Development of ultra high-sensitive and multi-axis accelerometer and magnetic sensor, and those integration on a ceramic substrate
Project/Area Number |
22310083
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Research Category |
Grant-in-Aid for Scientific Research (B)
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Allocation Type | Single-year Grants |
Section | 一般 |
Research Field |
Microdevices/Nanodevices
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Research Institution | Kansai University |
Principal Investigator |
AOYAGI Seiji 関西大学, システム理工学部, 教授 (30202493)
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Co-Investigator(Kenkyū-buntansha) |
SHINGUBARA Shosou 関西大学, システム理工学部, 教授 (10231367)
SUZUKI Masato 関西大学, システム理工学部, 助教 (70467786)
TAKAHASHI Tomokazu 関西大学, システム理工学部, 助教 (20581648)
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Project Period (FY) |
2010 – 2012
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Project Status |
Completed (Fiscal Year 2012)
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Budget Amount *help |
¥19,890,000 (Direct Cost: ¥15,300,000、Indirect Cost: ¥4,590,000)
Fiscal Year 2012: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Fiscal Year 2011: ¥3,770,000 (Direct Cost: ¥2,900,000、Indirect Cost: ¥870,000)
Fiscal Year 2010: ¥14,690,000 (Direct Cost: ¥11,300,000、Indirect Cost: ¥3,390,000)
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Keywords | マイクロセンサー / マイクロセンサ / MEMS / 磁気センサ / 加速度センサ / 集積化 |
Research Abstract |
Manufacture methods of high-sensitive accelerometer and magnetic sensor on a ceramic substrate were developed using MEMS technology, which separately detect component of three-axis direction. A large vibration system along one-axis direction for accelerometer was successfully developed. Then, a self-powered sensor detecting inertia force using an electret and a ceramic plate of high-permittivity was successfully developed and characterized. For the development of high-sensitive magnetic sensor, it is proven that films of Co and NiMoFe deposited on a ceramic substrate have surely ferromagnetism characteristics required as a gigantic magneto-resistive (GMR) and/or Tunneling magneto-resistive (TMR) element. Finally, magnetism convergence plates for three-dimensional detection of magnetic field, which is fabricated by only MEMS technology, i.e., without manually handling procedures, was successfully developed.
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Report
(4 results)
Research Products
(24 results)
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[Presentation] Fabrication of Highly Dielectric Nano-BATIO_3/Epoxy-Resin Composite Plate Having Trenches by Mold Casting and Its Application to Capacitive Energy Harvesting2011
Author(s)
M.Suzuki, N.Matsushita, T.Hirata, R.Yoneya, J.Onishi, T.Wada, T.Takahashi, T.Nishida, Y.Yoshikawa, S.Aoyagi
Organizer
The 16th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2011)
Place of Presentation
Beijing, China(発表確定)
Related Report
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