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Study on the Height Precision Compensation Polishing with an Rotation & Revolution Type Polishing Method

Research Project

Project/Area Number 22360062
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Production engineering/Processing studies
Research InstitutionGunma University (2011-2012)
Akita Prefectural University (2010)

Principal Investigator

LIN Weimin  群馬大学, 大学院・工学研究科, 准教授 (60321840)

Co-Investigator(Kenkyū-buntansha) FUJIMOTO Masakazu  秋田県立大学, システム科学技術学部, 助教 (00581290)
WU Yongbo  秋田県立大学, システム科学技術学部, 教授 (10302176)
Project Period (FY) 2010 – 2012
Project Status Completed (Fiscal Year 2012)
Budget Amount *help
¥18,200,000 (Direct Cost: ¥14,000,000、Indirect Cost: ¥4,200,000)
Fiscal Year 2012: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
Fiscal Year 2011: ¥7,150,000 (Direct Cost: ¥5,500,000、Indirect Cost: ¥1,650,000)
Fiscal Year 2010: ¥9,360,000 (Direct Cost: ¥7,200,000、Indirect Cost: ¥2,160,000)
Keywords機械工作・生産工学 / 加工学 / 精密研磨 / 精密部品加工 / 修正研磨加工 / 砥石 / 固定砥粒研磨 / 超音波援用研磨 / 研磨工具 / 研磨砥石 / 研磨エリア
Research Abstract

In this study, a new polishing that the rotation & revolution type polishing method (RRP) has been proposed. The principle of polishing and the influence of tools wear were discussed. A RRP unit has been developed for the fundamental polishing experiment. In the polishing experiments, glass or die steel workpieces were polished with free abrasive. The results of experiment show that this tool can process a workpiece with good surface roughness and high processing efficiency in the limited dimension of the machine tool.

Report

(4 results)
  • 2012 Annual Research Report   Final Research Report ( PDF )
  • 2011 Annual Research Report
  • 2010 Annual Research Report
  • Research Products

    (52 results)

All 2013 2012 2011 2010 Other

All Journal Article (12 results) (of which Peer Reviewed: 8 results) Presentation (40 results)

  • [Journal Article] Development of Micro Polishing System Using Piezoelectric Actuator Incorporated with Mechanical Amplitude Magnified Mechanism2013

    • Author(s)
      Sze Keat Chee, Hirofumi Suzuki, Takeshi Yano, Toshiro Higuchi and Weimin Lin
    • Journal Title

      International Journal of Automation Technology (IJAT)

      Volume: 7, 1 Pages: 71-82

    • Related Report
      2012 Annual Research Report 2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Experimental Investigation on Hybrid Technology of Ultrasonic Vibration Assisted Chemo-Mechanical Grinding (CMG) Silicon Wafer2013

    • Author(s)
      Weiping Yang, Yongbo Wu and Jun Liu
    • Journal Title

      Applied Mechanics and Materials

      Pages: 2290-2294

    • Related Report
      2012 Annual Research Report 2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] 自転/公転型研磨法の研究2012

    • Author(s)
      林偉民
    • Journal Title

      日本機械学会誌

      Volume: 115, 4 Pages: 44-44

    • Related Report
      2012 Final Research Report 2011 Annual Research Report
  • [Journal Article] 自転/公転型研磨法の新提案と高精度形状研磨の基礎研究2012

    • Author(s)
      林偉民,大村元志,藤本正和,呉勇波,山形豊
    • Journal Title

      砥粒加工学会誌

      Volume: 56,6 Pages: 44-49

    • NAID

      10030539350

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] 低周波振動援用による微細構造を持つ金型の研磨法の研究2012

    • Author(s)
      林偉民,徐世傑,矢野健,藤本正和,呉勇波,鈴木浩文,樋口俊郎
    • Journal Title

      型技術

      Volume: 27,7 Pages: 118-119

    • Related Report
      2012 Final Research Report
  • [Journal Article] Investigation into Chemo-Mechanical Fixed Abrasive Polishing of Fused Silica with the Assistance of Ultrasonic Vibration2012

    • Author(s)
      Y. G. Li, Y. Wu, L. Zhou, H. Guo, J.Cao, M. Fujimoto, M. Kemmochi
    • Journal Title

      Key Engineering Materials

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Chemo-Mechanical Manufacturing of Fused Silica by Combining Ultrasonic Vibration with Fixed-Abrasive Pellets2012

