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Growth of high phase purity cubic III-nitride semiconductor thin films and application of their heterostructures

Research Project

Project/Area Number 22360005
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Applied materials science/Crystal engineering
Research InstitutionThe University of Tokyo

Principal Investigator

ONABE Kentaro  東京大学, 大学院・新領域創成科学研究科, 教授 (50204227)

Co-Investigator(Renkei-kenkyūsha) YAGUCHI Hiroyuki  埼玉大学, 大学院・理工学研究科, 教授 (50239737)
KATAYAMA Ryuji  東北大学, 金属材料研究所, 准教授 (40343115)
KUBOYA Shigeyuki  東京大学, 大学院・新領域創成科学研究科, 助教 (70583615)
Research Collaborator SAKUNTAM Sanorpim  チュラロンコン大学(タイ), 理学部, 助教授
Project Period (FY) 2010 – 2012
Project Status Completed (Fiscal Year 2012)
Budget Amount *help
¥13,520,000 (Direct Cost: ¥10,400,000、Indirect Cost: ¥3,120,000)
Fiscal Year 2012: ¥2,990,000 (Direct Cost: ¥2,300,000、Indirect Cost: ¥690,000)
Fiscal Year 2011: ¥2,990,000 (Direct Cost: ¥2,300,000、Indirect Cost: ¥690,000)
Fiscal Year 2010: ¥7,540,000 (Direct Cost: ¥5,800,000、Indirect Cost: ¥1,740,000)
Keywordsエピタキシャル成長 / 立方晶窒化物半導体 / 立方晶III-N半導体 / 窒化物半導体 / III-N半導体 / MOVPE / MBE / 半導体物性 / 結晶成長 / 立方晶III族窒化物 / III族窒化物半導体
Research Abstract

High cubic phase purity films and their hetero-structures of III-nitride semiconductors including GaN, InN, AlN and related alloys have been realized using metalorganic vapor phase epitaxy or molecular beam epitaxy. Their basic physical properties such as phase purity, defect nature, luminescence and electrical conduction have been clarified in relation with the growth conditions. In particular, the usefulness of YSZ(001) substrates for cubic InN and InGaN films, conductivity control by Si doping to cubic GaN and AlGaN films, and the bandgap value for cubic AlN are established.

Report

(4 results)
  • 2012 Annual Research Report   Final Research Report ( PDF )
  • 2011 Annual Research Report
  • 2010 Annual Research Report
  • Research Products

    (63 results)

All 2013 2012 2011 2010 Other

All Journal Article (13 results) (of which Peer Reviewed: 9 results) Presentation (48 results) Remarks (2 results)

  • [Journal Article] RF-MBE growth of cubic AlN on MgO(001) substrates via 2-step c-GaN buffer2013

    • Author(s)
      M. Kakuda, S. Morikawa, S. Kuboya、R. Katayama, H. Yaguchi, K. Onabe,
    • Journal Title

      Journal of Crystal Growth

      Volume: (In Press)

    • URL

      http://www.sciencedirect.com/science/journal/00220248?oldURL=y

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] RF-MBE growth of cubic AlN on MgO (001) substrates via 2-step c-GaN buffer2013

    • Author(s)
      M. Kakuda, S. Morikawa, S. Kuboya、R. Katayama, H. Yaguchi, K. Onabe
    • Journal Title

      Journal of Crystal Growth

      Volume: In Press

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] MBE growth of cubic AlN films on MgO substrate via cubic GaN buffer layer2012

    • Author(s)
      M. Kakuda, K. Makino, T. Ishida, S.Kuboya, K. Onabe
    • Journal Title

      physica status solidi(c)

      Volume: Vol. 9 Issue: 3-4 Pages: 558-561

    • DOI

      10.1002/pssc.201100395

    • Related Report
      2012 Annual Research Report 2012 Final Research Report 2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] TEMinvestigation of anisotropic defect structure in cubic GaN/AlGaAs/GaAs(001) grown by MOVPE2011

    • Author(s)
      J. Parinyataramas, S. Sanorpim, C.Thanachayanont, K. Onabe
    • Journal Title

      physica status solidi (c)

