Fabrication of nano-porous materials by laser-enhanced mesoplasma CVD

• Project/Area Number: 22246082
• Research Category: Grant-in-Aid for Scientific Research (A)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Inorganic materials/Physical properties
• Research Institution: Tohoku University
• Principal Investigator: GOTO Takashi 東北大学, 金属材料研究所, 教授 (60125549)
• Co-Investigator(Kenkyū-buntansha): TU Rong 東北大学, 金属材料研究所, 准教授 (80396506) ; ITO Akihiko 東北大学, 金属材料研究所, 助教 (20451635)
• Co-Investigator(Renkei-kenkyūsha): KIMURA Teiichi (財)日本ファインセラミックスセンター, 材料技術研究所, 副主任研究員 (10333882) ; HOTTA Mikinori 大阪大学, 接合科学研究所, 特任研究員 (30431604)
• Project Period (FY): 2010 – 2012
• Project Status: Completed (Fiscal Year 2012)
• Budget Amount: ¥38,610,000 (Direct Cost: ¥29,700,000、Indirect Cost: ¥8,910,000); Fiscal Year 2012: ¥5,460,000 (Direct Cost: ¥4,200,000、Indirect Cost: ¥1,260,000); Fiscal Year 2011: ¥4,030,000 (Direct Cost: ¥3,100,000、Indirect Cost: ¥930,000); Fiscal Year 2010: ¥29,120,000 (Direct Cost: ¥22,400,000、Indirect Cost: ¥6,720,000)
• Keywords: 機能性セラミックス / メソプラズマ / 化学気相析出 / ナノポーラス / コーティング

Research Abstract

A novel chemical vapor deposition (CVD) process that combines laser, microwave and electron cyclotron resonance has been developed to enhance coating process for low-temperature and high-speed coatings.

Research Products

• [Journal Article] Rapid deposition of YBCO films by laser CVD and effect of lattice mismatch on their epitaxial growth and critical temperature (2013)
  • Author(s): P. Zhao, A. Ito, T. Goto
  • Journal Title: Ceramics International Volume: Volume39(Issue7, September 2013) Issue: 7 Pages: 7491-7497
  • DOI: 10.1016/j.ceramint.2013.02.098
  • Peer Reviewed
• [Journal Article] Growth and microstructure of Ba β-alumina films by laser chemical vapor deposition (2013)
  • Author(s): A. Ito, Y. You, H. Katsui, T. Goto
  • Journal Title: Journal of the European Ceramic Society Volume: 掲載決定 Issue: 13-14 Pages: 2566-2661
  • DOI: 10.1016/j.jeurceramsoc.2013.04.003
  • Peer Reviewed
• [Journal Article] Highly (001)-oriented α-Al_2O_3 filmsprepared by laser chemical vapor deposition (2013)
  • Author(s): Y. You, A. Ito, T. Goto
  • Journal Title: Materials Letters Volume: 106 Pages: 11-13
  • DOI: 10.1016/j.matlet.2013.04.113
  • Peer Reviewed
• [Journal Article] High-speed growth of YBa2Cu3O7-δ superconducting films on multilayer-coated Hastelloy C276 tape by laser-assisted MOCVD (2013)
  • Author(s): P. Zhao, A. Ito, T. Kato, D. Yokoe, T. Hirayama, T. Goto
  • Journal Title: Superconductor Science and Technology Volume: 26 Issue: 5 Pages: 55020-55020
  • DOI: 10.1088/0953-2048/26/5/055020
  • Peer Reviewed
• [Journal Article] Preparation of the c-axis oriented AlN film by laser chemical vapor deposition using a newly proposed Al(acac)_3 precursor (2013)
  • Author(s): Y. You, A. Ito, R. Tu, T. Goto
  • Journal Title: Journal of Crystal Growth Volume: 365 Pages: 1-5
  • DOI: 10.1016/j.jcrysgro.2012.12.034
  • Peer Reviewed
• [Journal Article] Highly (001)-oriented α-Al2O3 films prepared by laser chemical vapor deposition (2013)
  • Author(s): Y. You, A. Ito, T. Goto
  • Journal Title: Materials Letters Volume: accepted
  • Peer Reviewed
• [Journal Article] High-speed Epitaxial Growth of BaTi_2O_5Thick Films and Their In-plane Orientations (2012)
  • Author(s): D.Y. Guo, A. Ito, R. Tu, T. Goto
  • Journal Title: Applied Surface Science Volume: 259 Pages: 178-185
  • DOI: 10.1016/j.apsusc.2012.07.016
  • Peer Reviewed
• [Journal Article] Preparation of (020)-oriented BaTi_2O_5 thick films and their dielectric responses (2012)
  • Author(s): A. Ito, D.Y. Guo, R. Tu, T. Goto
  • Journal Title: Journal of the European Ceramic Society Volume: 32(10) Issue: 10 Pages: 2459-2467
  • DOI: 10.1016/j.jeurceramsoc.2012.02.022
  • Peer Reviewed
• [Journal Article] Microstructure and hardness of SiC-TiC nanocomposite thin films prepared by radiofrequency magnetron sputtering (2012)
  • Author(s): G. Osugi, A. Ito, M. Hotta, T. Goto
  • Journal Title: Thin Solid Films Volume: 520(18) Issue: 18 Pages: 5851-5855
  • DOI: 10.1016/j.tsf.2012.05.021
  • Peer Reviewed
• [Journal Article] Effect of Precursor Supply on (100) and (001) Orientations of α-Al_2O_3 Film Prepared by Laser CVD (2012)
  • Author(s): K. Hokuto, A. Ito, T. Kimura, T. Goto
  • Journal Title: Key Engineering Materials Volume: 508 Pages: 3-6
  • DOI: 10.4028/www.scientific.net/kem.508.3