    • Author(s)
      Yaguo Li, Yongbo Wu, Libo Zhou, Masakazu Fujimoto, Jian Wang, Qiao Xu, Shoichi Sasaki1, and Masaaki Kemmochi
    • Journal Title

      International Journal of Precision Engineering and Manufacturing

      Volume: 13, 12 Pages: 2163-2172

    • Related Report
      2012 Annual Research Report 2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] 低周波振動援用による微細構造を持つ金型の研磨法の研究2012

    • Author(s)
      林 偉民,徐 世傑, 矢野 健, 藤本正和,呉 勇波,鈴木浩文,樋口俊郎
    • Journal Title

      型技術

      Volume: 27 Pages: 116-117

    • Related Report
      2012 Annual Research Report
  • [Journal Article] Investigation into Chemo-Mechanical Fixed Abrasive Polishing of Fused Silica with the Assistance of Ultrasonic Vibration2012

    • Author(s)
      Y.G. Li, Y. Wu, L. Zhou, H. Guo, J. Cao, M. Fujimoto, M. Kemmochi
    • Journal Title

      Key Engineering Materials

      Volume: 523-524 Pages: 155-160

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Tentative investigation towards precision polishing of optical components with ultrasonically vibrating bound-abrasive pellets2012

    • Author(s)
      Yaguo Li, Yongbo Wu, Jian Wang, Wei Yang, Yinbiao Guo and Qiao Xu
    • Journal Title

      Optics Express

      Volume: 20 Pages: 568-575

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 自転/公転型研磨法の新提案と高精度形状研磨の基礎研究2012

    • Author(s)
      林偉民, 大村元志, 藤本正和, 呉勇波, 山形豊
    • Journal Title

      砥粒加工学会誌

      Volume: 56 Pages: 44-49

    • NAID

      10030539350

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 自転/公転型研磨法の研究2011

    • Author(s)
      林偉民
    • Journal Title

      型技術

      Volume: 26,12 Pages: 70-71

    • Related Report
      2012 Final Research Report 2011 Annual Research Report
  • [Presentation] 金属製中性子ミラーの研磨2012

    • Author(s)
      林偉民,森田晋也,山形豊
    • Organizer
      2012年度日本機械学会材料加工部門講演会MP2012
    • Place of Presentation
      大阪
    • Year and Date
      2012-12-01
    • Related Report
      2012 Final Research Report
  • [Presentation] 超音波援用固定砥粒加工による石英ガラスのポリシング2012

    • Author(s)
      李亜国,呉勇波,藤本正和,周立波
    • Organizer
      日本機械学会第9回生産加工・工作機械部門講演会
    • Place of Presentation
      由利本荘
    • Year and Date
      2012-10-28
    • Related Report
      2012 Final Research Report
  • [Presentation] 超音波援用化学機械複合固定砥粒加工によるSiウェハの高能率鏡面加工2012

    • Author(s)
      宇野文智,呉勇波,藤本正和,野村光由,周立波
    • Organizer
      日本機械学会第9回生産加工・工作機械部門講演会
    • Place of Presentation
      由利本荘
    • Year and Date
      2012-10-28
    • Related Report
      2012 Final Research Report
  • [Presentation] 中性子ミラーの超精密研磨2012

    • Author(s)
      林偉民,森田晋也,山形豊
    • Organizer
      2012年度日本機械学会第9回生産加工・工作機械部門講演会講演
    • Place of Presentation
      由利本荘
    • Year and Date
      2012-10-28
    • Related Report
      2012 Final Research Report
  • [Presentation] 低周波振動援用による微細構造を持つ形状物の研磨2012

    • Author(s)
      林偉民,徐世傑,矢野健,藤本正和,呉勇波,鈴木浩文,樋口俊郎
    • Organizer
      2012年度日本機械学会第9回生産加工・工作機械部門講演会
    • Place of Presentation
      由利本荘
    • Year and Date
      2012-10-28
    • Related Report
      2012 Final Research Report
  • [Presentation] A feasibility study of silicon wafer edge treatment by ultrasonic assisted fixed-abrasive CMP (UF-CMP)2012

    • Author(s)
      Yongbo Wu, Weiping Yang, Masakazu Fujimoto
    • Organizer
      the International Conference of Manufacturing Technology Engineers 2012
    • Place of Presentation
      Seoul, Korea
    • Year and Date
      2012-10-10
    • Related Report
      2012 Final Research Report
  • [Presentation] 低周波振 動テーブルの試作とそれによる振動援用 研磨効果2012

