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Development of atom-scale design and characterization technique towards single-dopant controlled silicon nanoelectronics

Research Project

Project/Area Number 22310085
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Microdevices/Nanodevices
Research InstitutionJapan Advanced Institute of Science and Technology (2011-2012)
Shizuoka University (2010)

Principal Investigator

MIZUTA Hiroshi  北陸先端科学技術大学院大学, マテリアルサイエンス研究科, 教授 (90372458)

Co-Investigator(Kenkyū-buntansha) TABE Michiharu  静岡大学, 電子工学研究所, 教授 (80262799)
Project Period (FY) 2010 – 2012
Project Status Completed (Fiscal Year 2012)
Budget Amount *help
¥19,500,000 (Direct Cost: ¥15,000,000、Indirect Cost: ¥4,500,000)
Fiscal Year 2012: ¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000)
Fiscal Year 2011: ¥4,550,000 (Direct Cost: ¥3,500,000、Indirect Cost: ¥1,050,000)
Fiscal Year 2010: ¥10,530,000 (Direct Cost: ¥8,100,000、Indirect Cost: ¥2,430,000)
Keywordsナノデバイス / 不純物 / 第一原理計算 / ドーパント原子 / シリコンナノデバイス / 第一原理解析 / 不純物原子
Research Abstract

We conducted large-scale ab initio analysis of single and a few dopant atoms embedded in extremely-scaled silicon nanorod and nano stub-shaped channel devices with dimensions as small as Bohr radius. We revealed the electronic states and positional stability of the single dopant atoms. A new analysis method based on PDOS spectra and 3D wavefunction visualization was introduced to identify the effective LUMO states, and we succeeded to evaluate the donor electron binding energy for the silicon nanostructures connected to the electrodes for the first time.

Report

(4 results)
  • 2012 Annual Research Report   Final Research Report ( PDF )
  • 2011 Annual Research Report
  • 2010 Annual Research Report
  • Research Products

    (44 results)

All 2013 2012 2011 2010

All Journal Article (10 results) (of which Peer Reviewed: 9 results) Presentation (34 results)

  • [Journal Article] Electron-tunneling operation of single-donor-atom transistors at elevated temperatures2013

    • Author(s)
      E. Hamid, D. Moraru, Y. Kuzuya, T.Mizuno, Le The Anh, H. Mizuta, and M.Tabe
    • Journal Title

      Phys. Rev. B

      Volume: Vol.87

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Photon-Induced Random Telegraph Signal Due to Potential Fluctuation of a Single Donor‐Acceptor Pair in Nanoscale Si p‐n Junctions2012

    • Author(s)
      A. Udhiarto, D. Moraru, S. Purwiyanti,Y. Kuzuya, T. Mizuno, H. Mizuta, and M.Tabe
    • Journal Title

      Appl. Phys. Exp

      Volume: Vol. 5

    • NAID

      10031126442

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] '第一原理計算によるシリコンナノトラジスタ中の 単一リン不純物の電子状態解析'2012

    • Author(s)
      葛屋, モラル, 水野, 田部, 水田
    • Journal Title

      電子情報通信学会・信学技報

      Volume: Vol. 111 Pages: 7-11

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Photon-Induced Random Telegraph Signal Due to Potential Fluctuation of a Single Donor–Acceptor Pair in Nanoscale Si p–n Junctions2012

    • Author(s)
      A. Udhiarto, D. Moraru, S. Purwiyanti, Y. Kuzuya, T. Mizuno, H. Mizuta, and M. Tabe
    • Journal Title

      Appl. Phys. Exp

      Volume: 5

    • NAID

      10031126442

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Electron-tunneling operation of single-donor-atom transistors at elevated temperatures2012

    • Author(s)
      E. Hamid, D. Moraru, Y. Kuzuya, T. Mizuno, Le The Anh, H. Mizuta, and M. Tabe
    • Journal Title

      Phys. Rev. B

      Volume: 87

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 第一原理計算によるシリコンナノトラジスタ中の単一リン不純物の電子状態解析2012

