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Synthesis of Cyclic Oligomers by the Dynamic Covalent Chemistry Mechanism and their Application for Resist Materials

Research Project

Project/Area Number 22350088
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Organic industrial materials
Research InstitutionKansai University (2012)
Kanagawa University (2010-2011)

Principal Investigator

KUDO Hiroto  関西大学, 化学生命工学部, 准教授 (30343635)

Project Period (FY) 2010 – 2012
Project Status Completed (Fiscal Year 2012)
Budget Amount *help
¥19,760,000 (Direct Cost: ¥15,200,000、Indirect Cost: ¥4,560,000)
Fiscal Year 2012: ¥2,210,000 (Direct Cost: ¥1,700,000、Indirect Cost: ¥510,000)
Fiscal Year 2011: ¥2,210,000 (Direct Cost: ¥1,700,000、Indirect Cost: ¥510,000)
Fiscal Year 2010: ¥15,340,000 (Direct Cost: ¥11,800,000、Indirect Cost: ¥3,540,000)
Keywordsレジスト / 極端紫外線 / 環状オリゴマー / ノーリア / 化学増幅型レジスト / 分子レジスト / 動的共有結合化学 / 電子線 / 光機能性材料
Research Abstract

A new dynamic covalent chemistry (DCC) system in the reaction of resorcinol and 1,5-pentanedial could be achieved, yielding a only soluble oligomer noria (noria means water wheel in Latin) in high yield, resembling a water-wheel in appearance. Application of the noria derivatives with pendant photo-reactive groups were examined for UV-curing materials and photo-resist materials. The obtained noria derivatives had good solubility, good film-forming ability, high thermal stability, and high photo-chemical reactivity. Furthermore, certain new ladder cyclic oligomers could be synthesized using a similar approach to that employed for the synthesis of noria and their application as next generation resist materials was also investigated

Report

(4 results)
  • 2012 Annual Research Report   Final Research Report ( PDF )
  • 2011 Annual Research Report
  • 2010 Annual Research Report
  • Research Products

    (60 results)

All 2013 2012 2011 2010 Other

All Journal Article (20 results) (of which Peer Reviewed: 20 results) Presentation (38 results) (of which Invited: 4 results) Remarks (2 results)

  • [Journal Article] Synthesis and Property of Noria (Water-Wheel Like Macrocycle) Derivatives with Pendant Alkoxyl and Adamantyl Ester Groups, and Their Application for Extreme Ultraviolet (EUV) Resist2013

    • Author(s)
      Nobumitsu Niina, Hiroto Kudo, Hiroaki Oizumi, Toshiro Itani, and Tadatomi Nishikubo
    • Journal Title

      Thin Solid Films

      Volume: 534 Pages: 459-464

    • Related Report
      2012 Annual Research Report 2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] 動的共有結合化学システムによるラダー型環状オリゴマーの合成とそれらを基盤とした光機能性材料2012

    • Author(s)
      工藤 宏人、西久保忠臣
    • Journal Title

      有機合成化学協会誌5月号(総合論文)

      Volume: 70 Pages: 492-507

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Impregnation of waterwheel supramolecules as proton carriers in Nafion-perfluorinated ionomer membranes2012

    • Author(s)
      Nadzrinahamin. A. Nazir, Hiroto Kudo, Tadatomi Nishikubo, Thein Kyu
    • Journal Title

      J Mater Sci

      Volume: 47 Pages: 7269-7279

    • Related Report
      2012 Annual Research Report 2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Synthesis of Triple-ringed[14]Arene via Dynamic Covalent Chemistry Mechanism in Condensation Reaction of Phenols with m-Benzenedicarboaldehyde2012

    • Author(s)
      Hiroyuki Seki, Shingo Kuwabara, Hiroto Kudo, and Tadatomi Nishikubo
    • Journal Title

