| Budget Amount *help |
¥4,160,000 (Direct Cost: ¥3,200,000、Indirect Cost: ¥960,000)
Fiscal Year 2012: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000)
Fiscal Year 2011: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
Fiscal Year 2010: ¥1,950,000 (Direct Cost: ¥1,500,000、Indirect Cost: ¥450,000)
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| Research Abstract |
Spontaneous shape transformation occurs as high-aspect-ratio hole patterns fabricated on Si substrates are annealed in non-oxidizing ambient at high temperatures. In this project, formation technology of three dimensional micro-structures applying the spontaneous shape transformation was investigated. Observing the shape transformation processes for various hole patterns, three dimensional structures created using this method were shown. Performing numerical simulations based on continuum theory, the dominant mass transport mechanism for the observed shape transformation was fond to be surface diffusion.
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