respectively. Based on this technique, silicon waveguide optical isolators and circulators are fabricated with an isolation of 30 dB and 15 dB, respectively. Also, a TE-TM mode converter is realized with a maximum conversion efficiency of 97 %. An apodized grating coupler can provides a coupling efficiency of 86 % for a randomly polarized light wave between a silicon waveguide and a surface mounted photo-diode. A fabrication process of photonic circuits integrating these functional devices is also investigated.

Report

(4 results)
  • 2012 Annual Research Report   Final Research Report ( PDF )
  • 2011 Annual Research Report
  • 2010 Annual Research Report
  • Research Products

    (67 results)

All 2013 2012 2011 2010 Other

All Journal Article (14 results) (of which Peer Reviewed: 14 results) Presentation (53 results) (of which Invited: 3 results)

  • [Journal Article] MZI optical isolator withSi-wire waveguides by surface- activated direct bonding2012

    • Author(s)
      Y. Shoji, M. Itoh, Y. Shirato, and T.Mizumoto
    • Journal Title

      Optics Express

      Volume: vol.20 Pages: 18440-18448

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Single trench SiON waveguideTE-TM mode converter2012

    • Author(s)
      K. Nakayama, Y. Shoji, and T.Mizumoto
    • Journal Title

      IEEE PhotonicsTechnology Letters

      Volume: vol.24,no.15 Pages: 1310-1312

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] (Invited) Direct wafer bonding and itsapplication to waveguide optical isolators2012

    • Author(s)
      T. Mizumoto, Y. Shoji, and R. Takei
    • Journal Title

      Materials

      Volume: vol.5 Pages: 985-1004

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] (Invited) Waveguide optical isolatorsfor integrated optics2012

    • Author(s)
      T. Mizumoto, R. Takei, and Y. Shoji
    • Journal Title

      IEEE Journal ofQuantum Electronics

      Volume: vol.48,no.2 Pages: 252-260

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Direct wafer bonding and its application to waveguide optical isolators2012

    • Author(s)
      T. Mizumoto
    • Journal Title

      Materials

      Volume: 5 Issue: 5 Pages: 985-1004

    • DOI

      10.3390/ma5050985

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Single trench SiON waveguide TE-TM mode converter2012

    • Author(s)
      K. Nakayama
    • Journal Title

      IEEE Photonics Technology Letters

      Volume: 24 Issue: 15 Pages: 1310-1312

    • DOI

      10.1109/lpt.2012.2202646

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] MZI optical isolator with Si-wire waveguides by surface-activated direct bonding2012

    • Author(s)
      Y. Shoji
    • Journal Title

      Optics Express

      Volume: 20 Issue: 16 Pages: 18440-18448

    • DOI

      10.1364/oe.20.018440

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Waveguide optical isolators for integrated optics2012

    • Author(s)
      T.Mizumoto, R.Takei, Y.Shoji
    • Journal Title

      IEEE Journal of Quantum Electronics

      Volume: 47 Issue: 2 Pages: 252-260

    • DOI

      10.1109/jqe.2011.2168194

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] (InvitedPaper) Application of Wafer Direct Bonding Technique to Optical Non- reciprocal Devices2011

    • Author(s)
      T. Mizumoto and R. Takei
    • Journal Title

      IEEE PhotonicsJournal

      Volume: vol.3,no.3 Pages: 588-596

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Application of Wafer Direct Bonding Technique to Optical Nonreciprocal Devices2011

    • Author(s)
      T.Mizumoto, R.Takei
    • Journal Title

      IEEE Photonics Journal

      Volume: 3 Issue: 3 Pages: 588-596

    • DOI

      10.1109/jphot.2011.2131641

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Effect of wafer pre-cleaning andplasma irradiation to wafer surfaces for plasma-assisted surface activated bonding2010

    • Author(s)
      R. Takei, K. Yoshida, and T. Mizumoto
    • Journal Title

      Japanese Journal of AppliedPhysics

      Volume: vol.49,no.8 Pages: 86204-86204

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Design andsimulation of silicon waveguide optical circulator employing nonreciprocal phase shift2010

