| Budget Amount *help |
¥18,720,000 (Direct Cost: ¥14,400,000、Indirect Cost: ¥4,320,000)
Fiscal Year 2012: ¥3,250,000 (Direct Cost: ¥2,500,000、Indirect Cost: ¥750,000)
Fiscal Year 2011: ¥7,280,000 (Direct Cost: ¥5,600,000、Indirect Cost: ¥1,680,000)
Fiscal Year 2010: ¥8,190,000 (Direct Cost: ¥6,300,000、Indirect Cost: ¥1,890,000)
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| Research Abstract |
In the cleaning processes of manufacturing semiconductor deVices, two-fluidspray cleaning technique is widely used. In this study, we fbcus our attention to the elementary process ofthis cleaning technique, i.e. a single droplet impact on a solid surface. We experimentally observe impact ofsingle droplet on a rigid solid surface. Especially we focus on the effects of surfaces tension, surfaceroughness and surrounding pressure. Decrease of the surrounding gas pressure makes droplets alwayscreate lamella even in the cases with low surface tension and rough surfaces
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