    • Author(s)
      葛屋陽平, モラルダニエル, 水野武志, 田部道晴, 水田博
    • Journal Title

      電子情報通信学会・信学技報

      Volume: IEICE-111 Pages: 7-11

    • Related Report
      2011 Annual Research Report
  • [Journal Article] 'Theory of quasiballistic transport through nanocrystalline silicon dots'2011

    • Author(s)
      N. Mori, H. Minari, S. Uno, H. Mizuta and N. Koshida
    • Journal Title

      Appl.Phys. Lett

      Volume: Vol. 98

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] 'Strain distribution analysis of sputter-formed strained Si by tip-enhanced Raman spectroscopy'2011

    • Author(s)
      H. Hanafusa, N. Hirose, A. Kasamatsu,T. Mimura, T. Matsui, H.M.H. Chong, H.Mizuta and Y Suda
    • Journal Title

      Appl. Phys. Exp

      Volume: Vol. 4

    • NAID

      10027783571

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Strain distribution analysis of sputter-formed strained Si by tip-enhanced Raman spectroscopy2011

    • Author(s)
      H.Hanafusa, N.Hirose, A.Kasamatsu, T.Mimura, T.Matsui, H.M.H.Chong, H.Mizuta, Y Suda
    • Journal Title

      Appl.Phys.Express

      Volume: 4

    • NAID

      10027783571

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Theory of quasi-ballistic transport through nanocrystalline silicon dots2011

    • Author(s)
      N.Mori, H.Minari, S.Uno, H.Mizuta, N.Koshida
    • Journal Title

      Appl.Phys.Lett.

      Volume: 98

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Presentation] Ab initio study of binding energy for single phosphorus donor in silicon nano stub-shaped channel2013

    • Author(s)
      L. T. Anh, Y. Kuzuya, D. Moraru, T.Mizuno, Manoharan M., M. Tabe and H.Mizuta
    • Organizer
      第60回応用物理学関係連合講演会
    • Place of Presentation
      神奈川工科大学, 神奈川
    • Year and Date
      2013-03-29
    • Related Report
      2012 Final Research Report
  • [Presentation] Ab initio study of binding energy for single phosphorus donor in silicon nano stub-shaped channel2013

    • Author(s)
      L. T. Anh, Y. Kuzuya, D. Moraru, T. Mizuno, Manoharan M., M. Tabe and H. Mizuta
    • Organizer
      第60回応用物理学会春季学術講演会
    • Place of Presentation
      神奈川工科大学
    • Related Report
      2012 Annual Research Report
  • [Presentation] Ab initio study of Phosphorus donor states in a single dopant transistor with a stub-shaped channel2012

    • Author(s)
      L. T. Anh, Y. Kuzuya, D. Moraru, T.Mizuno, M. Muruganathan, M. Tabe and H.Mizuta
    • Organizer
      Conference on Computational Physics (CCP2012)
    • Place of Presentation
      Kobe, Hyogo
    • Year and Date
      2012-10-17
    • Related Report
      2012 Final Research Report
  • [Presentation] Experimental and ab initio study of donor state deepening in nanoscale SOI-MOSFETs2012

    • Author(s)
      D. Moraru, E. Hamid, Y. Kuzuya, T.Mizuno, H. Mizuta and M. Tabe
    • Organizer
      IUMRS-International Conference on Electronic Materials(IUMRS-ICEM 2012)
    • Place of Presentation
      Yokohama,Kanagawa
    • Year and Date
      2012-09-25
    • Related Report
      2012 Final Research Report
  • [Presentation] Ionization energy enhancement and high temperature operation of single-dopant transistors2012

    • Author(s)
      E. Hamid, D. Moraru, Y. Kuzuya, T.Mizuno, L.T. Anh, H. Mizuta and M. Tabe
    • Organizer
      第73回応用物理学会学術講演会
    • Place of Presentation
      愛媛大学, 愛媛
    • Year and Date
      2012-09-13
    • Related Report
      2012 Final Research Report
  • [Presentation] Ab initio study of Phosphorus donor in Si nano-structures: Wave function analysis of P-doped Si nano wire and P-doped Si nano disk2012