      Chemistry Letters

      Volume: 41 Pages: 699-701

    • Related Report
      2012 Annual Research Report 2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Extreme Ultraviolet (EUV)-Resist Material Based on Noria (Water Wheel-like Macrocycle) Derivatives with Pendant Alkoxyl and Adamantyl Ester Groups2012

    • Author(s)
      Hiroto Kudo, Nobumitsu Niina, Tomoharu Sato, Hiroaki Oizumi, Toshiro Itani, Takuro Miura, Takeo Watanabe, Hiroo Kinoshita
    • Journal Title

      J. Photopolym. Sci. Technol.

      Volume: 25 Pages: 587-592

    • NAID

      130004833483

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] 動的共有結合化学システムによるラダー型環状オリゴマーの合成と、それらを基盤とした光機能性材料(UV硬化樹脂・分子レジスト)への応用2012

    • Author(s)
      工藤宏人、西久保忠臣
    • Journal Title

      有機合成化学協会誌5月号(総合論文)

      Volume: 70 Pages: 492-507

    • NAID

      10030765505

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Extreme Ultraviolet (EUV)-Resist Material Based on Noria (Water Wheel-like Macrocycle ) Derivatives with Pendant Alkoxyl and Adamantyl Ester Groups2012

    • Author(s)
      Hiroto Kudo, Nobumitsu Niina, Tomoharu Sato, Hiroaki Oizumi, Toshiro Itani, Takuro Miura, Takeo Watanabe, Hiroo Kinoshita
    • Journal Title

      J. Photopolym. Sci. Technol.

      Volume: 25 Pages: 587-592

    • NAID

      130004833483

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Synthesis and Property of Tellurium-containing Polymers Obtained by SimpleCondensation Reaction of Tetrachlorotellurium and 1,3-Dimethoxybenzene2011

    • Author(s)
      Hiroto Kudo, Hideatsu Ishihara, and Masashi Tomita
    • Journal Title

      Chemistry Letters

      Volume: 40 Pages: 762-764

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Condensation Reaction of Phenols with 1,5-Pentanedial for Synthesis of Noria-like Ladder-cyclic Oligomer by Dynamic Covalent Chemistry Mechanism2011

    • Author(s)
      Hiroyuki Seki, Shingo Kuwabara, Hiroto Kudo and Tadatomi Nishikubob
    • Journal Title

      Chemistry Letters

      Volume: 40 Pages: 464-466

    • NAID

      10028242461

    • Related Report
      2012 Final Research Report 2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Extreme Ultraviolet Resist Fabricated Using Water Wheel-Like Cyclic Oligomer with Pendant Adamantyl Ester Groups, Jpn2011

    • Author(s)
      Hiroyuki Seki, Hiroto Kudo, Hiroaki Oizumi, Toshiro Itani, and Tadatomi Nishikubo
    • Journal Title

      J. Appl. Phys

      Volume: 50

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Multicomponent negative-type photoresist based on Noria analog with 12 ethoxy groups2011

    • Author(s)
      Nobumitsu Niina, Hiroto Kudo, Ken Maruyama, Toshiyuki Kai,Tsutomu Shimokawa, Hiroaki Oizumi, Toshiro Itani, Tadatomi Nishikubo
    • Journal Title

      Polymer Journal

      Volume: 43 Pages: 407-413

    • NAID

      10028159565

    • Related Report
      2012 Final Research Report 2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Synthesis and Property of Tellurium-containing Polymers Obtained by Simple Condensation Reaction of Tetrachlorotellurium and 1,3-Dimethoxyben zene2011

    • Author(s)
      Hiroto Kudo, Hideatsu Ishihara, Masashi Tomita
    • Journal Title

      Chemistry Letters

      Volume: 40 Pages: 762-764

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Extreme Ultraviolet Resist Fabricated Using Water Wheel-Like Cyclic Oligomer with Pendant Adamantyl Ester Groups2011

    • Author(s)
      Hiroyuki Seki, Hiroto Kudo, Hiroaki Oizumi, Toshiro Itani, Tadatomi Nishikubo
    • Journal Title