    • Author(s)
      R. Takei and T. Mizumoto
    • Journal Title

      Japanese Journal ofApplied Physics

      Volume: vol.49,no.5 Pages: 52203-52203

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Design and simulation of silicon waveguide optical circulator employing nonreciprocal phase shift2010

    • Author(s)
      R.Takei, T.Mizumoto
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 49 Pages: 52203-52203

    • NAID

      40017116091

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Effect of wafer pre-cleaning and plasma irradiation to wafer surfaces for plasma-assisted surface activated bonding2010

    • Author(s)
      R.Takei, K.Yoshida, T.Mizumoto
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 49 Pages: 86204-86204

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Presentation] The first demonstration of silicon waveguide optical circulator2013

    • Author(s)
      K. Mitsuya, Y. Shoji, and T. Mizumoto
    • Organizer
      2013Optical Fiber Communication Conference (OFC 2013)
    • Place of Presentation
      Anaheim (USA)
    • Year and Date
      2013-05-21
    • Related Report
      2012 Final Research Report
  • [Presentation] High isolation in silicon waveguideoptical isolator employing non- reciprocal phase shift2013

    • Author(s)
      Y. Shirato, Y. Shoji, and T. Mizumoto
    • Organizer
      2013 Optical Fiber Communication Conference (OFC2013)
    • Place of Presentation
      Anaheim (USA)
    • Year and Date
      2013-03-19
    • Related Report
      2012 Final Research Report
  • [Presentation] Silicon waveguide wavelength-selective switch for on-chip WDM communications2012

    • Author(s)
      K. Miura, Y. Shoji, and T. Mizumoto
    • Organizer
      IEEE Photonics Conference 2012 (IPC 2012)
    • Place of Presentation
      Burlingame (USA)
    • Year and Date
      2012-09-26
    • Related Report
      2012 Final Research Report
  • [Presentation] On-chip optical isolatorsand silicon photonics2012

    • Author(s)
      T. Mizumoto, Y. Shoji, and K. Sakurai
    • Organizer
      The 17th Opto-Electronics and CommunicationsConference (OECC 2012)
    • Place of Presentation
      Busan (Korea)
    • Year and Date
      2012-07-06
    • Related Report
      2012 Final Research Report
  • [Presentation] Single trench SiON wave- guide TE-TMmode converter2012

    • Author(s)
      K. Nakayama, Y. Shoji, and T. Mizumoto
    • Organizer
      The 2012 Conference onLasers and Electro-Optics (CLEO 2012)
    • Place of Presentation
      Sann Jose(USA)
    • Year and Date
      2012-05-07
    • Related Report
      2012 Final Research Report
  • [Presentation] シングルトレンチ型SiON導波路TE-TMモード変換器2012

    • Author(s)
      中山謙一, 庄司雄哉, 水本哲弥
    • Organizer
      2012年電子情報通信学会総合全国大会
    • Place of Presentation
      岡山大学・岡山
    • Year and Date
      2012-03-23
    • Related Report
      2011 Annual Research Report
  • [Presentation] ダイレクトボンディングを用いたシリコンMZI細線導波路型光アイソレータ2012

    • Author(s)
      伊藤正俊, 白土雄也, 庄司雄哉, 水本哲弥
    • Organizer
      2012年電子情報通信学会総合全国大会
    • Place of Presentation
      岡山大学・岡山
    • Year and Date
      2012-03-22
    • Related Report
      2011 Annual Research Report
  • [Presentation] シングルトレンチ型SiON導波路TE-TMモード変換器の製作2012

    • Author(s)
      中山謙一, 庄司雄哉, 水本哲弥
    • Organizer
      2012年春季第59回応用物理学関係連合講演会
    • Place of Presentation
      早稲田大学・東京
    • Year and Date
      2012-03-18
    • Related Report
      2011 Annual Research Report
  • [Presentation] Ce:YIG直接接合によるMZI型シリコン細線導波路光アイソレータ2012