    • Author(s)
      L. T. Anh, D. Moraru, Y. Kuzuya, M. Tabe,H. Mizuta
    • Organizer
      第73回応用物理学会学術講演会
    • Place of Presentation
      愛媛大学, 愛媛
    • Year and Date
      2012-09-13
    • Related Report
      2012 Final Research Report
  • [Presentation] シリコンナノPN接合の電子状態2012

    • Author(s)
      葛屋, モラル, 水野, 田部, 水田
    • Organizer
      第73回応用物理学会学術講演会
    • Place of Presentation
      愛媛大学, 愛媛
    • Year and Date
      2012-09-13
    • Related Report
      2012 Final Research Report
  • [Presentation] Ab initio analysis of donor state deepening in Si nano-channels2012

    • Author(s)
      D. Moraru, Y. Kuzuya, E. Hamid, T.Mizuno, M. Tabe and H. Mizuta
    • Organizer
      IEEE Silicon Nanoelectronics Workshop
    • Place of Presentation
      Honolulu, USA
    • Year and Date
      2012-06-11
    • Related Report
      2012 Final Research Report
  • [Presentation] シリコンナノ構造におけるリンドナー電子状態の空間分布2012

    • Author(s)
      葛屋, モラル, 水野, 田部, 水田
    • Organizer
      第59回応用物理学関係連合講演会
    • Place of Presentation
      早稲田大学, 東京
    • Year and Date
      2012-03-17
    • Related Report
      2012 Final Research Report
  • [Presentation] シリコンナノ構造におけるリンドナー電子状態の空間分布2012

    • Author(s)
      葛屋陽平, モラルダニエル, 水野武志, 田部道晴, 水田博
    • Organizer
      2012年春季第59回応用物理学関係連合講演会
    • Place of Presentation
      早稲田大学(東京)
    • Year and Date
      2012-03-17
    • Related Report
      2011 Annual Research Report
  • [Presentation] 第一原理計算によるシリコンナノトラジスタ中の 単一リン不純物の電子状態解析2012

    • Author(s)
      葛屋, モラル, 水野, 田部, 水田
    • Organizer
      電子情報通信学会・電子デバイス研究会・シリコン材料・デバイス研究会
    • Place of Presentation
      北海道大学, 北海道
    • Year and Date
      2012-02-07
    • Related Report
      2012 Final Research Report
  • [Presentation] 第一原理計算によるシリコンナノトラジスタ中の単一リン不純物の電子状態解析2012

    • Author(s)
      葛屋陽平, モラルダニエル, 水野武志, 田部道晴, 水田博
    • Organizer
      電子情報通信学会・電子デバイス研究会・シリコン材料・デバイス研究会
    • Place of Presentation
      北海道大学(北海道)
    • Year and Date
      2012-02-07
    • Related Report
      2011 Annual Research Report
  • [Presentation] Ab initio study of Phosphorus donor states in a single dopant transistor with a stub-shaped channel2012

    • Author(s)
      L. T. Anh, Y. Kuzuya, D. Moraru, T. Mizuno, Manoharan M., M. Tabe and H. Mizuta
    • Organizer
      Conference on Computational Physics (CCP2012)
    • Place of Presentation
      Kobe
    • Related Report
      2012 Annual Research Report
  • [Presentation] Experimental and ab initio Study of Donor State Deepening in Nanoscale SOI-MOSFETs2012

    • Author(s)
      D. Moraru, E. Hamid, Y. Kuzuya, T. Mizuno, H. Mizuta, and M. Tabe
    • Organizer
      International Union of Materials Research Societies - International Conference on Electronic Materials 2012
    • Place of Presentation
      Yokohama
    • Related Report
      2012 Annual Research Report
  • [Presentation] Ab initio analysis of donor state deepening in Si nano-channels2012

    • Author(s)
      D. Moraru, Y. Kuzuya, E. Hamid, T. Mizuno, M. Tabe and H. Mizuta
    • Organizer
      IEEE Silicon Nanoelectronics Workshop 2012
    • Place of Presentation
      Honolulu
    • Related Report
      2012 Annual Research Report
  • [Presentation] シリコンナノpn接合の電子状態2012

