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Purification of refractory metals used for the sputtering target

Research Project

Project/Area Number 22360311
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Metal making engineering
Research InstitutionTohoku University

Principal Investigator

MIMURA Kouji  東北大学, 多元物質科学研究所, 准教授 (00091752)

Co-Investigator(Kenkyū-buntansha) ISSHIKI Minoru  東北大学, 多元物質科学研究所, 教授 (20111247)
Project Period (FY) 2010 – 2012
Project Status Completed (Fiscal Year 2012)
Budget Amount *help
¥11,700,000 (Direct Cost: ¥9,000,000、Indirect Cost: ¥2,700,000)
Fiscal Year 2012: ¥2,210,000 (Direct Cost: ¥1,700,000、Indirect Cost: ¥510,000)
Fiscal Year 2011: ¥1,950,000 (Direct Cost: ¥1,500,000、Indirect Cost: ¥450,000)
Fiscal Year 2010: ¥7,540,000 (Direct Cost: ¥5,800,000、Indirect Cost: ¥1,740,000)
Keywords高純度金属 / 高純度精製 / 水素プラズマ溶解 / モリブデン / バナジウムジルコニウム / 減圧水素プラズマ / 高融点金属 / ジルコニウム / 不純物 / プラズマ溶解 / 水素プラズマ / バナジウム / 不純物除去 / 金属生産工学
Research Abstract

Purification of refractory metals (Mo,V,Zr), required as the sputtering target for the advanced electronic devices, has been examined using the special melting methods such as hydrogen plasma arc melting (HPAM) and electron beam melting (EBM). Similar to EBM in high vacuum, HPAM under atmospheric pressure is confirmed to be useful for the remarkable reduction of volatile metallic impurities like Fe, Al, Cu and Cr from the melted metals. Also, HPAM is found to be a more practical purification method, due to very low vaporization loss of the melted metal during HPAM, different from EBM with high vaporization loss of the melted metal. Furthermore, it has been first verified in this work that HPAM under the low pressure is more efficient for the purification of refractory metals than HPAM under atmospheric pressure.

Report

(4 results)
  • 2012 Annual Research Report   Final Research Report ( PDF )
  • 2011 Annual Research Report
  • 2010 Annual Research Report
  • Research Products

    (12 results)

All 2012 2011 2010

All Journal Article (4 results) (of which Peer Reviewed: 3 results) Presentation (8 results)

  • [Journal Article] Preparation of high purity metals for advanced devices2011

    • Author(s)
      一色実、三村耕司、打越雅仁
    • Journal Title

      Thin Solid Films

      Volume: Vol.519 Issue: 24 Pages: 8451-8455

    • DOI

      10.1016/j.tsf.2011.05.038

    • Related Report
      2012 Final Research Report 2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 金属の高純度精製プロセス2011

    • Author(s)
      三村耕司、打越雅仁、一色実
    • Journal Title

      金属

      Volume: 81巻 Pages: 941-948

    • URL

      http://www.agne.co.jp/kinzoku/

    • Related Report
      2012 Final Research Report 2011 Annual Research Report
  • [Journal Article] Hydrogen effect on refining of Mometal by Ar-H2 plasma arc melting2010

    • Author(s)
      J.W.Lim, 三村耕司 , D.Miyawaki, J.M.Oh, G.S.Choi, S.B.Kim, 打越雅仁、一色実
    • Journal Title

      Materials Letters

      Volume: Vol.64 Issue: 21 Pages: 2290-2292

    • DOI

      10.1016/j.matlet.2010.07.067

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Hydrogen effect on refining of Mo metal by Ar-H_2 plasma arc melting2010

    • Author(s)
      J.W.Lim, K.Mimura, D.Miyawaki J.M.Oh, G.S.Choi, S.B.Kim, M.Uchikoshi, M.Isshiki
    • Journal Title

      Materials Letters

      Volume: 64 Pages: 2290-2292

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Presentation] Effect of oxygen content on hydrogenation of vanadium andhydrogen diffusion in the monohydride phase2012

    • Author(s)
      浅野耕太、林繁信、 三村耕司 、榎浩利、 中村優美子
    • Organizer
      International Symposium on Metal-Hydrogen Systems 2012
    • Place of Presentation
      Kyoto, Japan
    • Year and Date
      2012-10-21
    • Related Report
      2012 Final Research Report
  • [Presentation] Vの水素化反応と1水素化物相中の水素の拡散に及ぼす酸素の影響2012

    • Author(s)
      浅野耕太、林繁信、三村耕司、榎浩利、中村優美子
    • Organizer
      日本金属学会
    • Place of Presentation
      愛媛大学(松山市)
    • Year and Date
      2012-09-18
    • Related Report
      2012 Final Research Report
  • [Presentation] 水素プラズマ溶解による金属Moの溶解精製2012

    • Author(s)
      三村耕司、宮脇大、打越雅仁、一色実
    • Organizer
      日本金属学会
    • Place of Presentation
      横浜国立大(横浜市)
    • Year and Date
      2012-03-29
    • Related Report
      2012 Final Research Report
  • [Presentation] 水素プラズマ溶解による金属Moの高純度精製2012

    • Author(s)
      三村耕司、宮脇大、打越雅仁、一色実
    • Organizer
      日本金属学会
    • Place of Presentation
      横浜市
    • Year and Date
      2012-03-29
    • Related Report
      2011 Annual Research Report
  • [Presentation] Effect of oxygen content on hydrogenation of vanadium and hydrogen diffusion in the monohydride phase2012

    • Author(s)
      浅野耕太、林繁信、三村耕司、榎浩利、中村優美子
    • Organizer
      International Symposium on Metal–Hydrogen Systems 2012
    • Place of Presentation
      Kyoto, Japan
    • Related Report
      2012 Annual Research Report
  • [Presentation] Vの水素化反応と1水素化物相中の水素の拡散に及ぼす酸素の影響2012

    • Author(s)
      浅野耕太、林繁信、三村耕司、榎浩利、中村優美子
    • Organizer
      日本金属学会
    • Place of Presentation
      愛媛大学、松山市
    • Related Report
      2012 Annual Research Report
  • [Presentation] Hydrogen plasma arc melting and refining of refractory metals2011

    • Author(s)
      三村耕司、一色実
    • Organizer
      International Symposium ofMaterials Integration
    • Place of Presentation
      東北大学(仙台市)
    • Year and Date
      2011-12-01
    • Related Report
      2012 Final Research Report
  • [Presentation] Hydrogen Plasma Arc Melting and Refining of Refractory Metals2011

    • Author(s)
      K.Mimura, M.Isshiki
    • Organizer
      International Symposium of Materials Integration
    • Place of Presentation
      Sendai, Japan
    • Year and Date
      2011-12-01
    • Related Report
      2011 Annual Research Report

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Published: 2010-08-23   Modified: 2019-07-29  

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