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Bridging nanowires for deep ultra-violet detectors

Research Project

Project/Area Number 22360056
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Production engineering/Processing studies
Research InstitutionThe University of Tokyo

Principal Investigator

DELAUNAY J-J  東京大学, 大学院・工学系研究科, 准教授 (80376516)

Co-Investigator(Kenkyū-buntansha) 小出 康夫  独立行政法人物質・材料研究機構, センサ材料センター/ナノテクノロジー融合支援センター (70195650)
Co-Investigator(Renkei-kenkyūsha) 廖 梅勇  独立行政法人物質・材料研究機構, センサ材料センター/ナノテクノロジー融合支援センター, 研究員 (70528950)
福谷 克之  東京大学, 生産技術研究所, 教授 (10228900)
Project Period (FY) 2010 – 2012
Project Status Completed (Fiscal Year 2012)
Budget Amount *help
¥17,290,000 (Direct Cost: ¥13,300,000、Indirect Cost: ¥3,990,000)
Fiscal Year 2012: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Fiscal Year 2011: ¥3,250,000 (Direct Cost: ¥2,500,000、Indirect Cost: ¥750,000)
Fiscal Year 2010: ¥12,610,000 (Direct Cost: ¥9,700,000、Indirect Cost: ¥2,910,000)
Keywordsナノ・マイクロ加工 / 自己組織化 / 半導体ナノワイヤー
Research Abstract

A self-assembly and single-step fabrication technique of bridged nanowire photodetectors is proposed and demonstrated. A deep ultra-violet photodetector made of -Ga2O3 material is fabricated and characterized. The bridged nanowire photodetector is made of thick-nanowire electrode layers and suspended nanowires bridging the gap between the electrode layers. The electrodes and the bridged nanowires are grown with the same material in a single-step chemical vapor deposition process. The bridged nanowires make the sensitive part of the photoresistors. The selective growth of the electrode layers is obtained by patterning gold, a catalyst for the material to be grown, through a low-cost physical mask. The physical mask forms a pattern of two electrodes separated by a gap of 100 microns. Growth conditions of the chemical vapor process are optimized to form ultra-long nanowires (> 100 microns), so that some of the nanowires bridge the electrodes and, thus, form the sensitive part of thetodetector. The advantages of the reported technique are three-fold: the fabrication technique is efficient and cost-effective, the nanowire surfaces are free of contamination, and the nanowire properties are not affected by the substrate. The technique was applied to the large band-gap -Ga2O3 material to realize selectivity to deep ultra-violet detection (solar-blind). A photodetector having good spectral selectivity, fast response, low noise and low cross sensitivity was successfully fabricated.

Report

(4 results)
  • 2012 Annual Research Report   Final Research Report ( PDF )
  • 2011 Annual Research Report
  • 2010 Annual Research Report
  • Research Products

    (34 results)

All 2012 2011 2010 Other

All Journal Article (13 results) (of which Peer Reviewed: 6 results) Presentation (17 results) (of which Invited: 1 results) Book (2 results) Remarks (2 results)

  • [Journal Article] ZnO-ZnGa2O4 core-shell nanowire array for stable photoelectrochemical water splitting2012

    • Author(s)
      Miao Zhong, Yanbo Li, Ichiro Yamada, J.-J. Delaunay
    • Journal Title

      Nanoscale

      Volume: 4 Pages: 1509-1509

    • Related Report
      2012 Final Research Report
  • [Journal Article] Vertically aligned ZnO-ZnGa2O4 core-shell nanowires: from synthesis to optical properties2012

    • Author(s)
      Miao Zhong, Yanbo Li, Takero Tokizono, Maojun Zheng, Ichiro Yamada, Jean-Jacques Delaunay
    • Journal Title

      Journal of Nanoparticle Research

      Volume: 14 Pages: 804-804

    • Related Report
      2012 Final Research Report
  • [Journal Article] ZnO dense nanowire arraon a film structure in a single crystal domaitexture for optical and photoelectrochemicaapplications2012