  • Peer Reviewed
• [Journal Article] Growth of b-axis-oriented BaTi_2O_5Nanopillars by Laser Chemical VaporDeposition (2012)
  • Author(s): D.Y. Guo, A. Ito, R. Tu, T. Goto
  • Journal Title: Key Engineering Materials Volume: 508 Pages: 185-188
  • DOI: 10.4028/www.scientific.net/kem.508.185
  • Peer Reviewed
• [Journal Article] Ba_2TiO_4 and Ba_4Ti_<13>O_<30> Thick Films Prepared by Laser Chemical Vapor Deposition and Their Microstructure (2012)
  • Author(s): D.Y. Guo, A. Ito, R. Tu, T. Goto
  • Journal Title: Key Engineering Materials Volume: 508 Pages: 199-202
  • DOI: 10.4028/www.scientific.net/kem.508.199
  • Peer Reviewed
• [Journal Article] Preparation of c-axis-oriented Y_2Ba_4Cu_7O_<15-δ> Films by Laser CVD with Ultrasonically Nebulized Precursor (2012)
  • Author(s): A. Ito, M. Sato, T. Goto
  • Journal Title: Key Engineering Materials Volume: 508 Pages: 207-210
  • DOI: 10.4028/www.scientific.net/kem.508.207
  • Peer Reviewed
• [Journal Article] Preparation of Titania Solid Films by Laser CVD using CO_2 Laser (2012)
  • Author(s): M. Gao, A. Ito, R. Tu, T. Goto
  • Journal Title: Key Engineering Materials Volume: 508 Pages: 279-282
  • DOI: 10.4028/www.scientific.net/kem.508.279
  • Peer Reviewed
• [Journal Article] Microcolumnar and Granular Structures of TiO_2 Films Prepared by Laser CVD using Nd:YAG Laser (2012)
  • Author(s): M. Gao, A. Ito, R. Tu, T. Goto
  • Journal Title: Key Engineering Materials Volume: 508 Pages: 287-290
  • DOI: 10.4028/www.scientific.net/kem.508.287
  • Peer Reviewed
• [Journal Article] Rh-nanoparticle-dispersed ZrO_2 films prepared by laser chemical vapor deposition (2012)
  • Author(s): A. Honda, T. Kimura, A. Ito, T. Goto
  • Journal Title: Surface and Coatings Technology Volume: 206(11-12) Issue: 11-12 Pages: 3006-3010
  • DOI: 10.1016/j.surfcoat.2011.12.038
  • Peer Reviewed
• [Journal Article] Preparation of LaRuO_3 Films by Microwave Plasma-enhanced Chemical Vapor Deposition (2012)
  • Author(s): M. Kimura, A. Ito, T. Kimura, T. Goto
  • Journal Title: Thin Solid Films Volume: 520(6) Issue: 6 Pages: 1847-1850
  • DOI: 10.1016/j.tsf.2011.09.007
  • Peer Reviewed
• [Journal Article] Preparation of Ba-Ti-O films by Laser Chemical Vapor Deposition (2012)
  • Author(s): A. Ito, D.Y. Guo, R. Tu, T. Goto
  • Journal Title: Materials Chemistry and Physics Volume: 133(1) Issue: 1 Pages: 398-404
  • DOI: 10.1016/j.matchemphys.2012.01.048
  • Peer Reviewed
• [Journal Article] 傾斜機能材料の経緯と超電導テープへの応用 (2012)
  • Author(s): 後藤 孝・伊藤暁彦
  • Journal Title: セラミックス Volume: 47 Pages: 894-898
  • Peer Reviewed
• [Journal Article] High-Speed Epitaxial Growth of β-SiC Film on Si(111) Single Crystal by Laser Chemical Vapor Deposition (2012)
  • Author(s): Song Zhang, Rong Tu,Takashi Goto
  • Journal Title: Journal of the American Ceramic Society Volume: 95 Issue: 9 Pages: 2782-2784
  • DOI: 10.1111/j.1551-2916.2012.05354.x
  • Peer Reviewed
• [Journal Article] Eggshell- and Fur-like Microstructures of Yttria Silicate Film Prepared by Laser Chemical Vapor Deposition (2012)
  • Author(s): A.Ito, J.Endo, T.Kimura, T.Goto
  • Journal Title: Materials Chemistry and Physics Volume: 125 Pages: 242-246
  • Peer Reviewed
• [Journal Article] Dome-like and dense SiC-SiO_2 nanocomposite films synthesized by laser chemical vapor deposition using CO_2 laser (2012)
  • Author(s): S.Yu, A.Ito, R.Tu, T.Goto
  • Journal Title: Surface and Coatings Technology Volume: 205 Pages: 2818-2822
  • Peer Reviewed
• [Journal Article] High-speed growth of YBa_2Cu_3O_<7-δ> film with high critical temperature on MgO single crystal substrate by laser chemical vapor deposition (2012)
  • Author(s): P.Zhao, A.Ito, R.Tu, T.Goto
  • Journal Title: Superconductor Science and Technology Volume: 23 Pages: 125010-125010
  • Peer Reviewed
• [Journal Article] Fast epitaxial growth of α-axis- and c-axis-oriented YBa_2Cu_3O_<7-δ> films on (100) LaAlO_3 substrate by laser chemical vapor deposition (2012)
  • Author(s): P.Zhao, A.Ito, R.Tu, T.Goto
  • Journal Title: Applied Surface Science Volume: 257 Pages: 4317-4320
  • Peer Reviewed
• [Journal Article] (006)-oriented α-Al_2O_3 films prepared in CO2-H2 atmosphere by laser chemical vapor deposition using a diode laser (2011)
  • Author(s): Y. You, A. Ito, R. Tu, T. Goto
  • Journal Title: Materials Science and Engineering B Volume: 176(13) Issue: 13 Pages: 984-989
