Fabrication of nano-porous materials by laser-enhanced mesoplasma CVD
| Project/Area Number |
22246082
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| Research Category |
Grant-in-Aid for Scientific Research (A)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Inorganic materials/Physical properties
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| Research Institution | Tohoku University |
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Principal Investigator |
GOTO Takashi 東北大学, 金属材料研究所, 教授 (60125549)
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| Co-Investigator(Kenkyū-buntansha) |
TU Rong 東北大学, 金属材料研究所, 准教授 (80396506)
ITO Akihiko 東北大学, 金属材料研究所, 助教 (20451635)
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| Co-Investigator(Renkei-kenkyūsha) |
KIMURA Teiichi (財)日本ファインセラミックスセンター, 材料技術研究所, 副主任研究員 (10333882)
HOTTA Mikinori 大阪大学, 接合科学研究所, 特任研究員 (30431604)
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| Project Period (FY) |
2010 – 2012
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| Project Status |
Completed (Fiscal Year 2012)
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| Budget Amount *help |
¥38,610,000 (Direct Cost: ¥29,700,000、Indirect Cost: ¥8,910,000)
Fiscal Year 2012: ¥5,460,000 (Direct Cost: ¥4,200,000、Indirect Cost: ¥1,260,000)
Fiscal Year 2011: ¥4,030,000 (Direct Cost: ¥3,100,000、Indirect Cost: ¥930,000)
Fiscal Year 2010: ¥29,120,000 (Direct Cost: ¥22,400,000、Indirect Cost: ¥6,720,000)
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| Keywords | 機能性セラミックス / メソプラズマ / 化学気相析出 / ナノポーラス / コーティング |
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| Research Abstract |
A novel chemical vapor deposition (CVD) process that combines laser, microwave and electron cyclotron resonance has been developed to enhance coating process for low-temperature and high-speed coatings.
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Report
(4 results)
Research Products
(124 results)