      Jpn.J.Appl.Phys

      Volume: 50

    • NAID

      40019140824

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Synthesis and Photo-Cross-Linking Reaction of Noria Derivatives Containing Photoreactive Groups2010

    • Author(s)
      Hiroto Kudo, Nobumitsu Niina, Rieko Hayashi, Ken Kojima, Tadatomi Nishikubo
    • Journal Title

      Macromolecules

      Volume: 43(10) Pages: 4822-4826

    • Related Report
      2012 Final Research Report 2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Negative-type extreme ultraviolet resist materials based on water-wheel-like cyclic oligomer (noria)2010

    • Author(s)
      Hiroyuki Seki, Yuki kato, Hiroto Kudo, Hiroaki oizumi, Toshiro Itani, Tadatomi Nishikubo
    • Journal Title

      Jpn. J. Appl.

      Volume: 49

    • NAID

      210000068648

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Novel extreme ultraviolet (EUV)-resist material based on noria(water wheel-like cyclic oligomer)2010

    • Author(s)
      Hiroto Kudo, Yuji Suyama, Hiroaki Oizumi, Toshiro Itani, Tadatomi Nishikubo
    • Journal Title

      Journal of Materials Chemistry

      Volume: 20(21) Pages: 4445-4450

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] xtreme Ultraviolet (EUV)-Resist Materials of Noria (Water Wheel-Like Cyclic Oligomer) Derivatives containing Acetal Moieties2010

    • Author(s)
      Hiroto Kudo, Mayumi Jinguji, Tadatomi Nishikubo, Hiroaki Oizumi, Toshiro Itani
    • Journal Title

      J. Photopolym. Sci. Technol

      Volume: 23(5) Pages: 657-664

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Negative-type extreme ultraviolet resist materials based on water-wheel-like cyclic oligomer (noria)2010

    • Author(s)
      Hiroyuki Seki, Yuki kato, Hiroto Kudo, Hiroaki oizumi, Toshiro Itani, Tadatomi Nishikubo
    • Journal Title

      Jpn.J.Appl.Phys.

      Volume: 49,06GF06 Pages: 1-6

    • NAID

      210000068648

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Novel extreme ultraviolet(EUV)-resist material based on noria (water wheel-like cyclic oligomer)2010

    • Author(s)
      Hiroto Kudo, Yuji Suyama, Hiroaki Oizumi, Toshiro Itaru, Tadatomi Nishikubo
    • Journal Title

      Journal of Materials Chemistry

      Volume: 20(21) Pages: 4445-4450

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Extreme Ultraviolet (EUV)-Resist Materials of Noria (Water Wheel-Like Cyclic Oligomer) Derivatives containing Acetal Moieties2010

    • Author(s)
      Hiroto Kudo, Mayumi Jinguji, Tadatomi Nishikubo, Hiroaki Oizumi, Toshiro Itani
    • Journal Title

      J.Photopolym.Sci.Technol

      Volume: 23(5) Pages: 657-664

    • NAID

      40017186910

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Presentation] Novel Molecular Resist Materials based on Cyclic Oligomers2013

    • Author(s)
      Hiroto Kudo
    • Organizer
      2nd International EUV Resist Synmpojium
    • Place of Presentation
      大阪大学中之島センター(大阪)
    • Related Report
      2012 Final Research Report
  • [Presentation] Novel Molecular Resist Materials based on Cyclic Oligomers2013

    • Author(s)
      Hiroto Kudo
    • Organizer
      2nd International EUV Resist Synmpojium
    • Place of Presentation
      大阪大学中之島センター(大阪)
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Presentation] 極端紫外線(EUVL)用分子レジスト材料の開発 (1Xnm以下の解像性をめざして)2012

    • Author(s)
      工藤 宏人
    • Organizer
      日本化学会 第92春季年会 (招待講演)
    • Place of Presentation
      慶応大学日吉キャンパス
    • Year and Date
      2012-03-28
    • Related Report
      2012 Final Research Report
  • [Presentation] 極端紫外線(EUVL)用分子レジスト材料の開発(1Xnm以下の解像性をめざして)2012

