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Creation of β diketonate metal complex controlled chemical composition and structure and application to thin film device using it for starting materials

Research Project

Project/Area Number 22360132
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Electronic materials/Electric materials
Research InstitutionSendai National College of Technology

Principal Investigator

HAGA Koichi  仙台高等専門学校, 地域イノベーションセンター, 教授 (30270200)

Co-Investigator(Kenkyū-buntansha) SHISHIDO Toetsu  東北大学, 金属材料研究所, 研究推進研究員 (50125580)
YUBUTA Kunio  東北大学, 金属材料研究所・金属ガラス総合研究センター, 准教授 (00302208)
関 成之  仙台高等専門学校, 知能エレクトロニクス工学科, 助教 (50449378)
Project Period (FY) 2010 – 2012
Project Status Completed (Fiscal Year 2012)
Budget Amount *help
¥18,720,000 (Direct Cost: ¥14,400,000、Indirect Cost: ¥4,320,000)
Fiscal Year 2012: ¥5,200,000 (Direct Cost: ¥4,000,000、Indirect Cost: ¥1,200,000)
Fiscal Year 2011: ¥5,200,000 (Direct Cost: ¥4,000,000、Indirect Cost: ¥1,200,000)
Fiscal Year 2010: ¥8,320,000 (Direct Cost: ¥6,400,000、Indirect Cost: ¥1,920,000)
Keywords作成・評価技術 / ファイバー状金属錯体原料 / 酸化亜鉛 / 薄膜トランジスタ / アセチルアセトン亜鉛錯体 / ファイバー状アセチルアセトン亜鉛 / a軸配向ZnO / CVD / オゾンガス / 透明半導体 / 透明トランジスタ / MO-CVD / 結晶配向性制御 / ベータージケトン系金属錯体 / レーザー直接描画法
Research Abstract

The β diketonate metal complex of the fiber shape to control the structure and the chemical composition was created by a novel process without the case in the past, and the metal complex was used for the starting material of metalorganic chemical vapor deposition (MO-CVD). The high quality zinc oxide thin film that was not able to be accomplished by the commercially available metal complex was able to be obtained by using this starting material. Moreover, the laser direct writing method was introduced into the TFT process, and ZnO film transistor (ZnO-TFT) was completed. Crystallographic axis and the crystalline quality in two-dimensional based on the process of ZnO film were able to be obtained and to obtain the controlled a-axis oriented ZnO film. ZnO-TFT was not able to be accomplished in the period of this research using the a-axis oriented ZnO film.

Report

(4 results)
  • 2012 Annual Research Report   Final Research Report ( PDF )
  • 2011 Annual Research Report
  • 2010 Annual Research Report
  • Research Products

    (16 results)

All 2013 2012 2011 2010

All Journal Article (8 results) (of which Peer Reviewed: 7 results) Presentation (8 results)

  • [Journal Article] Preparation of ZnO Thin Films by MO-CVD Using Fibrous Bis (Acetylacetonato) Zinc (II) and Ozone2013

    • Author(s)
      K. Haga, S. Abe, Y. Takizawa, K. Yubuta, and T. Shisido
    • Journal Title

      J. Physice Conference Series

      Volume: 417 Pages: 1-6

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Preparation of ZnO thin films by MO-CVD using fibrous bis (acetylacetonato) zinc (II) and ozone2013

    • Author(s)
      Koichi Haga
    • Journal Title

      Journal of Physics

      Volume: Conference Series 417 Pages: 1-6

    • DOI

      10.1088/1742-6596/417/1/012059

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 組成と構造が制御された金属錯体を用いたZnO薄膜デバイスの作製2013

    • Author(s)
      羽賀浩一
    • Journal Title

      平成24年度東北大学金属材料研究所金属ガラス総合研究センター共同利用研究報告書

      Volume: 印刷中

    • Related Report
      2012 Annual Research Report
  • [Journal Article] Organic-Inorganic Conversion Process for MaterialCreation2011

    • Author(s)
      T. Sishido, K.Yubuta, S.Seki, A.Nomura, A.Yoshikawa, K.Hayashi, K.Haga
    • Journal Title

      J. Surf. Sci. and Nanotech.

      Volume: 9 Pages: 181-187

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Organic-Inorganic Conversion Process for Material Creation2011

    • Author(s)
      T.Sisido, K.Yubuta, S.Seki, A.Nomura, A.Yoshikawa, K.Hayashi, K.Haga
    • Journal Title

      J.Surf.Sci.and Nanotech

      Volume: 9 Pages: 181-187

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Characteristics of ZnO thin film transistor prepared by two different methods2010

