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Development of strain measurement system in microscopic area using EBSD method

Research Project

Project/Area Number 22560081
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Materials/Mechanics of materials
Research InstitutionOkayama University

Principal Investigator

SHIMIZU Kenichi  岡山大学, 大学院・自然科学研究科, 助教 (50294434)

Project Period (FY) 2010 – 2012
Project Status Completed (Fiscal Year 2012)
Budget Amount *help
¥4,550,000 (Direct Cost: ¥3,500,000、Indirect Cost: ¥1,050,000)
Fiscal Year 2012: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000)
Fiscal Year 2011: ¥2,340,000 (Direct Cost: ¥1,800,000、Indirect Cost: ¥540,000)
Fiscal Year 2010: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
Keywordsひずみ / 金属膜材 / EBSD / 疲労 / 疲労損傷 / EBSD法 / 結晶方位差 / すべり変形 / 疲労き裂 / 銅膜材 / き裂 / 電子線後方散乱回折 / き裂開口変位
Research Abstract

In this study, the pure copper film of 100μm thickness with a 0.5mm notch hole was fatigued and the fatigue damage such as a slip initiation was observed. Moreover, a misorientation and a misorientation axis were computed from crystal orientation matrices obtained by using the EBSD (Electron Backscatter Diffraction) method. As a result, a misorientation angle increased with fatigue testing in almost all the grains of the copper film. In the crystal grain in which slip lines are generated, misorientation axes are inclined to the same direction by fatigue testing, while those turn to a scattering directions for the static loading. From the change of a misorientation axis element, the misorientation axes are inclined toward the transverse direction to the loading direction and in face of the film. Subsequently, the axes tended to the loading direction and the slip lines were initiated.

Report

(4 results)
  • 2012 Annual Research Report   Final Research Report ( PDF )
  • 2011 Annual Research Report
  • 2010 Annual Research Report
  • Research Products

    (26 results)

All 2013 2012 2011 2010

All Journal Article (9 results) (of which Peer Reviewed: 9 results) Presentation (17 results)

  • [Journal Article] Fatigue Damage Behavior depending on the Bonding Interface Layer in Copper Film Bonded to Base Metals2011

    • Author(s)
      Tashiyuki Torii, Koki Ishida*, Mohamed. K. Hassan** and Kenichi Shimizu(*Uchiyama Manufacturing Corp., **South Valley University, Egypt)
    • Journal Title

      Key Engineering Materials

      Volume: Vols. 452-453 Pages: 253-256

    • URL

      http://www.scientific.net/KEM.452-453.253

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Effects of grain size on fatigue crack propagation in copper film2011

    • Author(s)
      Kenichi Shimizuand Tashiyuki Torii
    • Journal Title

      Key Engineering Materials

      Volume: Vols. 452-453 Pages: 289-292

    • URL

      http://www.scientific.net/KEM.452-453.289

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] 銅膜材の疲労破壊挙動に及ぼす樹脂接着効果とその支配要因(疲労過程のSEM観察と平均応力の影響に注目して)2011

    • Author(s)
      石田浩規*,鳥居太始之,清水憲一*(*内山工業)
    • Journal Title

      材料システム

      Volume: 29巻 Pages: 61-67

    • NAID

      130007987298

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Fatigue Damage Behavior depending on the Bonding Interface Layer in Copper Film Bonded to Base Metals2011

    • Author(s)
      Tashiyuki Torii1, Koki Ishida, Mohaned K.Hassan, Kenichi Shimizu
    • Journal Title

      Key Engineering Materials

      Volume: 452-453 Pages: 253-256

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Effects of grain size on fatigue crack propagation in copper film2011

    • Author(s)
      K.Shimizu, T.Torii
    • Journal Title

      Key Engineering Materials

      Volume: 452-453 Pages: 289-292

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 銅膜材の疲労破壊挙動に及ぼす樹脂接着効果とその支配要因(疲労過程のSEM観察と平均応力の影響に注目して)2011

