Control of ferroelectric properties by in-situ domain control

• Project/Area Number: 22560030
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Thin film/Surface and interfacial physical properties
• Research Institution: 防衛大学校
• Principal Investigator: NISHIDA Ken 防衛大学校, 電気情報学群, 准教授 (40299384)
• Co-Investigator(Kenkyū-buntansha): FUNAKUBO Hiroshi 東京工業大学, 総合理工学研究科, 教授 (90219080)
• Project Period (FY): 2010 – 2012
• Project Status: Completed (Fiscal Year 2012)
• Budget Amount: ¥4,160,000 (Direct Cost: ¥3,200,000、Indirect Cost: ¥960,000); Fiscal Year 2012: ¥1,040,000 (Direct Cost: ¥800,000、Indirect Cost: ¥240,000); Fiscal Year 2011: ¥1,040,000 (Direct Cost: ¥800,000、Indirect Cost: ¥240,000); Fiscal Year 2010: ¥2,080,000 (Direct Cost: ¥1,600,000、Indirect Cost: ¥480,000)
• Keywords: 薄膜 / in-situ モニタリング / ラマン分光法 / その場観察 / チタン酸鉛 / チタン酸ジルコン酸鉛 / 酸化物薄膜 / ドメイン制御

Research Abstract

The mechanism of domain formation and control of domain structure was investigated using in-situ Raman-MOCVD (Metal Organic Chemical Vapor Deposition) combined equipment. The domain structure was formed with releasing the residual strain in the films and it can be controlled by changing of atmosphere during first decreasing temperature after first film deposition.

