FABRICATION OF FERROELCTRIC ONE-DIMENSIONAL NANOSTRUCTURES AND CREATION OF FUNCTIONS

• Project/Area Number: 22360130
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Electronic materials/Electric materials
• Research Institution: University of Hyogo
• Principal Investigator: SHIMIZU Masaru 兵庫県立大学, 大学院・工学研究科, 教授 (30154305)
• Co-Investigator(Renkei-kenkyūsha): FUJISAWA Hironori 兵庫県立大学, 大学院・工学研究科, 准教授 (30285340) ; NAKASHIMA Seiji (80552702) ; HONDA Koichro 株式会社富士通研究所/東北大学, 電気通信研究所, 主管研究員/客員教授 (60399730)
• Project Period (FY): 2010 – 2012
• Project Status: Completed (Fiscal Year 2012)
• Budget Amount: ¥13,390,000 (Direct Cost: ¥10,300,000、Indirect Cost: ¥3,090,000); Fiscal Year 2012: ¥2,990,000 (Direct Cost: ¥2,300,000、Indirect Cost: ¥690,000); Fiscal Year 2011: ¥4,550,000 (Direct Cost: ¥3,500,000、Indirect Cost: ¥1,050,000); Fiscal Year 2010: ¥5,850,000 (Direct Cost: ¥4,500,000、Indirect Cost: ¥1,350,000)
• Keywords: 電気 / 電子材料 / 強誘電体 / ナノロッド / ナノワイヤ / ZnO / PbTiO3 / PZT / 選択成長 / 圧電振動発電デバイス / 一次元ナノ構造 / MOCVD法 / ZnOナノロッド / PbTiO_3 / Pb(Zr,Ti)O_3 / 一次元構造 / Pb(Zr, Ti)O_3 / ナノチューブ

Research Abstract

Frroelectric PbTiO_3/ZnO and PZT/ZnO core-shell nanorods and nanowires were fabricated by MOCVD. Diameter and growth density of core ZnO were controlled using the two-step growth process, and PZT/ZnO with different PZT thicknesses were successfully fabricated. PZT/ZnO nanorods were selectively grown on patterned Pt. Piezoelectric nanowire generators were fabricated. Measurement system of switchable polarization in single PbTiO_3 nanoisland was developed.

Research Products

• [Journal Article] Two-step Growth of ZnO Nanorods by Using MOCVD and Control of Their Diameters and Surface Densities (2013)
  • Author(s): H.Fujisawa, C.Kobayashi, S.Nakashima and M. Shimizu
  • Journal Title: J. Korean Phys. Soc. Volume: Vol.62 Pages: 1164-1168
• [Journal Article] Size Dependence of Ferroelectric Polarization in Nanoislands (2012)
  • Author(s): H.Fujisawa, K.Yamada, M.Igawa, S.Naka- shima and M.Shimizu
  • Journal Title: Jpn. J. Appl. Phys. Volume: 51
  • Peer Reviewed
• [Journal Article] Selective growth of ZnO nanorods and their appli- cations to ferroelectric nanorods (2012)
  • Author(s): H.Fujisawa, Y.Imi, S.Nakashima, M.Shi- mizu, Y.Kotaka and K.Honda
  • Journal Title: J. Appl. Phys Volume: 112 Issue: 3
  • DOI: 10.1063/1.4745042
  • Peer Reviewed
• [Journal Article] Switching Current Measurements of Self-Assembled Ferrolelectric PbTiO_3 Nanoislands Using Scanning Probe Micros- copy (2012)
  • Author(s): H.Fujisawa, K.Yamada, S.Nakashima and M.Shimizu
  • Journal Title: Jpn. J. Appl. Phys Volume: 51
  • Peer Reviewed
• [Journal Article] Switching Current Measurements of Self-Assembled Ferroelectric PbTiO_3 Nanoislands Using Scanning Probe Microscopy (2012)
  • Author(s): Hironori Fujisawa
  • Journal Title: Japanese Journal of Applied Physics Volume: Vol.51
  • Peer Reviewed
• [Journal Article] Crystal- line orientation of PbTiO_3 Nanorods Grown by MOCVD Using ZnO Nanorods as a Tem- plate (2011)