    • Author(s)
      石田浩規, 鳥居太始之, 清水憲一
    • Journal Title

      材料システム

      Volume: 29 Pages: 61-67

    • NAID

      130007987298

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Fatigue Fracture Behavior of MEMS Cu Thin Films2010

    • Author(s)
      Mohamed. K. Hassan*, Tashiyuki Torii, Koki Ishida** and Kenichi Shimizu(*South Valley University, Egypt, **Uchiyama Manufacturing Corp.)
    • Journal Title

      18th European Conference on Fracture, Fracture of Materials and Structures from Micro to Macro Scale

      Pages: 209-216

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] 銅膜材の屈折疲労き裂伝ぱ挙動に及ぼす圧延方向の影響(混合モード膜疲労試験とき裂に沿う不連続変位分布計測に基づいて)2010

    • Author(s)
      清水憲一,鳥居太始之,丸山賢司*(*マツダ)
    • Journal Title

      日本機械学会論文集(A編)

      Volume: 76巻768号 Pages: 1068-1075

    • NAID

      110007682105

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] 銅膜材の屈折疲労き裂伝ぱ挙動に及ぼす圧延方向の影響(混合モード膜疲労試験とき裂に沿う不連続変位分布計測に基づいて)2010

    • Author(s)
      清水憲一, 鳥居太始之, 丸山賢司
    • Journal Title

      日本機械学会論文集(A編)

      Volume: 76 Pages: 1068-1075

    • NAID

      110007682105

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Presentation] EBSD 法を用いた銅膜材切欠き底の結晶方位測定と疲労損傷評価2013

    • Author(s)
      棗田善貴,清水憲一,皿井孝明
    • Organizer
      日本機械学会中国四国支部第51期総会・講演会講演論文集
    • Place of Presentation
      高知
    • Year and Date
      2013-03-08
    • Related Report
      2012 Final Research Report
  • [Presentation] EBSD法を用いた銅膜材切欠き底の結晶方位測定と疲労損傷評価2013

    • Author(s)
      棗田善貴,清水憲一,皿井孝明
    • Organizer
      日本機械学会中国四国支部第51期総会・講演会
    • Place of Presentation
      高知工科大学
    • Related Report
      2012 Annual Research Report
  • [Presentation] 結晶方位差に基づく銅膜材の切欠き底疲労損傷評価とき裂発生2012

    • Author(s)
      清水憲一,棗田善貴
    • Organizer
      日本材料学会第31回疲労シンポジウム講演論文集
    • Place of Presentation
      横浜
    • Year and Date
      2012-11-21
    • Related Report
      2012 Final Research Report
  • [Presentation] 結晶方位差に基づく疲労き裂先端の損傷評価2012

    • Author(s)
      清水憲一,棗田善貴
    • Organizer
      日本材料学会第61 期学術講演会講演論文集
    • Place of Presentation
      岡山
    • Year and Date
      2012-05-27
    • Related Report
      2012 Final Research Report
  • [Presentation] 結晶方位差に基づく疲労き裂先端の損傷評価2012

    • Author(s)
      清水憲一,棗田善貴
    • Organizer
      日本材料学会第61期学術講演会
    • Place of Presentation
      岡山大学
    • Related Report
      2012 Annual Research Report
  • [Presentation] 結晶方位差に基づく銅膜材の切欠き底疲労損傷評価とき裂発生2012

    • Author(s)
      清水憲一,棗田善貴
    • Organizer
      日本材料学会第31回疲労シンポジウム
    • Place of Presentation
      慶應義塾大学
    • Related Report
      2012 Annual Research Report
  • [Presentation] 混合モード条件下の疲労き裂におけるき裂開口とすべり変形挙動(膜厚の異なる銅薄膜材を用いて)2011

    • Author(s)
      山口徹也, 清水憲一, 皿井孝明
    • Organizer
      日本機械学会第24回計算力学講演会
    • Place of Presentation
      岡山
    • Year and Date
      2011-10-09
    • Related Report
      2011 Annual Research Report
  • [Presentation] Evaluation of Fatigue Crack Propagation Behavior in Copper Films Based on Measurement of Crack Opening Displacement Distribution2011