      Volume: Vol. 8 Issue: 7-8 Pages: 2255-2257

    • DOI

      10.1002/pssc.201001170

    • Related Report
      2012 Final Research Report 2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] YSZ(001)微傾斜基板上立方晶InNへの六方晶相の混入傾向2011

    • Author(s)
      石田崇,角田雅弘,窪谷茂幸,尾鍋研太郎
    • Journal Title

      第58回応用物理学関係連合講演会予稿集

      Volume: CD-ROM

    • Related Report
      2012 Final Research Report
  • [Journal Article] 立方晶GaNバッファー層を用いた立方晶AlNのRF-MBE成長2011

    • Author(s)
      角田雅弘,牧野兼三,石田崇,窪谷茂幸,尾鍋研太郎
    • Journal Title

      第58回応用物理学関係連合講演会予稿集

      Volume: CD-ROM

    • Related Report
      2012 Final Research Report
  • [Journal Article] RF-MBE growth of Si doped cubic GaN and hexagonal phase incorporated c-AlGaN films on MgO(001) substrates2011

    • Author(s)
      M. Kakuda, S. Kuboya, K. Onabe,
    • Journal Title

      Journal of Crystal Growth

      Volume: Vol.323 Pages: 91-94

    • URL

      http://www.sciencedirect.com/science/journal/00220248?oldURL=y

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] RF-MBE growth of Si doped cubic GaN and hexagonal phase incorporated c-AlGaN films on MgO(001) substrates2011

    • Author(s)
      M.Kakuda, S.Kuboya, K.Onabe
    • Journal Title

      Journal of Crystal Growth

      Volume: 323 Pages: 91-94

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] RF-MBE growth of Si doped cubic GaN and hexagonal phase incorporated c-AlGaN films on MgO (001) substrates2011

    • Author(s)
      M.Kakuda, S.Kuboya, K.Onabe
    • Journal Title

      Journal of Crystal Growth

      Volume: 323 Pages: 91-94

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 立方晶GaNバッファー層を用いた立方晶AlNのRF-MBE成長2011

    • Author(s)
      角田雅弘, 牧野兼三, 石田崇, 窪谷茂幸, 尾鍋研太郎
    • Journal Title

      2011年春季第58回応用物理学関係連合講演会予稿集

      Volume: (CD-ROM)

    • Related Report
      2010 Annual Research Report
  • [Journal Article] YSZ(001)微傾斜基板上立方晶InNへの六方晶相の混入傾向2011

    • Author(s)
      石田崇, 角田雅弘, 窪谷茂幸, 尾鍋研太郎
    • Journal Title

      2011年春季第58回応用物理学関係連合講演会予稿集

      Volume: (CD-ROM)

    • Related Report
      2010 Annual Research Report
  • [Journal Article] A growth model of cubic GaN microstripes grown by MOVPE: Vapour Phase diffusion model including surface migration effects2010

    • Author(s)
      P. Sukkaew, S. Sanorpim, K. Onabe
    • Journal Title

      physica status solidi(a)

      Volume: Vol. 207 Issue: 6 Pages: 1372-1374

    • DOI

      10.1002/pssa.200983548

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] A growth model of cubic GaN microstripes grown by MOVPE : Vapour Phase diffusion model including surface migration effects2010

    • Author(s)
      P.Sukkaew, S.Sanorpim, K.Onabe
    • Journal Title

      physica status solidi (a)

      Volume: 207 Pages: 1372-1374

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Presentation] Y立方晶AlNおよび高Al濃度立方晶AlGaNのRF-MBE成長2013

    • Author(s)
      角田雅弘,森川生,窪谷茂幸,片山竜二,矢口裕之,尾鍋研太郎
    • Organizer
      第60回応用物理学会春季学術講演会
    • Place of Presentation
      神奈川工科大学(神奈川)
    • Year and Date
      2013-03-28
    • Related Report
      2012 Final Research Report
  • [Presentation] Growth of Cubic AlN Films on MgO substrates by MBE2012

    • Author(s)
      M. Kakuda, S. Morikawa, S. Kuboya,R. Katayama, H. Yaguchi, K. Onabe,
    • Organizer
      GCOE International Sympsium on Physical Sciences Frontier
    • Place of Presentation
      東京
    • Year and Date
      2012-12-09
    • Related Report
      2012 Final Research Report
  • [Presentation] RF-MBEGrowth of cubic AlN on MgO(001) substrates via 2-step c-GaN buffer layer2012