  • Author(s): H.Fujisawa, M.Shimizu, R.Kuri, S.Na- kashima, Y.Kotaka and K.Honda
  • Journal Title: Mater. Res. Soc. Symp. Proc. Volume: 1297
  • DOI: 10.1557/opl.2011.456
  • Peer Reviewed
• [Journal Article] Crystalline Orientation of PbTiO_3 Nanorods Grown by MOCVD Using ZnO Nanorods as a Template (2011)
  • Author(s): Hironori Fujisawa
  • Journal Title: Materials Research Society Symposium Proceedings Volume: 1292
  • Peer Reviewed
• [Journal Article] PbTiO_3 Thin Films Grown on Vicinal SrTiO_3(001) Substarte (2011)
  • Author(s): Hiroaki Yane
  • Journal Title: Journal Korean Physical Society Volume: (未定)
  • Peer Reviewed
• [Presentation] Fabrication of PZT/ZnO Core -Shell Nanowires and Their Applications to Ferrlelectric Nanogenerators (2012)
  • Author(s): M.Shimizu
  • Organizer: 2012 Mater- ials Research Society Fall Meeting
  • Place of Presentation: Hynes Convention Center, USA
  • Year and Date: 2012-11-28
• [Presentation] 二段階MOCVD法によるZnOナノロッドの作製と強誘電体ナノロッドへの応用(II) (2012)
  • Author(s): 小林千晃
  • Organizer: 第73回応用物理学会学術講演会
  • Place of Presentation: 愛媛大学
  • Year and Date: 2012-09-13
• [Presentation] Fabrication of PZT/ZnO core-shell nanorods with different PZT thicknesses by MOCVD (2012)
  • Author(s): C.Kobayashi
  • Organizer: The 9th Korea-Japan Conference on Ferrolelectrics
  • Place of Presentation: Univ. of Ulsan, Korea
  • Year and Date: 2012-08-09
• [Presentation] Fabrication and Ferroelectr- ic properties of nanostructured Pb(Zr,Ti) O_3, Int. Symp (2012)
  • Author(s): M.Shimizu
  • Organizer: Int. Symp. On Integrated Functional- ities 2102
  • Place of Presentation: Hong Kong Poly- tech. Univ., China
  • Year and Date: 2012-06-19
• [Presentation] 原子間力顕微鏡による単一PbTiO_3ナノ島の分極測定 (2012)
  • Author(s): 藤澤浩訓
  • Organizer: 第29回強誘電体応用会議
  • Place of Presentation: コープイン京都
  • Year and Date: 2012-05-24
• [Presentation] Fabrication and Ferroelectr- ic Properties of Low-dimensional PbZr_xTi_1-xO_3 (2012)
  • Author(s): M.Shimizu
  • Organizer: 2012 Mater. Res. Soc. Spring Meeting
  • Place of Presentation: Moscone Convention Center, USA
  • Year and Date: 2012-04-12
• [Presentation] 二段階MOCVD法によるZnOナノロッドの作製と強誘電体ナノロッドへの応用 (2012)
  • Author(s): 小林千晃
  • Organizer: 第59回応用物理学関係連合講演会
  • Place of Presentation: 早稲田大学
  • Year and Date: 2012-03-17
• [Presentation] 二段階MOCVDによるZnOナノロッドの作製と強誘電体ナノロッドへの応用 (2012)
  • Author(s): 小林千晃
  • Organizer: 第59回応用物理学関係連合講演会
  • Place of Presentation: 早稲田大学(東京都)
  • Year and Date: 2012-03-17
• [Presentation] AFMを用いたPbTiO_3ナノ島の分極量の評価 (2012)
  • Author(s): 井川将志
  • Organizer: 第59回応用物理学関係連合講演会
  • Place of Presentation: 早稲田大学(東京都)
  • Year and Date: 2012-03-17
• [Presentation] 原子間力顕微鏡による単一PbTiO3ナノ島の分極測定 (2012)
  • Author(s): 藤澤 浩訓
  • Organizer: 第29回強誘電体応用会議
  • Place of Presentation: コープイン京都 （京都市）
• [Presentation] Fabrication of PZT/ZnO core-shell nanorods with different PZT thicknesses by MOCVD (2012)
  • Author(s): Chiaki Kobayashi
