| Budget Amount *help |
¥34,320,000 (Direct Cost: ¥26,400,000、Indirect Cost: ¥7,920,000)
Fiscal Year 2012: ¥6,370,000 (Direct Cost: ¥4,900,000、Indirect Cost: ¥1,470,000)
Fiscal Year 2011: ¥13,260,000 (Direct Cost: ¥10,200,000、Indirect Cost: ¥3,060,000)
Fiscal Year 2010: ¥14,690,000 (Direct Cost: ¥11,300,000、Indirect Cost: ¥3,390,000)
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| Research Abstract |
In the high-volume production lines of semiconductor devices, high-resolution and high-throughput manufacturing has been achieved through the combination of expensive high-quality quantum beam and inexpensive low-quality thermal energy. In this study, nanoscale chemical reactions and reaction sites were investigated by using state-of-the-art quantum beams such as electron beam, laser, extreme ultraviolet (EUV) radiation, and X-ray. On the basis of the obtained knowledge, Monte Carlo simulation code was developed.
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