  • DOI: 10.1016/j.mseb.2011.05.030
  • Peer Reviewed
• [Journal Article] Deposition of .ALPHA.-Al2O3 films on Ti(C, N)-based cermet substrate by laser chemical vapor deposition using a diode laser (2011)
  • Author(s): Y. You, A. Ito, R. Tu, T. Goto
  • Journal Title: Journal of the Ceramic Society of Japan Volume: 119 Issue: 1391 Pages: 570-572
  • DOI: 10.2109/jcersj2.119.570
  • NAID: 130000784431
  • ISSN: 1348-6535, 1882-0743
  • Peer Reviewed
• [Journal Article] Preparation of α-Al_2O_3/TiN multilayer coating on Ti(C,N)-based cermet by laser CVD (2011)
  • Author(s): Y. You, A. Ito, R. Tu, T. Goto
  • Journal Title: Key Engineering Materials Volume: 484 Pages: 188-191
  • DOI: 10.4028/www.scientific.net/kem.484.188
  • Peer Reviewed
• [Journal Article] Effect of NH_3 atmosphere on preparation of Al_2O_3-AlN composite film by laser CVD (2011)
  • Author(s): Y. You, A. Ito, R. Tu, T. Goto
  • Journal Title: Key Engineering Materials Volume: 484 Pages: 172-176
  • DOI: 10.4028/www.scientific.net/kem.484.172
  • Peer Reviewed
• [Journal Article] Ternary Phase Relation on Preparation of YBa_2Cu_3O_<7-δ> Films by Laser CVD (2011)
  • Author(s): P.Zhao, A.Ito, R.Tu, T.Goto
  • Journal Title: Key Engineering Materials Volume: 484 Pages: 183-187
  • DOI: 10.4028/www.scientific.net/kem.484.183
  • Peer Reviewed
• [Journal Article] High-speed epitaxial growth of(100)-oriented CeO_2 film on r-cut sapphire by laser chemical vapor deposition (2011)
  • Author(s): P. Zhao, A. Ito, R. Tu, T. Goto
  • Journal Title: Surface and Coatings Technology Volume: 205(16) Issue: 16 Pages: 4079-4082
  • DOI: 10.1016/j.surfcoat.2011.02.062
  • Peer Reviewed
• [Journal Article] Laser chemical vapor deposition of TiN film on Ti(C,N)-based cermet substrate using Ti(OiPr)2(dpm)2-NH3 system (2011)
  • Author(s): Y. You, A. Ito, R. Tu, T. Goto
  • Journal Title: Journal of the Ceramic Society of Japan Volume: 119 Issue: 1388 Pages: 310-313
  • DOI: 10.2109/jcersj2.119.310
  • NAID: 130000662363
  • ISSN: 1348-6535, 1882-0743
  • Peer Reviewed
• [Journal Article] Fast epitaxial growth of a-axis- andc-axis-oriented YBa_2Cu_3O_<7-δ> films on (100) LaAlO_3 substrate by laser chemical vapor deposition (2011)
  • Author(s): P. Zhao, A. Ito, R. Tu, T. Goto
  • Journal Title: 4317-4320 Volume: 257(9) Issue: 9 Pages: 4317-4320
  • DOI: 10.1016/j.apsusc.2010.12.047
  • Peer Reviewed
• [Journal Article] Dome-like and dense SiC-SiO_2 nanocomposite films synthesized by laser chemical vapor deposition using CO_2 laser (2011)
  • Author(s): S. Yu, A. Ito, R. Tu, T. Goto
  • Journal Title: Surface and Coatings Technology Volume: 205(8-9) Issue: 8-9 Pages: 2818-2822
  • DOI: 10.1016/j.surfcoat.2010.10.050
  • Peer Reviewed
• [Journal Article] Eggshell- and Fur-like Microstructures of Yttria Silicate Film Prepared by Laser Chemical Vapor Deposition (2011)
  • Author(s): A. Ito, J. Endo, T. Kimura, T. Goto
  • Journal Title: Materials Chemistry and Physics Volume: 125(1-2) Issue: 1-2 Pages: 242-246
  • DOI: 10.1016/j.matchemphys.2010.09.014
  • Peer Reviewed
• [Journal Article] レーザーCVDによるセラミックスの高速・配向制御コーティング (2011)
  • Author(s): 伊藤暁彦, 後藤孝
  • Journal Title: セラミックス Volume: 46 Pages: 556-562
  • NAID: 10030200343
  • Peer Reviewed
• [Journal Article] Amorphous-like nanocrystalline γ-Al_2O_3 films prepared by MOCVD (2011)
  • Author(s): A.Ito, R.Tu, T.Goto
  • Journal Title: Surface and Coatings Technology Volume: 204 Pages: 2170-2174
  • Peer Reviewed
• [Journal Article] Moderate temperature and high-speed synthesis of α-Al_2O_3 films by laser chemical vapor deposition using Nd:YAG laser (2011)
  • Author(s): H.Kadokura, A.Ito, T.Kimura, T.Goto
  • Journal Title: Surface and Coatings Technology Volume: 204 Pages: 2302-2306
  • Peer Reviewed
• [Journal Article] Low temperature deposition of α-Al_2O_3 films by laser chemical vapor deposition using a diode laser (2011)
  • Author(s): Y.Yu, A.Ito, R.Tu, T.Goto
  • Journal Title: Applied Surface Science Volume: 256 Pages: 3906-3911
  • Peer Reviewed
• [Journal Article] Orientation control of α-Al_2O_3 films prepared by laser chemical vapor deposition using a diode laser (2011)
  • Author(s): Y.Yu, A.Ito, R.Tu, T.Goto
  • Journal Title: Journal of the Ceramic Society of Japan Volume: 118 Pages: 366-369
  • Peer Reviewed
• [Journal Article] Influence of laser power on the orientation and microstructure of CeO_2 films deposited on Hastelloy C276 tapes by laser chemical vapor deposition (2011)