    • Author(s)
      伊藤正俊, 白土雄也, 庄司雄哉, 水本哲弥
    • Organizer
      2012年春季第59回応用物理学関係連合講演会
    • Place of Presentation
      早稲田大学・東京
    • Year and Date
      2012-03-17
    • Related Report
      2011 Annual Research Report
  • [Presentation] シングルトレンチ型SiON導波路TE-TMモード変換器2012

    • Author(s)
      中山謙一, 庄司雄哉, 水本哲弥
    • Organizer
      電子情報通信学会OPE研究会
    • Place of Presentation
      大阪大学・大阪
    • Year and Date
      2012-01-27
    • Related Report
      2011 Annual Research Report
  • [Presentation] アポダイズド・グレーティングカプラによる表面実装PD-Si導波路結合2011

    • Author(s)
      藤本篤史, 庄司雄哉, 水本哲弥
    • Organizer
      電子情報通信学会第16回シリコンフォトニクス研究会
    • Place of Presentation
      電気通信大学・東京
    • Year and Date
      2011-11-25
    • Related Report
      2011 Annual Research Report
  • [Presentation] MZI型シリコン細線導波路光アイソレータ2011

    • Author(s)
      伊藤正俊, 白土雄也, 庄司雄哉, 水本哲弥
    • Organizer
      電子情報通信学会第16回シリコンフォトニクス研究会
    • Place of Presentation
      電気通信大学・東京
    • Year and Date
      2011-11-25
    • Related Report
      2011 Annual Research Report
  • [Presentation] シングルトレンチ型SiON導波路TE-TMモード変換器2011

    • Author(s)
      中山謙一, 庄司雄哉, 水本哲弥
    • Organizer
      電子情報通信学会第16回シリコンフォトニクス研究会
    • Place of Presentation
      電気通信大学・東京
    • Year and Date
      2011-11-25
    • Related Report
      2011 Annual Research Report
  • [Presentation] Improvement in couplingefficiency between a silicon waveguide and a surface mounted photo detector using an apodized grating coupler2011

    • Author(s)
      A. Fujimoto, K. Uchiho, Y. Shoji, and T.Mizumoto
    • Organizer
      The17th Microoptics Conference (MOC'11)
    • Place of Presentation
      仙台コンベンションセンター(宮城)
    • Year and Date
      2011-11-01
    • Related Report
      2012 Final Research Report
  • [Presentation] Multimode interference coupler with TE mode rejection characteristics in a silicon waveguide2011

    • Author(s)
      Y.Shirado, R.Takei, Y.Shoji, T.Mizumoto
    • Organizer
      The 17th Microoptics Conference (MOC'11)
    • Place of Presentation
      仙台
    • Year and Date
      2011-11-01
    • Related Report
      2011 Annual Research Report
  • [Presentation] Improvement in coupling efficiency between a silicon waveguide and a surface mounted photo detector using an apodized grating coupler2011

    • Author(s)
      A.Fujimoto, K.Uchiho, Y.Shoji, T.Mizumoto
    • Organizer
      The 17th Microoptics Conference (MOC'11)
    • Place of Presentation
      仙台
    • Year and Date
      2011-11-01
    • Related Report
      2011 Annual Research Report
  • [Presentation] Efficiency Improvement of SOIWaveguide Grating for Coupling to Surface Mounted Photodetector2011

    • Author(s)
      R. Takei, K. Uchiho, and T. Mizumoto
    • Organizer
      The 8th International Conference on Group IV Photonics
    • Place of Presentation
      London(UK)
    • Year and Date
      2011-09-15
    • Related Report
      2012 Final Research Report
  • [Presentation] 磁気光学ガーネットの表面活性化接合と導波路形光アイソレータへの応用2011

    • Author(s)
      庄司雄哉, 武井亮平, 水本哲弥
    • Organizer
      2011年電子情報通信学会ソサイエティ大会
    • Place of Presentation
      北海道大学・札幌
    • Year and Date
      2011-09-15
    • Related Report
      2011 Annual Research Report
  • [Presentation] Efficiency Improvement of SOI Waveguide Grating for Coupling to Surface Mounted Photodetector2011

