Nano profile measurement by depolarization microscope
Project/Area Number |
22360057
|
Research Category |
Grant-in-Aid for Scientific Research (B)
|
Allocation Type | Single-year Grants |
Section | 一般 |
Research Field |
Production engineering/Processing studies
|
Research Institution | Utsunomiya University |
Principal Investigator |
OTANI Yukitoshi 宇都宮大学, オプティクス教育研究センター, 教授 (10233165)
|
Project Period (FY) |
2010 – 2012
|
Project Status |
Completed (Fiscal Year 2012)
|
Budget Amount *help |
¥18,720,000 (Direct Cost: ¥14,400,000、Indirect Cost: ¥4,320,000)
Fiscal Year 2012: ¥4,030,000 (Direct Cost: ¥3,100,000、Indirect Cost: ¥930,000)
Fiscal Year 2011: ¥4,160,000 (Direct Cost: ¥3,200,000、Indirect Cost: ¥960,000)
Fiscal Year 2010: ¥10,530,000 (Direct Cost: ¥8,100,000、Indirect Cost: ¥2,430,000)
|
Keywords | 超精密計測 / ナノ形状 / ミュラー行例 / 散乱光解析 / 偏光解消 / ミュラー行列 / ストークス・パラメータ / ナノ計測 / 偏光計 / 近接場顕微鏡 / デポラリゼイション / ナノトポグラメトリー / 2重回転偏光計 / ナノ形状計測 |
Research Abstract |
An optical fiber type of polarimeter which is based on a depolarization microscopy is proposed to evaluate the surface profiles of nanostructures. The best combination of rotating speed of a retarder and an analyzer for dual rotating Stokes polarimeter is carried out in the proportion of one part to three from generated analysis for Stokes parameters detection. A nanostructure profile is determined from the polarization information which happens reflection and scatter of sample structures by depolarization microscopy
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Report
(4 results)
Research Products
(21 results)