Research Products

• [Journal Article] Distribution of Crystal Structure in Epitaxial Pb(Zr0.42,Ti0.58)O3 Film grown on (111)SrRuO3//(111)SrTiO3 Substrate (2012)
  • Author(s): M. Nishide
  • Journal Title: Integrated Ferroelectrics Volume: 133 Issue: 1 Pages: 54-60
  • DOI: 10.1080/10584587.2012.664063
  • Peer Reviewed
• [Journal Article] Preparation and characterization of BaTiO3 thin films using reactive sputtering method with metal target (2012)
  • Author(s): T. Osumi
  • Journal Title: Integrated Ferroelectrics Volume: 133 Issue: 1 Pages: 42-48
  • DOI: 10.1080/10584587.2012.664029
  • Peer Reviewed
• [Journal Article] Preparation and characterization of Ba(ZrxTi1-x)O3 thin films using reactive sputtering method (2012)
  • Author(s): K. J. Woong
  • Journal Title: Jpn. J. Appl. Phys. Volume: 51 Issue: 9S1 Pages: 09LA01-09LA01
  • DOI: 10.1143/jjap.51.09la01
  • Peer Reviewed
• [Journal Article] Rapid and high sensitive structure evaluation of ferroelectric films using micro-Raman spectroscopy: In-situ observation of stress accumulation and release in PbTiO3 films during first cooling process (2011)
  • Author(s): M. Nishide, M. Matsuoka, T. Tai, T. Katoda, H. Funakubo, K. Nishida, T. Yamamoto
  • Journal Title: Mat. Sci. and Eng. Volume: 18 Issue: 9 Pages: 092002-092002
  • DOI: 10.1088/1757-899x/18/9/092002
  • Peer Reviewed
• [Journal Article] In-situ observation of a MEMS-based Pb(Zr, Ti)O_3 microcantilever using micro-Raman spectroscopy (2010)
  • Author(s): M.Nishide, et al.
  • Journal Title: Journal of the Ceramic Society of Japan Volume: 118 Pages: 644-647
  • Peer Reviewed
• [Presentation] 様々な降温条件におけるPbTiO_3 膜中のドメイン形成のその場観察 (2012)
  • Author(s): 松岡 将史,西出 正道,田井 丈嗣,金 鎭雄,島 宏美,河東田 隆,舟窪 浩,西田 謙,山本 孝
  • Organizer: 第73回応用物理学会学術講演会
  • Place of Presentation: 松山大学文京キャンパス
• [Presentation] In-situ observation at the various conditions of first cooling process after PbTiO3 film CVD deposition (2012)
  • Author(s): M. Matsuoka, M. Nishide, K. Nishida, H. Shima, T. Tai, Kim J. W. , H. Funakubo, T. Yamamoto, and T. Katoda
  • Organizer: International Symposium on Integrated Functionalities (ISIF) 201
  • Place of Presentation: The Hong Kong Polytechnic University, Hong Kong, China
• [Presentation] Identification of the occupation site of Dy or Y substituted PZT thin films and the correlation between the occupation site and ferroelectric property (2012)
  • Author(s): K. Nishida
  • Organizer: International Symposium on Integrated Functionalities(ISIF) 2012
  • Place of Presentation: The Hong Kong Polytechnic University, Hong Kong, China
• [Presentation] In-situ observation at the various conditions of first cooling process after PbTiO3 film CVD deposition (2012)
  • Author(s): M. Matsuoka
  • Organizer: International Symposium on Integrated Functionalities(ISIF) 2012
  • Place of Presentation: The Hong Kong Polytechnic University, Hong Kong, China
• [Presentation] Evaluation of Strain Components of PbTiO3 Thin Films by Micro-Raman Microscopy (2012)
  • Author(s): M. Nishide
  • Organizer: International Symposium on Integrated Functionalities(ISIF) 2012
  • Place of Presentation: The Hong Kong Polytechnic University, Hong Kong, China
• [Presentation] Structure and electrical properties of Ba(Zrx, Ti1-x)O3 thin films by reactive sputtering method using metallic target (2012)
  • Author(s): J. W. Kim
  • Organizer: The 9th Korea-Japan Conference on Ferroelectrics(KJC-FE09)
  • Place of Presentation: University of Ulsan, Ulsan, Korea
• [Presentation] Preparation and characterization of Ba(Zrx, Ti1-x)O3 epitaxial thin films grown by reactive sputtering method (2012)
  • Author(s): J. W. Kim
  • Organizer: IUMRS-International Conference on Electronic Materials (IUMRS-ICEM 2012)
  • Place of Presentation: Pacifico Yokohama, Yokohama, Japan
• [Presentation] 様々な降温条件におけるPbTiO3膜中のドメイン形成のその場観察 (2012)
  • Author(s): 松岡将史
  • Organizer: 第73回応用物理学会学術講演会
  • Place of Presentation: 松山大学文京キャンパス
• [Presentation] 顕微ラマン分光法を用いたPbTiO3薄膜の歪成分評価 (2012)
  • Author(s): 西出正道
  • Organizer: 第73回応用物理学会学術講演会
  • Place of Presentation: 松山大学文京キャンパス
• [Presentation] 金属ターゲットを用いた反応性スパッタ法によるBa(ZrxTi1-x)O3薄膜の作製及び評価 (2012)
  • Author(s): 金 鎭雄
  • Organizer: 第29回強誘電体応用会議（FMA29）
  • Place of Presentation: コープイン京都
• [Presentation] Preparation and characterization of BaTiO_3 thin films using reactive sputtering method (2011)
  • Author(s): T.Osumi, M.Nishide, H.Funakubo, K.Nishida, T.Yamamoto
  • Organizer: International Symposium on Integrated Ferroelectrics and Functionalities (ISIF 2011)
  • Place of Presentation: University of Cambridge, UK
  • Year and Date: 2011-08-03
• [Presentation] Lateral size dependence of crystal structure in the Pb(Zr,Ti)O_3 thick film at the morphotropic phase boundary (2011)
  • Author(s): M.Nishide, T.Katoda, S.Yokoyama, H.Funakubo, K.Nishida, T.Yamamoto
  • Organizer: International Symposium on Integrated Ferroelectrics and Functionalities (ISIF 2011)
  • Place of Presentation: University of Cambridge, UK
  • Year and Date: 2011-08-02
• [Presentation] Quantitative estimation of oxygen vacancy in PbTiO3 thin film using Raman spectroscopy (2011)
  • Author(s): K.Nishida, M.Osada, J.Sakai, N.Ito, M.Nishide, T.Osumi, T.Tai, T.Katoda, R.Ikariyama, H.Funakubo, H.Moriwake, T.Yamamoto
  • Organizer: The 9th International Meeting of Pacific Rim Ceramic Societies on Ceramic and Glass Technology
  • Place of Presentation: Cairns, Australia
  • Year and Date: 2011-07-11
• [Presentation] チタン酸ジルコン酸鉛厚膜における深さ方向の歪評価 (2011)
  • Author(s): 西出正道, 河東田隆, 横山信太郎, 舟窪浩, 西田謙, 山本孝
  • Organizer: 第28回強誘電体応用会議(FMA-28)
  • Place of Presentation: コープイン京都(京都府)
  • Year and Date: 2011-05-25
• [Presentation] チタン酸ジルコン酸鉛厚膜における深さ方向の歪分布 (2011)
  • Author(s): 西出正道, 西田謙, 他
  • Organizer: 2011年春季第58回応用物理学会学術講演会
  • Place of Presentation: 神奈川工科大学(神奈川県)
  • Year and Date: 2011-03-26
• [Presentation] 反応性xバッタ法を用いたBaTiO_3薄膜の作製及び評価 (2011)
  • Author(s): 大住剛, 西田謙, 他
  • Organizer: 2011年春季第58回応用物理学会学術講演会
  • Place of Presentation: 神奈川工科大学(神奈川県)
  • Year and Date: 2011-03-26
• [Presentation] scattering Oxygen defect in PbTiO_3 thin films probed by resonant Raman (2010)
  • Author(s): K.Nishida, et al.
  • Organizer: 2010 Materials Research Society Fall Meeting
  • Place of Presentation: Boston, Massachusetts
  • Year and Date: 2010-11-30
• [Presentation] ラマン分光法によるMEMSベースPb(Zr, Ti)O_3マイクロカンチレバーのその場観察 (2010)
  • Author(s): 田井丈嗣, 西田謙, 他
  • Organizer: 30回LSIテスティングシンポジウム
  • Place of Presentation: 千里ライフサイエンスセンター(大阪)
  • Year and Date: 2010-11-11
• [Presentation] チタン酸ジルコン酸鉛厚膜の結晶構造の面内サイズ依存性 (2010)
  • Author(s): 西出正道, 西田謙, 他
  • Organizer: 2010年秋季第71回応用物理学会学術講演会
  • Place of Presentation: 長崎大学(長崎県)
  • Year and Date: 2010-09-16