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Helicon-wave-excited-plasma sputtering epitaxy of polariton laser structures for room temperature operation

Research Project

Project/Area Number 22246037
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section一般
Research Field Electronic materials/Electric materials
Research InstitutionTohoku University

Principal Investigator

CHICHIBU Shigefusa  東北大学, 多元物質科学研究所, 教授 (80266907)

Co-Investigator(Kenkyū-buntansha) SOTA Takayuki  早稲田大学, 理工学術院, 教授 (90171371)
UEDONO Akira  筑波大学, 数理物質科学研究科, 教授 (20213374)
HAZU Kouji  東北大学, 多元物質科学研究所, 助教 (30367057)
FURUSAWA Kentaro  東北大学, 多元物質科学研究所, 助教 (40392104)
Project Period (FY) 2010-04-01 – 2014-03-31
Project Status Completed (Fiscal Year 2013)
Budget Amount *help
¥46,930,000 (Direct Cost: ¥36,100,000、Indirect Cost: ¥10,830,000)
Fiscal Year 2013: ¥4,940,000 (Direct Cost: ¥3,800,000、Indirect Cost: ¥1,140,000)
Fiscal Year 2012: ¥11,570,000 (Direct Cost: ¥8,900,000、Indirect Cost: ¥2,670,000)
Fiscal Year 2011: ¥21,060,000 (Direct Cost: ¥16,200,000、Indirect Cost: ¥4,860,000)
Fiscal Year 2010: ¥9,360,000 (Direct Cost: ¥7,200,000、Indirect Cost: ¥2,160,000)
Keywords電子・電気材料 / ヘリコン波励起プラズマスパッタ / 微小共振器 / 励起子 / 励起子ポラリトン / 酸化亜鉛 / エピタキシー / ポラリトンレーザー / 縮退四光波混合
Research Abstract

A cavity-coupled exciton-polariton laser, namely cavity-polariton laser, has been attracting attention as a new generation low-threshold current density coherent light source composed of a semiconductor microcavity. In the present research, a microcavity composed of a ZnO active region sandwiched by pairwise distributed Bragg reflectors (DBRs) that most likely operates at room temperature was fabricated using a uniquely designed Helicon-Wave-Excited Plasma Sputtering (HWPS) method, which enables to grow high quality epitaxial semiconductor films. We eventually observed an enhanced emission peak at around 3.25 eV, which originates from an exciton-polariton emission coupled with a cavity mode. We therefore conclude that a way to fabricate new functional quantum heterostructures and to characterize them was cut open using the growth, fabrication, and characterization methods developed by this research project.

Report

(5 results)
  • 2013 Annual Research Report   Final Research Report ( PDF )
  • 2012 Annual Research Report
  • 2011 Annual Research Report
  • 2010 Annual Research Report
  • Research Products

    (81 results)

All 2014 2013 2012 2011 2010 Other

All Journal Article (25 results) (of which Peer Reviewed: 24 results) Presentation (54 results) (of which Invited: 8 results) Remarks (2 results)

  • [Journal Article] Impacts of Si-doping and resultant cation vacancy formation on the luminescence dynamics for the near-band-edge emission of Al0.6Ga0.4N films grown on AlN templates by metalorganic vapor phase epitaxy2013

    • Author(s)
      S. F. Chichibu, H. Miyake, Y. Ishikawa, M. Tashiro, T. Ohtomo, K. Furusawa, K. Hazu, K. Hiramatsu, and A. Uedono
    • Journal Title

      Journal of Applied Physics

      Volume: Vol.113,No.21 Pages: 2135061-6

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] Impacts of Si-doping and resultant cation vacancy formation on the luminescence dynamics for the near-band-edge emission of Al0.6Ga0.4N films grown on AlN templates by metalorganic vapor phase epitaxy2013

    • Author(s)
      S. F. Chichibu, H. Miyake, Y. Ishikawa, M. Tashiro, T. Ohtomo, K. Furusawa, K. Hazu,K. Hiramatsu, A. Uedono
    • Journal Title

      Journal of Applied Physics

      Volume: 113 Issue: 21 Pages: 2135061-6

    • DOI

      10.1063/1.4807906

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Electronic Structure and Spontaneous Polarization in ScxAlyGa1-x-yN Alloys Lattice-Matched to GaN: A First-Principles Study2013

    • Author(s)
      K. Shimada, S. F. Chichibu, M. Hata, H. Sazawa, T. Takada, and T. Sota
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 52 Issue: 8S Pages: 08JM04-08JM04

    • DOI

      10.7567/jjap.52.08jm04

    • NAID

      210000142746

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Local carrier dynamics around the sub-surface basal-plane stacking faults of GaN studied by spatio-time-resolved cathodoluminescence using a front-excitation-type photoelectron-gun2013

    • Author(s)
      K. Furusawa, Y. Ishikawa, M. Tashiro, K. Hazu, S. Nagao, H. Ikeda, K. Fujito, and S. F. Chichibu
    • Journal Title