    • Author(s)
      林偉民, 徐世傑, 矢野健, 藤本正和, 呉 勇波, 鈴木浩文, 樋口俊郎
    • Organizer
      2012 年度精密工学会秋季大 会学術講演会
    • Place of Presentation
      北九州
    • Year and Date
      2012-09-15
    • Related Report
      2012 Final Research Report
  • [Presentation] 自転/公転型研磨法研磨加工安定性の検討2012

    • Author(s)
      林偉民,藤本正和,呉勇波
    • Organizer
      2012年度砥粒加工学会学術講演会(ABTEC2012)
    • Place of Presentation
      京都
    • Year and Date
      2012-08-31
    • Related Report
      2012 Final Research Report
  • [Presentation] Hybrid Polishing of Fused Silica Glass with Bound-Abrasive Polishers in Conjunction with Vibration2012

    • Author(s)
      Yaguo Li and Yongbo Wu
    • Organizer
      SPIE
    • Place of Presentation
      USA
    • Year and Date
      2012-08-20
    • Related Report
      2012 Annual Research Report 2012 Final Research Report
  • [Presentation] Study on die polishing method of micro structured molds applying low frequency vibration2012

    • Author(s)
      Weimin Lin, Chee Sze Keat, Takeshi Yano, Hirofumi Suzuki, and Toshiro Higuchi
    • Organizer
      The 3rd International Conference on Nanomanufacturing (nanoMan2012)
    • Place of Presentation
      Tokyo, Japan
    • Year and Date
      2012-07-27
    • Related Report
      2012 Final Research Report
  • [Presentation] Polishing fused silica glass by incorporating ultrasonic vibration into fixed abrasive polishers2012

    • Author(s)
      Yaguo Li, Yongbo Wu, Masakazu Fujimoto, Libo Zhou
    • Organizer
      the 12th euspen International Conference
    • Place of Presentation
      Stockholm
    • Year and Date
      2012-06-22
    • Related Report
      2012 Final Research Report
  • [Presentation] Precision Manufacturing of Fused Silica Glass by Combining Bound-Abrasive Polishing with Ultrasonic Vibration2012

    • Author(s)
      Yaguo Li, Yongbo Wu
    • Organizer
      6th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2012)
    • Place of Presentation
      Xiamen, China
    • Year and Date
      2012-04-27
    • Related Report
      2012 Annual Research Report 2012 Final Research Report
  • [Presentation] Study on die plishing method of micro structured molds applying low frequency vibration2012

    • Author(s)
      Weimin Lin, Chee Sze Keat, Takeshi Yano, Hirofumi Suzuki, and Toshiro Higuchi
    • Organizer
      The 3rd International Conference on Nanomanufacturing (nanoMan2012)
    • Place of Presentation
      Wako, Japan
    • Related Report
      2012 Annual Research Report
  • [Presentation] 自転/公転型研磨法の研究2011

    • Author(s)
      林偉民
    • Organizer
      型技術ワークショップ2011in岐阜
    • Place of Presentation
      岐阜
    • Year and Date
      2011-11-21
    • Related Report
      2012 Final Research Report
  • [Presentation] 自転/公転型研磨法の研究2011

    • Author(s)
      林偉民
    • Organizer
      型技術ワークショップ2011in岐阜
    • Place of Presentation
      岐阜市
    • Year and Date
      2011-11-21
    • Related Report
      2011 Annual Research Report
  • [Presentation] 自転/公転型研磨法による加工特性について2011

    • Author(s)
      大村元志,佐々木宇宙,藤本正和,呉勇波,林偉民
    • Organizer
      2011年度精密工学会東北支部学術講演会
    • Place of Presentation
      仙台
    • Year and Date
      2011-10-21
    • Related Report
      2012 Final Research Report
  • [Presentation] 低周波振動を援用した自転/公転型研磨法の開発に関する基礎検討2011

    • Author(s)
      小林直貴,佐藤光平,藤本正和,呉勇波,林偉民,徐世傑,矢野健,山形豊,樋口俊朗,鈴木浩文,牧野俊清
    • Organizer
      2011年度精密工学会東北支部学術講演会
    • Place of Presentation
      仙台
    • Year and Date
      2011-10-21
    • Related Report
      2012 Final Research Report
  • [Presentation] 自転/公転型研磨法による加工特性について2011