  • Organizer: The 9th Korea-Japan Conference on Ferroelectrics
  • Place of Presentation: University of Ulsan (Ulsan, Korea)
• [Presentation] Evaluation of switching charge densitry of PbTiO3 nanoislands by atomic force microscopy (2012)
  • Author(s): Masashi Igawa
  • Organizer: The 9th Korea-Japan Conference on Ferroelectrics
  • Place of Presentation: University of Ulsan (Ulsan, Korea)
• [Presentation] 二段階MOCVDによるZnOナノロッドの作製と強誘電体ナノロッドへの応用(II) (2012)
  • Author(s): 小林 千晃
  • Organizer: 第73回応用物理学会学術講演会
  • Place of Presentation: 愛媛大学（松山市）
• [Presentation] AFMを用いたPbTiO3ナノ島の分極量の評価(II) (2012)
  • Author(s): 井川 将志
  • Organizer: 第73回応用物理学会学術講演会
  • Place of Presentation: 愛媛大学（松山市）
• [Presentation] Fabrication of PZT/ZnO Core-Shell Nanowires by Metalorganic Chemical Vapor Deposition (2012)
  • Author(s): Yuta Iwamoto
  • Organizer: Fifth International Conference on Emerging Trends in Engineering and Technology & Second International Symposium on Himeji Initiative in Computational Medical & Health Technology
  • Place of Presentation: Egret Himeji (Himeji)
• [Presentation] Fabrication of PZT/ZnO Core-Shell Nanowires and Their Applications to Piezoelectric Nanogenerators (2012)
  • Author(s): Masaru Shimizu
  • Organizer: 2012 Materials Research Society Fall Meeting
  • Place of Presentation: Hynes Convention Center (Boston, USA)
• [Presentation] Switching Charge Density of Ferroelectric PbTiO_3 Nanoislands (2011)
  • Author(s): Hironori Fujisawa
  • Organizer: Materials Research Society 2011 Fall Meeting
  • Place of Presentation: Boston (U.S.A.)
  • Year and Date: 2011-11-29
• [Presentation] Selective Growth of ZnO Nanorods for PZT Nanorods Device Appli- cations (2011)
  • Author(s): M.Shimizu
  • Organizer: Materials Research Society 2011 Fall Meeting
  • Place of Presentation: Hynes Conven- tion Center, USA
  • Year and Date: 2011-11-28
• [Presentation] Selective Growth of ZnO Nanorods for PZT Nanorods Device Applications (2011)
  • Author(s): Masaru Shimizu
  • Organizer: Materials Research Society 2011 Fall Meeting
  • Place of Presentation: Boston (U.S.A.)
  • Year and Date: 2011-11-28
• [Presentation] ZnOナノロッドの選択成長と強誘電体ナノロッドへの応用 (2011)
  • Author(s): 伊美泰徳
  • Organizer: 第72回応用物理学会学術講演会
  • Place of Presentation: 山形大学
  • Year and Date: 2011-09-01
• [Presentation] エピタキシャルPbTiO_3薄膜のリーク電流 (2011)
  • Author(s): 高田祐介
  • Organizer: 第72回応用物理学会学術講演会
  • Place of Presentation: 山形大学(山形県)
  • Year and Date: 2011-09-01
• [Presentation] AFMによるPbTiO_3ナノ島の分極反転電流の測定(III) (2011)
  • Author(s): 山田耕生
  • Organizer: 第72回応用物理学会学術講演会
  • Place of Presentation: 山形大学(山形県)
  • Year and Date: 2011-09-01
• [Presentation] ZnOナノロッドの選択成長と強誘電体ナノロッドへの応用 (2011)
  • Author(s): 伊美泰徳
  • Organizer: 第72回応用物理学会学術講演会
  • Place of Presentation: 山形大学(山形県)
  • Year and Date: 2011-09-01
• [Presentation] Fabrication and Piezo- and Ferroelectric Properties of Pb(Zr,Ti)O_3 Nanorods and Nanotubes by MOCVD (2011)
  • Author(s): M.Shimizu
  • Organizer: The 20th Int. Symp. on Applications of Ferroelectr- ics