    • Author(s)
      工藤宏人
    • Organizer
      日本化学会第92春季年会
    • Place of Presentation
      慶応大学日吉キャンパス(招待講演)
    • Year and Date
      2012-03-28
    • Related Report
      2011 Annual Research Report
  • [Presentation] Extreme Ultraviolet (EUV)-Resist Material Based on Noria (Water Wheel-like Macrocycle) Derivatives2012

    • Author(s)
      Hiroto Kudo
    • Organizer
      International Advanced Nanopatterning Materials and Processes Workshop
    • Place of Presentation
      早稲田国際会議場(東京)
    • Related Report
      2012 Final Research Report
  • [Presentation] Extreme Ultraviolet (EUV)-Resist Material Based on Noria (Water Wheel-like Macrocycle) Derivatives with Pendant Alkoxyl and Adamantyl Ester Groups2012

    • Author(s)
      Hiroto Kudo, Nobumitsu Niina, Tomoharu Sato, Hiroaki Oizumi, Toshiro Itani, Takuro Miura, Takeo Watanabe, Hiroo Kinoshita
    • Organizer
      The 29th International Conference of Photopolymer Science and Technology
    • Place of Presentation
      千葉大学コンベンションホール(千葉県)
    • Related Report
      2012 Final Research Report
  • [Presentation] 動的共有結合による籠状分子の合成と光機能材料への応用2012

    • Author(s)
      工藤 宏人
    • Organizer
      高分子学会
    • Place of Presentation
      横浜国際会議場(神奈川県)
    • Related Report
      2012 Final Research Report
  • [Presentation] 動的共有結合による籠状分子の合成と光機能材料への応用2012

    • Author(s)
      工藤宏人
    • Organizer
      高分子学会
    • Place of Presentation
      横浜国際会議場(神奈川県)
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Presentation] Extreme Ultraviolet (EUV)-Resist Material Based on Noria (Water Wheel-like Macrocycle ) Derivatives with Pendant Alkoxyl and Adamantyl Ester Groups2012

    • Author(s)
      Hiroto Kudo, Nobumitsu Niina, Tomoharu Sato, Hiroaki Oizumi, Toshiro Itani, Takuro Miura, Takeo Watanabe, Hiroo Kinoshita
    • Organizer
      The 29th International Conference of Photopolymer Science and Technology
    • Place of Presentation
      千葉大学コンベンションホール(千葉県)
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Presentation] Extreme Ultraviolet (EUV)-Resist Material Based on Noria (Water Wheel-like Macrocycle ) Derivatives2012

    • Author(s)
      Hiroto Kudo
    • Organizer
      International Advanced Nanopatterning Materials and Processes Workshop
    • Place of Presentation
      早稲田国際会議場(東京)
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Presentation] アセタール残基を有するNoria誘導体を基盤としたレジスト材料の開発2011

    • Author(s)
      神宮司真由美・工藤 宏人・西久保忠臣・老泉博昭・伊谷俊郎・丸山研・木村徹・下川努
    • Organizer
      第60回高分子討論会
    • Place of Presentation
      岡山大学
    • Year and Date
      2011-09-30
    • Related Report
      2012 Final Research Report 2011 Annual Research Report
  • [Presentation] コアに空孔を有する構造が制御されたスターポリスチレンの合成2011

    • Author(s)
      木原宏介・工藤 宏人・西久保忠臣
    • Organizer
      第60回高分子討論会
    • Place of Presentation
      岡山大学
    • Year and Date
      2011-09-30
    • Related Report
      2012 Final Research Report 2011 Annual Research Report
  • [Presentation] ビシクロオルソエステル残基を有するカリックスアレーン類の合成とそれらの屈折率変換特性2011

