Development of analytical method with a microcalorimeter-EDS on TEM and its application for metallic materials

• Project/Area Number: 22560028
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Thin film/Surface and interfacial physical properties
• Research Institution: National Institute for Materials Science
• Principal Investigator: HARA Toru 独立行政法人物質・材料研究機構, 表界面構造・物性ユニット, 主幹研究員 (70238161)
• Project Period (FY): 2010 – 2012
• Project Status: Completed (Fiscal Year 2012)
• Budget Amount: ¥3,640,000 (Direct Cost: ¥2,800,000、Indirect Cost: ¥840,000); Fiscal Year 2012: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000); Fiscal Year 2011: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000); Fiscal Year 2010: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
• Keywords: 電子顕微鏡 / 金属組織 / X線分光 / 超伝導材料・素子 / 超精密計測 / 解析・評価 / 金属物性

Research Abstract

In order to realize precise compositional analysis, we have developed a new type of X-ray detector for a transmission electron microscope based on a superconductor technology called “Transition-edge sensor”. It shows ten-fold higher energy resolution compare to a standard Si(Li)type X-ray detector. In this study, we constructed analytical method suitable for this new detector and applied to some metallic materials. We showed that this detector has very high sensitivity and can detect and analyze very small amount of segregation across the boundary.

Research Products

• [Journal Article] 透過型電子顕微鏡の組成分析への超伝導遷移端センサの応用 (2012)
  • Author(s): 原 徹、田中啓一、前畑京介、満田和久
  • Journal Title: 応用物理 Volume: 81-2 Pages: 139-142
  • NAID: 10030158496
  • Peer Reviewed
• [Journal Article] 透過型電子顕微鏡の組成分析への超伝導遷移端センサの応用 (2012)
  • Author(s): 原徹、田中啓一、前畑京介、満田和久
  • Journal Title: 応用物理 Volume: 81 Pages: 139-142
  • NAID: 10030158496
  • Peer Reviewed
• [Presentation] 超伝導マイクロカロリメータ(TES)分析電子顕微鏡への期待 (2013)
  • Author(s): 松村 晶
  • Organizer: 第60回応用物理学会春季学術講演会
  • Place of Presentation: 神奈川工科大学（神奈川県）
  • Invited
• [Presentation] Development of an Analytical TEM with a TES microcalorimeter EDS (2013)
  • Author(s): 原 徹
  • Organizer: Microscopy and Microanalysis 2013
  • Place of Presentation: Indiana Convention Center, Indianapolis, USA
  • Invited
• [Presentation] マイクロカロリメータ型EDSによる金属材料中の微量添加元素の検出下限値の評価 (2012)
  • Author(s): 原 徹、澤田浩太、井 誠一郎、田中啓一、大柿真毅、松村 晶、椎山謙一、藤 昇一
  • Organizer: 日本顕微鏡学会第68回学術講演会
  • Place of Presentation: 茨城県つくば市
  • Year and Date: 2012-05-16
• [Presentation] マイクロカロリメータ型EDSによる金属材料中の微量添加元素の検出下限値の評価 (2012)
  • Author(s): 原 徹
  • Organizer: 日本顕微鏡学会第68回学術講演会
  • Place of Presentation: つくば国際会議場（茨城県）
• [Book] 環境・エネルギー材料ハンドブック、うち、技術編第二章1、「電子線によるEDS分析」 (2012)
  • Author(s): 原 徹
  • Publisher: オーム社