Synthesis and Mechanical Characterization of Nano-Columnar DLC Coating Toward Application of MEMS

• Project/Area Number: 22560089
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Materials/Mechanics of materials
• Research Institution: Shibaura Institute of Technology
• Principal Investigator: AIZAWA Tatsuhiko 芝浦工業大学, デザイン工学部, 教授 (10134660)
• Project Period (FY): 2010 – 2012
• Project Status: Completed (Fiscal Year 2012)
• Budget Amount: ¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000); Fiscal Year 2012: ¥780,000 (Direct Cost: ¥600,000、Indirect Cost: ¥180,000); Fiscal Year 2011: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000); Fiscal Year 2010: ¥1,950,000 (Direct Cost: ¥1,500,000、Indirect Cost: ¥450,000)
• Keywords: DLC / ナノカラム構造化 / 自己組織化 / カラム間グラファイト化 / 電子ビーム / 異常弾性挙動 / カラム間選択ドーピング / 接触角制御 / ＤＬＣ / DLCコーティング / 金属ドーピング / AFM / プラズマエッチング / マイクロパターン / ナノプリント / EB / アモルファスカーボン / ナノ構造化 / ラマン分光法 / イオン注入

Research Abstract

Nano-columnar DLC (Diamond-Like Carbon) or amorphous carbon coating was made by PVD (Physical Vapor Deposition) method with electron beam irradiation. Its nano-structure and exotic mechanical properties were analyzed by AFM (Atomic Force Microscope) to investigate the nano-columnar structure and its relationship in the surface contact angle from hydrophilic to hydrophobic states.