    • Author(s)
      R.Takei, K.Uchiho, T.Mizumoto
    • Organizer
      The 8th International Conference on Group IV Photonics
    • Place of Presentation
      London, England
    • Year and Date
      2011-09-15
    • Related Report
      2011 Annual Research Report
  • [Presentation] 非相反移相効果を用いたシリコン導波路型光アイソレータに用いるTEモード遮断多モード干渉結合器2011

    • Author(s)
      白土雄也, 武井亮平, 水本哲弥
    • Organizer
      2011年秋季第72回応用物理学会講演会
    • Place of Presentation
      山形大学・山形
    • Year and Date
      2011-08-31
    • Related Report
      2011 Annual Research Report
  • [Presentation] Application of magneto-optical garnet to waveguide optical isolators for photonic integrated circuits2011

    • Author(s)
      T.Mizumoto, Y.Shoji, R.Takei
    • Organizer
      Moscow International Symposium on Magnetism
    • Place of Presentation
      Moscow, Russia
    • Year and Date
      2011-08-24
    • Related Report
      2011 Annual Research Report
  • [Presentation] Optical nonreciprocal devices for integrated optics2011

    • Author(s)
      T.Mizumoto
    • Organizer
      The 16th Optoelectronics and Communications Conference (OECC 2011)
    • Place of Presentation
      Kaohsiung, Taiwan
    • Year and Date
      2011-07-05
    • Related Report
      2011 Annual Research Report
  • [Presentation] Polarization insensitive grating coupler for lightwave coupling between silicon nanophotonic waveguide and surface mounted photodetector2011

    • Author(s)
      R.Takei, K.Uchiho, T.Mizumoto
    • Organizer
      The 2011 Conference on Lasers and Electro-Optics (CLEO 2011)
    • Place of Presentation
      Baltimore, Maryland
    • Year and Date
      2011-05-05
    • Related Report
      2011 Annual Research Report
  • [Presentation] Si導波路グレーティング結合器の放射特性2011

    • Author(s)
      内保光太郎, 武井亮平, 若井達哉, 水本哲弥
    • Organizer
      2011年春季第58回応用物理学関係連合講演会
    • Place of Presentation
      神奈川工科大学
    • Year and Date
      2011-03-24
    • Related Report
      2010 Annual Research Report
  • [Presentation] 遺伝アルゴリズムを用いたSi細線MZI型フラットトップWDMデバイスの設計2011

    • Author(s)
      杉山哲也, 武井亮平, 水本哲弥
    • Organizer
      2011年春季第58回応用物理学関係連合講演会
    • Place of Presentation
      神奈川工科大学
    • Year and Date
      2011-03-24
    • Related Report
      2010 Annual Research Report
  • [Presentation] 面実装光受光器との光波結合を目指したシリコン導波路グレーティング結合器2011

    • Author(s)
      武井亮平, 内保光太郎, 若井達哉, 水本哲弥
    • Organizer
      電子情報通信学会 フォトニックネットワーク研究会
    • Place of Presentation
      大阪大学
    • Year and Date
      2011-01-28
    • Related Report
      2010 Annual Research Report
  • [Presentation] (Invited) Application of wafer direct bonding technology to optical nonreciprocal devices2011

    • Author(s)
      T.Mizumoto, R.Takei
    • Organizer
      IEEE Photonics Society 2011 Winter Topical Meeting
    • Place of Presentation
      Colorado, USA
    • Year and Date
      2011-01-10
    • Related Report
      2010 Annual Research Report
  • [Presentation] (Invited) Optical Nonreciprocal devices fabricated with direct bonding technology2010

    • Author(s)
      T.Mizumoto, R.Takei
    • Organizer
      International Conference on Fiber Optics and Photonics (Photonics 2010)
    • Place of Presentation
      Guwahati, India
    • Year and Date
      2010-12-15
    • Related Report
      2010 Annual Research Report
  • [Presentation] (Invited) SOI Waveguide Optical Nonreciprocal Devices with Directly Bonded Garnet2010

