Synthesis and Mechanical Characterization of Nano-Columnar DLC Coating Toward Application of MEMS
Project/Area Number |
22560089
|
Research Category |
Grant-in-Aid for Scientific Research (C)
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Allocation Type | Single-year Grants |
Section | 一般 |
Research Field |
Materials/Mechanics of materials
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Research Institution | Shibaura Institute of Technology |
Principal Investigator |
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Project Period (FY) |
2010 – 2012
|
Project Status |
Completed (Fiscal Year 2012)
|
Budget Amount *help |
¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000)
Fiscal Year 2012: ¥780,000 (Direct Cost: ¥600,000、Indirect Cost: ¥180,000)
Fiscal Year 2011: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
Fiscal Year 2010: ¥1,950,000 (Direct Cost: ¥1,500,000、Indirect Cost: ¥450,000)
|
Keywords | DLC / ナノカラム構造化 / 自己組織化 / カラム間グラファイト化 / 電子ビーム / 異常弾性挙動 / カラム間選択ドーピング / 接触角制御 / DLC / DLCコーティング / 金属ドーピング / AFM / プラズマエッチング / マイクロパターン / ナノプリント / EB / アモルファスカーボン / ナノ構造化 / ラマン分光法 / イオン注入 |
Research Abstract |
Nano-columnar DLC (Diamond-Like Carbon) or amorphous carbon coating was made by PVD (Physical Vapor Deposition) method with electron beam irradiation. Its nano-structure and exotic mechanical properties were analyzed by AFM (Atomic Force Microscope) to investigate the nano-columnar structure and its relationship in the surface contact angle from hydrophilic to hydrophobic states.
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Report
(4 results)
Research Products
(33 results)