    • Author(s)
      M. Kakuda, S. Morikawa, S. Kuboya, R. Katayama, K. Onabe
    • Organizer
      17th International Conference on Molecular Beam Epitaxy (MBE2012)
    • Place of Presentation
      奈良(奈良)
    • Year and Date
      2012-09-24
    • Related Report
      2012 Final Research Report
  • [Presentation] Growth of cubic AlN films on MgO substrate via2-step cubic GaN buffer layer by RF-MBE2012

    • Author(s)
      M. Kakuda, S. Morikawa, S. Kuboya,R. Katayama, K. Onabe
    • Organizer
      31th Electronic Materials Symposium (EMS-31)
    • Place of Presentation
      伊豆(静岡)
    • Year and Date
      2012-07-11
    • Related Report
      2012 Final Research Report
  • [Presentation]2012

    • Author(s)
      角田雅弘,森川生,窪谷茂幸,片山竜二,尾鍋研太郎
    • Organizer
      第4回窒化物半導体結晶成長講演会
    • Place of Presentation
      東京大学(東京)
    • Year and Date
      2012-04-27
    • Related Report
      2012 Final Research Report
  • [Presentation] 立方晶GaNバッファー層を用いた立方晶AlNのRF-MBE成長(3)2012

    • Author(s)
      角田雅弘,森川生,窪谷茂幸,尾鍋研太郎
    • Organizer
      第59回応用物理学関係連合講演会
    • Place of Presentation
      早稲田大学(東京).
    • Year and Date
      2012-03-16
    • Related Report
      2012 Final Research Report
  • [Presentation] 立方晶GaNバッファー層を用いた立方晶AlNのRF-MBE成長(3)2012

    • Author(s)
      角田雅弘, 森川生、窪谷茂幸, 尾鍋研太郎
    • Organizer
      2012年春季第59回応用物理学関係連合講演会
    • Place of Presentation
      早稲田大学(東京都新宿区)
    • Year and Date
      2012-03-16
    • Related Report
      2011 Annual Research Report
  • [Presentation] 立方晶GaNバッファー層を用いた立方晶AlNのRF-MBE成長(2)2011

    • Author(s)
      角田雅弘,牧野兼三,石田崇,窪谷茂幸,尾鍋研太郎
    • Organizer
      第72回応用物理学会学術講演会
    • Place of Presentation
      山形大学(山形)
    • Year and Date
      2011-08-30
    • Related Report
      2012 Final Research Report
  • [Presentation] YSZ(001)微傾斜基板上立方晶InNへの六方晶相の混入比率の偏り2011

    • Author(s)
      石田崇,角田雅弘,窪谷茂幸,尾鍋研太郎
    • Organizer
      第72回応用物理学会学術講演会
    • Place of Presentation
      山形大学(山形)
    • Year and Date
      2011-08-30
    • Related Report
      2012 Final Research Report
  • [Presentation] YSZ(001)微傾斜基板上立方晶InNへの六方晶相の混入比率の偏り2011

    • Author(s)
      石田崇、角田雅弘, 窪谷茂幸, 尾鍋研太郎
    • Organizer
      2011年秋季第72回応用物理学会学術講演会
    • Place of Presentation
      山形大学(山形県山形市)
    • Year and Date
      2011-08-30
    • Related Report
      2011 Annual Research Report
  • [Presentation] 立方晶GaNバッファー層を用いた立方晶AlNのRF-MBE成長(2)2011

    • Author(s)
      角田雅弘, 牧野兼三、石田崇、窪谷茂幸, 尾鍋研太郎
    • Organizer
      2011年秋季第72回応用物理学会学術講演会
    • Place of Presentation
      山形大学(山形県山形市)
    • Year and Date
      2011-08-30
    • Related Report
      2011 Annual Research Report
  • [Presentation] MBE growth of cubic AlN films on MgO substrate via cubic GaN buffer layer2011