    • Author(s)
      葛屋、モラル、水野、田部、水田
    • Organizer
      第73回応用物理学会学術講演会
    • Place of Presentation
      愛媛大学
    • Related Report
      2012 Annual Research Report
  • [Presentation] Ab initio study of Phosphorus donor in Si nano-structures: Wave function analysis of P-doped Si nano wire and P-doped Si nano disk2012

    • Author(s)
      L. T. Anh, D. Moraru, Y. Kuzuya, Mi. Tabe, H. Mizuta
    • Organizer
      第73回応用物理学会学術講演会
    • Place of Presentation
      愛媛大学
    • Related Report
      2012 Annual Research Report
  • [Presentation] Ionization energy enhancement and high temperature operation of single-dopant transistors2012

    • Author(s)
      E. Hamid, D. Moraru, Y. Kuzuya, T. Mizuno, L.T. Anh, H. Mizuta and M. Tabe
    • Organizer
      第73回応用物理学会学術講演会
    • Place of Presentation
      愛媛大学
    • Related Report
      2012 Annual Research Report
  • [Presentation] Single-dopant simulation: DOS and carrier transport(招待講演)2011

    • Author(s)
      H. Mizuta, Y. Kuzuya, D. Moraru, T.Mizuno and M. Tabe
    • Organizer
      Italy-Japan Workshop on Single Atom Control for Future Nanoelectronics
    • Place of Presentation
      Waseda University, Tokyo
    • Year and Date
      2011-11-10
    • Related Report
      2012 Final Research Report
  • [Presentation] Single-dopant simulationm : DOS and carrier transport2011

    • Author(s)
      H.Mizuta, Y.Kuzuya, D.Moraru, T.Mizuno, M.Tabe
    • Organizer
      Italy-Japan Workshop on Single Atom Control for Future Nanoelectronics
    • Place of Presentation
      Tokyo (Waseda University)(招待講演)
    • Year and Date
      2011-11-10
    • Related Report
      2011 Annual Research Report
  • [Presentation] Strain effects on avalanche multiplication in a silicon nanodot array2011

    • Author(s)
      N. Mori, H. Minari, S. Uno, H. Mizuta and N. Koshida
    • Organizer
      2011 International Conference on Solid State Devices and Materials (SSDM2011)
    • Place of Presentation
      Nagoya, Aichi
    • Year and Date
      2011-09-29
    • Related Report
      2012 Final Research Report
  • [Presentation] Strain effects on avalanche multiplication in a silicon nanodot array2011

    • Author(s)
      N.Mori, H.Minari, S.Uno, H.Mizuta, N.Koshida
    • Organizer
      2011 International Conference on Solid State Devices and Materials (SSDM2011)
    • Place of Presentation
      Nagoya (Aichi Industry & Labor Center)
    • Year and Date
      2011-09-29
    • Related Report
      2011 Annual Research Report
  • [Presentation] 少数ドーパントを有するシリコンナノロッドの状態解析2011

    • Author(s)
      葛屋, モラル, 水野, 田部, 水田
    • Organizer
      第72回応用物理学会学術講演会
    • Place of Presentation
      山形大学, 山形
    • Year and Date
      2011-09-01
    • Related Report
      2012 Final Research Report
  • [Presentation] 少数ドーパントを有するシリコンナノロッドの状態解析2011

    • Author(s)
      葛屋陽平, モラルダニエル, 水野武志, 田部道晴, 水田博
    • Organizer
      2011年秋季第72回応用物理学会学術講演会
    • Place of Presentation
      山形大学(山形)
    • Year and Date
      2011-09-01
    • Related Report
      2011 Annual Research Report
  • [Presentation] 単一ドーパントシミュレーション:ナノ構造内ドーパント原子の状態と電子輸送2011