      Applied Physics Letters

      Volume: 103 Issue: 5 Pages: 0521081-4

    • DOI

      10.1063/1.4817297

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Excitonic emission dynamics in homoepitaxial AlN films studied using polarized and spatio-time-resolved cathodoluminescence measurements2013

    • Author(s)
      S. F. Chichibu, K. Hazu, Y. Ishikawa, M. Tashiro, T. Ohtomo, K. Furusawa, A. Uedono, S. Mita, J. Xie, R. Collazo, and Z. Sitar
    • Journal Title

      Applied Physics Letters

      Volume: 103 Issue: 14 Pages: 1421031-5

    • DOI

      10.1063/1.4823826

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Spatio-time-resolved cathodoluminescence studies on freestanding GaN substrates grown by hydride vapor phase epitaxy2013

    • Author(s)
      S. F. Chichibu, Y. Ishikawa, M. Tashiro, K. Hazu, K. Furusawa, H. Namita, S. Nagao, K. Fujito, A. Uedono
    • Journal Title

      Electrochemical Society Transactions

      Volume: 50 Issue: 42 Pages: 1-8

    • DOI

      10.1149/05042.0001ecst

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Time-resolved luminescence studies on AlN and high AlN mole fraction AlGaN alloys2013

    • Author(s)
      S. F. Chichibu, T. Onuma, K. Hazu, and A. Uedono
    • Journal Title

      Physica Status Solidi (c)

      Volume: 10 Issue: 3 Pages: 501-506

    • DOI

      10.1002/pssc.201200676

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Spatio-time-resolved cathodoluminescence studies on freestanding GaN substrates grown by hydride vapor phase epitaxy2013

    • Author(s)
      S. F. Chichibu, Y. Ishikawa, M. Tashiro, K. Hazu, K. Furusawa, H. Namita, S. Nagao, K. Fujito, and A. Uedono
    • Journal Title

      Electrochemical Society Transactions

      Volume: 50

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Structural, elastic, and polarization parameters and band structures of wurtzite ZnO and MgO2012

    • Author(s)
      S. -H. Jang and S. F. Chichibu
    • Journal Title

      Journal of Applied Physics

      Volume: Vol.112,No.7 Pages: 0735031-6

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] Signatures of Γ1-Γ5 mixed-mode polaritons in polarized reflectance spectra of ZnO2012

    • Author(s)
      A. Takagi, A. Nakamura, A. Yoshikaie, S. Yoshioka, S. Adachi, S. F. Chichibu, and T. Sota
    • Journal Title

      Journal of Physics: Condensed Matter

      Volume: Vol.24,No.41 Pages: 4158011-8

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] Valence-band-ordering of a strain-free bulk ZnO single crystal identified by four-wave-mixing spectroscopy technique2012

    • Author(s)
      K. Hazu, S. F. Chichibu, S. Adachi, and T. Sota
    • Journal Title

      Journal of Applied Physics

      Volume: Vol.111,No.9 Pages: 0935221-6

    • Related Report
      2013 Final Research Report 2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Femtosecond-laser-driven photoelectron gun for time-resolved cathodoluminescence measurement of GaN2012

    • Author(s)
      T. Onuma, Y. Kagamitani, K. Hazu, T. Ishiguro, T. Fukuda, and S. F. Chichibu
    • Journal Title

      Review of Scientific Instruments

      Volume: Vol.83,No.4 Pages: 0439051-7

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] Signatures of Γ1-Γ5 mixed-mode polaritons in polarized reflectance spectra of ZnO2012

    • Author(s)
      A. Takagi, A. Nakamura, A. Yoshikaie, S. Yoshioka, S. Adachi, S. F. Chichibu, and T. Sota
    • Journal Title

      Journal of Physics: Condensed Matter

      Volume: 24 Issue: 41 Pages: 4158011-8

    • DOI

      10.1088/0953-8984/24/41/415801

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Structural, elastic, and polarization paremeters and band structures of wurtzite ZnO and MgO2012

    • Author(s)
      S. -H. Jang and S. F. Chichibu
    • Journal Title

      Journal of Applied Physics

      Volume: 112 Issue: 7 Pages: 0735031-6

    • DOI

      10.1063/1.4757023

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Local lifetime and luminescence efficiency for the near-band-edge emission of freestanding GaN substrates determined using spatio-time-resolved cathodoluminescence2012

    • Author(s)
      Y. Ishikawa, M. Tashiro, K. Hazu, K. Furusawa, H. Namita, S. Nagao, K. Fujito, and S. F. Chichibu
    • Journal Title

      Applied Physics Letters

      Volume: 101 Issue: 21 Pages: 2121061-4

    • DOI

      10.1063/1.4767357

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Defect characterization in Mg-doped GaN studied using a monoenergetic positron beam2012