  • Author(s): P.Zhao, A.Ito, R.Tu, T.Goto
  • Journal Title: Applied Surface Science Volume: 256 Pages: 6395-6398
  • Peer Reviewed
• [Journal Article] Preparation of highly (100)-oriented CeO_2 films on polycrystalline Al_2O_3 substrates by laser chemical vapor deposition (2011)
  • Author(s): P.Zhao, A.Ito, R.Tu, T.Goto
  • Journal Title: Surface and Coatings Technology Volume: 204 Pages: 3619-3622
  • Peer Reviewed
• [Journal Article] High-Speed Deposition of Y-Si-O Films by Laser Chemical Vapor Deposition Using Nd:YAG laser (2011)
  • Author(s): A.Ito, J.Endo, T.Kimura, T.Goto
  • Journal Title: Surface and Coatings Technology Volume: 204 Pages: 3846-3850
  • Peer Reviewed
• [Journal Article] Laser Chemical Vapor Deposition of SiC Films with CO_2 laser (2011)
  • Author(s): K.Fujie, A.Ito, R.Tu, T.Goto
  • Journal Title: Journal of Alloys and Compounds Volume: 502 Pages: 238-242
  • Peer Reviewed
• [Journal Article] SiC-SiO_2 nanocomposite films prepared by laser CVD using tetraethyl orthosilicate and acetylene as precursors (2011)
  • Author(s): S.Yu, R.Tu, A.Ito, T.Goto
  • Journal Title: Materials Letters Volume: 64 Pages: 2151-2154
  • Peer Reviewed
• [Journal Article] High-speed growth of YBa_2Cu_3O_<7-δ> film with high critical temperature on MgO single crystal substrate by laser chemical vapor deposition (2010)
  • Author(s): P. Zhao, A. Ito, R. Tu, T. Goto
  • Journal Title: Superconductor Science and Technology Volume: 23(12) Issue: 12 Pages: 125010-125010
  • DOI: 10.1088/0953-2048/23/12/125010
  • Peer Reviewed
• [Journal Article] SiC-SiO_2 nanocomposite films prepared by laser CVD using tetraethyl orthosilicate and acetylene as precursors (2010)
  • Author(s): S. Yu, R. Tu, A. Ito, T. Goto
  • Journal Title: Materials Letters Volume: 64(20) Issue: 20 Pages: 2151-2154
  • DOI: 10.1016/j.matlet.2010.07.022
  • Peer Reviewed
• [Journal Article] Influence of laser power on the orientation and microstructure of CeO_2 films deposited on Hastelloy C276 tapes by laser chemical vapor deposition (2010)
  • Author(s): P. Zhao, A. Ito, R. Tu, T. Goto
  • Journal Title: Applied Surface Science Volume: 256(21) Issue: 21 Pages: 6395-6398
  • DOI: 10.1016/j.apsusc.2010.04.023
  • Peer Reviewed
• [Journal Article] High-Speed Deposition of Y-Si-O Films by Laser Chemical Vapor Deposition Using Nd:YAG laser (2010)
  • Author(s): A. Ito, J. Endo, T. Kimura, T. Goto
  • Journal Title: Surface and Coatings Technology Volume: 204(23) Issue: 23 Pages: 3846-3850
  • DOI: 10.1016/j.surfcoat.2010.04.066
  • Peer Reviewed
• [Journal Article] Preparation of highly (100)-oriented CeO_2 films on polycrystalline Al_2O_3 substrates by laser chemical vapor deposition (2010)
  • Author(s): P. Zhao, A. Ito, R. Tu, T. Goto
  • Journal Title: Surface and Coatings Technology Volume: 204(21-22) Issue: 21-22 Pages: 3619-3622
  • DOI: 10.1016/j.surfcoat.2010.04.037
  • Peer Reviewed
• [Journal Article] Laser Chemical Vapor Deposition of SiC Films with CO_2 laser (2010)
  • Author(s): K. Fujie, A. Ito, R. Tu, T. Goto
  • Journal Title: Journal of Alloys and Compounds Volume: 502(1) Issue: 1 Pages: 238-242
  • DOI: 10.1016/j.jallcom.2010.04.154
  • Peer Reviewed
• [Journal Article] Orientation control of .ALPHA.-Al2O3 films prepared by laser chemical vapor deposition using a diode laser (2010)
  • Author(s): Y. Yu, A. Ito, R. Tu, T. Goto
  • Journal Title: Journal of the Ceramic Society of Japan Volume: 118 Issue: 1377 Pages: 366-369
  • DOI: 10.2109/jcersj2.118.366
  • NAID: 130000304749
  • ISSN: 1348-6535, 1882-0743
  • Peer Reviewed
• [Presentation] Preparation and characterization of α-Al2O3 thick Films by Laser CVD using CO2 and Nd:YAG lasers (2013)
  • Author(s): Ming Gao, Akihiko Ito, Takashi Goto
  • Organizer: 第51回セラミックス基礎科学討論会
  • Place of Presentation: 仙台市 (仙台国際センター)
• [Presentation] High-speed preparation of (100)-oriented CeO2 films on Hastelloy C276 tape by laser chemical vapor deposition using single liquid source (2013)
  • Author(s): Pei Zhao, Akihiko Ito, Rong Tu, Takashi Goto
  • Organizer: 第51回セラミックス基礎科学討論会
  • Place of Presentation: 仙台市 (仙台国際センター)
• [Presentation] Orientation growth and microstructure of Al2O3 and Al2TiO5 films by laser CVD (2013)
  • Author(s): Akihiko Ito, Takashi Goto
  • Organizer: Japan-Russia CVD seminar
  • Place of Presentation: Sendai (IMR, Tohoku Univ.)