    • Author(s)
      大村元志, 佐々木宇宙, 藤本正和, 呉勇波, 林偉民
    • Organizer
      2011年度精密工学会東北支部学術講演会
    • Place of Presentation
      仙台市
    • Year and Date
      2011-10-21
    • Related Report
      2011 Annual Research Report
  • [Presentation] 低周波振動を援用した自転/公転型研磨法の開発に関する基礎検討2011

    • Author(s)
      小林直貴, 佐藤光平, 藤本正和, 呉勇波, 林偉民, 徐世傑, 矢野健, 山形豊, 樋口俊朗, 鈴木浩文, 牧野俊清
    • Organizer
      2011年度精密工学会東北支部学術講演会
    • Place of Presentation
      仙台市
    • Year and Date
      2011-10-21
    • Related Report
      2011 Annual Research Report
  • [Presentation] 自転/公転型研磨法による修正研磨法の基礎研究2011

    • Author(s)
      林偉民, 大村元志, 藤本正和, 呉勇波, 山形豊
    • Organizer
      砥粒加工学会ABTEC2011
    • Place of Presentation
      春日市
    • Year and Date
      2011-09-09
    • Related Report
      2011 Annual Research Report
  • [Presentation] 低周波振動援用研磨法による金型材料の加工効果2011

    • Author(s)
      林偉民, 小林直樹, 藤本正和, 呉勇波, 徐世傑, 矢野健, 鈴木浩文
    • Organizer
      砥粒加工学会ABTEC2011
    • Place of Presentation
      春日市
    • Year and Date
      2011-09-09
    • Related Report
      2011 Annual Research Report
  • [Presentation] 低周波振動援用研磨法による金型材料の加工効果2011

    • Author(s)
      林偉民,小林直樹,藤本正和,呉勇波,徐世傑,矢野健,鈴木浩文
    • Organizer
      2011年度砥粒加工学会学術講演会(ABTEC2011)
    • Place of Presentation
      春日
    • Year and Date
      2011-09-08
    • Related Report
      2012 Final Research Report
  • [Presentation] 自転/公転型研磨法による修正研磨法の基礎研究2011

    • Author(s)
      林偉民,大村元志,藤本正和,呉勇波,山形豊
    • Organizer
      2011年度砥粒加工学会学術講演会(ABTEC2011)
    • Place of Presentation
      春日
    • Year and Date
      2011-09-08
    • Related Report
      2012 Final Research Report
  • [Presentation] 低周波振動援用研磨による金型材料の加工特性2011

    • Author(s)
      小林直貴,久保田享,林偉民,呉勇波,藤本正和,徐世傑,矢野健,山形豊,樋口俊郎,鈴木浩文,牧野俊清
    • Organizer
      2011年度精密工学会春季大会学術講演会
    • Place of Presentation
      東京
    • Year and Date
      2011-03-16
    • Related Report
      2012 Final Research Report
  • [Presentation] 低周波振動援用研磨による金型材料の加工特性2011

    • Author(s)
      小林直貴, 久保田享, 林偉民, 呉勇波, 藤本正和, 徐世傑, 矢野健, 山形豊, 樋口俊郎, 鈴木浩文, 牧野俊清
    • Organizer
      2011年度精密工学会春季大会学術講演会
    • Place of Presentation
      東洋大学
    • Year and Date
      2011-03-16
    • Related Report
      2010 Annual Research Report
  • [Presentation] 自転/公転研磨法による研磨加工の基礎検討2010

    • Author(s)
      大村元志,佐藤康成,林偉民,藤本正和,呉勇波
    • Organizer
      2010年度精密工学会東北支部学術講演会
    • Place of Presentation
      盛岡
    • Year and Date
      2010-11-27
    • Related Report
      2012 Final Research Report
  • [Presentation] 低周波振動援用研磨における金型材料の研磨効果2010

    • Author(s)
      小林直貴,久保田亭,林偉民,藤本正和,呉勇波,徐世傑,矢野健,山形豊,樋口俊郎,鈴木浩文
    • Organizer
      2010年度精密工学会東北支部学術講演会
    • Place of Presentation
      盛岡
    • Year and Date
      2010-11-27
    • Related Report
      2012 Final Research Report
  • [Presentation] 自転/公転研磨法による研磨加工の基礎検討2010

    • Author(s)
      大村元志, 佐藤康成, 林偉民, 藤本正和, 呉勇波
    • Organizer
      2010年度精密工学会東北支部学術講演会
    • Place of Presentation
      岩手大学
    • Year and Date
      2010-11-27
    • Related Report
      2010 Annual Research Report
  • [Presentation] 低周波振動援用研磨における金型材料の研磨効果2010