    • Author(s)
      A.Uedono, S.Ishibashi, K.Tenjinbayashi, T.Tsutsui, K.Nakahara, D.Takamizu, S.F.Chichibu
    • Journal Title

      Journal of Applied Physics

      Volume: 111 Issue: 1 Pages: 0145081-6

    • DOI

      10.1063/1.3675516

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Femtosecond-laser-driven photoelectron-gun for time-resolved cathodoluminescence measurement of GaN2012

    • Author(s)
      T.Onuma, Y.Kagamitani, K.Hazu, T.Ishiguro, T.Fukuda, S.F.Chichibu
    • Journal Title

      Review of Scientific Instruments

      Volume: 83 Issue: 4 Pages: 0439051-7

    • DOI

      10.1063/1.3701368

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Collateral evidence for an excellent radiative performance of Al_xGa_<1-x>N alloy films of high AlN mole fractions2011

    • Author(s)
      S.F.Chichibu, K.Hazu, T.Onuma, A.Uedono
    • Journal Title

      Applied Physics Letters

      Volume: 99 Issue: 5 Pages: 0519021-3

    • DOI

      10.1063/1.3615681

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Spontaneous polarization and band gap bowing in Y_xAl_yGa_<1-x-y>N alloys lattice-matched to GaN2011

    • Author(s)
      K.Shimada, A.Zenpuku, K.Fujiwara, K.Hazu, S.F.Chichibu, M.Hata, H.Sazawa, T.Takada, T.Sota
    • Journal Title

      Journal of Applied Physics

      Volume: 100 Issue: 7 Pages: 0741141-5

    • DOI

      10.1063/1.3651154

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] ワイドバンドギャップ半導体の新機能出現と時間空間分解分光計測2011

    • Author(s)
      秩父重英, 羽豆耕治
    • Journal Title

      マテリアルインテグレーション(特集)

      Volume: 24 Pages: 273-276

    • Related Report
      2011 Annual Research Report
  • [Journal Article] Helicon-wave-excited- plasma sputtering epitaxy of Nb-doped Ti0-2 films on GaN2011

    • Author(s)
      A.N.Fouda, K.Hazu, T.Nakayama, A.Tanaka, S.F.Chichibu
    • Journal Title

      Physica Status Solidi (c)

      Volume: 8 Pages: 534-536

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Surface stoichiometry and activity control for atomically smooth low dislocation density ZnO and pseudomorphic MgZnO epitaxy on a Zn-polar ZnO substrate by the helicon-wave-excited-plasma sputtering epitaxy method2010

    • Author(s)
      Y. Sawai, H. Hazu, and S. F. Chichibu
    • Journal Title

      Journal of Applied Physics

      Volume: Vol.108,No.6 Pages: 0635411-8

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] Surface stoichiometry and activity control for atomically smooth low dislocation density ZnO and pseudomorphic MgZnO epitaxy on a Zn-polar ZnO substrate by the helicon-wave-excited-plasma sputtering epitaxv method2010

    • Author(s)
      Y.Sawai, H.Hazu, S.F.C hichibu
    • Journal Title

      Journal of Applied Physics

      Volume: 108 Pages: 635411-8

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Crystal Phase-Selective Epitaxy of Rutile and Anatase Nb-doped Ti0_2 Films on a GaN Template by the Helicon-Wave-Excited- Plasma Sputtering Epitaxy Method2010

    • Author(s)
      K.Hazu, A.Fouda, T.Nakayama, A.Tanaka, S.F.Chichibu
    • Journal Title

      Applied Physics Express

      Volume: 3 Pages: 911021-3

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Transparent semi-conducting Nb-doped anatase Ti0_2 films deposited by helicon-wave-excited-plasma sputtering2010

    • Author(s)
      A.Fouda, K.Hazu, M.Haemori, T.Nakayama, A.Tanaka, S.F.Chichibu
    • Journal Title

      Journal of Vacuum Science and Technology B

      Volume: 29 Pages: 110171-6

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Presentation] 反応性ヘリコン波励起プラズマスパッタ法によるZnO系微小光共振器形成の検討2014

    • Author(s)
      古澤健太郎,柿畑研人,小山雅史,秩父重英
    • Organizer
      2014年春季応用物理学会
    • Place of Presentation
      相模原市
    • Year and Date
      2014-03-17
    • Related Report
      2013 Annual Research Report 2013 Final Research Report
  • [Presentation] 水熱合成ZnO ターゲットを用いたZnO薄膜のヘリコン波励起プラズマスパッタエピタキシー(2)2014

    • Author(s)
      古澤健太郎,中沢駿仁,石川陽一,田代公則,秩父重英
    • Organizer
      2014年春季応用物理学会
    • Place of Presentation
      相模原市
    • Year and Date
      2014-03-17
    • Related Report
      2013 Final Research Report
  • [Presentation] Influences of point defects on the emission dynamics of wide bandgap nitride and oxide semiconductors2013