• [Presentation] レーザーCVD法によるアナターゼおよびルチルTiO2膜のエピタキシャル成長 (2013)
  • Author(s): 伊藤暁彦, 後藤孝
  • Organizer: 日本セラミックス協会 2013年年会
  • Place of Presentation: 東京 (東京工業大学)
• [Presentation] High-speed Deposition of beta-SiC film by laser CVD (2012)
  • Author(s): T. Goto
  • Organizer: International Symposium on New Frontier of Advanced Si-Based Ceramics and Composites (ISASC2012) 【招待講演】
  • Place of Presentation: Korea
  • Year and Date: 2012-03-27
• [Presentation] High-speed deposition of (111)-oriented β-SiC films by laser CVD (2012)
  • Author(s): S.Zhang, R.Tu, T.Goto
  • Organizer: 日本セラミックス協会2012年年会
  • Place of Presentation: 京都大学
  • Year and Date: 2012-03-19
• [Presentation] Preparation of c-axis-oriented YBa_2Cu_3O_<7-δ> films by laser chemical vapor deposition using single liquid source (2012)
  • Author(s): R.Zhao, A.Ito, R.Tu, T.Goto
  • Organizer: 日本セラミックス協会2012年年会
  • Place of Presentation: 京都大学
  • Year and Date: 2012-03-19
• [Presentation] Chemical Vapor Deposition for Industrial Applications (2012)
  • Author(s): T. Goto
  • Organizer: The 1st International GIGAKU Conference in Nagaoka (1st IGCN)【招待講演】
  • Place of Presentation: Nagaoka
  • Year and Date: 2012-02-04
• [Presentation] High-speed epitaxial growth of β-SiC film on Si single crystal by laser chemical vapor deposition (2012)
  • Author(s): S.Zhang, R.Tu, T.Goto
  • Organizer: 日本セラミックス協会第50回基礎科学討論会
  • Place of Presentation: 東京
  • Year and Date: 2012-01-13
• [Presentation] レーザーCVD法により合成したAl-Ti-O系膜の微細構造 (2012)
  • Author(s): 西垣祥太郎・伊藤暁彦・後藤孝
  • Organizer: 日本セラミックス協会第50回基礎科学討論会
  • Place of Presentation: 東京
  • Year and Date: 2012-01-12
• [Presentation] レーザーCVD法による配向性α-Al_2O_3膜の合成と微細構造観察 (2012)
  • Author(s): 伊藤暁彦・後藤孝
  • Organizer: 日本セラミックス協会第50回基礎科学討論会
  • Place of Presentation: 東京
  • Year and Date: 2012-01-12
• [Presentation] レーザーCVDによる特異な結晶相・微細構造を持つセラミックス膜の合成 (2012)
  • Author(s): 伊藤暁彦, 後藤孝
  • Organizer: 日本学術振興会先進セラミックス第124委員会第140回研究会
  • Place of Presentation: 東京 (早稲田大学)
• [Presentation] レーザーCVDによる特異なナノ構造を持つセラミックスコーティング (2012)
  • Author(s): 伊藤暁彦, 後藤孝
  • Organizer: 金属材料研究所 平成 24 年度テクニカルセンター職員研修 (専門研修)
  • Place of Presentation: 仙台市 (東北大学金属材料研究所)
• [Presentation] レーザーCVDによるナノ柱状晶構造を有するβ‐Al2TiO5膜の合成と微細構造観察 (2012)
  • Author(s): 伊藤暁彦, 西垣祥太郎, 後藤孝
  • Organizer: 平成24年度 粉体粉末冶金協会 秋季大会
  • Place of Presentation: 草津市 (立命館大学)
• [Presentation] Oriented growth of alumina thick films and their nanostructure (2012)
  • Author(s): Akihiko Ito, Takashi Goto
  • Organizer: Materials Science Week 2012
  • Place of Presentation: Sendai (IMR, Tohoku Univ.)
• [Presentation] Thermal barrier coating by a new CVD route (2011)
  • Author(s): T. Goto
  • Organizer: International Conference on Energy Efficient Materials (IC2E4MCI-11)【招待講演】
  • Place of Presentation: India
  • Year and Date: 2011-12-19
• [Presentation] Thermal barrier coating by a new CVD route (2011)
  • Author(s): T.Goto
  • Organizer: International Conference on Energy Efficient Materials (IC2E4MCI-11)
  • Place of Presentation: インド・アクラ(招待講演)
  • Year and Date: 2011-12-17
• [Presentation] Synthesis of novel ceramic materials by CVD routes (2011)
  • Author(s): T. Goto
  • Organizer: International Symposium of GCOE: Materials Integration In conjunction with The 2nd International Symposium on Advanced Synthesis and Processing Technology for Materials (ASPT2011) 【招待講演】
  • Place of Presentation: Sendai
  • Year and Date: 2011-12-01
• [Presentation] Synthesis of novel ceramic materials by CVD routes (2011)
  • Author(s): T.Goto
  • Organizer: International Symposium of GCOE Materials Integration In conjunction with The 2nd International Symposium on Advanced Synthesis and Processing Technology for Materials (ASPT2011)
  • Place of Presentation: 仙台(招待講演)
  • Year and Date: 2011-12-01
• [Presentation] レーザーCVDにより合成したα-Al_2O_3膜の優先配向成長 (2011)
  • Author(s): 伊藤暁彦・後藤孝
  • Organizer: セラミックス総合研究会
  • Place of Presentation: 山梨大学
  • Year and Date: 2011-11-18
• [Presentation] Laser Chemical Vapor Deposition for highly Functional Films (2011)
  • Author(s): T. Goto
  • Organizer: Functional Materials Workshop at CUG 【招待講演】
  • Place of Presentation: China
  • Year and Date: 2011-11-03
