| Budget Amount *help |
¥19,500,000 (Direct Cost: ¥15,000,000、Indirect Cost: ¥4,500,000)
Fiscal Year 2013: ¥3,770,000 (Direct Cost: ¥2,900,000、Indirect Cost: ¥870,000)
Fiscal Year 2012: ¥5,460,000 (Direct Cost: ¥4,200,000、Indirect Cost: ¥1,260,000)
Fiscal Year 2011: ¥4,160,000 (Direct Cost: ¥3,200,000、Indirect Cost: ¥960,000)
Fiscal Year 2010: ¥6,110,000 (Direct Cost: ¥4,700,000、Indirect Cost: ¥1,410,000)
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| Research Abstract |
We have investigated poludimethylsilonxan (PDMS) micromaching by ablation using laser plasma soft X-rays. We have achieved precise michromachining of PDMS at one micrometer scale. The micromachining properties are governed by power density of incident laser plasma soft X-rays on PDMS surfaces, while the wavelength do not affect the properties. It is found that the chemical structures is not modified even after the irradiation of laser plasma soft X-rays. Thus, we have achieved proerties suitable for PDMS micromachining.
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