    • Author(s)
      M. Zhong, Y. Sato, M. Kurniawan, AApostoluk, B. Masenelli, E. Maeda, Y. Ikuharand J.-J. Delaunay
    • Journal Title

      Nanotechnology

      Volume: 23 Pages: 495602-495602

    • Related Report
      2012 Final Research Report
  • [Journal Article] ZnO dense nanowire array on a film structure in a single crystal domain texture for optical and photoelectrochemical applications2012

    • Author(s)
      M. Zhong, J.-J. Delaunay, et al.
    • Journal Title

      Nanotechnology

      Volume: 23 Pages: 495602-495602

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Vertically aligned ZnO-ZnGa(2)O(4) core-shell nanowires : from synthesis to optical properties2012

    • Author(s)
      Miao Zhong, Jean-Jacques Delaunay, et al
    • Journal Title

      Journal of Nanoparticle Research

      Volume: 14 Issue: 4 Pages: 804-804

    • DOI

      10.1007/s11051-012-0804-x

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] ZnO-ZnGa(2)O(4) core-shell nanowire array for stable photoelectrochemical water splitting2012

    • Author(s)
      Miao Zhong, Yanbo Li, Ichiro Yamada, Jean-Jacques Delaunay
    • Journal Title

      Nanoscale

      Volume: 4 Issue: 5 Pages: 1509-1514

    • DOI

      10.1039/c2nr11451h

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Spectropic determination of flatband potential and carrier density of ZnO nanowires with/without hydrogen plasma treatment2012

    • Author(s)
      Miao Zhong, Jean-Jacques Delaunay
    • Journal Title

      SPIE Proceedings

      Volume: Proc.SPIE8263 Pages: 82631A-82631A

    • DOI

      10.1117/12.907500

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Stability of hydrogen incorporated in ZnO nanowires by plasma treatment2011

    • Author(s)
      Yanbo Li, Miao Zhong, Takero Tokizono, Ichiro Yamada, Georges Bremond, Jean-Jacques Delaunay
    • Journal Title

      Nanotechnology

      Volume: 22 Pages: 435703-435703

    • Related Report
      2012 Final Research Report 2011 Annual Research Report
  • [Journal Article] Efficient Assembly of Bridged Ga2O3 Nanowires for Solar-blind Photodetection2010

    • Author(s)
      Yanbo Li, Takero Tokizono, Meiyong Liao, Miao Zhong, Yasuo Koide, Ichiro Yamada, Jean-Jacques Delaunay
    • Journal Title

      Advanced Functional Materials

      Volume: 20 Pages: 3972-3978

    • Related Report
      2012 Final Research Report
  • [Journal Article] Bascule nanobridges self-assembled with ZnO nanowires as double schottky barrier UV switches2010

    • Author(s)
      Yanbo Li, Alexander Paulsen, Ichiro Yamada, Yasuo Koide and Jean-Jacques Delaunay
    • Journal Title

      Nanotechnology

      Volume: 21 Pages: 295502-295502

    • Related Report
      2012 Final Research Report
  • [Journal Article] Efficient Assembly of Bridged Ga_2O_3 Nanowires for Solar-blind Photodetection2010

    • Author(s)
      Yanbo Li, Takero Tokizono, Meiyong Liao, Miao Zhong, Yasuo Koide, Ichiro Yamada, Jean-Jacques Delaunay
    • Journal Title

      Advanced Functional Materials

      Volume: 20 Pages: 3972-3978

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Bascule nanobridges self-assembled with ZnO nanowires as double schottky barrier UV switches2010

    • Author(s)
      Yanbo Li, Alexander Paulsen, Ichiro Yamada, Yasuo Koide, Jean-Jacques Delaunay
    • Journal Title

      Nanotechnology

      Volume: 21 Pages: 295502-295502

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Bridging wide bandgap nanowires for ultraviolet light detection2010

    • Author(s)
      Yanbo Li, Miao Zhong, Takero Tokizono, Alexander Paulsen, Meiyong Liao, Yasuo Koide, Ichiro Yamada, Jean-Jacques Delaunay
    • Journal Title