    • Author(s)
      T.Mizumoto, R.Takei
    • Organizer
      2010 MRS Fall meeting
    • Place of Presentation
      Boston, USA
    • Year and Date
      2010-12-01
    • Related Report
      2010 Annual Research Report
  • [Presentation] Materials anddesigns for nonreciprocal optical devices2010

    • Author(s)
      T. Mizumoto
    • Organizer
      2010 MRS Fall meeting
    • Place of Presentation
      Boston (USA), Tutorial-J
    • Year and Date
      2010-11-29
    • Related Report
      2012 Final Research Report
  • [Presentation] (Tutorial) Materials and designs for nonreciprocal optical devices2010

    • Author(s)
      T.Mizumoto
    • Organizer
      2010 MRS Fall meeting
    • Place of Presentation
      Boston, USA
    • Year and Date
      2010-11-29
    • Related Report
      2010 Annual Research Report
  • [Presentation] Polarization-insensitive coupling of lightwave between a Si waveguide and a surface mounted PD2010

    • Author(s)
      K.Uchiho, R.Takei, T.Mizumoto
    • Organizer
      The 16th Microoptics Conference (MOC'10)
    • Place of Presentation
      Hsinchu, Taiwan
    • Year and Date
      2010-11-03
    • Related Report
      2010 Annual Research Report
  • [Presentation] Si導波路グレーティングにおける上部クラッド層依存性2010

    • Author(s)
      内保光太郎, 武井亮平, 水本哲弥
    • Organizer
      2010年秋季第71回応用物理学会講演会
    • Place of Presentation
      長崎大学
    • Year and Date
      2010-09-17
    • Related Report
      2010 Annual Research Report
  • [Presentation] SiON導波路TE-TMモード変換器の設計2010

    • Author(s)
      中山謙一, 金相憲, 武井亮平, 水本哲弥
    • Organizer
      2010年秋季第71回応用物理学会講演会
    • Place of Presentation
      長崎大学
    • Year and Date
      2010-09-16
    • Related Report
      2010 Annual Research Report
  • [Presentation] (Invited) Waveguide type optical nonreciprocal devices by wafer bonding technology2010

    • Author(s)
      T.Mizumoto
    • Organizer
      The 15th Optoelectronics and Communications Conference (OECC 2010)
    • Place of Presentation
      札幌コンベンションセンター
    • Year and Date
      2010-07-07
    • Related Report
      2010 Annual Research Report
  • [Presentation] Single trench SiON waveguide TE-TM mode converter

    • Author(s)
      K. Nakayama
    • Organizer
      The 2012 Conference on Lasers and Electro-Optics (CLEO 2012)
    • Place of Presentation
      San Jose (USA)
    • Related Report
      2012 Annual Research Report
  • [Presentation] Surface Activated Bonding of Si/Ce:YIG for Waveguide Optical Isolators

    • Author(s)
      Y. Shoji
    • Organizer
      3rd International IEEE Workshop on Low Temperature Bonding for 3D Integration
    • Place of Presentation
      東京大学 (東京)
    • Related Report
      2012 Annual Research Report
  • [Presentation] On-chip optical isolators and silicon photonics

    • Author(s)
      T. Mizumoto
    • Organizer
      The 17th OptoElectronics and Communications Conference (OECC 2012)
    • Place of Presentation
      Busan (Korea)
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Presentation] Direct bonding of dissimilar crystals and its application to photonic circuits

    • Author(s)
      T. Mizumoto
    • Organizer
      Nano Korea 2012
    • Place of Presentation
      Seoul (Korea)
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Presentation] Si-wire MZI optical isolator fabricated by direct bonding

    • Author(s)
      M. Ito
    • Organizer
      The 9th International Conference on Group IV Photonics
    • Place of Presentation
      San Diego (USA)
    • Related Report
      2012 Annual Research Report
  • [Presentation] Single trench waveguide TE-TM mode converter fabricated with SiON