    • Author(s)
      S. F. Chichibu and A. Uedono
    • Organizer
      2013 Japan Society of Applied Physics - Materials Research Society Joint Symposia
    • Place of Presentation
      京都
    • Year and Date
      2013-09-17
    • Related Report
      2013 Final Research Report
    • Invited
  • [Presentation] 単結晶酸化亜鉛薄膜へのN,Pイオン注入と熱処理効果2012

    • Author(s)
      藤本龍吾, 和田凉太, 小池一歩, 佐々誠彦, 矢野満明, 吉田謙一, 長町信治, 羽豆耕治, 秩父重英
    • Organizer
      日本材料学会半導体エレクトロニクス部門委員会
    • Place of Presentation
      京都工芸繊維大学,京都府
    • Year and Date
      2012-03-24
    • Related Report
      2011 Annual Research Report
  • [Presentation] ルチルおよびアナターゼTiO_2/GaNヘテロ界面のX線光電子分光法による価電子帯オフセット評価2012

    • Author(s)
      羽豆耕治, 中山徳行, 田中明和, 秩父重英
    • Organizer
      2012年春季応用物理学会
    • Place of Presentation
      早稲田大学,東京都
    • Year and Date
      2012-03-17
    • Related Report
      2011 Annual Research Report
  • [Presentation] 時空間同時分解カソードルミネッセンス法によるIII族窒化物半導体評価(2)-HVPE成長GaN基板(2)-2012

    • Author(s)
      石川陽一, 羽豆耕治, 田代公則, 松本創, 藤戸健史, 下山謙司, 秩父重英
    • Organizer
      2012年春季応用物理学会
    • Place of Presentation
      早稲田大学,東京都
    • Year and Date
      2012-03-17
    • Related Report
      2011 Annual Research Report
  • [Presentation] 水熱合成ZnOターゲットを用いたZnO薄膜のヘリコン波励起プラズマスパッタエピタキシー2012

    • Author(s)
      張成燻,羽豆耕治,秩父重英
    • Organizer
      2012年春季応用物理学会
    • Place of Presentation
      東京
    • Year and Date
      2012-03-16
    • Related Report
      2013 Final Research Report
  • [Presentation] 水熱合成ZnOターゲットを用いたZnO薄膜のヘリコン波励起プラズマスパッタエピタキシー2012

    • Author(s)
      張成燻, 羽豆耕治, 秩父重英
    • Organizer
      2012年春季応用物理学会
    • Place of Presentation
      早稲田大学,東京都
    • Year and Date
      2012-03-16
    • Related Report
      2011 Annual Research Report
  • [Presentation] 高AlNモル分率AlGaN混晶薄膜の時間分解PL/CL評価2012

    • Author(s)
      秩父重英, 羽豆耕治, 尾沼猛儀, 上殿明良
    • Organizer
      2012年春季応用物理学会
    • Place of Presentation
      早稲田大学,東京都
    • Year and Date
      2012-03-16
    • Related Report
      2011 Annual Research Report
  • [Presentation] Si添加Al_<0.6>Ga_<0.4>N混晶薄膜の時間分解フォトルミネッセンス評価2012

    • Author(s)
      羽豆耕治, 石川陽一, 田代公則, 三宅秀人, 平松和政, 上殿明良, 秩父重英
    • Organizer
      2012年春季応用物理学会
    • Place of Presentation
      早稲田大学,東京都
    • Year and Date
      2012-03-16
    • Related Report
      2011 Annual Research Report
  • [Presentation] フェムト秒パルス電子線発生とワイドギャップ半導体の評価2012

    • Author(s)
      秩父重英,羽豆耕治,石川陽一,古澤健太郎,上殿明良
    • Organizer
      2012年春季応用物理学会シンポジウム
    • Place of Presentation
      東京(依頼講演)
    • Year and Date
      2012-03-15
    • Related Report
      2013 Final Research Report
  • [Presentation] フェムト秒パルス電子線発生とワイドギャップ半導体の評価2012

    • Author(s)
      秩父重英, 羽豆耕治, 石川陽一, 古澤健太郎, 上殿明良
    • Organizer
      2012年春季応用物理学会
    • Place of Presentation
      早稲田大学,東京都(シンポジウム招待)(招待講演)
    • Year and Date
      2012-03-15
    • Related Report
      2011 Annual Research Report
  • [Presentation] フェムト秒パルス電子線を用いた窒化物半導体の時間・空間分解カソードルミネッセンス計測2011

    • Author(s)
      秩父重英
    • Organizer
      多元系機能性材料研究会平成23年度年末講演会
    • Place of Presentation
      愛媛大学,愛媛県
    • Year and Date
      2011-12-10
    • Related Report
      2011 Annual Research Report
  • [Presentation] ウルツ鉱型MgxZn1-xO混晶の弾性テンソル要素C13、C33に関する考察2011

