| Project/Area Number |
22310083
|
|---|
| Research Category |
Grant-in-Aid for Scientific Research (B)
|
| Allocation Type | Single-year Grants |
|---|
| Section | 一般 |
|---|
| Research Field |
Microdevices/Nanodevices
|
|---|
| Research Institution | Kansai University |
|---|
Principal Investigator |
AOYAGI Seiji 関西大学, システム理工学部, 教授 (30202493)
|
|---|
| Co-Investigator(Kenkyū-buntansha) |
SHINGUBARA Shosou 関西大学, システム理工学部, 教授 (10231367)
SUZUKI Masato 関西大学, システム理工学部, 助教 (70467786)
TAKAHASHI Tomokazu 関西大学, システム理工学部, 助教 (20581648)
|
|---|
| Project Period (FY) |
2010 – 2012
|
| Project Status |
Completed (Fiscal Year 2012)
|
| Budget Amount *help |
¥19,890,000 (Direct Cost: ¥15,300,000、Indirect Cost: ¥4,590,000)
Fiscal Year 2012: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Fiscal Year 2011: ¥3,770,000 (Direct Cost: ¥2,900,000、Indirect Cost: ¥870,000)
Fiscal Year 2010: ¥14,690,000 (Direct Cost: ¥11,300,000、Indirect Cost: ¥3,390,000)
|
|---|
| Keywords | マイクロセンサー / マイクロセンサ / MEMS / 磁気センサ / 加速度センサ / 集積化 |
|---|
| Research Abstract |
Manufacture methods of high-sensitive accelerometer and magnetic sensor on a ceramic substrate were developed using MEMS technology, which separately detect component of three-axis direction. A large vibration system along one-axis direction for accelerometer was successfully developed. Then, a self-powered sensor detecting inertia force using an electret and a ceramic plate of high-permittivity was successfully developed and characterized. For the development of high-sensitive magnetic sensor, it is proven that films of Co and NiMoFe deposited on a ceramic substrate have surely ferromagnetism characteristics required as a gigantic magneto-resistive (GMR) and/or Tunneling magneto-resistive (TMR) element. Finally, magnetism convergence plates for three-dimensional detection of magnetic field, which is fabricated by only MEMS technology, i.e., without manually handling procedures, was successfully developed.
|