    • Author(s)
      K. Nakayana
    • Organizer
      The 9th International Conference on Group IV Photonics
    • Place of Presentation
      San Diego (USA)
    • Related Report
      2012 Annual Research Report
  • [Presentation] Silicon waveguide wavelength-selective switch for on-chip WDM communications

    • Author(s)
      K. Miura
    • Organizer
      IEEE Photonics Conference 2012 (IPC 2012)
    • Place of Presentation
      Burlingame (USA)
    • Related Report
      2012 Annual Research Report
  • [Presentation] High isolation in silicon waveguide optical isolator employing nonreciprocal phase shift

    • Author(s)
      Y. Shirato
    • Organizer
      2013 Optical Fiber Communication Conference (OFC2013)
    • Place of Presentation
      Anaheim (USA)
    • Related Report
      2012 Annual Research Report
  • [Presentation] The first demonstration of silicon waveguide optical circulator

    • Author(s)
      K. Mitsuya
    • Organizer
      2013 Optical Fiber Communication Conference (OFC2013)
    • Place of Presentation
      Anaheim (USA)
    • Related Report
      2012 Annual Research Report
  • [Presentation] オンチップ光ネットワーク用シリコン波長選択スイッチ

    • Author(s)
      三浦謙悟
    • Organizer
      電子情報通信学会OPE研究会
    • Place of Presentation
      リゾーピア熱海 (静岡)
    • Related Report
      2012 Annual Research Report
  • [Presentation] シリコン導波路型光サーキュレータ

    • Author(s)
      三矢浩太
    • Organizer
      電子情報通信学会OPE研究会
    • Place of Presentation
      リゾーピア熱海 (静岡)
    • Related Report
      2012 Annual Research Report
  • [Presentation] 非相反移相効果を用いたシリコン細線導波路型光アイソレータの高アイソレーション動作

    • Author(s)
      白土雄也
    • Organizer
      電子情報通信学会OPE研究会
    • Place of Presentation
      機械振興会館 (東京)
    • Related Report
      2012 Annual Research Report
  • [Presentation] シリコン導波路型光サーキュレータ

    • Author(s)
      三矢浩太
    • Organizer
      電子情報通信学会OPE研究会
    • Place of Presentation
      機械振興会館 (東京)
    • Related Report
      2012 Annual Research Report
  • [Presentation] Ce:YIG直接接合を用いたシリコン導波路型光サーキュレータ

    • Author(s)
      三矢浩太
    • Organizer
      2012年電子情報通信学会エレクトロニクスソサィエティ大会
    • Place of Presentation
      富山大学 (富山)
    • Related Report
      2012 Annual Research Report
  • [Presentation] 偏波制御による光非相反機能の実現と導波路デバイスへの展開

    • Author(s)
      水本哲弥
    • Organizer
      2012年電子情報通信学会エレクトロニクスソサィエティ大会
    • Place of Presentation
      富山大学 (富山)
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Presentation] 非相反移相効果を用いたシリコン導波路型光アイソレータに用いるTEモード遮断マッハツェンダ干渉計

    • Author(s)
      白土雄也
    • Organizer
      2012年秋季第73回応用物理学会講演会
    • Place of Presentation
      愛媛大学 (愛媛)
    • Related Report
      2012 Annual Research Report
  • [Presentation] オンチップ光ネットワーク用シリコン導波路型波長選択スイッチ

    • Author(s)
      三浦謙悟
    • Organizer
      2012年秋季第73回応用物理学会講演会
    • Place of Presentation
      愛媛大学 (愛媛)
    • Related Report
      2012 Annual Research Report
  • [Presentation] アポダイズ・グレーティングによる表面実装PD-Si導波路結合

    • Author(s)
      藤本篤史
    • Organizer
      2012年秋季第73回応用物理学会講演会
    • Place of Presentation
      愛媛大学 (愛媛)
    • Related Report
      2012 Annual Research Report

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Published: 2010-08-23   Modified: 2019-07-29  

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