    • Author(s)
      張成燻,羽豆耕治,秩父重英
    • Organizer
      2011年秋季応用物理学会
    • Place of Presentation
      山形
    • Year and Date
      2011-09-01
    • Related Report
      2013 Final Research Report
  • [Presentation] 偏光反射スペクトル解析によるZnO の物性値の同定2011

    • Author(s)
      羽豆耕治,吉海江憲,吉岡宗一郎,高木絢子,鳥井康介,宗田孝之,秩父重英
    • Organizer
      2011年秋季応用物理学会
    • Place of Presentation
      山形
    • Year and Date
      2011-09-01
    • Related Report
      2013 Final Research Report
  • [Presentation] 偏光反射スペクトル解析によるZnOの物性値の同定2011

    • Author(s)
      羽豆耕治, 吉海江憲, 吉岡宗一郎, 高木絢子, 鳥井康介, 宗田孝之, 秩父重英
    • Organizer
      2011年秋季応用物理学会
    • Place of Presentation
      山形大学,山形県
    • Year and Date
      2011-09-01
    • Related Report
      2011 Annual Research Report
  • [Presentation] ウルツ鉱型Mg_xZn_<1-x>O混晶の弾性テンソル要素C_<13>、C_<33>に関する考察2011

    • Author(s)
      張成燻, 羽豆耕治, 秩父重英
    • Organizer
      2011年秋季応用物理学会
    • Place of Presentation
      山形大学,山形県
    • Year and Date
      2011-09-01
    • Related Report
      2011 Annual Research Report
  • [Presentation] AlNエピタキシャル薄膜の発光寿命と点欠陥他の関係について2011

    • Author(s)
      秩父重英, 羽豆耕治, 尾沼猛儀, 上殿明良
    • Organizer
      2011年秋季応用物理学会
    • Place of Presentation
      山形大学,山形県
    • Year and Date
      2011-08-31
    • Related Report
      2011 Annual Research Report
  • [Presentation] ヘリコン波励起プラズマスパッタ法によるNb添加TiO_2薄膜の堆積(4)2011

    • Author(s)
      羽豆耕治, 南風盛将光, 中山徳行, 田中明和, 秩父重英
    • Organizer
      2011年秋季応用物理学会
    • Place of Presentation
      山形大学,山形県
    • Year and Date
      2011-08-31
    • Related Report
      2011 Annual Research Report
  • [Presentation] ヘリコン波励起プラズマスパッタエピタキシーによるc面GaN上へのルチル/アナターゼTiO_2:Nb薄膜の結晶相選択成長(2)2011

    • Author(s)
      羽豆耕治, 中山徳行, 田中明和, 秩父重英
    • Organizer
      2011年秋季応用物理学会
    • Place of Presentation
      山形大学,山形県
    • Year and Date
      2011-08-31
    • Related Report
      2011 Annual Research Report
  • [Presentation] GaNと格子整合するY_xAl_yGa_<1-x-y>Nの自発分極とバンドギャップボーイングの第一原理計算2011

    • Author(s)
      島田和宏, 羽豆耕治, 秩父重英, 秦雅彦, 高田朋幸, 佐沢洋幸, 宗田孝之
    • Organizer
      2011年秋季応用物理学会
    • Place of Presentation
      山形大学,山形県
    • Year and Date
      2011-08-30
    • Related Report
      2011 Annual Research Report
  • [Presentation] Time-resolved photoluminescence and time-resolved cathodoluminescence studies on AlN and high AlN mole fraction AlGaN alloys2011

    • Author(s)
      S.F.Chichibu, T.Onuma, K.Hazu, T.Sota, A.Uedono
    • Organizer
      The 9th International Conference on Nitride Semiconductors (ICNS-9)
    • Place of Presentation
      Glasgow, UK
    • Year and Date
      2011-07-12
    • Related Report
      2011 Annual Research Report
  • [Presentation] Time-resolved photoluminescence and time-resolved cathodoluminescence studies on AlN and high AlN mole fraction AlGaN alloys2011

    • Author(s)
      S.F.Chichibu, T.Onuma, K.Hazu, T.Sota, A.Uedono
    • Organizer
      European Materials Research Society, 2011 Spring Meeting
    • Place of Presentation
      Nice, France(招待)(招待講演)
    • Year and Date
      2011-05-11
    • Related Report
      2011 Annual Research Report
  • [Presentation] ヘリコン波励起プラズマスパッタ法によるNb添加TiO_2薄膜の堆積(3)2011

    • Author(s)
      羽豆耕治, フォウダアリィ, 南風盛将光, 中山徳行, 田中明和, 秩父重英
    • Organizer
      2011年春季第58回応用物理学関係連合講演会
    • Place of Presentation
      神奈川県厚木市
    • Year and Date
      2011-03-27
    • Related Report
      2010 Annual Research Report
  • [Presentation] ヘリコン波励起プラズマスパッタエピタキシーによるC面GaN上へのルチル/アナターゼTio_2:Nb薄膜の結晶相選択成長2011