    • Author(s)
      清水達記、工藤 宏人、西久保忠臣
    • Organizer
      第60回高分子討論会
    • Place of Presentation
      岡山大学
    • Year and Date
      2011-09-30
    • Related Report
      2012 Final Research Report 2011 Annual Research Report
  • [Presentation] オキセタニル基とカルボキシル基を有するアミノ酸誘導体類の合成と自己重付加反応、および得られたポリマー類の物理特性と生分解性2011

    • Author(s)
      大城利樹.・工藤 宏人・西久保忠臣
    • Organizer
      第60回高分子討論会
    • Place of Presentation
      岡山大学
    • Year and Date
      2011-09-29
    • Related Report
      2012 Final Research Report 2011 Annual Research Report
  • [Presentation] 環状チオウレタン類を開始剤として用いた環拡大重合法による構造の制御された環状ポリマーの合成2011

    • Author(s)
      武士由希・島 茂記・工藤 宏人・西久保 忠臣
    • Organizer
      第60回高分子討論会
    • Place of Presentation
      岡山大学
    • Year and Date
      2011-09-29
    • Related Report
      2012 Final Research Report
  • [Presentation] アダマンチルエステル残基を有するトリプルカリックスレゾルシンアレーン誘導体類の合成とそれらのレジスト材料への応用2011

    • Author(s)
      関浩之・工藤宏人・丸山研・木村徹・下川努・西久保忠臣
    • Organizer
      第60回高分子討論会
    • Place of Presentation
      岡山大学
    • Year and Date
      2011-09-29
    • Related Report
      2011 Annual Research Report
  • [Presentation] 環状チオウレタン類を開始剤として用いた環拡大重合法による環状ポリスルフィドの合成2011

    • Author(s)
      武士由希・島茂記・工藤宏人・西久保忠臣
    • Organizer
      第60回高分子討論会
    • Place of Presentation
      岡山大学
    • Year and Date
      2011-09-29
    • Related Report
      2011 Annual Research Report
  • [Presentation] ビシクロオルトエステル基を有するカゴ型シルセスキオキサンの合成と性質、および屈折率特性変化2011

    • Author(s)
      鈴木穰次・工藤宏人・西久保忠臣
    • Organizer
      第60回高分子討論会
    • Place of Presentation
      岡山大学
    • Year and Date
      2011-09-28
    • Related Report
      2011 Annual Research Report
  • [Presentation] アダマンチルエステル残基を有するダブルカリックスアレーン誘導体の合成とそれらを基盤としたレジスト材料の開発2011

    • Author(s)
      森山和樹・西久保忠臣・工藤宏人・老泉博昭・井谷俊郎・丸山研・木村徹・下川努
    • Organizer
      第60回高分子討論会
    • Place of Presentation
      岡山大学
    • Year and Date
      2011-09-28
    • Related Report
      2011 Annual Research Report
  • [Presentation] アダマンチル残基を有するカリックスアレーン二量体の合成と性質、およびそれらのEB・EUVレジスト材料への応用2011

    • Author(s)
      佐藤友治・荒井義明・工藤宏人・西久保忠臣・井谷俊郎・老泉博昭
    • Organizer
      第60回高分子討論会
    • Place of Presentation
      岡山大学
    • Year and Date
      2011-09-28
    • Related Report
      2011 Annual Research Report
  • [Presentation] Recent Development in Molecular Resists for Extreme Ultraviolet Lithography2011

    • Author(s)
      工藤 宏人・西久保忠臣
    • Organizer
      The 28th International Conference of Photopolymer Science and Technology (ICPST-28)
    • Place of Presentation
      千葉大学
    • Year and Date
      2011-06-22
    • Related Report
      2012 Final Research Report
  • [Presentation] Recent Development in Molecular Resists for Extreme Ultraviolet Lithography2011