    • Author(s)
      M. Kakuda, K. Makino, T. Ishida, S. Kuboya, K. Onabe
    • Organizer
      9th International Conference on Nitride Semiconductors (ICNS-9)
    • Place of Presentation
      Glasgow, UK.
    • Year and Date
      2011-07-12
    • Related Report
      2012 Final Research Report
  • [Presentation] MBE growth of cubic AlN films on MgO substrate via cubic GaN buffer layer2011

    • Author(s)
      M.Kakuda, K.Makino, T.Ishida, S.Kuboya, K.Onabe
    • Organizer
      9th International Conference on Nitride Semiconductors (ICNS-9)
    • Place of Presentation
      Glasgow, UK
    • Year and Date
      2011-07-12
    • Related Report
      2011 Annual Research Report
  • [Presentation] Cubic InN films on YSZ(001) vicinal substrates grown by RF-MBE2011

    • Author(s)
      T. Ishida, M. Kakuda, S. Kuboya, K.Onabe
    • Organizer
      30th Electronic Materials Symposium (EMS-30)
    • Place of Presentation
      守山(滋賀).
    • Year and Date
      2011-07-01
    • Related Report
      2012 Final Research Report
  • [Presentation] Cubic InN films on YSZ(001) vicinal substrates grown by RF-MBE2011

    • Author(s)
      T.Ishida, M.Kakuda, S.Kuboya, K.Onabe
    • Organizer
      30th Electronic Materials Symposium (EMS-30)
    • Place of Presentation
      Laforet Biwako, Moriyama, Shiga, Japan
    • Year and Date
      2011-07-01
    • Related Report
      2011 Annual Research Report
  • [Presentation] RF-MBE growth of cubic AlN films on MgO substrate via cubic GaN buffer layer2011

    • Author(s)
      M. Kakuda, K. Makino, T. Ishida, S. Kuboya, K. Onabe
    • Organizer
      30th Electronic Materials Symposium (EMS-30)
    • Place of Presentation
      守山(滋賀).
    • Year and Date
      2011-06-30
    • Related Report
      2012 Final Research Report
  • [Presentation] RF-MBE growth of cubic AlN films on MgO substrate via cubic GaN buffer layer2011

    • Author(s)
      M.Kakuda, K.Makino, T.Ishida, S.Kuboya, K.Onabe
    • Organizer
      30th Electronic Materials Symposium (EMS-30)
    • Place of Presentation
      Laforet Biwako, Moriyama, Shiga, Japan
    • Year and Date
      2011-06-30
    • Related Report
      2011 Annual Research Report
  • [Presentation] Growth of cubic InN films on YSZ(001) vicinal substrates by RF-MBE2011

    • Author(s)
      T. Ishida, M. Kakuda, S. Kuboya, K. Onabe
    • Organizer
      Asia-Pacific Workshop on Widegap Semiconductors (APWS-2011)
    • Place of Presentation
      Toba, Mie, Japan.
    • Year and Date
      2011-05-25
    • Related Report
      2012 Final Research Report
  • [Presentation] Growth of cubic AlN films on MgO substrate using cubic GaN buffer layer by RF-MBE2011

    • Author(s)
      M. Kakuda, K. Makino, T. Ishida, S. Kuboya, K. Onabe
    • Organizer
      Asia-Pacific Workshop on Widegap Semiconductors(APWS-2011)
    • Place of Presentation
      Toba,Mie, Japan.
    • Year and Date
      2011-05-25
    • Related Report
      2012 Final Research Report
  • [Presentation] Growth of cubic AlN films on MgO substrate using cubic GaN buffer layer by RF-MBE2011

    • Author(s)
      M.Kakuda, K.Makino, T.Ishida, S.Kuboya, K.Onabe
    • Organizer
      Asia-Pacific Workshop on Widegap Semiconductors (APWS-2011)
    • Place of Presentation
      Toba Hotel International Toba, Mie, Japan
    • Year and Date
      2011-05-25
    • Related Report
      2011 Annual Research Report
  • [Presentation] Growth of cubic InN films on YSZ(001) vicinal substrates by RF-MBE2011