• [Presentation] Laser Chemical Vapor Deposition for highly Functional Films (2011)
  • Author(s): T.Goto
  • Organizer: Functional Materials Workshop at CUG
  • Place of Presentation: 中国・武漢(招待講演)
  • Year and Date: 2011-11-03
• [Presentation] レーザーCVD法によるTi(O,N)膜の合成と組成の傾斜機能制御 (2011)
  • Author(s): 米崎達也, 伊藤暁彦, 後藤孝
  • Organizer: 粉体粉末冶金協会秋季大会
  • Place of Presentation: 大阪大学
  • Year and Date: 2011-10-28
• [Presentation] レーザーCVD法によるAl-Ti-O系膜の合成 (2011)
  • Author(s): 西垣祥太郎・伊藤暁彦・後藤孝
  • Organizer: 日本セラミックス協会東北北海道支部研究発表会
  • Place of Presentation: 日本大学
  • Year and Date: 2011-10-27
• [Presentation] レーザーCVDによるアルミナ硬質コーティングの配向成長と微細構造 (2011)
  • Author(s): 伊藤暁彦・後藤孝
  • Organizer: 日本セラミックス協会第24回秋季シンポジウム
  • Place of Presentation: 北海道大学(招待講演)
  • Year and Date: 2011-09-08
• [Presentation] Preparation of highly oriented β-SiC films by laser chemical vapor deposition (2011)
  • Author(s): S.Zhang, R.Tu, T.Goto
  • Organizer: 日本セラミックス協会第24回秋季シンポジウム
  • Place of Presentation: 北海道大学
  • Year and Date: 2011-09-08
• [Presentation] レーザーCVDによるアルミナ硬質コーティングの配向成長と微細構造 (2011)
  • Author(s): 伊藤暁彦
  • Organizer: 後藤孝,日本セラミックス協会第24回秋季シンポジウム【招待講演】
  • Place of Presentation: 北海道
  • Year and Date: 2011-09-06
• [Presentation] Laser induced plasma chemicalvapor deposition for high speed coating (2011)
  • Author(s): T.Goto
  • Organizer: The XX International Conference on Ion-Surface Interactions (ISI-2011)
  • Place of Presentation: ロシア・モスクワ(招待講演)
  • Year and Date: 2011-08-28
• [Presentation] Laser induced plasma chemical vapor deposition for high speed coating (2011)
  • Author(s): T. Goto
  • Organizer: The XX International Conference onIon-Surface Interactions (ISI-2011) 【招待講演】
  • Place of Presentation: Russia
  • Year and Date: 2011-08-25
• [Presentation] High-speed deposition of ceramic coatings by laser CVD (2011)
  • Author(s): T. Goto
  • Organizer: 12th Conference of the European Ceramic Society (ECerS XII),【招待講演】
  • Place of Presentation: Stockholm
  • Year and Date: 2011-06-23
• [Presentation] High-speed Coating of Structural Ceramics by Laser Chemical Vapor Deposition (2011)
  • Author(s): A.Ito, T.Goto
  • Organizer: STAC-5
  • Place of Presentation: 横浜(招待講演)
  • Year and Date: 2011-06-22
• [Presentation] High-speed Coating of Structural Ceramics by Laser Chemical Vapor Deposition (2011)
  • Author(s): Akihiko Ito, Takashi Goto
  • Organizer: STAC-5【招待講演】
  • Place of Presentation: Yokohama
  • Year and Date: 2011-06-21
• [Presentation] High-speed deposition of ceramic coatings by laser CVD (2011)
  • Author(s): T.Goto
  • Organizer: 12th Conference of the European Ceramic Society (ECerS XII)
  • Place of Presentation: スウェーデン・ストックホルム(招待講演)
  • Year and Date: 2011-06-19
• [Presentation] α-Al_2O_3 coating on cutting tools by laser chemical vapor deposition (2011)
  • Author(s): T. Goto
  • Organizer: Engineering Ceramics 2011 【招待講演】
  • Place of Presentation: Slovakia
  • Year and Date: 2011-05-09
• [Presentation] α-Al_2O_3 coating on cutting tools by laser chemical vapor deposition (2011)
  • Author(s): T.Goto
  • Organizer: Engineering Ceramics 2011
  • Place of Presentation: スロバキア・ブラチスラヴァ(招待講演)
  • Year and Date: 2011-05-09
• [Presentation] High-Speed Coating of α-Al2O3 Film by Laser Chemical Vapor Deposition on Cutting Tools (2011)
  • Author(s): T. Goto
  • Organizer: 38th International Conference on Metallurgical Coatings & Thin FIlms (ICMCTF 2011) 【招待講演】
  • Place of Presentation: USA
  • Year and Date: 2011-05-02
• [Presentation] High-speed Coating of α-Al_2O_3 Film by Laser Chemical Vapor Deposition on Cutting Tools (2011)
  • Author(s): T.Goto
  • Organizer: 38th International Conference on Metallurgical Coatings & Thin Films (ICMCTF 2011)
  • Place of Presentation: 米国・サンディエゴ(招待講演)
  • Year and Date: 2011-05-02
• [Presentation] Preparation of BaTi_2O_5 films on (100), (110) and (111) MgO substrates by laser CVD (2011)
  • Author(s): Dongyun Guo, Akihiko Ito, Rong Tu, Takashi Goto
  • Organizer: 日本セラミックス協会2010年年会
  • Place of Presentation: 静岡大学
  • Year and Date: 2011-03-16
• [Presentation] Microstructure of YBa_2Cu_3O_<7-δ> films prepared by laser chemical vapor depositio (2011)
  • Author(s): Pei Zhao, Akihiko Ito, Rong Tu, Takashi Goto, Takeharu Kato