    • Author(s)
      工藤宏人・西久保忠臣
    • Organizer
      The 28^<th> International Conference of Photopolymer Science and Technology (ICPST-28)
    • Place of Presentation
      千葉大学(招待講演)
    • Year and Date
      2011-06-22
    • Related Report
      2011 Annual Research Report
  • [Presentation] Extreme Ultraviolet (EUV) . Resist Materials based on Water Wheel-like Cyclic Oligomer (Noria)2011

    • Author(s)
      工藤宏人・西久保忠臣
    • Organizer
      RadTech Asia 2011
    • Place of Presentation
      横浜国際会議場
    • Year and Date
      2011-06-21
    • Related Report
      2012 Final Research Report
  • [Presentation] Extreme Ultraviolet (EUV)-Resist Materials based on Water Wheel-like Cyclic Oligomer (Noria)2011

    • Author(s)
      工藤宏人・西久保忠臣
    • Organizer
      RadTech Asia 2011
    • Place of Presentation
      横浜国際会議場
    • Year and Date
      2011-06-21
    • Related Report
      2011 Annual Research Report
  • [Presentation] 1分子内にオキセタニル基、カルボキシル基、およびチオール基を有するモノマー(ABCタイプモノマー)の自己重付加反応と得られたポリマーの性質2011

    • Author(s)
      大城利樹・工藤宏人・西久保忠臣
    • Organizer
      第60回高分子学会年次大会
    • Place of Presentation
      大阪国際会議場
    • Year and Date
      2011-05-27
    • Related Report
      2011 Annual Research Report
  • [Presentation] アダマンチルエステル残基を有するカリックス[4]レゾルシンアレーントリマー(C7-trimer)誘導体の合成とそれらのEUVレジスト材料への応用2011

    • Author(s)
      石原 秀篤・森山 和樹・ 工藤 宏人・西久保 忠臣・老泉博昭・井谷 俊郎
    • Organizer
      第60回高分子学会年次大会
    • Place of Presentation
      大阪国際会議場
    • Year and Date
      2011-05-26
    • Related Report
      2012 Final Research Report 2011 Annual Research Report
  • [Presentation] レゾルシノールと1,6-ヘキサンジア.ルの縮合反応によるラダ.型環状オリゴマーの合成とそれらの極端紫外線(EUV)レジスト材料への応用2011

    • Author(s)
      佐藤 友治・井谷 俊郎・老泉博昭・工藤 宏人・西久保 忠臣
    • Organizer
      60回高分子学会年次大会
    • Place of Presentation
      大阪国際会議場
    • Year and Date
      2011-05-26
    • Related Report
      2012 Final Research Report
  • [Presentation] ダマンチルアセタール残基を有するNoria誘導体の合成と、それらのEB、EUVレジスト特性2011

    • Author(s)
      神宮司 真由美・工藤 宏人・西久保 忠臣・老泉 南昭・井谷 俊郎・ 丸山 研・木村 徹・下川 努
    • Organizer
      第60回高分子学会年次大会
    • Place of Presentation
      大阪国際会議場
    • Year and Date
      2011-05-26
    • Related Report
      2012 Final Research Report
  • [Presentation] アダマンチルアセタール残基を有するNoria誘導体の合成と、それらのEB、EUVレジスト特性2011

    • Author(s)
      神宮司真由美・工藤宏人・西久保忠臣・老泉南昭・井谷俊郎・丸山研・木村徹・下川努
    • Organizer
      第60回高分子学会年次大会
    • Place of Presentation
      大阪国際会議場
    • Year and Date
      2011-05-26
    • Related Report
      2011 Annual Research Report
  • [Presentation] レゾルシノールと1,6-ヘキサンジア〓ルの縮合反応によるラダ〓型環状オリゴマ〓の合成とそれらの極端紫外線(EUV)レジスト材料への応用2011

    • Author(s)
      佐藤友治・井谷俊郎・老泉博昭・工藤宏人・西久保忠臣
    • Organizer
      第60回高分子学会年次大会
    • Place of Presentation
      大阪国際会議場
    • Year and Date
      2011-05-26
    • Related Report
      2011 Annual Research Report
  • [Presentation] ビシクロオルソエステル残基を有するカリックスアレ-ン誘導.の合成と光反応およびそれらの屈折率上昇材2011