  • Place of Presentation: The Westin Bayshore, Canada
  • Year and Date: 2011-07-25
• [Presentation] Fabrication and Piezo- and Ferroelectric Properties of Pb(Zr,Ti)O_3 Nanorods and Nanotubes by MOCVD (2011)
  • Author(s): Masaru Shimizu
  • Organizer: The 20th International Symposium on Applications of Ferroelectrics
  • Place of Presentation: Vancouver (Canada)
  • Year and Date: 2011-07-25
• [Presentation] Preparation and Ferroelectric Properties of One-dimensional Pb(Zr,Ti)O_3 Nanorods and Nanotubes by MOCVD (2011)
  • Author(s): Masaru Shimizu
  • Organizer: 9th International Workshop on High Aspect Ratio Microstructure Technology
  • Place of Presentation: 兵庫県立大学(兵庫県)
  • Year and Date: 2011-06-17
• [Presentation] 圧縮歪みを有するエピタキシャルPbTiO_3ナノ島の作製 (2011)
  • Author(s): 畠江康文、清水勝, 他
  • Organizer: 平成23年(2011)春季第58回応用物理学関係連合講演会
  • Place of Presentation: 講演予稿集DVD
  • Year and Date: 2011-03-26
• [Presentation] AFMによるPbTiO_3ナノ島の分極反転電流の測定(II) (2011)
  • Author(s): 山田耕生、清水勝, 他
  • Organizer: 平成23年(2011)春季第58回応用物理学関係連合講演会
  • Place of Presentation: 講演弄稿集DVD
  • Year and Date: 2011-03-26
• [Presentation] MOCVD法によるPbTiO_3ナノチューブの作製 (2011)
  • Author(s): 本田耕一郎、清水勝, 他
  • Organizer: 第25回JFCAテクノフェスタ
  • Place of Presentation: メルパルク東京(東京都)
  • Year and Date: 2011-01-23
• [Presentation] 走査型プローブ顕微鏡によるPbTiO_3ナノアイランドの分極反転電流測定 (2010)
  • Author(s): 藤沢浩訓、清水勝, 他
  • Organizer: 第20回日本MRS学術シンポジウム
  • Place of Presentation: 横浜市開港記念会館(神奈川県)
  • Year and Date: 2010-12-20
• [Presentation] Switching Current Measurements of Ferroelectric PbTiO_3 Nanoislands by Scanning Probe Microscopy (2010)
  • Author(s): H.Fujisawa, M.Shimizu, et al.
  • Organizer: Mater.Res.Soc.2010 Fall Meeting
  • Place of Presentation: Hynes Convention Center(米国)
  • Year and Date: 2010-12-02
• [Presentation] Preparation and Piezo- and Ferroelectric Properties of Pb(Zr,Ti)O_3 One-dimensional Nanorods and Nanotubes by MOCVD (2010)
  • Author(s): M.Shimizu
  • Organizer: Mater. Res. Soc. 2010 Fall Meet
  • Place of Presentation: Hynes Convention Center, USA
  • Year and Date: 2010-12-01
• [Presentation] Preparation and Piezo-and Ferroelectric Properties Pb(Zr, Ti)O_3 One-dimensional Nanorods and Nanotubes by MOCVD (2010)
  • Author(s): M.Shimizu, et al.
  • Organizer: Mater.Res.Soc.2010 Fall Meeting
  • Place of Presentation: Hynes Convention Center(米国)
  • Year and Date: 2010-12-01
• [Presentation] Characterization of Thin Film Ferroelectrics for FRAMs (2010)
  • Author(s): K.Honda, M.Shimizu, et al.
  • Organizer: Mater.Res.Soc.2010 Fall Meeting
  • Place of Presentation: Hynes Convention Center(米国)
  • Year and Date: 2010-12-01
• [Presentation] FRAMキャパシタ用強誘電体薄膜の評価 (2010)
  • Author(s): 本田耕一郎、清水勝, 他
  • Organizer: 第30回LSIテスティングシンポジウム
  • Place of Presentation: 千里ライフサイエンスセンター(大阪府)
  • Year and Date: 2010-11-12
• [Presentation] Switching current measurements of ferroelectric PbTiO_3 nanoislands using scanning probe microscopy (2010)
  • Author(s): H.Fujisawa, M.Shimizu, et al.
