Synthesis of Cyclic Oligomers by the Dynamic Covalent Chemistry Mechanism and their Application for Resist Materials
| Project/Area Number |
22350088
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Organic industrial materials
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| Research Institution | Kansai University (2012)
Kanagawa University (2010-2011) |
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Principal Investigator |
KUDO Hiroto 関西大学, 化学生命工学部, 准教授 (30343635)
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| Project Period (FY) |
2010 – 2012
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| Project Status |
Completed (Fiscal Year 2012)
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| Budget Amount *help |
¥19,760,000 (Direct Cost: ¥15,200,000、Indirect Cost: ¥4,560,000)
Fiscal Year 2012: ¥2,210,000 (Direct Cost: ¥1,700,000、Indirect Cost: ¥510,000)
Fiscal Year 2011: ¥2,210,000 (Direct Cost: ¥1,700,000、Indirect Cost: ¥510,000)
Fiscal Year 2010: ¥15,340,000 (Direct Cost: ¥11,800,000、Indirect Cost: ¥3,540,000)
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| Keywords | レジスト / 極端紫外線 / 環状オリゴマー / ノーリア / 化学増幅型レジスト / 分子レジスト / 動的共有結合化学 / 電子線 / 光機能性材料 |
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| Research Abstract |
A new dynamic covalent chemistry (DCC) system in the reaction of resorcinol and 1,5-pentanedial could be achieved, yielding a only soluble oligomer noria (noria means water wheel in Latin) in high yield, resembling a water-wheel in appearance. Application of the noria derivatives with pendant photo-reactive groups were examined for UV-curing materials and photo-resist materials. The obtained noria derivatives had good solubility, good film-forming ability, high thermal stability, and high photo-chemical reactivity. Furthermore, certain new ladder cyclic oligomers could be synthesized using a similar approach to that employed for the synthesis of noria and their application as next generation resist materials was also investigated
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Report
(4 results)
Research Products
(60 results)