    • Author(s)
      羽豆耕治, フォウダアリィ, 中山徳行, 田中明和, 秩父重英
    • Organizer
      2011年春季第58回応用物理学関係連合講演会
    • Place of Presentation
      神奈川県厚柿
    • Year and Date
      2011-03-27
    • Related Report
      2010 Annual Research Report
  • [Presentation] ウルツ鉱型Mg_xZnl-_x0混晶の弾性テンソル要素に関する考察2011

    • Author(s)
      張成燻, 羽豆耕治, 秩父重英
    • Organizer
      2011年春季第58回応用物理学関係連合講演会
    • Place of Presentation
      神奈川県厚木市
    • Year and Date
      2011-03-26
    • Related Report
      2010 Annual Research Report
  • [Presentation] m面ZnO基板の偏光反射スペクトルの解析2011

    • Author(s)
      羽豆耕治, 吉海江憲, 吉岡宗一郎, 高木絢子, 鳥井康介, 宗田孝之秩父重英
    • Organizer
      2011年春季第58回応用物理学関係連合講演会
    • Place of Presentation
      神奈川県厚木市
    • Year and Date
      2011-03-26
    • Related Report
      2010 Annual Research Report
  • [Presentation] Helicon-Wave-Excited-Plasma Sputtering Epitaxy of Nb-doped TiO_2 films on GaN2010

    • Author(s)
      S.F.Chichibu, A.N.Fouda T.Nakayama, A.Tanaka, K.Hazu
    • Organizer
      The 37th International Symposium on Compound Semiconductors
    • Place of Presentation
      Kagawa,Japan
    • Year and Date
      2010-06-02
    • Related Report
      2010 Annual Research Report
  • [Presentation] Deposition of Anatase Nb-doped Ti0_2 Thin Films on Glass Substrates by Helicon-Wave-Excited-Plasma Sputtering method2010

    • Author(s)
      A.N.Fouda, K.Hazu, T.Nakayama, A.Tanaka, S.F.Chichibu
    • Organizer
      The 37th International Symposium on Compound Semiconductors
    • Place of Presentation
      Kagawa,Japan
    • Year and Date
      2010-05-31
    • Related Report
      2010 Annual Research Report
  • [Presentation] Effects of Si-doping on the recombination dynamics of excitons in AlGaN alloys studied by time-resolved cathodoluminescence

    • Author(s)
      S. F. Chichibu, H. Miyake, Y. Ishikawa, M. Tashiro, T. Ohtomo, K. Hazu, K. Furusawa, K. Hiramatsu, A. Uedono
    • Organizer
      European Materials Research Society, 2013 Spring Meeting, Session L: Group III nitrides
    • Place of Presentation
      Strasbourg, France
    • Related Report
      2013 Annual Research Report
    • Invited
  • [Presentation] Influences of point defects on the emission dynamics of wide bandgap nitride and oxide semiconductors

    • Author(s)
      S. F. Chichibu and A. Uedono
    • Organizer
      2013 Japan Society of Applied Physics - Materials Research Society Joint Symposia
    • Place of Presentation
      Kyoto, Japan
    • Related Report
      2013 Annual Research Report
    • Invited
  • [Presentation] Effects of Si-doping on the near-band-edge emission dynamics of Al0.6Ga0.4N epilayers grown on AlN templates by metalorganic vapor phase epitaxy

    • Author(s)
      S. F. Chichibu, H. Miyake, K. Hazu, Y. Ishikawa, M. Tashiro, T. Ohtomo, K. Furusawa, K. Hiramatsu, A. Uedono
    • Organizer
      The IUMRS International Conference in Asia 2013 (IUMRS-ICA-2013)
    • Place of Presentation
      Bangalore, India
    • Related Report
      2013 Annual Research Report
    • Invited
  • [Presentation] Spatio-time-resolved cathodoluminescence studies on local exciton dynamics of a freestanding GaN substrate grown by hydride vapor phase epitaxy

    • Author(s)
      K. Furusawa, Y. Ishikawa, M. Tashiro, K. Hazu, S. Nagao, H. Ikeda, K. Fujito, and S. F. Chichibu
    • Organizer
      The 40th International Symposium on Compound Semiconductors (ISCS 2013)
    • Place of Presentation
      Kobe, Japan
    • Related Report
      2013 Annual Research Report
  • [Presentation] Spatio-time-resolved cathodoluminescence studies on AlN epitaxial films grown on low dislocation density bulk AlN substrates prepared by the physical vapor transport method