      Proceedings SPIE

      Volume: 7940 Pages: 13-13

    • Related Report
      2010 Annual Research Report
  • [Presentation] Vertically aligned ZnO-ZnGa2O4 core-shell nanowires for photoelectrochemical water splitting2012

    • Author(s)
      Jean-Jacques Delaunay, Miao Zhong, Yanbo Li
    • Organizer
      SPIE OPTO, Oxide-based Materials and Devices III
    • Place of Presentation
      San Francisco, USA
    • Year and Date
      2012-04-24
    • Related Report
      2012 Final Research Report
  • [Presentation] Role of ZnAl(2)O(4) Buffer Layer in the Epitaxy of Vertical ZnO Nanowires on a-plane Sapphire2012

    • Author(s)
      Miao Zhong, Yukio Sato, Etsuo Maeda, Yichi Ikuhara, Jean-Jacques Delaunay
    • Organizer
      年春季第59回応用物理学関係連合講演会
    • Place of Presentation
      東京
    • Year and Date
      2012-03-17
    • Related Report
      2011 Annual Research Report
  • [Presentation] Vertically aligned ZnO-ZnGaO core-shell nanowires for photoelectrochemical water splitting2012

    • Author(s)
      Miao Zhong, Yanbo Li, Jean-Jacques Delaunay
    • Organizer
      SPIE OPTO, Oxide-based Materials and Devices III
    • Place of Presentation
      San Francisco, USA(招待講演)
    • Year and Date
      2012-01-24
    • Related Report
      2011 Annual Research Report
  • [Presentation] Dense and vertically aligned ZnO-ZnGa(2)O(4) core-shell nanowires fabricated on a conductive film for stable and efficient water splitting2012

    • Author(s)
      M. Zhong, J.-J. Delaunay
    • Organizer
      2nd Annual World Congress of Nano-S&T
    • Place of Presentation
      Qingdao, China
    • Related Report
      2012 Annual Research Report 2012 Final Research Report
  • [Presentation] Metal oxide nanowires for sensing and conversion of light2012

    • Author(s)
      J.-J. Delaunay, Y. Li, and M. Zhong
    • Organizer
      2nd International Conference on Nanotek and Expo
    • Place of Presentation
      Philadelphia, USA.
    • Related Report
      2012 Final Research Report
  • [Presentation] Bridging wide bandgap nanowires for ultraviolet light detection2012

    • Author(s)
      J.-J Delaunay, Y. B. Li, T. Tokizono, M. Liao, M. Zhong, Y. Koide and I. Yamada
    • Organizer
      20th MRS Japan Conference, Session E
    • Place of Presentation
      Yokohama, Japan
    • Related Report
      2012 Final Research Report
  • [Presentation] Progress toward nanowire device assembly technology2012

    • Author(s)
      Yanbo Li, Daoai Wang, Miao Zhong, Jean-Jacques Delaunay, Jun Kubota, and Kazunari Domen
    • Organizer
      92th Chemical Society of Japan Spring Meeting
    • Place of Presentation
      Tokyo, Japan
    • Related Report
      2012 Final Research Report
  • [Presentation] Progress toward nanowire device assembly technology2012

    • Author(s)
      Yanbo Li, Daoai Wang, Miao Zhong, Jean-Jacques Delaunay, Jun Kubota, Kazunari Domen
    • Organizer
      92th CSJ Spring Meeting
    • Place of Presentation
      Tokyo(招待講演)
    • Related Report
      2011 Annual Research Report
  • [Presentation] Dense ZnO-ZnGa(2)O(4) core-shell nanowire array for stable water Splitting (Award : Outstanding work for young scientists)2011

    • Author(s)
      Miao Zhong, Jean-Jacques Delaunay
    • Organizer
      21st Symposium of the Material Research Society of Japan, Session D
    • Place of Presentation
      横浜
    • Year and Date
      2011-12-19
    • Related Report
      2011 Annual Research Report
  • [Presentation] Bridging wide bandgap nanowires for ultraviolet light detection2011

