Direct micromachining of polydimethylsiloxane using laser plasma soft X-rays
Project/Area Number |
22360016
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Research Category |
Grant-in-Aid for Scientific Research (B)
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Allocation Type | Single-year Grants |
Section | 一般 |
Research Field |
Thin film/Surface and interfacial physical properties
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Research Institution | University of Tsukuba |
Principal Investigator |
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Co-Investigator(Kenkyū-buntansha) |
OKADA Tatsuo 九州大学, 大学院・システム情報科学研究院, 教授 (90127994)
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Project Period (FY) |
2010-04-01 – 2014-03-31
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Project Status |
Completed (Fiscal Year 2013)
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Budget Amount *help |
¥19,500,000 (Direct Cost: ¥15,000,000、Indirect Cost: ¥4,500,000)
Fiscal Year 2013: ¥3,770,000 (Direct Cost: ¥2,900,000、Indirect Cost: ¥870,000)
Fiscal Year 2012: ¥5,460,000 (Direct Cost: ¥4,200,000、Indirect Cost: ¥1,260,000)
Fiscal Year 2011: ¥4,160,000 (Direct Cost: ¥3,200,000、Indirect Cost: ¥960,000)
Fiscal Year 2010: ¥6,110,000 (Direct Cost: ¥4,700,000、Indirect Cost: ¥1,410,000)
|
Keywords | レーザープラズマ軟X線 / ポリジメチルシロキサン / シリコーンエラストマー / マイクロ加工 / 極端紫外光 / 光直接加工 / シリコー,エラストマー / シリコーンゴム / PDMS / 微細加工 |
Research Abstract |
We have investigated poludimethylsilonxan (PDMS) micromaching by ablation using laser plasma soft X-rays. We have achieved precise michromachining of PDMS at one micrometer scale. The micromachining properties are governed by power density of incident laser plasma soft X-rays on PDMS surfaces, while the wavelength do not affect the properties. It is found that the chemical structures is not modified even after the irradiation of laser plasma soft X-rays. Thus, we have achieved proerties suitable for PDMS micromachining.
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Report
(5 results)
Research Products
(51 results)
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[Presentation] Ablation Process of PMMA Induced by Irradiation with Laser Plasma EUV Light2013
Author(s)
Nobuhiko Sugiura, Shuichi Torii, Tetsuya Makimura, Yoshiyuki Ichinosawa, Kota Okazaki, Daisuke Nakamura, Akihiko Takahashi, Tatsuo Okada, Hiroyuki Niino, Kouichi Murakami
Organizer
The 10th Conference on Lasers and Electo-Optics Pacific Rim 2013
Place of Presentation
Kyoto International Confernce Center, Kyoto
Related Report
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[Presentation] Micromachining of PMMA using laser plasma soft X-rays for fabrication of 3D molds in a micrometer scale2013
Author(s)
Nobuhiko Sugiura, Shuichi Torii, Tetsuya Makimura, Yoshiyuki Ichinosawa, Kouta Okazaki, Daisuke Nakamura, Akihiko Takahashi, Tatsuo Okada, Hiroyuki Niino, Kouichi Murakami
Organizer
The 14th International Symposium on Laser Precision Microfabrication
Place of Presentation
Toki Messe Niigata Convention Center, Niigata
Related Report
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[Presentation] レーザープラズマ放射極端紫外光による微細加工2013
Author(s)
鳥居 周一, 小森 隆幸, 高橋 翔大, 小川 端生, 藤枝 隆一郎, 深見 慎太郎, 杉浦 信彦, 牧村 哲也, 中村 大輔, 高橋 昭彦, 岡田 龍雄, 新納 弘之, 村上 浩一
Organizer
レーザー学会第450回研究会
Place of Presentation
早稲田大学西早稲田キャンパス, 東京
Related Report
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