    • Author(s)
      T.Ishida, M.Kakuda, S.Kuboya, K.Onabe
    • Organizer
      Asia-Pacific Workshop on Widegap Semiconductors (APWS-2011)
    • Place of Presentation
      Toba Hotel International Toba, Mie, Japan
    • Year and Date
      2011-05-25
    • Related Report
      2011 Annual Research Report
  • [Presentation] Cubic III-nitrides: potential photonic materials (Invited)2011

    • Author(s)
      K. Onabe, S.Sanorpim, H. Kato, M.Kakuda, T. Nakamura, K. Nakamura, S.Kuboya, R. Katayama
    • Organizer
      SPIE Photonic West 2011
    • Place of Presentation
      San Francisco, CA,USA.
    • Year and Date
      2011-01-24
    • Related Report
      2012 Final Research Report
  • [Presentation] Cubic III-nitrides : potential photonic materials2011

    • Author(s)
      K.Onabe, S.Sanorpim, H.Kato, M.Kakuda, T.Nakamura, K.Nakamura, S.Kuboya, R.Katayama
    • Organizer
      SPIE Photonic West 2011
    • Place of Presentation
      San Francisco, CA, USA(Invited)
    • Year and Date
      2011-01-24
    • Related Report
      2010 Annual Research Report
  • [Presentation] RF-MBE Growth of Cubic InN and InGaN Films on YSZ(001) Substrates2010

    • Author(s)
      K. Nakamura, T. Ishida, M. Kakuda,S. Kuboya, K. Onabe
    • Organizer
      International Workshop on Nitride Semiconductors(IWN2010)
    • Place of Presentation
      Tampa,Florida, USA.
    • Year and Date
      2010-09-20
    • Related Report
      2012 Final Research Report
  • [Presentation] RF-MBE Growth of Cubic InN and InGaN Films on YSZ (001) Substrates2010

    • Author(s)
      K.Nakamura, T.Ishida, M.Kakuda, S.Kuboya, K.Onabe
    • Organizer
      International Workshop on Nitride Semiconductors (IWN2010)
    • Place of Presentation
      Tampa, Florida, USA
    • Year and Date
      2010-09-20
    • Related Report
      2010 Annual Research Report
  • [Presentation] RF-MBE法によるMgO(001)基板上Siドープ立方晶AlGaNの薄膜成長2010

    • Author(s)
      角田雅弘,窪谷茂幸,尾鍋研太郎
    • Organizer
      第71回応用物理学会学術講演会
    • Place of Presentation
      長崎大学(長崎)
    • Year and Date
      2010-08-27
    • Related Report
      2012 Final Research Report
  • [Presentation] Growth of cubic InN and InGaN films on YSZ (001) substrates by RF-MBE2010

    • Author(s)
      K.Nakamura, T.Ishida, M.Kakuda, S.Kuboya, K.Onabe
    • Organizer
      16th International Conference on Molecular Beam Epitaxy
    • Place of Presentation
      Berlin, Germany
    • Year and Date
      2010-08-27
    • Related Report
      2010 Annual Research Report
  • [Presentation] RF-MBE法によるMgO(001)基板上Siドープ立方晶AlGaNの薄膜成長2010

    • Author(s)
      角田雅弘, 窪谷茂幸, 尾鍋研太郎
    • Organizer
      第71回応用物理学会学術講演会
    • Place of Presentation
      長崎大学(長崎県長崎市)
    • Year and Date
      2010-08-27
    • Related Report
      2010 Annual Research Report
  • [Presentation] RF-MBE Growth of Si doped cubic GaN and AlGaN films on MgO(001) substrates2010

    • Author(s)
      M. Kakuda, S.Kuboya, K. Onabe,
    • Organizer
      16th International Conference on Molecular Beam Epitaxy (MBE2010)
    • Place of Presentation
      Berlin,Germany.
    • Year and Date
      2010-08-26
    • Related Report
      2012 Final Research Report
  • [Presentation] RF-MBE Growth of Si doped cubic GaN and AlGaN films on MgO (001) substrates2010

    • Author(s)
      M.Kakuda, S.Kuboya, K.Onabe
    • Organizer
      16th International Conference on Molecular Beam Epitaxy
    • Place of Presentation
      Berlin, Germany
    • Year and Date
      2010-08-26
    • Related Report
      2010 Annual Research Report
  • [Presentation] Growth of Si doped cubic GaN and AlGaN films on MgO(001) substrates by RF-MBE2010