  • Organizer: The 17th Workshop on Oxide Electronics
  • Place of Presentation: 淡路夢舞台(兵庫県)
  • Year and Date: 2010-09-21
• [Presentation] 走査型非線形誘電率顕微鏡法によるPbTiO_3極薄膜の観察 (2010)
  • Author(s): 山野宏次郎、清水勝, 他
  • Organizer: 平成22年(2010)秋季第71回応用物理学会学術講演会
  • Place of Presentation: 長崎大学(長崎県)
  • Year and Date: 2010-09-16
• [Presentation] AFMによるPbTiO_3ナノ島の分極反転電流の測定 (2010)
  • Author(s): 山田耕生、清水勝, 他
  • Organizer: 平成22年(2010)秋季第71回応用物理学会学術講演会
  • Place of Presentation: 長崎大学(長崎県)
  • Year and Date: 2010-09-16
• [Presentation] PbTiO_3 thin films grown on vicinal SrTiO_3(001)substrate (2010)
  • Author(s): H.Yane, M.Shimizu, et al.
  • Organizer: The 8th Japan-Korea Conference on Ferroelectrics
  • Place of Presentation: イーグレ姫路(兵庫県)
  • Year and Date: 2010-08-06
• [Presentation] Fabrication of PZT/ZnO nanorods by MOCVD (2010)
  • Author(s): Y.Imi, M.Shimizu, et al.
  • Organizer: The 8th Japan-Korea Conference on Ferroelectrics
  • Place of Presentation: イーグレ姫路(兵庫県)
  • Year and Date: 2010-08-06
• [Presentation] Switching current measurements of PbTiO_3 thin films and nanoislands by atomic force microscopy (2010)
  • Author(s): K.Yamada, M.Shimizu, et al.
  • Organizer: The 8th Japan-Korea Conference on Ferroelectrics
  • Place of Presentation: イーグレ姫路(兵庫県)
  • Year and Date: 2010-08-05
• [Presentation] Ferroelectric Gate Transistors Using ZnO Nanorod as a Channel (2010)
  • Author(s): H.Fujisawa, M.Shimizu, et al.
  • Organizer: the 7th Asian Meeting on Ferroelectricity and the 7th Asian Meeting on ElectroCeramics
  • Place of Presentation: Ramada Plaza Jeju Hotel(韓国)
  • Year and Date: 2010-06-30
• [Presentation] Fundamental Properties of Low-dimensional Nanoferroelectrics, Rus- sia/CIS/Baltic/Japan Symp (2010)
  • Author(s): M.Shimizu
  • Organizer: on Ferro- electricity
  • Place of Presentation: Tokyo Inst. Tech
  • Year and Date: 2010-06-21
• [Presentation] Fundamental Properties of Low Dimensional Nanoferoelectrics (2010)
  • Author(s): Masaru Shimizu
  • Organizer: Russia/CIS/Baltic/Japan Symposium on Ferroelectrcity
  • Place of Presentation: すずかけホール、東工大(横浜)(招待講演)
  • Year and Date: 2010-06-21
• [Presentation] Characterization of Thin Film Ferroelectrics for FRAMs (2010)
  • Author(s): K.Honda, M.Shimizu, et al.
  • Organizer: International Symposium on Integrated Functiona lities
  • Place of Presentation: San Juan(プエルトリコ)
  • Year and Date: 2010-06-15
• [Presentation] ZnOナノロッドをチャネルに用いた強誘電体ゲートトランジスタの作製 (2010)
  • Author(s): 藤沢浩訓、清水勝, 他
  • Organizer: 第27回強誘電体応用会議
  • Place of Presentation: コープイン京都(京都府)
  • Year and Date: 2010-05-28
• [Presentation] Characterization of Thin Film Ferrolelectrics for FRAMs (2010)
  • Author(s): K.Honda
  • Organizer: Int. Symp. on Integrated Functionalities 2010
  • Place of Presentation: San Jan, Perto Rico