Research Products

• [Journal Article] CHARACTERIZATION OF CU-DOPED NANOCOLUMNAR DLC COATING. (2013)
  • Author(s): Satoru Yukawa, Tatsuhiko Aizawa
  • Journal Title: Proc. 7th SEATUC Conference Pages: 7-6
• [Journal Article] Analysis of nano-columnar DLC thin Films by the Atomic Force Microscopy (2013)
  • Author(s): Foo Jin Hoe, Ryo Suenaga, Tatsuhiko Aizawa
  • Journal Title: Proc. 7th SEATUC Conference Pages: 7-6
• [Journal Article] Synthesis and characterization of doped and undoped nano-columnar DLC coating (2013)
  • Author(s): Foo Jin Hoe, Tatsuhiko Aizawa, Satoru Yukawa
  • Journal Title: J. Tecknologi Volume: 62(1) Pages: 17-24
• [Journal Article] CHARACTERIZATION OF CU-DOPED NANO-COLUMNAR DLC COATING (2013)
  • Author(s): Satoru Yukawa, Tatsuhiko Aizawa
  • Journal Title: Proc. 7th SEATUC Conference Volume: 7-6
  • Peer Reviewed
• [Journal Article] ANALYSIS OF NANO-COLUMNAR DLC THIN FILMS BY THE ATOMIC FORCE MICROSCOPY (2013)
  • Author(s): Foo Jin Hoe, Ryo Suenaga, Tatsuhiko Aizawa
  • Journal Title: Proc. 7th SEATUC Conference Volume: 7-6
  • Peer Reviewed
• [Journal Article] Synthesis and Characterization of Doped and Undoped Nano-Columnar DLC Coating (2013)
  • Author(s): Foo Jin Hoe, Tatsuhiko Aizawa, Satoru Yukawa
  • Journal Title: Journal Tec\knologi Volume: 62-1 Pages: 17-24
  • Peer Reviewed
• [Journal Article] Micro-patterning onto DLC coating by plasma oxygen etching (2012)
  • Author(s): T.Aizawa, E.E.Yunata, N.T.Redationo, T.Fukuda
  • Journal Title: Proc.7^<th> International Conference on Micro-Manufacturing Pages: 360-366
  • Peer Reviewed
• [Journal Article] ナノカラムDLC膜の創成・評価およびその応用展開 (2011)
  • Author(s): 相澤龍彦、Foo Jin Hoe, 湯川聖
  • Journal Title: 芝浦工大研究報告理工系 Volume: 55 Pages: 23-32
  • Peer Reviewed
• [Journal Article] 高密度プラズマ技術による炭素系素材のエッチング・アッシング (2011)
  • Author(s): 相澤龍彦、杉田良雄
  • Journal Title: 芝浦工大研究報告理工系 Volume: 55 Pages: 13-22
  • Peer Reviewed
• [Journal Article] Micro-patterning onto diamond like carbon coating via RF-DC oxygen plasma etching (2011)
  • Author(s): T.Aizawa
  • Journal Title: Proc.5^<th> SEATUC Symposium Pages: 425-428
  • Peer Reviewed
• [Journal Article] Effect of parameters setting on nano-columnar DLC film formation (2011)
  • Author(s): F.J, Hoe, T.Aizawa, T.Uematsu
  • Journal Title: Proc.5^<th> SEATUC Symposium Pages: 433-436
  • Peer Reviewed
• [Journal Article] Tooling life design for dry metal forming via nano-laminated DLC coating (2011)
  • Author(s): T.Aizawa, H.Morita
  • Journal Title: Proc.5^<th> SEATUC Symposium Pages: 5-8
  • Peer Reviewed
• [Journal Article] Fabrication of micro-patterned optical elements by fine mold stamping (2011)
  • Author(s): T.Aizawa, T.Fukuda
  • Journal Title: Proc.5^<th> SEATUC Symposium Pages: 429-432
  • Peer Reviewed
• [Journal Article] Imprinting of patterns onto polymers and oxide-glasses via fine micro-stamping (2011)
  • Author(s): T.Aizawa, K.Itoh, T.Inohara
  • Journal Title: Proc.6^<th> International Conference on Micro Manufacturing ICOMM-2011 Pages: 77-82
  • Peer Reviewed
• [Presentation] Synthesis and characterization of copper doped nano-columnar DLC coating (2013)
  • Author(s): S. Yukawa, T. Aizawa
  • Organizer: 7th SEATUC Conference
  • Place of Presentation: Bandung
• [Presentation] Analysis of nano-columnar DLC thin films by the atomic force microscopy (2013)
  • Author(s): Foo Jin Hoe, R. Suenaga, T. Aizawa
  • Organizer: 7th SEATUC Conference
  • Place of Presentation: Bandung
• [Presentation] CHARACTERIZATION OF CU-DOPED NANO-COLUMNAR DLC COATING (2013)
  • Author(s): S. Yukawa
  • Organizer: 7th SEATUC Conference
  • Place of Presentation: Bandung
• [Presentation] ANALYSIS OF NANO-COLUMNAR DLC THIN FILMS BY THE ATOMIC FORCE MICROSCOPY (2013)
  • Author(s): Foo Jin Hoe
  • Organizer: 7th SEATUC Conference
  • Place of Presentation: Bandung
• [Presentation] Precise characterization of nanoOcolumnar DLC film by raman Spectroscopy and AFM (2012)
  • Author(s): F.J.Hoe, T.Aizawa, T.Uematsu
  • Organizer: Proc.6^<th> SEATUC Conference
  • Place of Presentation: Baang-Kok
  • Year and Date: 2012-03-06
• [Presentation] Plasma diagnosis in etching and ashing of diamond like carbon coating (2012)
  • Author(s): E.E.Yunata, T.Aizawa, N.T.Redationo
  • Organizer: Proc.6^<th> SEATUC Conference
  • Place of Presentation: Baang-Kok
  • Year and Date: 2012-03-06
• [Presentation] Plasma micro-patterning onto diamond like carbon coating (2012)
  • Author(s): N.T.Redationo, T.Aizawa, E.E.Yunawa
  • Organizer: Proc.6^<th> SEATUC Conference
  • Place of Presentation: Baang-Kok
  • Year and Date: 2012-03-06
• [Presentation] Characterization of Cu doped nano-columnar DLC coating (2012)
  • Author(s): S. Yukawa, T. Aizawa
  • Organizer: ICMCTF-2012
  • Place of Presentation: San Diego
• [Presentation] Exotic mechanical properties of Cu-doped nano-columnar DLC coating (2011)
  • Author(s): S.Yukawa, T.Aizawa
  • Organizer: Proc.4^<th> Asian Workshop on Nano/Micro Forming Technology
  • Place of Presentation: Toyohashi
  • Year and Date: 2011-10-27
• [Presentation] Plasma etching with metallic masking for micro-patterning onto DLC coated Mold-dies (2011)
  • Author(s): T.Aizawa, N.T.Redationo, E.E.Yunata
  • Organizer: Proc.4^<th> Asian Workshop on Nano/Micro Forming Technology
  • Place of Presentation: Toyohashi
  • Year and Date: 2011-10-27
• [Presentation] Imprinting of patterns onto polymers and oxide-glasses via fine micro-stamping (2011)
  • Author(s): Tatsuhiko Aizawa
  • Organizer: 6^<th> International Conference on Micro Manufacturing ICOMM-2011
  • Place of Presentation: 東京
  • Year and Date: 2011-03-08
• [Presentation] Tooling life design for dry metal forming via nano-laminated DLC coating (2011)
  • Author(s): Hiroshi Morita
  • Organizer: 5^<th> SEATUC Symposium
  • Place of Presentation: Hanoi
  • Year and Date: 2011-02-25
• [Presentation] Micro-patterning onto diamond like carbon coating via RF-DC oxygen plasma etching (2011)
  • Author(s): Tatsuhiko Aizawa
  • Organizer: 5^<th> SEATUC Symposium
  • Place of Presentation: Hanoi
  • Year and Date: 2011-02-24
• [Presentation] Fabrication of micro-patterned optical elements by fine mold stamping (2011)
  • Author(s): Tatsuhiko Aizawa
  • Organizer: 5^<th> SEATUC Symposium
  • Place of Presentation: Hanoi
  • Year and Date: 2011-02-24
• [Presentation] Effect of parameters setting on nano-columnar DLC film formation (2011)
  • Author(s): Foo Jin Hoe
  • Organizer: 5^<th> SEATUC Symposium
  • Place of Presentation: Hanoi
  • Year and Date: 2011-02-24
• [Presentation] Tailored coating for high temperature molding of oxide glasses into optical elements (2010)
  • Author(s): Tatsuhiko Aizawa
  • Organizer: 第61回塑性加工連合講演会
  • Place of Presentation: 山形県米沢市
  • Year and Date: 2010-10-14
• [Presentation] ナノ構造化DLCコーテッド工具によるマイクロドライプレス(第4報 種々のDLCコーテッド工具によるドライせん断プレス成形特性比較) (2010)
  • Author(s): 相澤龍彦
  • Organizer: 平成22年度塑性加工春季講演会
  • Place of Presentation: 東京
  • Year and Date: 2010-05-28
• [Book] 「アジアの経済発展と産業技術」第10章 (2013)
  • Author(s): 相澤龍彦
  • Publisher: ナカニシヤ出版
• [Book] Recent Trends in Fracture Mechanics (2011)
  • Author(s): T.Aizawa
  • Total Pages: 350
  • Publisher: NOVA Publishers