    • Author(s)
      J.-J. Delaunay, Y. B. Li, T. Tokizono, M. Liao, M. Zhong, Y. Koide, I. Yamada
    • Organizer
      VCIAN
    • Place of Presentation
      Texas, USA. (invited talk)
    • Related Report
      2012 Final Research Report
  • [Presentation] Bridging wide bandgap nanowires for ultraviolet light detection2011

    • Author(s)
      J.-J. Delaunay, Y. B. Li, T. Tokizono, M. Liao, M. Zhong, Y. Koide, I. Yamada
    • Organizer
      1st Annual World Congress of Nano-S&T
    • Place of Presentation
      Dalian, China
    • Related Report
      2012 Final Research Report
  • [Presentation] Bridging wide bandgap nanowires for ultraviolet light detection2011

    • Author(s)
      Jean-Jacques Delaunay, Yanbo Li, Takero Tokizono, Meiyong Liao, Miao Zhong, Yasuo Koide, Ichiro Yamada
    • Organizer
      VCIAN, 1st Annual World Congress of Nano-S&T
    • Place of Presentation
      Las Vegas, Texas, USA(招待講演)
    • Related Report
      2011 Annual Research Report
  • [Presentation] Vertically aligned ZnO-ZnGaO core-shell nanowire array : from synthesis to properties2011

    • Author(s)
      Miao Zhong, Yanbo Li, Takero Tokizono, Ichiro Yamada, Jean-Jacques Delaunay
    • Organizer
      International Conference on Materials for Advanced Technologies
    • Place of Presentation
      Singapore, Singapore
    • Related Report
      2011 Annual Research Report
  • [Presentation] Bridging wide bandgap nanowires for ultraviolet light detection2011

    • Author(s)
      Yanbo Li, Miao Zhong, Takero Tokizono, Alexander Paulsen, Meiyong Liao, Yasuo Koide, Ichiro Yamada, Jean-Jacques Delaunay
    • Organizer
      SPIE OPTO
    • Place of Presentation
      San Francisco, USA
    • Related Report
      2010 Annual Research Report
  • [Presentation] Bridging wide bandgap nanowires for ultraviolet light detection2010

    • Author(s)
      Jean-Jacques Delaunay, Yanbo Li, Takero Tokizono, Meiyong Liao, Miao Zhong, Yasuo Koide, Ichiro Yamada
    • Organizer
      20th MRS Japan Conference
    • Place of Presentation
      Yokohama, Japan 招待講演
    • Related Report
      2010 Annual Research Report
  • [Presentation] Bridged semiconductor nanowires for ultraviolet light detection2010

    • Author(s)
      Yanbo Li, Jean-Jacques Delaunay
    • Organizer
      2nd GMSI International Symposium
    • Place of Presentation
      Tokyo, Japan 招待講演
    • Related Report
      2010 Annual Research Report
  • [Presentation] Metal oxide nanowires for sensing and conversion of light

    • Author(s)
      J.-J. Delaunay, Y. Li, M. Zhong
    • Organizer
      2nd International Conference on Nanotek and Expo
    • Place of Presentation
      Philadelphia, USA
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Book] Nanowires on film for photoelectrochemical water splitting (chapter in Nanowires Recent Advances )2012

    • Author(s)
      M. Zhong, M. Kurniawan, B. Vilquin, A. Apostoluk, J.-J. Delaunay
    • Total Pages
      22
    • Publisher
      Nanowires - Recent Advances, INTECH (ISBN 980-953-307-525-4)
    • Related Report
      2012 Annual Research Report
  • [Book] book chapter in Nanowires2010

    • Author(s)
      Y. B. Li, J.-J. Delaunay
    • Publisher
      INTECH, ISBN
    • Related Report
      2012 Final Research Report
  • [Remarks]

    • URL

      http://scale.t.u-tokyo.ac.jp/research/index.html

    • Related Report
      2012 Final Research Report
  • [Remarks]

    • URL

      http://lelab.t.u-tokyo.ac.jp/~jean/research/index.html

    • Related Report
      2010 Annual Research Report

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Published: 2010-08-23   Modified: 2019-07-29  

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