    • Author(s)
      S. F. Chichibu, Y. Ishikawa, M. Tashiro, K. Furusawa, K. Hazu, S. Mita, J. Xie, R. Collazo, Z. Sitar
    • Organizer
      The 10th International Conference on Nitride Semiconductors (ICNS-10)
    • Place of Presentation
      Washington, DC,USA
    • Related Report
      2013 Annual Research Report
  • [Presentation] Local emission dynamics in and around the sub-surface basal-plane stacking faults in GaN studied by the spatio-time-resolved cathodoluminescence method using a front-excitation photoelectron gun

    • Author(s)
      K. Furusawa, Y. Ishikawa, M. Tashiro, K. Hazu, S. Nagao, H. Ikeda, K. Fujito, and S. F. Chichibu
    • Organizer
      The 10th International Conference on Nitride Semiconductors (ICNS-10)
    • Place of Presentation
      Washington, DC,USA
    • Related Report
      2013 Annual Research Report
  • [Presentation] Transport and emission properties of Nb-doped n++-type (001) anatase-TiO2 / Mg-doped p-type (0001) GaN heteroepitaxial structures

    • Author(s)
      M. Yamagishi, K. Hazu, T. Ohtomo, Y. Ishikawa, K. Furusawa, T. Nakayama, and S. F. Chichibu
    • Organizer
      The 10th International Conference on Nitride Semiconductors (ICNS-10)
    • Place of Presentation
      Washington, DC,USA
    • Related Report
      2013 Annual Research Report
  • [Presentation] Local carrier dynamics in and around the sub-surface stacking faults in GaN studied using spatio-time-resolved cathodoluminescence equipped with a front-excitation configuration femtosecond pulsed photoelectron gun

    • Author(s)
      K. Furusawa, Y. Ishikawa, M. Tashiro, K. Hazu, S. Nagao, H. Ikeda, K. Fujito, and S. F. Chichibu
    • Organizer
      2013 Japan Society of Applied Physics - Materials Research Society Joint Symposia
    • Place of Presentation
      Kyoto, Japan
    • Related Report
      2013 Annual Research Report
  • [Presentation] 「ワイドバンドギャップ窒化物・酸化物半導体の発光寿命と点欠陥の関係」

    • Author(s)
      秩父重英,上殿明良
    • Organizer
      ワイドギャップ半導体光・電子デバイス162委員会 10月定期研究会
    • Place of Presentation
      名城大学
    • Related Report
      2013 Annual Research Report
    • Invited
  • [Presentation] 気相成長AlN基板上AlNエピタキシャル層の時間空間分解カソードルミネッセンス計測

    • Author(s)
      秩父重英,石川陽一,田代公則,古澤健太郎,羽豆耕治,J.Xie,三田清二,R.Collazo,Z.Sitar
    • Organizer
      2013年秋季応用物理学会
    • Place of Presentation
      同志社大学
    • Related Report
      2013 Annual Research Report
  • [Presentation] 時間空間分解カソードルミネッセンス法による単一積層欠陥回りでの発光ダイナミクス解析

    • Author(s)
      古澤健太郎,石川陽一,田代公則,羽豆耕治,長尾哲,池田宏隆,藤戸健史,秩父重英
    • Organizer
      2013年秋季応用物理学会
    • Place of Presentation
      同志社大学
    • Related Report
      2013 Annual Research Report
  • [Presentation] 水熱合成ZnOターゲットを用いたZnO薄膜のヘリコン波励起プラズマスパッタエピタキシー(2)

    • Author(s)
      古澤健太郎,中沢駿仁,石川陽一,田代公則,秩父重英
    • Organizer
      2014年春季応用物理学会
    • Place of Presentation
      相模原市
    • Related Report
      2013 Annual Research Report
  • [Presentation] AlNテンプレート上Si添加高AlNモル分率AlxGa1-xN多重量子井戸の時間空間分解陰極線蛍光分光評価

    • Author(s)
      秩父重英,石川陽一,古澤健太郎,田代公則,大友友美,三宅秀人,平松和政
    • Organizer
      2014年春季応用物理学会
    • Place of Presentation
      相模原市
    • Related Report
      2013 Annual Research Report
  • [Presentation] Time-resolved luminescence studies on AlN and high AlN mole fraction AlGaN alloys

    • Author(s)
      S. F. Chichibu and A. Uedono
    • Organizer
      The Fourth International Symposium on Growth of III-Nitrides (ISGN-4)
    • Place of Presentation
      St. Petersburg, Russia
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Presentation] Spatio-time-resolved cathodoluminescence studies on freestanding GaN substrates grown by hydride vapor phase epitaxy

    • Author(s)
      S. F. Chichibu, Y. Ishikawa, K. Hazu, M. Tashiro, K. Furusawa, H. Namita, S. Nagao, K. Fujito, and A. Uedono
    • Organizer
      Pacific Rim Meeting on Electrochemical and Solid-State Science (PRiME 2012), ECS222nd
    • Place of Presentation
      Hawaii, USA
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Presentation] III-V族窒化物半導体の欠陥評価最前線