    • Author(s)
      モラル, 葛屋, 水野, 田部, 水田
    • Organizer
      第72回応用物理学会学術講演会シンポジウム: Extended CMOS のためのDeterministic ドーピングと単一ドーパントデバイス
    • Place of Presentation
      山形大学, 山形
    • Year and Date
      2011-08-29
    • Related Report
      2012 Final Research Report
  • [Presentation] 単一ドーパントシミュレーション:ナノ構造内ドーパント原子の状態と電子輸送2011

    • Author(s)
      モラルダニエル, 葛屋陽平, 水野武志, 田部道晴, 水田博
    • Organizer
      2011年秋季第72回応用物理学会学術講演会シンポジウム:Extended CMOS のためのDeterministicドーピングと単一ドーパントデバイス
    • Place of Presentation
      山形大学(山形)
    • Year and Date
      2011-08-29
    • Related Report
      2011 Annual Research Report
  • [Presentation] Impact ionization and avalanche multiplication in a silicon nanodot array2011

    • Author(s)
      N. Mori, H. Minari, S. Uno, H. Mizuta and N. Koshida
    • Organizer
      17th International Conference on Electron Dynamics in Semiconductors, Optoelectronics and Nanostructures (EDISON17)
    • Place of Presentation
      Santa Barbara, USA
    • Year and Date
      2011-08-09
    • Related Report
      2012 Final Research Report
  • [Presentation] Impact ionization and avalanche multiplication in a silicon nanodot array2011

    • Author(s)
      N.Mori, H.Minari, S.Uno, H.Mizuta, N.Koshida
    • Organizer
      17th International Conference on Electron Dynamics in Semiconductors, Optoelectronics and Nanostructures (EDISON17)
    • Place of Presentation
      Santa Barbara (USA)
    • Year and Date
      2011-08-09
    • Related Report
      2011 Annual Research Report
  • [Presentation] 単一不純物を有するシリコンナノロッドの第一原理解析2011

    • Author(s)
      葛屋, 三木, モラル, 水野, 田部, 水田
    • Organizer
      第58回応用物理学関係連合講演会
    • Place of Presentation
      東日本大震災の為、講演予稿集の発行のみ
    • Year and Date
      2011-03-09
    • Related Report
      2012 Final Research Report
  • [Presentation] 単一不純物を有するシリコンナノロッドトランジスタの第一原理解析2011

    • Author(s)
      葛屋陽平
    • Organizer
      2010年春季第58回応用物理学関係連合講演会
    • Place of Presentation
      東日本大震災の為、講演予稿集の発行のみ
    • Year and Date
      2011-03-09
    • Related Report
      2010 Annual Research Report
  • [Presentation] Scaled Silicon NEM-SET Hybrid Devices (Invited Talk)2010

    • Author(s)
      Hiroshi Mizuta
    • Organizer
      International Conference on Solid-State and Integrated Circuit Technology (ICSICT2010)
    • Place of Presentation
      Shanghai
    • Year and Date
      2010-11-03
    • Related Report
      2010 Annual Research Report
  • [Presentation] Scaled Silicon NEM-SET Hybrid Devices (招待講演)2010

    • Author(s)
      H. Mizuta
    • Organizer
      International Conference on Solid-State and Integrated Circuit Technology (ICSICT2010)
    • Place of Presentation
      Shanghai, China
    • Year and Date
      2010-11-02
    • Related Report
      2012 Final Research Report
  • [Presentation] Scaled Silicon Nanoelectromechanical Systems (Keynote Lecture)2010

    • Author(s)
      Hiroshi Mizuta
    • Organizer
      7^<th> International Workshop on Functional and Nanostructured Materials (FNMA2010)
    • Place of Presentation
      Malta
    • Year and Date
      2010-07-18
    • Related Report
      2010 Annual Research Report
  • [Presentation] Scaled Silicon Nanoelectromechanical Systems (基調講演)2010

    • Author(s)
      H. Mizuta
    • Organizer
      7th International Workshop on Functional and Nanostructured Materials (FNMA2010)
    • Place of Presentation
      Villa Bighi, Malta
    • Year and Date
      2010-07-11
    • Related Report
      2012 Final Research Report

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Published: 2010-08-23   Modified: 2019-07-29  

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