    • Author(s)
      小林直貴, 久保田亭, 林偉民, 藤本正和, 呉勇波, 徐世傑, 矢野健, 山形豊, 樋口俊郎, 鈴木浩文
    • Organizer
      2010年度精密工学会東北支部学術講演会
    • Place of Presentation
      岩手大学
    • Year and Date
      2010-11-27
    • Related Report
      2010 Annual Research Report
  • [Presentation] 自転/公転研磨法の基礎検討2010

    • Author(s)
      林偉民,大村元志,小林直貴,呉勇波,藤本正和,山形豊
    • Organizer
      砥粒加工学会ABTEC2010
    • Place of Presentation
      岡山
    • Year and Date
      2010-08-28
    • Related Report
      2012 Final Research Report
  • [Presentation] 自転/公転研磨法の基礎検討2010

    • Author(s)
      林偉民, 大村元志, 小林直貴, 呉勇波, 藤本正和, 山形豊
    • Organizer
      砥粒加工学会ABTEC2010
    • Place of Presentation
      岡山大学
    • Year and Date
      2010-08-28
    • Related Report
      2010 Annual Research Report
  • [Presentation] A feasibility study of silicon wafer edge treatment by ultrasonic assisted fixed-abrasive CMP (UF-CMP)

    • Author(s)
      Yongbo Wu, Weiping Yang, Masakazu Fujimoto
    • Organizer
      The International Conference of Manufacturing Technology Engineers 2012
    • Place of Presentation
      Seoul, Korea
    • Related Report
      2012 Annual Research Report
  • [Presentation] Polishing fused silica glass by incorporating ultrasonic vibration into fixed abrasive polishers

    • Author(s)
      Yaguo Li, Yongbo Wu, Masakazu Fujimoto, Libo Zhou
    • Organizer
      The 12th euspen International Conference
    • Place of Presentation
      Stockholm
    • Related Report
      2012 Annual Research Report
  • [Presentation] 自転/公転型研磨法研磨加工安定性の検討

    • Author(s)
      林 偉民, 藤本 正和, 呉 勇波
    • Organizer
      2012年度砥粒加工学会学術講演会(ABTEC2012)
    • Place of Presentation
      京都
    • Related Report
      2012 Annual Research Report
  • [Presentation] 低周波振動テーブルの試作とそれによる振動援用研磨効果

    • Author(s)
      林 偉民, 徐 世傑, 矢野 健, 藤本正和, 呉 勇波, 鈴木浩文, 樋口俊郎
    • Organizer
      2012年度精密工学会秋季大会学術講演会
    • Place of Presentation
      北九州市
    • Related Report
      2012 Annual Research Report
  • [Presentation] 中性子ミラーの超精密研磨

    • Author(s)
      林 偉民, 森田晋也, 山形 豊
    • Organizer
      2012年度日本機械学会第9回生産加工・工作機械部門講演会
    • Place of Presentation
      由利本荘市
    • Related Report
      2012 Annual Research Report
  • [Presentation] 低周波振動援用による微細構造を持つ形状物の研磨

    • Author(s)
      林 偉民, 徐 世傑, 矢野 健, 藤本正和, 呉 勇波, 鈴木浩文, 樋口俊郎
    • Organizer
      2012年度日本機械学会第9回生産加工・工作機械部門講演会
    • Place of Presentation
      由利本荘市
    • Related Report
      2012 Annual Research Report
  • [Presentation] 超音波援用固定砥粒加工による石英ガラスのポリシング

    • Author(s)
      李亜国,呉勇波,藤本正和,周立波
    • Organizer
      2012年度日本機械学会第9回生産加工・工作機械部門講演会
    • Place of Presentation
      由利本荘市
    • Related Report
      2012 Annual Research Report
  • [Presentation] 超音波援用化学機械複合固定砥粒加工によるSiウェハの高能率鏡面加工

    • Author(s)
      宇野文智,呉勇波,藤本正和,野村光由,周立波
    • Organizer
      2012年度日本機械学会第9回生産加工・工作機械部門講演会
    • Place of Presentation
      由利本荘市
    • Related Report
      2012 Annual Research Report
  • [Presentation] 金属製中性子ミラーの研磨

    • Author(s)
      林 偉民, 森田晋也, 山形 豊
    • Organizer
      2012年度日本機械学会材料加工部門講演会MP2012
    • Place of Presentation
      大阪市
    • Related Report
      2012 Annual Research Report

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Published: 2010-08-23   Modified: 2019-07-29  

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