Development of new high power deep UV light emitting device
Project/Area Number |
22246051
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Research Category |
Grant-in-Aid for Scientific Research (A)
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Allocation Type | Single-year Grants |
Section | 一般 |
Research Field |
Electron device/Electronic equipment
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Research Institution | Ritsumeikan University |
Principal Investigator |
AOYAGI Yoshinobu 立命館大学, 立命館グローバル・イノベーション研究機構, 特別招聘教授 (70087469)
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Co-Investigator(Kenkyū-buntansha) |
TAKEUCHI Misaichi 立命館大学, 立命館グローバル, 准教授 (60284585)
KUROUCHI Masahito 立命館大学, 立命館グローバル・イノベーション研究機構, ポストドクトラルフェロー (10452187)
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Research Collaborator |
KUROSE Noriko PIリサーチ, 主任研究員
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Project Period (FY) |
2010 – 2012
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Project Status |
Completed (Fiscal Year 2012)
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Budget Amount *help |
¥49,660,000 (Direct Cost: ¥38,200,000、Indirect Cost: ¥11,460,000)
Fiscal Year 2012: ¥6,240,000 (Direct Cost: ¥4,800,000、Indirect Cost: ¥1,440,000)
Fiscal Year 2011: ¥9,750,000 (Direct Cost: ¥7,500,000、Indirect Cost: ¥2,250,000)
Fiscal Year 2010: ¥33,670,000 (Direct Cost: ¥25,900,000、Indirect Cost: ¥7,770,000)
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Keywords | 深紫外光 / マイクロプラズマ / AlGaN / MIPE / 深紫外発光素子 / 水浄化 / 医療応用 / 高出力 / 高品質GaAlN結晶 / 2光速同時その場観測法 / スパッタ装置 / 水銀灯 / 高効率 / 水殺菌 |
Research Abstract |
A dynamically-controlled micro-plasma-excited (MIPE) aluminum gallium nitride deepultraviolet (DUV) light-emitting device is demonstrated. This device provides high-powerDUV emission at any desired wavelength, and allows enlargement of emission areas likeplasma display panels for easy, low-cost fabrication. Neither p-n junctions nor electrodecontacts are required for device fabrication. We fabricated 2-inch diameter wafer-sizeMIPE emitters of DUV light at specific wavelengths from AlGaN quantum wells with 50 mWaverage output power. We can also fabricate 6-inch diameter DUV emitters using sapphirewafers and 1 m×5 m panel-type DUV emitters.
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Report
(4 results)
Research Products
(49 results)
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[Journal Article]2012
Author(s)
Y. Aoyagi, M. Takeuchi, K. Yoshida, M. Kurouchi, Y. Nanishi, H. Sugano, Y. Ahiko,H. Nakamura
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Journal Title
Journal of Environmental Protection
Volume: 137
Pages: 1215-1218
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Peer Reviewed
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[Patent(Industrial Property Rights)] オゾン濃度測定装置2011
Inventor(s)
吉田薫, 武内道一, 青柳克信, 菅野裕靖, 阿彦由美, 菅野勝靖, 中村広隆
Industrial Property Rights Holder
吉田薫, 武内道一, 青柳克信, 菅野裕靖, 阿彦由美, 菅野勝靖, 中村広隆
Industrial Property Number
2011-038925
Filing Date
2011-02-24
Related Report
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