    • Author(s)
      Kenichi Shimizu, Yoshiki Natsumeda and Hiroaki Chikaishi* (* Sanyo Electric Co. Ltd.)
    • Organizer
      International Conference on Advanced Technology in Experimental Mechanics 2011 (ATEM'11)
    • Place of Presentation
      神戸
    • Year and Date
      2011-09-20
    • Related Report
      2012 Final Research Report 2011 Annual Research Report
  • [Presentation] 銅膜材の屈折疲労き裂伝ぱ挙動に及ぼす膜厚さの影響2011

    • Author(s)
      清水憲一, 山口徹也
    • Organizer
      日本材料学会第60期学術講演会
    • Place of Presentation
      大阪
    • Year and Date
      2011-05-26
    • Related Report
      2011 Annual Research Report
  • [Presentation] 銅膜材の疲労特性に及ぼす結晶粒径の影響2010

    • Author(s)
      清水憲一, 山口徹也, 鳥居太始之
    • Organizer
      日本材料学会第30回疲労シンポジウム
    • Place of Presentation
      高知
    • Year and Date
      2010-11-02
    • Related Report
      2010 Annual Research Report
  • [Presentation] 銅膜材の疲労特性に及ぼす結晶粒径の影響2010

    • Author(s)
      近石浩章,清水憲一,鳥居太始之
    • Organizer
      徳島講演会[中国四国支部・九州支部合同企画]講演論文集
    • Place of Presentation
      徳島
    • Year and Date
      2010-10-16
    • Related Report
      2012 Final Research Report
  • [Presentation] 混合モード条件下の疲労き裂におけるき裂開口とすべり変形挙動(薄膜材における破面接触挙動に注目して)2010

    • Author(s)
      近石浩章, 清水憲一, 鳥居太始之
    • Organizer
      徳島講演会[中国四国支部・九州支部合同企画]
    • Place of Presentation
      徳島
    • Year and Date
      2010-10-16
    • Related Report
      2010 Annual Research Report
  • [Presentation] 銅膜材のき裂開口変位計測に基づく疲労き裂伝ぱ挙動の評価2010

    • Author(s)
      清水憲一,鳥居太始之,近石浩章
    • Organizer
      日本機械学会2010 年度年次大会講演論文集
    • Place of Presentation
      名古屋
    • Year and Date
      2010-09-07
    • Related Report
      2012 Final Research Report
  • [Presentation] 銅膜材のき裂開口変位計測に基づく疲労き裂伝ぱ挙動の評価2010

    • Author(s)
      清水憲一, 鳥居太始之, 近石浩章
    • Organizer
      日本機械学会2010年度年次大会
    • Place of Presentation
      名古屋
    • Year and Date
      2010-09-07
    • Related Report
      2010 Annual Research Report
  • [Presentation] Fatigue Fracture Behavior of MEMS Cu Thin Films2010

    • Author(s)
      Mohamed.K.Hassan, Tashiyuki Torii, Koki Ishida, Kenichi Shimizu
    • Organizer
      18th European Conference on Fracture, ECF-18
    • Place of Presentation
      ドレスデン,ドイツ
    • Year and Date
      2010-08-31
    • Related Report
      2010 Annual Research Report
  • [Presentation] 銅膜材における斜めき裂の破面接触と屈折疲労き裂伝ぱ挙動2010

    • Author(s)
      清水憲一,鳥居太始之,山口徹也,常保健太*(*日立造船)
    • Organizer
      日本材料学会第59 期学術講演会講演論文 集
    • Place of Presentation
      札幌
    • Year and Date
      2010-05-22
    • Related Report
      2012 Final Research Report
  • [Presentation] 銅膜材における斜めき裂の破面接触と屈折疲労き裂伝ぱ挙動2010

    • Author(s)
      清水憲一, 鳥居太始之, 山口徹也, 常保健太
    • Organizer
      日材料学会第59期学術講演会
    • Place of Presentation
      札幌
    • Year and Date
      2010-05-22
    • Related Report
      2010 Annual Research Report

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Published: 2010-08-23   Modified: 2019-07-29  

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