    • Author(s)
      秩父重英,上殿明良
    • Organizer
      応用物理学会 シリコンテクノロジー分科会 第148回研究集会
    • Place of Presentation
      グランキューブ大阪(大阪国際会議場)
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Presentation] Band alignments and lateral transport properties of Nb-doped (100) rutile- and (001) anatase-TiO2 / (0001) GaN heteroepitaxial structures

    • Author(s)
      K. Hazu, T. Ohtomo, T. Nakayama, A. Tanaka, and S. F. Chichibu
    • Organizer
      International Workshop on Nitride Semiconductors 2012 (IWN2012)
    • Place of Presentation
      Sapporo, Japan
    • Related Report
      2012 Annual Research Report
  • [Presentation] GaNと格子整合するScxAlyGa1-x-yNの自発分極と電子構造の第一原理計算

    • Author(s)
      島田和宏,秩父重英,秦雅彦,高田朋幸,佐沢洋幸,宗田孝之
    • Organizer
      2012年秋季応用物理学会
    • Place of Presentation
      愛媛大学,愛媛県
    • Related Report
      2012 Annual Research Report
  • [Presentation] ZnO単結晶基板上AlInGaN薄膜の屈折率分散の測定

    • Author(s)
      羽豆耕治,加賀谷宗仁,秩父重英
    • Organizer
      2012年秋季応用物理学会
    • Place of Presentation
      愛媛大学,愛媛県
    • Related Report
      2012 Annual Research Report
  • [Presentation] Spatio-time-resolved cathodoluminescence study using a femtosecond focused electron beam on freestanding GaN substrates grown by hydride vapor phase epitaxy

    • Author(s)
      S. F. Chichibu, Y. Ishikawa, M. Tashiro, K. Hazu, K. Furusawa, S. Nagao, K. Fujito, and A. Uedono
    • Organizer
      The 39th International Symposium on Compound Semiconductors (ISCS 2012)
    • Place of Presentation
      Santa Barbara, CA, USA
    • Related Report
      2012 Annual Research Report
  • [Presentation] Local carrier dynamics in freestanding GaN substrates grown by hydride vapor phase epitaxy studied using the spatio-time-resolved cathodoluminescence technique

    • Author(s)
      K. Furusawa, Y. Ishikawa, M. Tashiro, K. Hazu, S. Nagao, K. Fujito, A. Uedono, and S. F. Chichibu
    • Organizer
      International Workshop on Nitride Semiconductors 2012 (IWN2012)
    • Place of Presentation
      Sapporo, Japan
    • Related Report
      2012 Annual Research Report
  • [Presentation] Impacts of point defects on the photoluminescence lifetime of Si-doped Al0.6Ga0.4N epilayers grown on an AlN template

    • Author(s)
      S. F. Chichibu, K. Hazu, Y. Ishikawa, M. Tashiro, H. Miyake, K. Hiramatsu, and A. Uedono
    • Organizer
      International Workshop on Nitride Semiconductors 2012 (IWN2012)
    • Place of Presentation
      Sapporo, Japan
    • Related Report
      2012 Annual Research Report
  • [Presentation] 表面入射型パルス光電子銃を搭載した時間空間分解カソードルミネッセンス装置によるワイドバンドギャップ半導体の評価

    • Author(s)
      古澤健太郎,石川陽一,田代公則,羽豆耕治,秩父重英
    • Organizer
      2012年秋季応用物理学会
    • Place of Presentation
      愛媛大学,愛媛県
    • Related Report
      2012 Annual Research Report
  • [Presentation] m面GaN基板上にNH3-MBE成長したAl0.25Ga0.75Nの時間空間分解CL評価-GaN基板のチルトモゼイクが発光特性に及ぼす影響-

    • Author(s)
      秩父重英,羽豆耕治,石川陽一,田代公則,古澤健太郎,長尾哲,藤戸健史
    • Organizer
      2012年秋季応用物理学会
    • Place of Presentation
      愛媛大学,愛媛県
    • Related Report
      2012 Annual Research Report
  • [Presentation] 高輝度表面入射型パルス電子銃を搭載した時間空間分解カソードルミネッセンス装置によるHVPE成長GaN基板の評価

    • Author(s)
      石川陽一,古澤健太郎,田代公則,羽豆耕治,長尾哲,池田宏隆,藤戸健史,秩父重英
    • Organizer
      2013年春季応用物理学会
    • Place of Presentation
      神奈川工大,神奈川県
    • Related Report
      2012 Annual Research Report
  • [Remarks]

    • URL

      http://www.tagen.tohoku.ac.jp/labo/chichibu/index-j.html

    • Related Report
      2013 Final Research Report
  • [Remarks]

    • URL

      http://www.tagen.tohoku.ac.jp/labo/chichibu/index-j.html

    • Related Report
      2010 Annual Research Report

URL: 

Published: 2010-08-23   Modified: 2019-07-29  

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