電界促進効果による超薄膜拡散バリア層の形成機構

• Project/Area Number: 22246086
• Research Category: Grant-in-Aid for Scientific Research (A)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Structural/Functional materials
• Research Institution: Tohoku University
• Principal Investigator: 小池 淳一 Tohoku University, 工学(系)研究科(研究院), 教授 (10261588)
• Project Period (FY): 2010
• Project Status: Completed (Fiscal Year 2010)
• Budget Amount: ¥20,800,000 (Direct Cost: ¥16,000,000、Indirect Cost: ¥4,800,000); Fiscal Year 2010: ¥20,800,000 (Direct Cost: ¥16,000,000、Indirect Cost: ¥4,800,000)