    • Author(s)
      清水 達記・工藤 宏人・西久保 忠臣
    • Organizer
      第60回高分子学会年次大会
    • Place of Presentation
      大阪国際会議場
    • Year and Date
      2011-05-25
    • Related Report
      2012 Final Research Report
  • [Presentation] ビシクロオルソエステル残基を有するカリックスアレーン誘導〓の合成と光反応およびそれらの屈折率上昇材2011

    • Author(s)
      清水達記・工藤宏人・西久保忠臣
    • Organizer
      第60回高分子学会年次大会
    • Place of Presentation
      大阪国際会議場
    • Year and Date
      2011-05-25
    • Related Report
      2011 Annual Research Report
  • [Presentation] 環状チオウレタン類を開始剤として用いた環拡大重合法による構造の制御された環状ポリマーの合成2011

    • Author(s)
      武士由希・島茂記・工藤宏人・西久保忠臣
    • Organizer
      第60回高分子学会年次大会
    • Place of Presentation
      大阪国際会議場
    • Year and Date
      2011-05-25
    • Related Report
      2011 Annual Research Report
  • [Presentation] Noria骨〓をテンプレートとしたコア架橋型スターポリマーの合成とその特性2011

    • Author(s)
      木原宏介・工藤宏人・西久保忠臣
    • Organizer
      第60回高分子学会年次大会
    • Place of Presentation
      大阪国際会議場
    • Year and Date
      2011-05-25
    • Related Report
      2011 Annual Research Report
  • [Presentation] 動的共有結合化学を利用したレゾルシノール類とm-ベンゼンジカルボアルデヒドとの縮合反応によるラダー型オリゴマーの合成2011

    • Author(s)
      関浩之・工藤宏人・西久保忠臣
    • Organizer
      第60回高分子学会年次大会
    • Place of Presentation
      大阪国際会議場
    • Year and Date
      2011-05-25
    • Related Report
      2011 Annual Research Report
  • [Presentation] 動的共有結合化学システムの構築による特殊構造分子の合成と応用(16 nm以下の高解像度レジスト材料の開発を目指して)2010

    • Author(s)
      工藤 宏人
    • Organizer
      関東高分子若手研究会
    • Place of Presentation
      横浜国立大学
    • Year and Date
      2010-11-20
    • Related Report
      2012 Final Research Report 2010 Annual Research Report
  • [Presentation] Positive and Negative Type Extreme Ultraviolet (EUV) . Resist Materials based on Noria (Water Wheel-like Cyclic Oligomer)2010

    • Author(s)
      工藤 宏人
    • Organizer
      The 27th International Conference of Photopolymer Science and Technology Materials and Propcess for Advanced Microlithography and Nanotechnology
    • Place of Presentation
      千葉大学
    • Year and Date
      2010-06-23
    • Related Report
      2012 Final Research Report
  • [Presentation] Positive and Negative Type Extreme Ultraviolet (EUV)-Resist Materials based on Noria (Water Wheel-like Cyclic Oligomer)2010

    • Author(s)
      工藤宏人
    • Organizer
      For The 27^<th> International Conference of Photopolymer Science and Technology Materials and Propcess for Advanced Microlithography and Nanotechnology
    • Place of Presentation
      千葉大学
    • Year and Date
      2010-06-23
    • Related Report
      2010 Annual Research Report
  • [Remarks]

    • URL

      http://www2.kansai-u.ac.jp/kudo-lab/

    • Related Report
      2012 Final Research Report
  • [Remarks] 関西大学 化学生命工学部 化学・物質工学科 高分子合成化学研究室

    • URL

      http://www2.kansai-u.ac.jp/kudo-lab/

    • Related Report
      2012 Annual Research Report

URL: 

Published: 2010-08-23   Modified: 2019-07-29  

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