  • Organizer: 日本セラミックス協会2010年年会
  • Place of Presentation: 静岡大学
  • Year and Date: 2011-03-16
• [Presentation] (100)-oriented CeO_2 films prepared on (100) SrTiO_3 substrates by laser chemical vapor deposition (2011)
  • Author(s): Pei Zhao, Akihiko Ito, Rong Tu, Takashi Goto
  • Organizer: 日本セラミックス協会2010年年会
  • Place of Presentation: 静岡大学
  • Year and Date: 2011-03-16
• [Presentation] Nano-Coating for High-Efficiency Energy Use and Rare-Metal Substitution (2011)
  • Author(s): Takashi Goto
  • Organizer: 35th International Cocoa Beach Conference & Exposition on Advanced Ceramics & Composites (ICACC11)
  • Place of Presentation: 米国・デイトナ
  • Year and Date: 2011-01-23
• [Presentation] High-speed preparation of a-axis- and c-axis-oriented YBa_2Cu_3O_<7-δ> film on Hastelloy C276 tape by laser chemical vapor deposition (2011)
  • Author(s): Pei Zhao, Akihiko Ito, Rong Tu, Takashi Goto
  • Organizer: 第49回セラミックス基礎科学討論会
  • Place of Presentation: 岡山コンベンションセンター
  • Year and Date: 2011-01-11
• [Presentation] レーザーCVD法によりサーメット基板上に合成したα-Al_2O_3膜の微細構造 (2011)
  • Author(s): Yu You, Akihiko Ito, Rong Tu, Takashi Goto
  • Organizer: 第49回セラミックス基礎科学討論会
  • Place of Presentation: 岡山コンベンションセンター
  • Year and Date: 2011-01-11
• [Presentation] レーザーCVD法により合成したTi(O,N)膜の配向と微細構造に及ぼす成膜温度の影響 (2011)
  • Author(s): Tatsuya Yonesaki, Akihiko Ito, Takashi Goto
  • Organizer: 第49回セラミックス基礎科学討論会
  • Place of Presentation: 岡山コンベンションセンター
  • Year and Date: 2011-01-11
• [Presentation] High-Speed Growth of YBa_2Cu_3O_<7-δ> Film by Laser Chemical Vapor Deposition (2010)
  • Author(s): T. Goto, P. Zhao, A. Ito
  • Organizer: International Workshop on Advanced Materials and Technologies for Global Energy andEnvironmental Challenges 【招待講演】
  • Place of Presentation: South Africa
  • Year and Date: 2010-12-08
• [Presentation] High-Speed Growth of YBa_2Cu_3O_<7-δ> Film by Laser Chemical Vapor Deposition (2010)
  • Author(s): Takashi Goto, Pei Zhao, Akihiko Ito
  • Organizer: International Workshop on Advanced Materials and Technologies for Global Energy and Environmental Challenges
  • Place of Presentation: 南アフリカ・プレトリア
  • Year and Date: 2010-12-06
• [Presentation] Laser Chemical Vapor Deposition of Oriented Alpha-alumina Coatings (2010)
  • Author(s): A. Ito, Teiichi Kimura, T. Goto
  • Organizer: The 4th International Symposium on Advanced Ceramics (ISAC-4) 【招待講演】
  • Place of Presentation: Osaka
  • Year and Date: 2010-11-15
• [Presentation] Synthesis of Ceramics and Composite Materials by Novel CVD Routes (2010)
  • Author(s): Takashi Goto
  • Organizer: 3rd International Congress on Ceramics (ICC3)
  • Place of Presentation: 大阪国際会議場
  • Year and Date: 2010-11-14
• [Presentation] レーザーCVD法によるSiC-SiO_2ナノコンポジット膜の合成 (2010)
  • Author(s): A.Ito, Shu Yu, Rong Tu, Takashi Goto
  • Organizer: 第一回セラミックスエンジニアリングワークショップ
  • Place of Presentation: 大阪国際会議場
  • Year and Date: 2010-11-14
• [Presentation] Laser Chemical Vapor Deposition of Oriented Alpha-alumina Coatings (2010)
  • Author(s): Akihiko Ito, Teiichi Kimura, Takashi Goto
  • Organizer: The 4th International Symposium on Advanced Ceramics (ISAC-4)
  • Place of Presentation: 大阪国際会議場
  • Year and Date: 2010-11-14
• [Presentation] High-speed Preparation of YBa_2Cu_3O_<7-δ> Film on Polycrystalline Al_2O_3 Substrate by Laser Chemical Vapor Deposition Using Nd:YAG Laser (2010)
  • Author(s): Pei Zhao, Akihiko Ito, Rong Tu, Takashi Goto
  • Organizer: The 4th International Symposium on Advanced Ceramics (ISAC-4)
  • Place of Presentation: 大阪国際会議場
  • Year and Date: 2010-11-14
• [Presentation] Effect of Laser Power on Preparation of Ti(O,N) Films by Laser Chemical Vapor Deposition Using a Diode Laser (2010)
  • Author(s): Tatsuya Yonesaki, Akihiko Ito, Takashi Goto
  • Organizer: The 4th International Symposium on Advanced Ceramics (ISAC-4)
  • Place of Presentation: 大阪国際会議場
  • Year and Date: 2010-11-14
• [Presentation] Laser Chemical Deposition of AlN Film by Using Al(acac)_3 and NH_3 Precursors (2010)
  • Author(s): Yu You, AKihiko Ito, Rong Tu, Takashi Goto
  • Organizer: The 4th International Symposium on Advanced Ceramics (ISAC-4)
  • Place of Presentation: 大阪国際会議場
  • Year and Date: 2010-11-14
