Nano profile measurement by depolarization microscope

• Project/Area Number: 22360057
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Production engineering/Processing studies
• Research Institution: Utsunomiya University
• Principal Investigator: OTANI Yukitoshi 宇都宮大学, オプティクス教育研究センター, 教授 (10233165)
• Project Period (FY): 2010 – 2012
• Project Status: Completed (Fiscal Year 2012)
• Budget Amount: ¥18,720,000 (Direct Cost: ¥14,400,000、Indirect Cost: ¥4,320,000); Fiscal Year 2012: ¥4,030,000 (Direct Cost: ¥3,100,000、Indirect Cost: ¥930,000); Fiscal Year 2011: ¥4,160,000 (Direct Cost: ¥3,200,000、Indirect Cost: ¥960,000); Fiscal Year 2010: ¥10,530,000 (Direct Cost: ¥8,100,000、Indirect Cost: ¥2,430,000)
• Keywords: 超精密計測 / ナノ形状 / ミュラー行例 / 散乱光解析 / 偏光解消 / ミュラー行列 / ストークス・パラメータ / ナノ計測 / 偏光計 / 近接場顕微鏡 / デポラリゼイション / ナノトポグラメトリー / 2重回転偏光計 / ナノ形状計測

Research Abstract

An optical fiber type of polarimeter which is based on a depolarization microscopy is proposed to evaluate the surface profiles of nanostructures. The best combination of rotating speed of a retarder and an analyzer for dual rotating Stokes polarimeter is carried out in the proportion of one part to three from generated analysis for Stokes parameters detection. A nanostructure profile is determined from the polarization information which happens reflection and scatter of sample structures by depolarization microscopy

Research Products

• [Journal Article] All polarization properties of PLZT ferroelectric ceramics observed in two dimensional distributions under applied voltage by the Mueller matrix (2013)
  • Author(s): Makoto Ginya, Yasuhiro Mizutani, Tetsuo Iwata, Yukitoshi Otani
  • Journal Title: Sensors and Actuators A : Physical Volume: 200 Pages: 37-43
  • DOI: 10.1016/j.sna.2012.11.023
  • Peer Reviewed
• [Journal Article] All polarization properties of PLZT ferroelectric ceramics observed in two dimensional distributions under applied voltage by the Mueller matrix (2012)
  • Author(s): M.Ginya,Y.Mizutani,T.Iwata,Y.Otani
  • Journal Title: Sensors and Actuators A: Physical(2013)
  • Peer Reviewed
• [Presentation] 一般化二重回転型ストークス偏光計 (2013)
  • Author(s): 水谷亮太,若山俊隆,大谷幸利
  • Organizer: 応用物理学関係連合講演会
  • Place of Presentation: 神奈川工業大学,神奈川
  • Year and Date: 2013-03-27
• [Presentation] 一般化二重回転型ストークス偏光計 (2013)
  • Author(s): 大谷幸利
  • Organizer: 応用物理学関係連合講演会
  • Place of Presentation: 東京
• [Presentation] Imaging Stokes polarimeter by dual rotating retarder and analyzer and itsapplication of evaluation of Japanese lacquer (2012)
  • Author(s): Ryota Mizutani, Tomoharu Ishikawa, Miyoshi Ayama, Yukitoshi Otani
  • Organizer: Photonics Asia - Optical Metrology and Inspection for Industrial Applications II
  • Place of Presentation: Beijing China
  • Year and Date: 2012-11-06
• [Presentation] 広ダイナミックレンジ光強度検出機構を用いたストークス散乱偏光計 (2012)
  • Author(s): 江馬雅好,喜入朋宏,茨田大輔,早崎芳夫,大谷幸利,谷田貝豊彦
  • Organizer: 日本光学会年次学術講演会Optics & Photonics Japan2012
  • Place of Presentation: タワーホール船堀,東京
  • Year and Date: 2012-10-25
• [Presentation] (2012)
  • Author(s): Yukitoshi Otani
  • Organizer: SEM Congress & Exposition on Experimental & Applied Mechanics
  • Place of Presentation: Costa Mesa, CA, USA,招待講演
  • Year and Date: 2012-06-13
• [Presentation] 紫外域の二重回転型分光ストークス偏光計 (2012)
  • Author(s): 水谷亮太, 大谷幸利
  • Organizer: 応用物理学関連連合講演会
  • Place of Presentation: 早稲田大学(東京)
  • Year and Date: 2012-03-17
• [Presentation] Nano-structure inspection by dual-rotating Mueller matrix spectro-polarimeter (2012)
  • Author(s): Yukitoshi Otani
  • Organizer: SEM Congress & Exposition on Experimental & Applied Mechanics
  • Place of Presentation: Costa Mesa, CA, USA
  • Invited
• [Presentation] Imaging Stokes polarimeter by dual rotating retarder and analyzer and its application of evaluation of Japanese lacquer (2012)
  • Author(s): Ryota Mizutani
  • Organizer: Photonics Asia - Optical Metrology and Inspection for Industrial Applications II
  • Place of Presentation: 北京・中国
• [Presentation] 広ダイナミックレンジ光強度検出機構を用いた ストークス散乱偏光計 (2012)
  • Author(s): 江馬 雅好
  • Organizer: OPJ2012
  • Place of Presentation: 東京
• [Presentation] Optical fiber probe type of dual rotating Stokes polarimeter (2011)
  • Author(s): 水谷亮太, 大谷幸利
  • Organizer: IWH2011ホログラフィ技術に関する国際ワークショップ
  • Place of Presentation: 宇都宮大学(栃木)
  • Year and Date: 2011-11-16
• [Presentation] Stokes polarimeter with optical fiber probe (2011)
  • Author(s): R.Mizutani, Y.Otani
  • Organizer: ISOT2011
  • Place of Presentation: Hong Kong, China
  • Year and Date: 2011-11-02
• [Presentation] Stokes Polarimeter with Optical Fiber Probe (2011)
  • Author(s): 水谷亮太, 大谷幸利
  • Organizer: ISOT2011オプトメカトロニクスに関する国際会議
  • Place of Presentation: 香港中文大学(中国)
  • Year and Date: 2011-11-01
• [Presentation] 光ファイバープローブ型ストークス偏光計 (2011)
  • Author(s): 水谷亮太,大谷幸利
  • Organizer: 精密工学会秋季大会
  • Place of Presentation: 金沢大学,石川
  • Year and Date: 2011-09-21
• [Presentation] 光ファイバープローブ型ストークス偏光計 (2011)
  • Author(s): 水谷亮太, 大谷幸利
  • Organizer: 精密工学会秋季大会学術講演会
  • Place of Presentation: 金沢大学(石川)
  • Year and Date: 2011-09-20
• [Book] (M.Losurdo, K. Hingerl(Eds.)) Chapter 8 Ellipsometry at the Nanostructure (2013)
  • Author(s): Y.Mizutani, Y.Otani
  • Publisher: Ellipsometry at the Nanoscale(Springer)
• [Book] Chapter 8 Ellipsometry at the Nanostructure, Ellipsometry at the Nanoscale (2013)
  • Author(s): Yasuhiro Mizutani, Yukitoshi Otani (Maria Losurdo, Kurt Hingerl(Eds.))
  • Publisher: Springer
• [Remarks]
  • URL: http://www.opt.utsunomiya-u.ac.jp/~otani/
• [Remarks] 宇都宮大学オプティクス教育研究センター大谷研究室
  • URL: http://www.opt.utsunomiya-u.ac.jp/~otani/
• [Remarks]
  • URL: http://www.opt.utsunomiya-u.ac.jp/^-otani/