Principle of Micro-Beam Sensor and Its application to Bio/Chemical Sensing
| Project/Area Number |
22246026
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| Research Category |
Grant-in-Aid for Scientific Research (A)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Thermal engineering
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| Research Institution | Kyushu University |
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Principal Investigator |
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| Co-Investigator(Kenkyū-buntansha) |
TAKAHASHI Koji 九州大学, 大学院・工学研究院, 教授 (10243924)
KURATA Kosaku 九州大学, 大学院・工学研究院, 准教授 (00368870)
UCHIDA Satoru 九州大学, 大学院・工学研究院, 助教 (80038041)
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| Co-Investigator(Renkei-kenkyūsha) |
KAN Doncheon 九州大学, 大学院・医学研究院, 教授 (80214716)
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| Project Period (FY) |
2010 – 2012
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| Project Status |
Completed (Fiscal Year 2012)
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| Budget Amount *help |
¥50,310,000 (Direct Cost: ¥38,700,000、Indirect Cost: ¥11,610,000)
Fiscal Year 2012: ¥4,290,000 (Direct Cost: ¥3,300,000、Indirect Cost: ¥990,000)
Fiscal Year 2011: ¥7,020,000 (Direct Cost: ¥5,400,000、Indirect Cost: ¥1,620,000)
Fiscal Year 2010: ¥39,000,000 (Direct Cost: ¥30,000,000、Indirect Cost: ¥9,000,000)
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| Keywords | 熱物性 / 測定法 / MEMS / センサ / 計測技術 / ＭＥＭＳセンサ / 熱物性値測定 / 熱伝導率 / 新測定法 / 微量測定 / ガスセンサ / 熱伝導率検出器 / MEMSセンサ / 定常測定 / 水素センサ / アレルギーセンサ / TCD / バイオセンサ / ケミカルセンサ |
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| Research Abstract |
This study aimed to develop a new method for measuring thermal conductivity of gases and liquids using a micro-beam MEMS sensor that is suspended across a trench on a silicon substrate. In this method, the thermal conductivity of a sample is determined by measuring the temperature of the sensor at a steady-state after heating it in a sample fluid. After developing the fabrication process, feasibility of the method was demonstrated by comparing the results between the air and FC-72 as test fluids using platinum and gold sensors approximately 10 μm in length. The fact that the temperature rise of the sensor does not depend on the flow was also demonstrated by an experiment in an external air flow, which is important for the application of the sensor as gas sensors.
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Report
(4 results)
Research Products
(17 results)
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[Presentation]2012
Author(s)
福永鷹信,田中雄樹,藏田耕作,高橋厚史,高松洋
Organizer
第33回日本熱物性シンポジウム
Place of Presentation
大阪
Year and Date
2012-10-03
Related Report
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[Presentation]2010
Author(s)
H. Takamatsu, T. Tanaka, Y. Furuya, S. Uchida, K. Kurata, K. Takahashi
Organizer
The 9th Asian Thermophysical Properties Conf
Place of Presentation
Beijing, China
Year and Date
2010-10-20
Related Report
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