    • Author(s)
      K. Haga, M. Sakuma, Y. Takizawa and S. Seki
    • Journal Title

      Phys. StatusSolidi

      Volume: C7 Pages: 1715-1717

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Preparation of ZnO thin films by MO-CVD method using bis (acetylacetonato) zinc (II) anhydrate fiber2010

    • Author(s)
      S.Seki, H.Onodera, T.Sekizawa, M.Sakuma, K.Haga, Y.Seki, Y.Sawada, T.Shishido
    • Journal Title

      Physica Status Solidi

      Volume: C7 Pages: 1565-1567

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Charactaristics of ZnO thin film transister prepared by two diffrent methods2010

    • Author(s)
      K.Haga, M.Sakuma, Y.Takizawa, S.Seki
    • Journal Title

      Physica Status Solidi

      Volume: C7 Pages: 1715-1717

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Presentation] 直流バイアススパッタリングとMO-CVD法を併用したa軸配向高抵抗ZnO薄膜の作製2013

    • Author(s)
      羽賀浩一,瀧澤義浩,金子義生,湯葢邦夫,宍戸統悦
    • Organizer
      第60回応用物理学会春季学術講演会
    • Place of Presentation
      神奈川工科大学
    • Year and Date
      2013-03-28
    • Related Report
      2012 Final Research Report
  • [Presentation] 同一基板上でa軸とc軸に配向性制御された高抵抗多結晶ZnO薄膜の作製2013

    • Author(s)
      羽賀浩一
    • Organizer
      第60回応用物理学会春季学術講演会
    • Place of Presentation
      神奈川工科大学
    • Related Report
      2012 Annual Research Report
  • [Presentation] ファイバー状Zn(C5H7O2)2・xH2OとO3を原料に用いたMO-CVD法による高抵抗ZnO薄膜の作製2012

    • Author(s)
      羽賀浩一,阿部修,瀧澤義浩,湯葢邦夫,宍戸統悦
    • Organizer
      第59回応用物理学会学術講演会
    • Place of Presentation
      早稲田大学
    • Year and Date
      2012-03-15
    • Related Report
      2012 Final Research Report
  • [Presentation] ファイバー状Zn(C_5H_7O_2)_2・xH_2OファイバーとO_3を用いたMO-CVD法による高抵抗ZnO薄膜の作製2012

    • Author(s)
      羽賀浩一, 阿部修, 瀧澤義浩, 湯葢邦夫, 宍戸統悦
    • Organizer
      第59回応用物理学関係連合講演会
    • Place of Presentation
      早稲田大学(東京)
    • Year and Date
      2012-03-15
    • Related Report
      2011 Annual Research Report
  • [Presentation] 有機-無機転換工程の考察―SiC、ZnO素材作製を例に―2012

    • Author(s)
      宍戸統悦
    • Organizer
      第7回日本フラックス成長研究発表会
    • Place of Presentation
      物質・材料研究機構 茨城県
    • Related Report
      2012 Annual Research Report
  • [Presentation] Preparation of ZnO Thin Films by MO-CVD Using Fibrous Bis (Acetylacetonato) Zinc (II) and Ozone2011

    • Author(s)
      Koichi Haga, Shu Abe, Yoshihiro Takizawa, Kunio Yubuta, Toetsu Shishido
    • Organizer
      15th International Conference on Thin Film 2011 (ICTF15)
    • Place of Presentation
      京都テルサ(京都府)
    • Year and Date
      2011-11-09
    • Related Report
      2011 Annual Research Report
  • [Presentation] Zn(C5H7O2)2・xH2OファイバーとO3を用いたMO-CVD法によるZnO薄膜の作製2011

    • Author(s)
      羽賀浩一,阿部修,瀧澤義浩,湯葢邦夫,宍戸統悦
    • Organizer
      第72回応用物理学会学術講演会
    • Place of Presentation
      山形大学
    • Year and Date
      2011-08-31
    • Related Report
      2012 Final Research Report
  • [Presentation] Zn(C_5H_7O_2)_2・xH_2OとO_3を原料に用いたMO-CVD法によるZnO薄膜の作製2011

    • Author(s)
      羽賀浩一, 阿部修, 瀧澤義浩, 湯葢邦夫, 宍戸統悦
    • Organizer
      第72回応用物理学会学術講演会
    • Place of Presentation
      山形大学(山形)
    • Related Report
      2011 Annual Research Report

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Published: 2010-08-23   Modified: 2019-07-29  

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