    • Author(s)
      M. Kakuda, S.Kuboya, K. Onabe,
    • Organizer
      29th Electronic Materials Symposium (EMS-29)
    • Place of Presentation
      伊豆(静岡).
    • Year and Date
      2010-07-15
    • Related Report
      2012 Final Research Report
  • [Presentation] RF-MBE growth of cubic InN and InGaN films on YSZ(001) substrates2010

    • Author(s)
      K. Nakamura, T. Ishida, M. Kakuda,S. Kuboya, K. Onabe
    • Organizer
      29th Electronic Materials Symposium (EMS-29)
    • Place of Presentation
      伊豆(静岡)
    • Year and Date
      2010-07-15
    • Related Report
      2012 Final Research Report
  • [Presentation] MOVPE growth of cubic GaN films via an AlGaAs intermediate layer on GaAs(001) substrates2010

    • Author(s)
      H. Kato, Y. Seki, Q. T. Thieu, S.Kuboya, K. Onabe
    • Organizer
      29th Electronic Materials Symposium (EMS-29)
    • Place of Presentation
      伊豆(静岡).
    • Year and Date
      2010-07-15
    • Related Report
      2012 Final Research Report
  • [Presentation] MOVPE growth of cubic GaN films via an AlGaAs intermediate layer on GaAs (001) substrates2010

    • Author(s)
      H.Kato, Y.Seki, Q.T.Thieu, S.Kuboya, K.Onabe
    • Organizer
      29th Electronic Materials Symposium (EMS-29)
    • Place of Presentation
      Laforet Shuzenji, Shuzenji, Japan
    • Year and Date
      2010-07-15
    • Related Report
      2010 Annual Research Report
  • [Presentation] Growth of Si doped cubic GaN and AlGaN films on MgO (001) substrates by RF-MBE2010

    • Author(s)
      M.Kakuda, S.Kuboya, K.Onabe
    • Organizer
      29th Electronic Materials Symposium (EMS-29)
    • Place of Presentation
      Laforet Shuzenji, Shuzenji, Japan
    • Year and Date
      2010-07-15
    • Related Report
      2010 Annual Research Report
  • [Presentation] RF-MBE growth of cubic InN and InGaN films on YSZ (001) substrates2010

    • Author(s)
      K.Nakamura, T.Ishida, M.Kakuda, S.Kuboya, K.Onabe
    • Organizer
      29th Electronic Materials Symposium (EMS-29)
    • Place of Presentation
      Laforet Shuzenji, Shuzenji, Japan
    • Year and Date
      2010-07-14
    • Related Report
      2010 Annual Research Report
  • [Presentation] MOVPE growth of c-GaN films via an AlGaAs intermediate Layer2010

    • Author(s)
      H. Kato, Y. Seki, Q. T. Thieu, S.Kuboya, K. Onabe
    • Organizer
      The 3rd International Symposium on Growth of III-Nitrides (ISGN3)
    • Place of Presentation
      Montpellier,France.
    • Year and Date
      2010-07-05
    • Related Report
      2012 Final Research Report
  • [Presentation] MOVPE growth of c-GaN films via an AlGaAs intermediate Layer on GaAs (001) substrates2010

    • Author(s)
      H.Kato, Y.Seki, Q.T.Thieu, S.Kuboya, K.Onabe
    • Organizer
      The 3rd International Symposium on Growth of III-Nitrides (ISGN3)
    • Place of Presentation
      Montpellier, France
    • Year and Date
      2010-07-05
    • Related Report
      2010 Annual Research Report
  • [Presentation] Growth of Si doped c-AlGaN and c-GaNfilms on MgO (001) substrate byRF-MBE2010

    • Author(s)
      M. Kakuda, Y. Fukuhara, K.Nakamura, S. Kuboya, K. Onabe,
    • Organizer
      8th International Symposiumon Semiconductor Light Emitting Devices (ISSLED 2010)
    • Place of Presentation
      Beijing, China.
    • Year and Date
      2010-05-17
    • Related Report
      2012 Final Research Report
  • [Presentation] Growth of c-GaN Films via an AlGaAs Intermediate Layer on GaAs(001) Substrates by MOVPE2010