• [Presentation] Effect of deposition temperature on the microstructure of AlN films prepared by laser CVD using a diode laser (2010)
  • Author(s): Yu You, Akihiko Ito, Rong Tu, Takashi Goto
  • Organizer: 粉体粉末冶金協会平成22年度秋季大会
  • Place of Presentation: 京都大学
  • Year and Date: 2010-11-09
• [Presentation] レーザーCVD法により合成したTiON膜の微細構造に与える合成条件の影響 (2010)
  • Author(s): Akihiko Ito, H.Joo, Takashi Goto
  • Organizer: 粉体粉末冶金協会平成22年度秋季大会
  • Place of Presentation: 京都大学
  • Year and Date: 2010-11-09
• [Presentation] レーザーCVD法により合成したTi(O,N)膜の組成と微細構造に及ぼすレーザー出力の影響 (2010)
  • Author(s): Tatsuya Yonesaki, Akihiko Ito, Takashi Goto
  • Organizer: 平成22年度日本セラミックス協会東北北海道支部研究発表会
  • Place of Presentation: 東北大学
  • Year and Date: 2010-10-28
• [Presentation] Preparation of AlN film by laser CVD using Al(acac)_3 and NH_3 Precursors (2010)
  • Author(s): Yu You, Akihiko Ito, Rong Tu, Takashi Goto
  • Organizer: 平成22年度日本セラミックス協会東北北海道支部研究発表会
  • Place of Presentation: 東北大学
  • Year and Date: 2010-10-28
• [Presentation] Fast epitaxial growth of α-axis- and c-axis-oriented YBa_2Cu_3O_<7-δ> films on (100) LaAlO_3 substrate by laser chemical vapor deposition (2010)
  • Author(s): Pei Zhao, Akihiko Ito, Rong Tu, Takashi Goto
  • Organizer: 平成22年度日本セラミックス協会東北北海道支部研究発表会
  • Place of Presentation: 東北大学
  • Year and Date: 2010-10-28
• [Presentation] Preparation of (020)-oriented BaTi_2O_5 film on (100) MgO substrate by laser CVD (2010)
  • Author(s): Dongyun Guo, Akihiko Ito, Rong Tu, Takashi Goto
  • Organizer: 平成22年度日本セラミックス協会東北北海道支部研究発表会
  • Place of Presentation: 東北大学
  • Year and Date: 2010-10-28
• [Presentation] High-speed growth of YBa_2Cu_3O_<7-δ> film with high critical temperature on MgO single crystal substrate by laser chemical vapor deposition (2010)
  • Author(s): Pei Zhao, Akihiko Ito, Rong Tu, Takashi Goto
  • Organizer: Tohoku-Novosibirsk Research Student Workshop
  • Place of Presentation: ロシア・ノボシビリスク
  • Year and Date: 2010-09-19
• [Book] Processing and Properties of Advanced Ceramics and Composites IV (Ceramic Transactions Series). [Wiley-American Ceramic Society,] (2012)
  • Author(s): (Eds) Jitendra P. Singh, Narottam P. Bansal, Takashi Goto, Jacques Lamon, Sung R. Choi, Morsi M
  • Total Pages: 336
  • Publisher: Mahmoud, Guido, ISBN978-1-118-27336-4
• [Book] Ceramics and Composites Processing Methods.ISBN0-470-55344-85 (2012)
  • Author(s): Takashi Got
  • Publisher: John Wiley & Sons
• [Book] Trans Tech Publications, ISBN978-3-03785-376-45 (2012)
  • Author(s): (Eds) Takashi Goto, Zhengyi Fu and Lianmeng Zhan
  • Publisher: Materials Integration
• [Book] Processing and Properties of Advanced Ceramics and Composites IV (2012)
  • Author(s): Jitendra P. Singh, Narottam P. Bansal, Takashi Goto, Jacques Lamon, Sung R. Choi, Morsi M. Mahmoud, Guido Link
  • Total Pages: 336
  • Publisher: Wiley-American Ceramic Society
• [Book] Ceramics and Composites Processing Methods (2012)
  • Author(s): T. Goto
  • Publisher: John Wiley & Sons
• [Book] Materials Integration (2012)
  • Author(s): Takashi Goto, Zhengyi Fu and Lianmeng Zhang
  • Total Pages: 390
  • Publisher: Trans Tech Publications
• [Book] [Wiley-American Ceramic Society], ISBN978-0-470-39122-8 (2011)
  • Author(s): Takashi Goto
  • Publisher: Ceramic Integration and Joining Technologies: From Macro to Nanoscale
• [Book] [CRC Press], ISBN1439849951 (2011)
  • Author(s): Takashi Goto, Takayuki Narushima, Kyosuke Ueda
  • Publisher: BIOMLOGICAL and BIOMEDICAL COATINGS HANDBOOK - Processing and Characterization
• [Book] [Trans Tech Publications], ISBN978-3-03785-181-4 (2011)
  • Author(s): (Eds) Takashi Goto, Yi-Bing Cheng, Takashi Akatsu
  • Total Pages: 257
  • Publisher: CSJ Series Volume 22 Advanced Engineering Ceramics and Composites
• [Remarks] 1.結晶配向制御した硬質セラミックスの高速・低温コーティング技術
  • URL: http://www.rpip.tohoku.ac.jp/seeds/profile/174/lang:jp/
• [Remarks] 2.多元系セラミックスの高速・高収率成膜技術による超電導線材作製
  • URL: http://www.rpip.tohoku.ac.jp/seeds/profile/175/lang:jp/
• [Remarks] 結晶配向制御した硬質セラミックスの高速・低温コーティング技術
  • URL: http://www.rpip.tohoku.ac.jp/seeds/profile/174/lang:jp/
• [Remarks] 多元系セラミックスの高速・高収率成膜技術による超電導線材作製
  • URL: http://www.rpip.tohoku.ac.jp/seeds/profile/175/lang:jp/