    • Author(s)
      H. Kato, Y. Seki, Q. T. Thieu, S. Kuboya, K. Onabe
    • Organizer
      8th International Symposium on Semiconductor Light Emitting Devices(ISSLED 2010)
    • Place of Presentation
      Beijing, China.
    • Year and Date
      2010-05-17
    • Related Report
      2012 Final Research Report
  • [Presentation] Growth of c-GaN Films via an AlGaAs Intermediate Layer on GaAs (001) Substrates by MOVPE2010

    • Author(s)
      H.Kato, Y.Seki, Q.T.Thieu, S.Kuboya, K.Onabe
    • Organizer
      8th International Symposium on Semiconductor Light Emitting Devices (ISSLED 2010)
    • Place of Presentation
      Beijing, China
    • Year and Date
      2010-05-17
    • Related Report
      2010 Annual Research Report
  • [Presentation] Growth of Si doped c-AlGaN and c-GaN films on MgO (001) substrate by RF-MBE2010

    • Author(s)
      M.Kakuda, Y.Fukuhara, K.Nakamura, S.Kuboya, K.Onabe
    • Organizer
      8th International Symposium on Semiconductor Light Emitting Devices (ISSLED 2010)
    • Place of Presentation
      Beijing, China
    • Year and Date
      2010-05-17
    • Related Report
      2010 Annual Research Report
  • [Presentation] Growth of cubic InN and InGaN films on YSZ(001) substrates by RF-MBE2010

    • Author(s)
      K. Nakamura, T. Ishida, M. Kakuda,S. Kuboya, K. Onabe
    • Organizer
      16th International Conference on Molecular Beam Epitaxy (MBE2010)
    • Place of Presentation
      Berlin, Germany.
    • Related Report
      2012 Final Research Report
  • [Presentation] RF-MBE法による立方晶AlNの結晶成長

    • Author(s)
      角田雅弘、森川生、窪谷茂幸、片山竜二、尾鍋研太郎
    • Organizer
      第4回窒化物半導体結晶成長講演会
    • Place of Presentation
      東京大学(東京都目黒区)
    • Related Report
      2012 Annual Research Report
  • [Presentation] Growth of cubic AlN films on MgO substrate via 2-step cubic GaN buffer layer by RF-MBE

    • Author(s)
      M. Kakuda, S. Morikawa, S. Kuboya, R. Katayama, K. Onabe
    • Organizer
      31th Electronic Materials Symposium (EMS-31)
    • Place of Presentation
      Izu, Japan
    • Related Report
      2012 Annual Research Report
  • [Presentation] RF-MBE Growth of cubic AlN on MgO(001) substrates via 2-step c-GaN buffer layer

    • Author(s)
      M. Kakuda, S. Morikawa, S. Kuboya, R. Katayama, K. Onabe
    • Organizer
      17th International Conference on Molecular Beam Epitaxy (MBE2012)
    • Place of Presentation
      Nara, Japan
    • Related Report
      2012 Annual Research Report
  • [Presentation] Growth of Cubic AlN Films on MgO substrates by MBE

    • Author(s)
      M. Kakuda, S. Morikawa, S. Kuboya, R. Katayama, H. Yaguchi, K. Onabe
    • Organizer
      GCOE International Sympsium on Physical Sciences Frontier
    • Place of Presentation
      Tokyo, Japan
    • Related Report
      2012 Annual Research Report
  • [Presentation] 立方晶AlNおよび高Al濃度立方晶AlGaNのRF-MBE成長

    • Author(s)
      角田雅弘、森川生、窪谷茂幸、片山竜二、矢口裕之、尾鍋研太郎
    • Organizer
      2013年第60回応用物理学会春季学術講演会
    • Place of Presentation
      神奈川工科大学(厚木市)
    • Related Report
      2012 Annual Research Report
  • [Remarks]

    • URL

      http://www.onblab.k.u-tokyo.ac.jp/onblab/

    • Related Report
      2011 Annual Research Report
  • [Remarks]

    • URL

      http://www.onblab.k.u-tokyo.ac.jp/onblab/

    • Related Report
      2010 Annual Research Report

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Published: 2010-08-23   Modified: 2019-07-29  

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